Effect of strain-gradients of surface micro-beams on frequency-shift of a quartz crystal resonator under thickness-shear vibrations

With introduction of the first-order strain-gradient of surface micro-beams into the energy density function,we developed a two-dimensional dynamic model for a compound quartz crystal resonator(QCR) system,consisting of a QCR and surface micro-beam arrays.The frequency shift that was induced by micro-beams with consideration of strain-gradients is discussed in detail and some useful results are obtained,which have important significance in resonator design and applications.     

Influence of surface micro-beams with large deflection on the resonance frequency of a quartz crystal resonator in thickness-shear mode vibrations

We study the dynamic behavior of a quartz crystal resonator(QCR)in thickness-shear vibrations with the upper surface covered by an array of micro-beams(MBs)under large deflection.Through taking into account the continuous conditions of shear force and bending moment at the interface of MBs/resonator,dependences of frequency shift of the compound QCR system versus material parameter and geometrical parameter are illustrated in detail for nonlinear and linear vibrations.It is found that the frequency shift produces a little right(left)translation for increasing elastic modulus(length/radius ratio)of MBs.Moreover,the frequency right(left)translation distance caused by nonlinear deformation becomes more serious in the second-order mode than in the first-order one.     

Electric admittance analysis of quartz crystal resonator in thickness-shear mode induced by array of surface viscoelastic micro-beams

The electric admittance of a compound system composed of a thicknessshear mode(TSM) quartz crystal resonator(QCR) and an array of surface viscoelastic micro-beams(MBs) is studied.The governing equations of the MBs are derived from the Timoshenko-beam theory in consideration of shear deformation.The electrical admittance is described directly in terms of the physical properties of the surface epoxy resin(SU-8) MBs from an electrically forced vibration analysis.It is found that both the inertia effect and the constraint effect of the MBs produce competitive influence on the resonant frequency and admittance of the compound QCR system.By further comparing the numerical results calculated from the Timoshenko-beam model with those from the Euler-beam model,the shear deformation is found to lead to some deviation of an admittance spectrum.The deviations are revealed to be evident around the admittance peak(s) and reach the maximum when a natural frequency of the MBs is identical to the fundamental frequency of the QCR.Besides,a higher order vibration mode of the MBs corresponds to a larger deviation at the resonance.     

ON THE INTERACTION BETWEEN A QUARTZ CRYSTAL RESONATOR AND AN ARRAY OF MICRO-BEAMS IN THICKNESS-SHEAR VIBRATIONS

We studied the coupled dynamic behavior of a quartz-crystal-resonator(QCR)/microbeams system in the thickness-shear motions. Through taking into account the couple stress in the dynamic equations of the quartz plate, both continuous conditions of shear force and bending moment at the resonator/micro-beams interface are realized. Frequency shift of the compound QCR system induced by micro-beams is studied in detail. The obtained results are useful in device design and frequency-stability analysis of quartz crystal resonators.     

考虑尺度效应的夹层楔形多孔梁动力学分析

基于修正偶应力理论, 研究了具有大范围旋转中心刚体-功能梯度夹层Euler-Bernoulli楔形多孔柔性微梁系统的动力学特性.楔形梁是中间层为不完全功能梯度层, 两表层为均质材料的功能梯度夹层结构, 它可以减小传统夹层结构由于层与层之间材料属性的不同导致脱粘类型损伤的影响.采用假设模态法描述变形, 考虑具有捕捉动力刚化效应的非线性耦合项, 计及von Kármán几何非线性应变, 运用第二类Lagrange方程, 导出了适用于较大变形的高次刚柔耦合动力学方程.对在平面内做大范围运动的中心刚体-功能梯度夹层Euler-Bernoulli楔形多孔微梁的动力学特性进行了详细研究.研究表明: 功能梯度夹层楔形梁表层结构高度、旋转角速度、功能梯度幂指数、尺度参数、孔隙度以及各层结构的体积分数对系统的动力学特性都有很大的影响; 功能梯度夹层楔形梁综合了功能梯度直梁和楔形梁的特性, 其相对于功能梯度直梁的固有频率增大, 同时使得孔隙度对结构固有频率变化趋势的影响不再与功能梯度直梁相同; 由于柔性梁变形能中具有横向与轴向的耦合势能, 系统在稳态下的平衡位置发生了迁移现象; 系统随着尺度参数的变化发生了频率转向与振型转换.      

