一种新型微空阴极结构的大气压射频冷等离子体源

介绍微空阴极的结构和物理机理，着重介绍一种新型大气压下射频激励的大面积冷等离子体源——融合空心阴极(fused hollow cathodes，FHC).结合应用和与之有关的研究，简单介绍空心阴极的放电特性，以及影响其放电特性的因素，如阴极材料、气体种类、频率、气体流速、气压、阴极内径等.另外提到了其他两种相关的微空阴极系统. 关键词： 微空阴极 大气压 冷等离子体 射频     

微空心阴极维持放电的实验研究

为在高气压下形成大体积均匀等离子体,将微空心阴极放电(MHCD)作为等离子体阴极,引入另一阳极而设计为微空心阴极维持放电(MCSD)的发生装置.实验研究了MCSD的产生放电条件,通过在氩气中添加少量氮气,分析氮分子第一正带系发射光谱的方法测量了MCSD中羽流区不同位置的气体温度.研究表明,当等离子体阴极电流增加到一个临...     

介质阻挡放电点燃大气压直流均匀放电的光谱研究

由于大气压均匀放电等离子体在工业领域具有广泛的应用前景,为了获得大尺寸的大气压均匀等离子体,采用氩气作为工作气体,在大气压空气环境中利用同轴介质阻挡放电点燃了针-板电极间的大气隙(气隙宽度达到5 cm)直流均匀放电。研究发现,同轴介质阻挡放电能够有效降低针-板电极间的击穿电压。该均匀放电由等离子体柱、等离子体羽、阴极暗区和阴极辉区组成。其中等离子体柱和阴极辉区都是连续放电。而等离子体羽不同位置的放电是不同时的。事实上,等离子体羽放电是由从阴极向着等离子体柱移动的发光光层(即等离子体子弹)叠加而成。利用电学方法测量了放电的伏安特性曲线,发现其与低气压正常辉光放电类似,均具有负斜率。采集了放电的发射光谱,发现存在N₂第二正带系、氩原子和氧原子谱线。通过Boltzmann plot方法对放电等离子体电子激发温度进行了空间分辨测量,发现等离子体柱的电子激发温度比等离子体羽的电子激发温度低。通过分析放电机制,对以上现象进行了定性解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

脉冲HF化学激光体系中的放电模式分析

采用面阵滑闪火花预电离诱导的平行板放电结构,研究了SF6-C2H6混合气体中的脉冲放电模式,确认了不同放电条件下存在自持体放电(SSVD)和电弧放电两种模式,且两种模式可以互相转化。SSVD模式放电电流波形主要由电容电压和气压决定,气体混合比和储能电容值对其影响很小。SSVD电流峰值随电容电压增加基本线性增加,随气压增加线性减小,分析表明这一特性是因为SSVD是由多个同步电子雪崩在时空上叠加而成,属于a过程主导的电子雪崩放电。     

Spectroscopic measurements and electrical diagnostics of microhollow cathode discharges in argon flow at atmospheric pressure

This paper is dedicated to the study of the electrical and optical characteristics of direct current microhollow cathode discharges (MHCD) in argon flow. Experiments have been carried out in order to determine the so-called Paschen’s curves in a static open MHCD. Current-voltage characteristics were obtained as a function of the pressure and hole diameter. MHCD enable stable direct current discharge operation, which could be ignited for pressures ranging from 12 to 800 Torr, in a very wide range of current densities and electrodes materials. Optical emission spectroscopy and analysis of the spectral line broadening of plasma line emissions were performed in order to measure parameters such as electron number density (2–4 × 10¹⁴ cm^-3)^{-3}), gas temperature (460–640 K), excitation temperature (~ 7000 K) and electron temperature (~ 8500 K), for current ranging from 7 to 15 mA. Lower gas temperature was measured compared to the static MHCD ones.     

空心针-板电极大气压氩气辉光放电的特性研究

大气压均匀放电等离子体在工业领域具有非常广泛的应用前景,它是利用直流电源激励的空心针-板放电装置,以氩气为工作气体在大气压空气中产生均匀稳定的放电。对氩气流量和气隙间距对辉光放电发光特性的关系进行了研究,结果表明放电所产生的等离子体柱连接两个电极,发光较为均匀(观察不到放电丝)。在板电极附近放电等离子体柱直径最大,最大直径随着电流和气流的增大而增大。放电伏安特性研究发现,与低气压辉光放电相类似,两电极间的电压随着电流的增大而减小,并且随气流和气隙间距的增大而增大。对该大气压直流均匀放电在扫描范围为330～450 nm的光学发射光谱进行分析,获得了放电等离子体的分子振动温度和谱线强度比I_391.4/I_337.1随氩气流量和气隙间距的变化关系。I_391.4/I_337.1均随流量和气隙间距的增大而降低。对等离子体柱的I_391.4/I_337.1沿气流方向(等离子体柱轴向)进行了空间分辨测量,并进行了定性分析,结果表明,振动温度及电子平均能量随着远离空心针口距离的增大而增大。这些结果对大气压辉光放电在工业中的应用具有重要意义。     

