考虑表面效应的双层圆板的自由振动分析

考虑微生化传感器中谐振器的结构特点,基于Kirchhoff薄板理论与表面弹性理论推导了考虑表面效应的双层圆板的自由振动方程。使用伽辽金法得到了近似解。分析了硬化与软化表面效应与表面残余应力对双层圆板固有频率的影响。结果表明,与已有简化的单层圆板模型相比,现有考虑表面效应的双层板模型会得到与之不同的固有频率。随着板厚与上下两层板厚度比的变化,单层板模型预测的结果会比实际值偏大或者偏小,将无法为传感器膜片的研究与设计提供准确的理论值。对具有双层结构的传感器膜片的理论研究,使用现有模型得到的结果更加准确。     

MEMS惯性器件敏感电容结构相关温度漂移特性仿真

基于MEMS器件的微型惯导系统的精度和MEMS惯性器件的全温稳定性具有很高的相关性.MEMS结构相关的温度漂移主要来自材料之间的热失配应力,工艺引入的应力,以及封装应力等.而相关应力在MEMS结构中的分布以及所造成的应变又和MEMS结构具有一定相关性.通过ANSYS有限元分析软件建立了多种MEMS惯性器件常用梁-质量块结构的FEM模型,具体包括悬臂梁结构、双端固支梁结构、L形梁结构、对角支撑梁结构.通过热-力耦合仿真,研究了热失配应力在上述结构中的分布以及所产生的结构变形.对比分析了不同芯片粘胶形式,包括中心粘胶、三点粘胶、整片粘胶对上述MEMS结构引入的封装应力以及其全温(-40℃～60℃)温度漂移特性.此外,还分析研究了不同衬底厚度对MEMS结构封装应力的隔离效果.     

表面黏附及表面输运的最新研究进展

表面黏附及表面输运作为典型的材料表面行为,已成为表面力学关注的重要课题及学科前沿,揭示该类表面效应的形成机制及其影响因素,对微纳米器件、微纳米传感器、微纳米传输、智能材料表面等创新设计具有重要的指导意义。本文针对表面黏附及表面输运两种典型的表面力学行为,综述了国内外在该方面的最新研究进展,主要介绍了作者课题组在该方面的最新工作及取得的成果,最后针对该方面研究提出未来工作展望。     

国际传热研究前沿──微细尺度传热

微细尺度传热问题的工程背景来自于８０年代高密度微电子器件的冷却和９０年代出现的微电子机械系统中的流动和传热问题．它的特点是,当空间和时间尺度微细化后,出现了很多与常规尺度下不同的物理现象,其原因可以分为两大类:一类是连续介质的假定不再适用,另一类则是各种作用力的相对重要性发生了变化．所需研究的挑战性问题有,导热系数的尺度效应、导热的波动现象,微小通道中流动和传热,流动压缩性和界面效应等的影响,微细尺度下的辐射和相变等．      

Self-shaping of bioinspired chiral composites

Self-shaping materials such as shape memory polymers have recently drawn considerable attention owing to their high shape-changing ability in response to changes in ambient conditions, and thereby have promising applications in the biomedical, biosensing, soft robotics and aerospace fields. Their design is a crucial issue of both theoretical and technological interest. Motivated by the shape-changing ability of Towel Gourd tendril helices during swelling/deswelling, we present a strategy for realizing self-shaping function through the deformation of micro/nanohelices. To guide the design and fabrication of selfshaping materials, the shape equations of bent configurations, twisted belts, and helices of slender chiral composite are developed using the variation method. Furthermore, it is numerically shown that the shape changes of a chiral composite can be tuned by the deformation of micro/nanohelices and the fabricated fiber directions. This work paves a new way to create self-shaping composites.     

微机电系统的微观摩擦学研究进展

对微机电系统的微观摩擦学研究现状进行了综述,介绍了在微机电系统中摩擦学呈现的各种新特征,以及材料、环境和不同工况条件对微机电系统运行稳定性的影响,从微观摩擦学角度探讨了微机电系统的润滑问题,介绍了表面改性和薄膜润滑等在解决微机电系统润滑问题方面的研究现状,并对相关领域的工作进展进行了总结和展望。     

Tabor数、粘着数与微尺度粘着弹性接触理论

微电子机械系统（ＭＥＭＳ）等领域的飞速发展,促使我们迈进了一个表面效应在许多现象 中占主导地位的研究领域．本文重点介绍在ＭＥＭＳ中经常遇到的微尺度粘着弹性接触的相关理论． 通过对两个无量纲数——Ｔａｂｏｒ数μ（以及其相应形式）和粘着数θ的分析,以及考虑它们对于粘 着力的影响,指出了粘着弹性接触理论中所隐含的尺度效应,随着特征尺度的减小,粘着弹性接触中 的表面效应愈加明显．     

Influence of viscoelasticity on drop deformation and orientation in shear flow: Part 1. Stationary states