Voltage–amplitude response of alternating current near half natural frequency electrostatically actuated MEMS resonators

This paper uses the Reduced Order Model (ROM) method to investigate the nonlinear-parametric dynamics of electrostatically actuated MEMS cantilever resonators under soft Alternating Current (AC) voltage of frequency near half natural frequency of the resonator. The voltage is between the resonator and a ground plate, and provides a nonlinear parametric actuation for the resonator. Fringe effect and damping forces are included. The resonator is modeled as an Euler–Bernoulli cantilever. Two methods of investigations are compared, Method of Multiple Scales (MMS), and Reduced Order Model. Moreover, the instabilities (bifurcation points) are predicted for both cases, when the voltage is swept up, and when the voltage is swept down. Although MMS and ROM are in good agreement for small amplitudes, MMS fails to accurately predict the behavior of the MEMS resonator for greater amplitudes. Only ROM captures the behavior of the system for large amplitudes. ROM convergence shows that five terms model accurately predicts the steady-states of the resonator for both small and large amplitudes.     

功能梯度材料微梁的热弹性阻尼研究

基于Euler-Bernoulli梁理论和单向耦合的热传导理论,研究了功能梯度材料(functionally graded material,FGM)微梁的热弹性阻尼(thermoelastic damping,TED).假设矩形截面微梁的材料性质沿厚度方向按幂函数连续变化,忽略了温度梯度在轴向的变化,建立了单向耦合的变系数一维热传导方程.热力耦合的横向自由振动微分方程由经典梁理论获得.采用分层均匀化方法将变系数的热传导方程简化为一系列在各分层内定义的常系数微分方程,利用上下表面的绝热边界条件和界面处的连续性条件获得了微梁温度场的分层解析解.将温度场代入微梁的运动方程,获得了包含热弹性阻尼的复频率,进而求得了代表热弹性阻尼的逆品质因子.在给定金属-陶瓷功能梯度材料后,通过数值计算结果定量分析了材料梯度指数、频率阶数、几何尺寸以及边界条件对TED的影响.结果表明:(1)若梁长固定不变,梁厚度小于某个数值时,改变陶瓷材料体积分数可以使得TED取得最小值;(2)固有频率阶数对TED的最大值没有影响,但是频率阶数越高对应的临界厚度越小;(3)不同的边界条件对应的TED的最大值相同,但是随着支座约束刚度增大对应的临界厚度减小;(4)TED的最大值和对应的临界厚度随着金属组分的增大而增大.     

Size-dependent modal interactions of a piezoelectrically laminated microarch resonator with 3:1 internal resonance

The nonlinear interactions of a microarch resonator with 3:1 internal resonance are studied. The microarch is subjected to a combination of direct current (DC) and alternating current (AC) electric voltages. Thin piezoelectric layers are thoroughly bonded on the top and bottom surfaces of the microarch. The piezoelectric actuation is not only used to modulate the stiffness and resonance frequency of the resonator but also to provide the suitable linear frequency ratio for the activation of the internal resonance. The size effect is incorporated by using the so-called modified strain gradient theory. The system is highly nonlinear due to the co-existence of the initial curvature, the mid-plane stretching resulting from clamped anchors, and the electrostatic excitation. The eigenvalue problem is solved to conduct a frequency analysis and identify the possible regions for activating the internal resonance. The effects of the piezoelectric actuation, the electric excitation, and the small-scale effect are investigated on the internal resonance. Exclusive nonlinear phenomena such as Hopf bifurcation and hysteresis are identified in the microarch response. It is shown that by applying appropriate piezoelectric actuation, one is able to activate microarch internal resonance regardless of the initial rise level of the microarch. It is also disclosed that among all the parameters, AC electric voltage has the greatest effect on the energy exchange between the interacting modes. The results can be used to design resonators and internal resonance based micro-electro-mechanical system (MEMS) energy harvesters.     