同轴电极结构下真空放电等离子体生成及传播特性

采用放电电流为100~300 A、持续时间为13 s的单脉冲电源,设计了两种同轴电极结构作为放电阳极,分别为筒状电极、喷嘴状电极。利用MAXWELL 3D电场仿真软件对两种电极结构下的电场分布进行了仿真分析,并采用探针法对放电生成的等离子体的参数进行了测量,分析讨论了同轴电极结构对真空放电等离子体生成特性的影响。选取喷嘴状电极结构作为阳极,分别测量了采用铅、铝、铜三种材质的阴极时生成的等离子体的扩散速度及能量。实验与仿真结果表明:当阳极为喷嘴状电极时阴极尖端的电场强度较大,测得放电电流较大,击穿电压较低,等离子体密度也较大;采用铝材质阴极时生成的等离子体扩散速度最快,采用铅材质阴极时生成的等离子体的离子动能最大。     

Glow Discharge Characteristics of Hollow Needle-Plate Electrode in Atmospheric Pressure ArgonSCIEI北大核心CSCD

Atmosphere pressure uniform plasma has the broad application prospect in the industrial field. Using hollow needle cathode - plate anode device excited by direct-current voltage, a uniform and stable glow discharge is generated at atmospheric pressure in ambient air with argon used as working gas. The influence of the experimental parameters (including gas flow rate and the gas gap width) on discharge has been investigated by optical method. It can be found that a glow-discharge plasma column can bridge the two electrodes. The plasma column is uniform, and no filaments can be discerned. Near the plate electrode, the diameter of the plasma column is largest of all positions. The maximal diameter of the plasma column increases with increasing the discharge current or the gas flow rate. Through electrical method, the voltage-current characteristic has been investigated. It has been found that the discharge voltage decreases with increasing the current which is similar with the characteristic of glow discharge in low pressure. It increases with increasing the gas gap width or the gas flow rate. By analyzing the optical emission spectrum scanning from 330 to 450 nm emitted from the direct-current glow discharge, the molecular vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 have been investigated as functions of the gas flow rate and gas gap width. Results indicate that both the vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 decrease with increasing the gas flow rate or the gas gap width. In addition, the molecular vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 have been investigated in spatial resolution along the direction of gas flow(plasma column axial), and give a qualitative analysis as well. It is found that the vibrational temperature and the average electron energy increase with increasing the distance from the hollow needle cathode. These results are important to the industrial applications of glow discharge.     

用发射光谱法测量氮气直流辉光放电的转动温度

本文报道了氮气气压分别为10和20Pa时，对直流辉光放电的发射光谱进行测量和分析的结果。选择的研究对象为N2放电中形成的N2^ B^2∑u^ →X^2∑g^ 跃迁的Δv=v′-v″=0谱带系中v′=0→v″=0谱带的R支。在阴极背面辉光区、阴极鞘层区、正柱区以及阳极辉光区中分别选择一点进行了转动分辨的发射光谱的测量。利用自己编写的光谱拟合程序，获得了相应的实验条件下N2^ 的转动温度，给出了转动温度随放电电压的变化趋势，其结果可以用直流放电的帕邢定律得到很好的解释。在10和20Pa气压下，放电的阴极鞘层区、正柱区、阳极辉光区中的转动温度都随放电电压呈现出了不同的变化趋势，甚至是完全相反的变化趋势。我们认为这是由于气压不同时，放电状态不同所致：气压为10Pa时的放电是正常辉光放电，而气压为时20Pa的放电为反常辉光放电。     

Volume electrical discharge in Ne/SF6/C6H14 and pure SF6

The electrical and spatial characteristics of a volume electrical discharge are studied as functions of the ratio of partial pressures of the mixture components at varying initial voltage. Early in the discharge, hot (plasma) cathode spots are observed with diffusive plasma flares developing above them. Overlapping of the flares produces a volume plasma column. The column homogeneity depends on the diffusive-flare density, and the length of the volume-discharge stage is determined by the time it takes for one or more flares to transform and give rise to the channel stage. Estimates of the ionization, attachment, and ion recombination rates are used to show that the electron density in plasma channels is two orders of magnitude lower than that of positive and negative ions forming a stagnant stiff skeleton of the plasma. Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 8, pp. 43–49, August, 1999.     