The influence of matrix and droplet viscoelasticity on the steady deformation and orientation of a single droplet subjected to simple shear is investigated microscopically. Experimental data are obtained in the velocity–vorticity and velocity–velocity gradient plane. A constant viscosity Boger fluid is used, as well as a shear-thinning viscoelastic fluid. These materials are described by means of an Oldroyd-B, Giesekus, Ellis, or multi-mode Giesekus constitutive equation. The drop-to-matrix viscosity ratio is 1.5. The numerical simulations in 3D are performed with a volume-of-fluid algorithm and focus on capillary numbers 0.15 and 0.35. In the case of a viscoelastic matrix, viscoelastic stress fields, computed at varying Deborah numbers, show maxima slightly above the drop tip at the back and below the tip at the front. At both capillary numbers, the simulations with the Oldroyd-B constitutive equation predict the experimentally observed phenomena that matrix viscoelasticity significantly suppresses droplet deformation and promotes droplet orientation. These two effects saturate experimentally at high Deborah numbers. Experimentally, the high Deborah numbers are achieved by decreasing the droplet radius with other parameters unchanged. At the higher capillary and Deborah numbers, the use of the Giesekus model with a small amount of shear-thinning dampens the stationary state deformation slightly and increases the angle of orientation. Droplet viscoelasticity on the other hand hardly affects the steady droplet deformation and orientation, both experimentally and numerically, even at moderate to high capillary and Deborah numbers.     

A review of MEMS-based microscale and nanoscale tensile and bending testing

Thin films at the micrometer and submicrometer scales exhibit mechanical properties that are different than those of bulk polycrystals. Industrial application of these materials requires accurate mechanical characterization. Also, a fundamental understanding of the deformation processes at smaller length scales is required to exploit the size and interface effects to develop new and technologically attractive materials. Specimen fabrication, small-scale force and displacement generation, and high resolution in the measurements are generic challenges in microscale and nanoscale mechanical testing. In this paper, we review small-scale materials testing techniques with special focus on the application of microelectromechanical systems (MEMS). Small size and high force and displacement resolution make MEMS suitable for small-scale mechanical testing. We discuss the development of tensile and bending testing techniques using MEMS, along with the experimental results on nanoscale aluminum specimens.     

Nonlinear dynamic analysis of electrically actuated viscoelastic bistable microbeam system

Nonlinear Dynamics - Viscoelastic phenomena widely exist in MEMS materials, which may have certain effects on transition mechanism of nonlinear jumping phenomena and transient chaotic behaviors....     

二维材料实验力学综述

以石墨烯为代表的二维材料因其原子级厚度、独特物理性质,成为近年来物理、化学、材料交叉学科的研究热点,在合成制备、结构表征、应用开发等方面的研究工作表明其在微纳机电系统、光电器件与功能复合材料领域有广泛且重要的应用前景。然而,由于二维材料结构与尺度的独特性,在其基本物性的理解方面仍存在许多未解决的问题,尤其是力学性能的表征,面临着诸多挑战。本文综述了二维材料本征力学性质和界面力学行为的微纳测试与表征技术的最新进展,例如纳米压痕技术、微孔鼓泡法等,并详细探讨了影响二维材料力学性能及行为的主要因素,分析了其微观尺度下的作用机制,以期通过物理或化学手段实现力学性能的调控。     

ABNORMAL BENDING OF MICRO-CANTILEVER PLATE INDUCECD BY A DROPLET

The abnormal bending of a micro-cantilever plate induced by a droplet is of great interest and of significance in micro/nano-manipulations. In this study, the physical mechanism of this abnormal phenomenon induced by an actual droplet is elucidated. Firstly, the morphologies of 2D and 3D droplets axe solved analytically or numerically. Then the Laplace pressure difference acting on the cantilever plate caused by the droplet is presented. Finally, the deflections of the micro-cantilever plates driven by the capillary forces are quantitatively analyzed. These analytical results may be beneficial to some engineering applications, such as micro-sensors, MEMS and the micro/nano-measurement.     

刚性圆形压头作用下热电材料半平面的无摩擦接触问题

热电材料可以将热能转化为电能,反之亦然,这一优良的性质将有助于研发更具成本效益的设备和器件。本文研究了刚性圆形压头作用在热电材料半平面的无摩擦接触问题。假定压头为电导体、热导体,且压头压入深度及与材料的接触区域宽度未知。首先求解电场和温度场,利用傅里叶变换得到了电势函数、温度、电流密度和能量通量的解析表达式。然后求解弹性场,利用积分变换和边界条件,将该热弹性接触问题转化为第一类奇异积分方程并数值求解。数值结果讨论了压头半径和热电载荷对法向接触应力、电流强度因子和能量通量强度因子的影响。结果表明,对于圆压头,热电材料的法向电流密度、法向能量通量在接触边缘表现出奇异性,而表面法向接触应力在接触边缘为零。本文建立的研究模型有助于更深层次的了解热电材料的接触行为。     

A new fabrication process for a flexible skin with temperature sensor array and its applications