A well-posed Euler-Bernoulli beam model incorporating nonlocality and surface energy effect

This study shows that it is possible to develop a well-posed size-dependent model by considering the effect of both nonlocality and surface energy, and the model can provide another effective way of nanomechanics for nanostructures. For a practical but simple problem(an Euler-Bernoulli beam model under bending), the ill-posed issue of the pure nonlocal integral elasticity can be overcome. Therefore, a well-posed governing equation can be developed for the Euler-Bernoulli beams when considering both the pure nonlocal integral elasticity and surface elasticity. Moreover, closed-form solutions are found for the deflections of clamped-clamped(C-C), simply-supported(S-S) and cantilever(C-F) nano-/micro-beams. The effective elastic moduli are obtained in terms of the closed-form solutions since the transfer of physical quantities in the transition region is an important problem for span-scale modeling methods. The nonlocal integral and surface elasticities are adopted to examine the size-dependence of the effective moduli and deflection of Ag beams.     

On the secondary resonance of a MEMS resonator: A conceptual study based on shooting and perturbation methods

Nonlinear dynamics of a clamped–clamped capacitive micro-beam resonator subjected to subharmonic excitation of order one-half is studied. The micro-beam resonator is sandwiched with two piezoelectric layers throughout the length, and as a result of piezoelectric actuation a tensile/compressive axial load is induced along the length which is used as a frequency tuning tool. The resonator is subjected to a combination of a bias DC and harmonic AC electrostatic actuations. In order to determine the frequency response subharmonic resonance condition, both perturbation and shooting methods are applied. The stability of the periodic solutions and the bifurcations types are also studied. It is shown that the application of perturbation method imposes some limitations on the order of magnitudes of the terms in the differential equation of the motion; as a result out of the domain where the ordering assumption of the perturbation solution does not hold, some periodic solutions as well as some vital bifurcation points are missed. It is shown that on the frequency domain, the resonator exhibits both softening and hardening behaviors whereas this is not predicted by the perturbation scheme. The effect of DC and AC actuation voltages on the qualitative response of the system is determined. It is shown that based on the polarity of the piezoelectric actuation, the frequency response curves can be shifted both in forward and backward directions which can be used in the design of novel RF MEMS filters/sensors.     

通流面积可变型消声器及其在管道噪声控制中的应用

对利用共振消声器进行管道噪声控制问题作了理论分析,讨论了通流面积可变型消声器的特性及在管道噪声消声控制中的应用问题,消声控制实验的消声量约38dB.     

Field analysis and complex resonance frequency of the quasi-TE0,1,1-mode in an inhomogeneously filled resonator with losses

The object of the present investigation is the determination of the field intensity and the resonance frequency of the quasi-TE_0,1,1-mode (with rotational symmetry) in an inhomogeneously filled resonator. The resonator is filled with a number of concentrically located tubes consisting of different materials, which may be lossy. The top and the bottom walls of the resonator are electrically perfectly conducting; at the side wall an impedance boundary condition is employed. Numerical results for a case of practical interest in magnetic resonance experiments are obtained.     