Performance studies of a pulsed HF laser with a sliding discharge plasma cathode

The plasma electrode design concept is applied for the first time to an HF laser. The discharge along the surface of a dielectric (sliding discharge) is used as a plasma cathode for the main laser discharge. The laser operates at atmospheric pressure with a gas mixture of He/SF₆/C₃H₈. Details are presented on the efficiency of energy transfer, the dependence of laser performance on circuit parameters, gas mixture, relative energy loading and time delay between the plasma electrode and main discharges. The F atom production rate is estimated from the linear dependence of the output energy on the electric charge passed through the discharge. Output energies of 600 mJ were obtained at 1.6% efficiency from a small active discharge of 108 cm₃ volume and 38 cm length, while the maximum specific input and output energies were 370 J/1 and 5.7 J/1, respectively. These values compare favourably with those reported in the literature for non-chain-reaction-type gas mixtures at 1 atm pressure and demonstrate that the plasma electrode design is a powerful scheme for developing gas-discharge lasers.     

纳秒脉冲空气辉光放电等离子体及应用

采用基于半导体断路开关的纳秒脉冲高压电源,在两个金属电极之间产生放电区间为1 600mm×100 mm×25 mm的常压辉光空气等离子体。等离子体发生器采用负高压针电极阵列与平板阳极结构,针电极的直径为1 mm,长度为20 mm,针电极之间的间隔为20 mm,针电极与平板零电位之间的距离为25mm,在每个负高压针电极末端周围同时形成圆锥形辉光放电,在平板地电极则形成大面积辉光放电。采用电压探针测量了该新型等离子体的放电特性,结果表明:放电脉冲的上升时间为26 ns,最高脉冲输出峰值电压为27 kV;利用该辉光等离子体对幅宽为1 000 mm聚四氟乙烯薄膜进行了表面改性处理,处理后其表面接触角由原来的124°降到69°,亲水性能大为提高。     

微空心阴极放电的Monte Carlo模拟研究

基于MATLAB与VC++混合语言，采用Monte Carlo模拟对高气压下亚毫米级微空心阴极放电（MHCD）中电子的运动过程进行了研究，计算出不同气压下的稳态时场向电子密度分布，电子能量分布以及对各种碰撞的统计等.分析表明：高气压下微空心阴极放电更能反映空心阴极效应——“来回振荡”的本质.通过模拟得到，电子在阴极间来回振荡的过程中，仍以前向散射为主.随着气压的升高，侧向散射效应逐渐体现出来. 关键词： 微空心阴极 Monte Carlo 负辉区 碰撞截面     

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采用纳秒脉冲电源,在静止空气条件下,开展了不同气压、放电距离和电压条件下的大体积纳秒脉冲放电实验研究.研究表明,当长度固定为200mm时,气压为250Pa时,随着电压的增大,放电区域从圆锥电极附近扩展到整个通道.当电压为12kV时,放电布满整个通道;随气压升高,初始放电电压增大.实验中发现在电压升高到一定程度时纳秒脉冲电离出现不稳定性,表现在气压相对较低时等离子体出现径向波动,气压相对较高时非平衡等离子体放电向电弧放电转变.分析认为,为了实现大体积均匀放电等离子体的产生,阻止放电不稳定性发生,应该采用上升沿时间更短,脉宽更小,电压更高的纳秒脉冲电源.     

Intense emission from a grid-stabilized plasma cathode

Intense emission from a grid-stabilized plasma cathode based on a glow discharge with an expanded anode area is studied. In the electrode system of the ion source, the potential difference between a large-mesh grid electrode (a hole diameter of 4–6 mm) and cathode and anode plasma reaches 200 V and the glow discharge current is up to 1 A. The current distribution over the electrodes of the plasma cathode is taken, and the dependences of the electron extraction efficiency and electron-emitting-plasma potential on the gas pressure and discharge parameters are obtained. A relationship between the geometric parameters of the grid, cathode plasma potential, and efficiency of electron extraction from the plasma is derived. It is shown that stable intense emission from the plasma cathode can be provided in wide ranges of gas pressure and discharge current by varying the geometry and mesh size of the plasma cathode grid. Discharge contraction in the grid plane at elevated gas pressures is explained. It is assumed that the emitting plasma becomes inhomogeneous due to variation in the thickness of near-electrode layers in the holes of the grid, which makes the distribution of the emission current from the plasma more nonuniform.     

