Controllable off-plane deflection of cantilevers for multiple scanning proximity probe arrays

The presented work reports the fabrication of 4×32 arrays of fully addressable proximity probes, which are initially and controllably off-plane deflected (bent). Such a deflection is required for the simultaneous approach and scanning of all cantilevers. It is realized by deposition of the silicon cantilevers with Si₃N₄ film inducing tensile stress. ANSYS simulations are used to calculate the off-plane deflection for different thickness of the cantilever and the Si₃N₄ layer and compared with experimentally obtained values. Cantilever arrays with set bending up to 50 μm, employing LPCVD silicon nitride film with a tensile stress of 750 MPa are fabricated.     

Sensitive detection of temperature behind reflected shock waves using wavelength modulation spectroscopy of CO2 near 2.7?μm

Tunable diode-laser absorption of CO₂ near 2.7 μm incorporating wavelength modulation spectroscopy with second-harmonic detection (WMS-2f) is used to provide a new sensor for sensitive and accurate measurement of the temperature behind reflected shock waves in a shock-tube. The temperature is inferred from the ratio of 2f signals for two selected absorption transitions, at 3633.08 and 3645.56 cm⁻¹, belonging to the ν ₁+ν ₃ combination vibrational band of CO₂ near 2.7 μm. The modulation depths of 0.078 and 0.063 cm⁻¹ are optimized for the target conditions of the shock-heated gases (P∼1–2 atm, T∼800–1600 K). The sensor is designed to achieve a high sensitivity to the temperature and a low sensitivity to cold boundary-layer effects and any changes in gas pressure or composition. The fixed-wavelength WMS-2f sensor is tested for temperature and CO₂ concentration measurements in a heated static cell (600–1200 K) and in non-reactive shock-tube experiments (900–1700 K) using CO₂–Ar mixtures. The relatively large CO₂ absorption strength near 2.7 μm and the use of a WMS-2f strategy minimizes noise and enables measurements with lower concentration, higher accuracy, better sensitivity and improved signal-to-noise ratio (SNR) relative to earlier work, using transitions in the 1.5 and 2.0 μm CO₂ combination bands. The standard deviation of the measured temperature histories behind reflected shock waves is less than 0.5%. The temperature sensor is also demonstrated in reactive shock-tube experiments of n-heptane oxidation. Seeding of relatively inert CO₂ in the initial fuel-oxidizer mixture is utilized to enable measurements of the pre-ignition temperature profiles. To our knowledge, this work represents the first application of wavelength modulation spectroscopy to this new class of diode lasers near 2.7 μm.     

Mid-infrared laser-absorption diagnostic for vapor-phase fuel mole fraction and liquid fuel film thickness

A novel two-wavelength mid-infrared laser-absorption diagnostic has been developed for simultaneous measurements of vapor-phase fuel mole fraction and liquid fuel film thickness. The diagnostic was demonstrated for time-resolved measurements of n-dodecane liquid films in the absence and presence of n-decane vapor at 25°C and 1 atm. Laser wavelengths were selected from FTIR measurements of the C–H stretching band of vapor n-decane and liquid n-dodecane near 3.4 μm (3000 cm⁻¹). n-Dodecane film thicknesses <20 μm were accurately measured in the absence of vapor, and simultaneous measurements of n-dodecane liquid film thickness and n-decane vapor mole fraction (300 ppm) were measured with <10% uncertainty for film thicknesses <10 μm. A potential application of the measurement technique is to provide accurate values of vapor mole fraction in combustion environments where strong absorption by liquid fuel or oil films on windows make conventional direct absorption measurements of the gas problematic.     

Polarization and piezoelectricity in polymer films with artificial void structure