This paper reports a novel technique for fabrication of a flexible skin with a temperature sensor array (40×1 sensors). A simplified MEMS technology using platinum resistors as sensing materials, which are sandwiched between two polyimide layers as flexible substrates is developed. The two polyimide layers are deposited on top of a thin aluminum layer, which serves as a sacrificial layer such that the flexible skin can be released by metal etching and peeled off easily. The flexible skin with a temperature sensor array has a high mechanical flexibility and can be handily attached on a highly curved surface to detect tiny temperature distribution inside a small area. The sensor array shows a linear output and has a sensitivity of 7.5mV/℃ (prior to amplifiers) at a drive current of 1 mA. To demonstrate its applications, two examples have been demonstrated, including measurement of temperature distribution around a micro heater of a micro PCR (polymerase chain reaction) chip for DNA amplification and detection of separation point for flow over a circular cylinder. The development of the flexible skin with a temperature sensor array may be crucial for measuring temperature distribution on any curved surface in the fields of aerodynamics, space exploration, auto making and biomedical applications etc.     

A New Method for Measuring Displacements of Micro Devices by an Optical Encoding System

Micro electro mechanical systems (MEMS) frequently require displacement measurements with high accuracy, a high sampling rate, and a long sensing travel. However, the available methods for measuring displacements of micro devices are typically limited in terms of at least one of these figures of merit. In this paper, we present a novel implementation of an optical encoding method for measuring displacements of micro devices that provides good capabilities in all of these figures of merit. The optical encoding system combines a commercial reading apparatus with a custom-made metal grating that can be easily produced during MEMS fabrication. Experimental tests demonstrate the ability of the system to measure displacements with a resolution of 25 nm and sampling rate of 1 MHz, under a variety of displacement rate functions.     

表面应力调制的微流控技术的驱动原理

发展和优化对薄膜、液滴和气泡进行流动控制操作的多功能装置, 要求深入了解界面现象和微流体动力学流动.表面积/ 体积的大比值和低雷诺数流动是此类系统的特点.毛细数和Bond数强烈地受边界效应影响, 因而可以通过各种表面处理和表面力 来进行控制.本文综述了运用调制法向或切向应力, 对均匀的、带化学处理条纹及拓扑结构纹理表面上的微滴和液膜进行驱动 的常用技术的基本原理.     

Manufacturing tolerant topology optimization

In this paper we present an extension of the topology optimization method to include uncertainties during the fabrication of macro, micro and nano structures. More specifically, we consider devices that are manufactured using processes which may result in （uniformly） too thin （eroded） or too thick （dilated） structures compared to the intended topology. Examples are MEMS devices manufactured using etching processes, nano-devices manufactured using e-beam lithography or laser micro-machining and macro structures manufactured using milling processes. In the suggested robust topology optimization approach, under- and over-etching is modelled by image processing-based ＂erode＂ and ＂dilate＂ operators and the optimization problem is formulated as a worst case design problem. Applications of the method to the design of macro structures for minimum compliance and micro compliant mechanisms show that the method provides manufacturing tolerant designs with little decrease in performance. As a positive side effect the robust design formulation also eliminates the longstanding problem of one-node connected hinges in compliant mechanism design using topology optimization.     

A model for computational investigation of elasto-plastic normal and tangential contact considering adhesion effect

With the rapid development of Micro-Electro-Mechanical System (MEMS), we enter a field in which the surface effects have dominated many of the micro-scale phenomena, and the adhesive contact is one of the focuses. In this paper, a feasible model for finite element computation is presented via a macroscopic and microscopic combination approach, in which the adhesive forces are simulated by some non-linear spring elements considering the softening stage. Two basic problems concerning the adhesion effect were considered; through specific quantitative analysis, the results show a consistency with the current elastic continuum theories of adhesion and a brief investigation into the effects of adhesion on plastic deformation and tangential contact will be carried out as well. The project supported by the National Natural Science Foundation of China (10172050, 90205022) and Key Grant Project of Chinese MoE (0306)     

微纳通道谐振器检测与表征中的动力学问题

微纳通道机械谐振器在液体环境中具有超高的谐振频率、品质因子和灵敏度,常用于液体环境中的高精度检测与表征,在生物、医药、化工等领域有着广阔的应用前景.微纳通道机械谐振器的检测与表征功能高度依赖其动力学特性,而此类器件是由谐振结构、内部流体、被检测物和外部激励等多因素组成的耦合系统,涉及的动力学问题较为复杂,已成为谐振器件研究中的前沿热点和瓶颈问题.本文综述了微纳通道机械谐振器的研究进展,总结了谐振器件实现高精度检测与表征功能时的动力学设计原理,详细讨论了谐振器件的稳定性、频响特性、能量耗散、频率波动等动态特性,阐明了不同动力学问题的物理机制及其对谐振器性能的影响规律,可为深入厘清微纳通道机械谐振器的动力学设计问题,提高器件动态性能提供理论参考和技术支撑,对超高频、超高灵敏度谐振器的设计、制造及应用发展具有重要意义.