Wide-aperture high-current electron beam in a discharge with cathode plasma at elevated pressure

This work pursues investigations into the discharge with a cathode plasma in a cavity one wall of which is an insulating plate with a hole D in diameter (the cavity is 0.5 or 1.5 mm wide). This discharge is thoroughly analyzed in comparison with the high-voltage hollow-cathode discharge. Owing to the reduced emission of electrons from the cathode plasma, the discharge becomes more stable against transition to the low-voltage form, as a result of which an electron beam can be generated under higher gas pressures. Such a beam formed at the entrance to the cavity is used as an auxiliary one that propagates over the remaining (flat) surface of the cathode and adds to the gas ionization. Accordingly, the beam current from the main discharge to the anode rises (high-current regime). Wide-aperture (D = 22 mm) ≈1-μs-long pulsed beams with a current an order of magnitude higher than the total current of the equivalent anomalous discharge are obtained. Experiments are carried out at a helium pressure to 20 Torr and a voltage from 1 to 20 kV.     

Experimental Investigations of Discharge Characteristics and Plasma Parameters of a Cylindrical Cathode Discharge in a Magnetic Field. II. Plasma Parameters

The experimental determination of the main plasma parameters (i.e. plasma potential, plasma density, electron temperature, intensity of plasma radiation) in the negative glow of a cylindrical cathode discharge in magnetic field is presented. The influence of electrode configuration, gas pressure, discharge current and magnetic field on plasma parameters and their radial distribution is analysed.     

DC corona discharge ozone production enhanced by magnetic field

We have studied the effect of a stationary magnetic field on the production of ozone from air at atmospheric pressure by a negative corona discharge in a cylindrical electrode configuration. We used a stainless steel hollow needle placed at the axis of the cylindrical discharge chamber as a cathode. The outer wall of the cylinder was used as an anode. The vector of magnetic induction was perpendicular to the vector of current density. We found that: (a) the magnetic field extends the current voltage range of the discharge; (b) for the discharge in the Trichel pulses regime and in the pulseless glow regime, the magnetic field has no substantial effect on the discharge voltage or on the concentration of ozone that is produced; (c) for the discharge in the filamentary streamer regime for a particular current, the magnetic field increases the discharge voltage and consequently an approximately 30% higher ozone concentration can be obtained; (d) the magnetic field does not substantially increase the maximum ozone production yield. A major advantage of using a magnetic field is that the increase in ozone concentration produced by the discharge can be obtained without additional energy requirements.     

气压对微束射频容性放电模式调制的研究

微束射频容性放电在纳米晶体颗粒等离子体增强气相合成有着潜在的应用前景.本论文利用ICCD、单反相机、高压探头和电流探头等对微束射频容性放电特性进行了实验诊断研究.结果发现:在纯氩气微束射频放电中,随着气压的增加,放电从辉光放电模式向多通道丝状放电模式转换;在99%氩/1%氢混合气体微束射频放电中,丝状放电模式消失,而是从低气压全空间分布的辉光放电模式,到中等气压向轴心收缩的辉光放电模式,最后到高气压的“环状”辉光放电模式;而在纯氢气微束射频放电中,随着气压的增加,放电模式直接从全空间分布的辉光放电模式向“环状”辉光放电模式转换.最后通过射频电场中电子加热、趋肤效应和气体热传导的共同作用解释了产生不同放电模式的物理机制.     

Observations of plasma dynamics in a gas-embedded compressionalZ-pinch

A series of experiments carried out in a gas embedded compressional Z-pinch are presented. A dc micro discharge of 150 μA between two conical sharp edged electrodes is established to produce a hollow cylindrical discharge. A few nanoseconds before the application of the main voltage, a pulsed laser is focused through the anode onto the cathode. With this preionization scheme an initial coaxial current structure is established. H₂ and D₂ at a pressure of 1/3 atm were used as a working gas. The experiments have been carried out using a pulse power generator capable of delivering current of up to I~200 kA with a dI/dt>10¹² A/s. The use of H₂ and D₂ allows the study of discharges with the same electrical properties, but with different dynamics. At early times this preionization scheme produces a coaxial double column pinch, which as current rises, coalesces into a single column becoming a gas embedded compressional Z-pinch. Diagnostics used are current and voltage monitors, single frame holographic interferometry and shadowgraphy, visible streak camera, and single frame image converter camera. Electron density, line density, pinch radius, and plasma motion are obtained from the optical diagnostics. It was found that the maximum electron density achieved on axis is greater than twice the expected value according with the filling pressure used in the discharges, which contrasts with a traditional gas embedded pinch in which the density is lower than the expected value from filling pressure. The expansion rate of the plasma column is reduced to a third of the observed value for the single channel laser initiated gas embedded pinch. These measurements agree with the existence of a central current channel in this new configuration of gas embedded pinch. The experimental results clearly show that compression is achieved with the composite preionization scheme