Laminated polymer-film systems with well-defined void structures were prepared from fluoroethylenepropylene (FEP) and polytetrafluoroethylene (PTFE) layers. First the PTFE films were patterned and then fusion-bonded with the FEP films. The laminates were subjected to either corona or contact charging in order to obtain the desired piezoelectricity. The build-up of the “macro-dipoles” in the laminated films was studied by recording the electric hysteresis loops. The resulting electro-mechanical properties were investigated by means of dielectric resonance spectroscopy (DRS) and direct measurements of the stress-strain relationship. Moreover, the thermal stability of the piezoelectric d ₃₃ coefficient was investigated at elevated temperatures and via thermally stimulated discharge (TSD) current measurements in short circuit. For 150 μm thick laminated films, consisting of one 25 μm thick PTFE layer, two 12.5 μm thick FEP layers, and a void of 100 μm height, the critical voltage necessary for the build-up of the “macro-dipoles” in the inner voids was approximately 1400 V, which agrees with the value calculated from the Paschen Law. A quasi-static piezoelectric d ₃₃ coefficient up to 300 pC/N was observed after corona charging. The mechanical properties of the film systems are highly anisotropic. At room temperature, the Young’s moduli of the laminated film system are around 0.37 MPa in the thickness direction and 274 MPa in the lateral direction, respectively. Using these values, the theoretical shape anisotropy ratio of the void was calculated, which agrees well with experimental observation. Compared with films that do not exhibit structural regularity, the laminates showed improved thermal stability of the d ₃₃ coefficients. The thermal stability of d ₃₃ can be further improved by pre-aging. E.g., the reduction of the d ₃₃ value in the sample pre-aged at 150°C for 5 h was less than 5% after annealing for 30 h at a temperature of 90°C.     

Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations

We demonstrate double-cavity micromachined tunable filters with electrical actuations for both blue and red wavelength tuning. Electrical actuations for both shifts can be achieved by combining electrostatic and electro-thermal actuations below and above the breakdown voltage of p-n junctions in the micromachined cantilevers. The measured tuning range with the actuation is 8 nm for both tuning sides and the micromachined filter with a cantilever length of 80 μm exhibits a switching time of less than 115 μs for both turn-on and turn-off states. We also present the theoretical and measured temperature dependence of fabricated micromachined filters at various cantilever lengths, which experimentally gives us a temperature dependence of 0.14 nm/K for a cantilever length of 100 μm.     

Table-top kHz hard X-ray source with ultrashort pulse duration for time-resolved X-ray diffraction

The interaction of ultrashort laser pulses with solid state targets is studied concerning the production of short X-ray pulses with photon energies up to about 10 keV. The influence of various parameters such as pulse energy, repetition rate of the laser system, focusing conditions, the application of prepulses, and the chirp of the laser pulses on the efficiency of this highly nonlinear process is examined. In order to increase the X-ray flux, the laser pulse energy is increased by a 2nd multipass amplifier from 750 μJ to 5 mJ. By applying up to 4 mJ of the pulse energy a X-ray flux of 4×10¹⁰ Fe K _α photons/s or 2.75×10¹⁰ Cu K _α photons/s are generated. The energy conversion efficiency is therefore calculated to η _Fe≈1.4×10⁻⁵ and η _Cu≈1.0×10⁻⁵. The X-ray source size is determined to 15×25 μm². By focusing the produced X-rays using a toroidally bent crystal a quasi-monochromatic X-ray point source with a diameter of 56 μm×70μm is produced containing ≈10⁴ Fe K _α1 photons/s which permits the investigation of lattice dynamics on a picosecond or even sub-picosecond time scale. The lattice movement of a GaAs(111) crystal is shown as a typical application.     

Influence of the heater material on the critical heat load at boiling of liquids on surfaces with different sizes

Data on critical heat loads q _cr for the saturated and unsaturated pool boiling of water and ethanol under atmospheric pressure are reported. It is found experimentally that the critical heat load does not necessarily coincide with the heat load causing burnout of the heater, which should be taken into account. The absolute values of q _cr for the boiling of water and ethanol on copper surfaces 65, 80, 100, 120, and 200 μm in diameter; tungsten surface 100 μm in diameter; and nichrome surface 100 μm in diameter are obtained experimentally.     

Metal-on-oxide nanoparticles produced using laser ablation of microparticle aerosols

A continuous aerosol process has been studied for producing nanoparticles of oxides that were decorated with smaller metallic nanoparticles and are free of organic stabilizers. To produce the oxide carrier nanoparticles, an aerosol of 3–6 μm oxide particles was ablated using a pulsed excimer laser. The resulting oxide nanoparticle aerosol was then mixed with 1.5–2.0 μm metallic particles and this mixed aerosol was exposed to the laser for a second time. The metallic micron-sized particles were ablated during this second exposure, and the resulting nanoparticles deposited on the surface of the oxide nanoparticles producing an aerosol of 10–60 nm oxide nanoparticles that were decorated with smaller 1–5 nm metallic nanoparticles. The metal and oxide nanoparticle sizes were varied by changing the laser fluence and gas type in the aerosol. The flexibility of this approach was demonstrated by producing metal-decorated oxide nanoparticles using two oxides, SiO₂ and TiO₂, and two metals, Au and Ag.     