基于尺寸效应的FG-SMA微梁非线性自由振动特性研究

形状记忆合金具有相变温度低、输出应力高、能耗小、驱动电压低、可恢复应变大、生物相容性好等特性。随着形状记忆合金制备技术的进一步发展，有学者提出将功能梯度形状记忆合金材料用于微机电系统等智能微结构，将使其具有更优良的特性。因此开展机电多场耦合功能梯度形状记忆合金微结构的非线性自由振动特性研究具有重要研究价值。本文基于冯卡门几何非线性理论，综合考虑静电力和分子间作用力的影响，考虑尺寸效应，基于修正偶应力理论，建立两端固定的功能梯度形状记忆合金微梁模型，对功能梯度形状记忆合金微梁相变前后的机电耦合非线性自由振动问题进行深入研究，分析了尺寸效应参数、几何结构参数和相变参数等对功能梯度形状记忆合金微梁自由振动特性的影响。     

基于尺寸效应的FG-SMA微梁非线性自由振动特性研究

形状记忆合金具有相变温度低、输出应力高、能耗小、驱动电压低、可恢复应变大、生物相容性好等特性。随着形状记忆合金制备技术的进一步发展,有学者提出将功能梯度形状记忆合金材料用于微机电系统等智能微结构,将使其具有更优良的特性。因此开展机电多场耦合功能梯度形状记忆合金微结构的非线性自由振动特性研究具有重要研究价值。本文基于冯卡门几何非线性理论,综合考虑静电力和分子间作用力的影响,考虑尺寸效应,基于修正偶应力理论,建立两端固定的功能梯度形状记忆合金微梁模型,对功能梯度形状记忆合金微梁相变前后的机电耦合非线性自由振动问题进行深入研究,分析了尺寸效应参数、几何结构参数和相变参数等对功能梯度形状记忆合金微梁自由振动特性的影响。     

Thermoelastic damping in micro-beam resonators

Thermoelastic damping is recognized as a significant loss mechanism at room temperature in micro-scale beam resonators. In this paper, the governing equations of coupled thermoelastic problems are established based on the generalized thermoelastic theory with one relaxation time. The thermoelastic damping of micro-beam resonators is analyzed by using both the finite sine Fourier transformation method combined with Laplace transformation and the normal mode analysis. The vibration responses of deflection and thermal moment are obtained for the micro-beams with simply supported and isothermal boundary conditions. The vibration frequency is analyzed for three boundary condition cases, i.e., the clamped and isothermal, the simply supported and isothermal, and the simply supported and adiabatic. The analytic results show that the amplitude of deflection and thermal moment are attenuated and the vibration frequency is increased with thermoelastic coupling effect being considered. In addition, it can be found from both the analytic results and the numerical calculations that these properties are size-dependent. When the thickness of the micro-beam is larger than its characteristic size, the effect of thermoelastic damping weakens as the beam thickness increases. The size-effect induced by thermoelastic coupling would disappear when the thickness of the micro-beam is over a critical value that depends on the material properties and the boundary conditions.     

Surface acoustic wave MEMS gyroscope

The design and performance evaluation of a surface acoustic wave (SAW) MEMS gyroscope is presented in this paper. This gyroscope is an integration of a SAW resonator and a SAW sensor. The SAW resonator is used to setup a stable reference vibration and SAW sensor is used for the detection of the secondary SAW generated by the Coriolis force. Further to this resonator, strategically positioned metallic dots that form an array along the standing wave anti-node locations are subjected to the reference vibratory motion. These vibrating dot arrays through the Coriolis effect will generate secondary SAW, which is picked up by the SAW sensor. The SAW resonator is designed and optimized using coupling-of-modes (COM) theory. In view of its one-layer planar configuration, this gyroscope can be implemented easily for applications requiring conformal mounting onto a surface of interest. This SAW gyroscope can be competitively priced inherently rugged, reliable and very sensitive. It is also capable of being wirelessly interrogated, without any sensor power source.     