Performances of different metals in optical fibre-based surface plasmon resonance sensor

The capability of various metals used in optical fibre-based surface plasmon resonance (SPR) sensing is studied theoretically. Four metals, gold (Au), silver (Ag), copper (Cu) and aluminium (Al) are considered for the present study. The performance of the optical fibre-based SPR sensor with four different metals is obtained numerically and compared in detail. The performance of optical fibre-based SPR sensor has been analysed in terms of sensitivity, signal-to-noise (SNR) ratio and quality parameter. It is found that the performance of optical fibre-based SPR sensor with Au metal is better than that of the other three metals. The sensitivity of the optical fibre-based SPR sensor with 50 nm thick and 10 mm long Au metal film of exposed sensing region is 2.373 μm/RIU with good linearity, SNR is 0.724 and quality parameter is 48.281 RIU^− 1. The thickness of the metal film and the length of the exposed sensing region of the optical fibre-based SPR sensor for each metal are also optimized.     

Fast solvent-driven micropump fabricated by two-photon microfabrication

A solvent-driven micropump was developed using three-dimensional two-photon microfabrication. The actuation of micropump is utilizing the bending behavior of hydrogel film under asymmetric solvent-stimulus. The micropump could absorb and discharge fluid reversibly by simply alternating solvent composition. Contributing to the thin hydrogel film with the thickness of 2.5 μm, the response time was significantly improved to 0.17 s. The discharge capacity of fluid was estimated to be as low as 9.2×10⁻² pL. The pumping of such ultra-low-volume fluid will be useful for further miniaturization of micro-nanofluidic devices.     

Improved laser-induced forward transfer of organic semiconductor thin films by reducing the environmental pressure and controlling the substrate–substrate gap width

Laser-induced forward transfer (LIFT) has been investigated for bilayer transfer material systems: silver/organic film (Alq₃ or PFO). The LIFT process uses an intermediate dynamic release layer of a triazene polymer. This study focuses on the effect of introducing a controlled donor–receiver substrate gap distance and the effect of doing the transfer at reduced air pressures, whilst varying the fluence up to ∼200 mJ/cm². The gap between ‘in-contact’ substrates has been measured to be a minimum of 2–3 μm. A linear variation in the gap width from ‘in contact’ to 40 μm has been achieved by adding a spacer at one side of the substrate–substrate sandwich. At atmospheric pressure, very little transfer is achieved for Alq₃, although PFO shows some signs of successful doughnut transfer (with a large hole in the middle) in a narrow fluence range, at gaps greater than 20 μm. For the transfer of Ag/PFO bilayers at atmospheric pressure, the addition of a PFO layer onto the receiver substrate improved the transfer enormously at smaller gaps and higher fluences. However, the best transfer results were obtained at reduced pressures where a 100% transfer success rate is obtained within a certain fluence window. The quality of the pixel morphology at less than 100 mbar is much higher than at atmospheric pressure, particularly when the gap width is less than 20 μm. These results show the promise of LIFT for industrial deposition processes where a gap between the substrates will improve the throughput.     

High efficiency KTiOAsO4 optical parametric oscillator within a diode-side-pumped two-rod Nd:YAG laser

A high efficiency KTiOAsO₄(KTA) intracavity optical parametric oscillator (IOPO) is demonstrated within a diode-side-pumped acousto-optically (AO) Q-switched two-rod Nd:YAG laser. With a 25-mm-long X-cut KTA crystal, efficient parametric conversions to signal (1.54 μm) and idler (3.47 μm) waves are realized. The highest output power of 15.8 W including 12.7 W signal and 3.1 W idler power is obtained at a repetition rate of 7.5 kHz and a pump power of 208 W, corresponding to an optical-to-optical conversion efficiency of up to 7.6%. The signal pulse duration is 32 ns with a peak power of 53 kW. At a repetition rate of 12.5 kHz and the pump power of 208 W, the highest idler power of 3.4 W is obtained with a peak power of 14 kW and a pulse duration of 19 ns. And the beam quality factors (M ²) of the signal and idler waves are determined to be around 2 and 20, respectively.     