A micromechanical mass sensing method based on amplitude tracking within an ultra-wide broadband resonance

We propose a mass sensing scheme in which amplitude shifts within a nonlinear ultra-wide broadband resonance serve as indicators for mass detection. To achieve the broad resonance bandwidth, we considered a nonlinear design of the resonator comprised of a doubly clamped beam with a concentrated mass at its center. A reduced-order model of the beam system was constructed in the form of a discrete spring-mass system that contains cubic stiffness due to axial stretching of the beam in addition to linear stiffness (Duffing equation). The cubic nonlinearity has a stiffening effect on the frequency response causing nonlinear bending of the frequency response toward higher frequencies. Interestingly, we found that the presence of the concentrated mass broadens the resonant bandwidth significantly, allowing for an ultra-wide operational range of frequencies and response amplitudes in the proposed mass sensing scheme. A secondary effect of the cubic nonlinearity is strong amplification of the third harmonic in the beam’s response. We computationally study the sensitivity of the first and third harmonic amplitudes to mass addition and find that both metrics are more sensitive than the linearized natural frequency and that in particular, the third harmonic amplitude is most sensitive. This type of open-loop mass sensing avoids complex feedback control and time-consuming frequency sweeping. Moreover, the mass resolution is within a functional range, and the design parameters of the resonator are reasonable from a manufacturing perspective.     

Effect of movability of the resonator center on the operation of a hemispherical resonator gyro

It was established in [2] that resonator deformation according to the second mode shape of a thin hemispherical shell results in a displacement of the center of mass if the resonator is unbalanced, i.e., if the distribution of mass over the surface of the hemisphere deviates from axial symmetry. In the same paper, it was shown that this displacement of the center of mass makes the instrument sensitive to linear vibrations. The present paper deals with linear vibration caused in the presence of unbalance by the working vibrations themselves and by the forces used to maintain the latter. The linear vibration is considered in the form of beam vibrations of the resonator stem. The study is aimed at determining the influence of the coupling between the working and beam vibrations on the instrument readings. We obtain a formula relating the hemispherical resonator gyro drift to the unbalance and the eccentricity, which, in particular, can be caused by the gravity component normal to the sensitivity axis. The drift considered here is essentially caused by the fact that deformation of the resonator supports also results in deformation of the electric control field in the gap between the electrodes. The resulting additional forces cause the effect studied in this paper. The drift magnitude depends on how the control of the phase state of the resonator is chosen. In what follows, to be definite, we consider the control in fast-time mode, i.e., at the natural vibration frequency. A similar effect takes place for any other type of control of waves in the resonator.     

声表面波谐振器频率-温度行为分析

声表面波（SAW）器件以其优良的性能广泛应用于雷达、通讯和日常用品等领域。然而，随着器件工作频率的不断升高，温度对器件频率稳定性的影响也越来越严重。因此，研究声表面波器件的温度效应，并在变温情况下保持SAW器件的频率稳定性至关重要。本文采用增量型的拉格朗日方程分析受温度影响的声表面波频率漂移问题。用频率-温度系数（TCF）作为评价频率-温度行为的标准。设计了一个具有温度补偿层的双层SAW谐振器模型，降低了器件的频率-温度系数。通过尺寸优化，LiNbO3-AlN结构的SAW谐振器在25℃（参考温度）下的频率温度系数TCF接近0ppm/℃。SAW谐振器的波长为4μm，谐振频率为1214.9MHz。     

声表面波谐振器频率-温度行为分析

声表面波（SAW）器件以其优良的性能广泛应用于雷达、通讯和日常用品等领域。然而,随着器件工作频率的不断升高,温度对器件频率稳定性的影响也越来越严重。因此,研究声表面波器件的温度效应,并在变温情况下保持SAW器件的频率稳定性至关重要。本文采用增量型的拉格朗日方程分析受温度影响的声表面波频率漂移问题。用频率-温度系数（TCF）作为评价频率-温度行为的标准。设计了一个具有温度补偿层的双层SAW谐振器模型,降低了器件的频率-温度系数。通过尺寸优化,LiNbO3-AlN结构的SAW谐振器在25℃（参考温度）下的频率温度系数TCF接近0ppm/℃。SAW谐振器的波长为4μm,谐振频率为1214.9MHz。