Thermal analysis of InP-based quantum cascade lasers for efficient heat dissipation

We have theoretically investigated the thermal characteristics of double-channel ridge–waveguide InGaAs/InAlAs/InP quantum cascade lasers (QCLs) using a two-dimensional heat dissipation model. The temperature distribution, heat flow, and thermal conductance (G _th) of QCLs were obtained through the thermal simulation. A thick electroplated Au around the laser ridges helps to improve the heat dissipation from devices, being good enough to substitute the buried heterostructure (BH) by InP regrowth for epilayer-up bonded lasers. The effects of the device geometry (i.e., ridge width and cavity length) on the G _th of QCLs were investigated. With 5 μm thick electroplated Au, the G _th is increased with the decrease of ridge width, indicating an improvement from G _th=177 W/K⋅cm² at W=40 μm to G _th=301 W/K⋅cm² at W=9 μm for 2 mm long lasers. For the 9 μm×2 mm epilayer-down bonded laser with 5 μm thick electroplated Au, the use of InP contact layer leads to a further improvement of 13% in G _th, and it was totally raised by 45% corresponding to 436 W/K⋅cm² compared to the epilayer-up bonded laser with InGaAs contact layer. It is found that the epilayer-down bonded 9 μm wide BH laser with InP contact layer leads to the highest G _th=449 W/K⋅cm². The theoretical results were also compared with available obtained experimentally data.     

Modeling and analysis of birefringence in magneto-optical thin film made by SiO2/ZrO2 doped with ferrite of cobalt

We report the device characteristics of the metal–dielectric high-reflectivity (HR) coated 1.55 μm laterally coupled distributed feedback (DFB) laser with metal surface gratings by using holographic lithography. The HR coating films are composed of Au/Ti/SiO₂. It provides a variety of advantages compared to the uncoated DFB laser on the same processed wafer while there is no degradation on current–voltage characteristics. For 3 μm wide and 300 μm long HR coated DFB laser, it exhibits a maximum output power of ∼17 mW and a threshold current of 14.2 mA at 20°C under continuous-wave mode. It is clear that the threshold current and slope efficiency are improved by 36% and 96%, respectively, due to the reduction of mirror loss. The metal–dielectric HR coating on one facet of DFB laser is found to have significantly increased characteristic temperature (i.e., T ₀∼88 K). Furthermore, the stable single-mode operation with an increased single-mode suppression ratio was achieved.     

Crystal structure and mechanical strain in polycrystalline ferrite films on polycrystalline sapphire substrates

We have grown films of magnesium, lithium, zinc, and nickel-zinc ferrites, varying in thickness from 0.5 to 8 μm on polycrystalline sapphiresubstrates by coating the surface of the substrate with an aqueous nitric acid solution of salts of the elements which compose the ferrite. The lattice parameter of the ferrite film increases with the film thickness and becomes constant at thicknesses greater than 8 μm. We have determined the ratio of the theoretical strength limit to the macroscopic one in the film based on the change in the interplanar distanced ₂₂₀ and the lattice parameter calculated from it, under the assumption that the changeΔa(h)=a _∞=a(h) results from macroscopic stresses in the film. This ratio shows that whenh=1 μm the microstresses in the film are an order of magnitude smaller than the theoretical strength limit. At larger film thicknesses this macroscopic stress becomes even lower, and at the external surface of thick films it goes completely to zero. Pedagogical Institute, Viteb. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 30–33, October, 1996.     

Growth, polarized spectral properties, and 1.5–1.6 μm laser operation of Er:Yb:Sr3Gd2(BO3)4 crystal

An Er:Yb:Sr₃Gd₂(BO₃)₄ crystal was grown by the Czochralski method. The polarized spectral properties of the crystal were investigated, including the polarized absorption and fluorescence spectra and fluorescence decay. The fluorescence quantum efficiency of the upper laser level ⁴I_13/2 of Er³⁺ ions and the efficiency of the energy transfer from Yb³⁺ to Er³⁺ ions were calculated. End-pumped by a diode laser at 970 nm in a hemispherical cavity, a 1.6 W quasi-cw laser at 1.5–1.6 μm with a slope efficiency of 18% and an absorbed pump threshold of 5.9 W was achieved in a 1.8-mm-thick Z-cut Er:Yb:Sr₃Gd₂(BO₃)₄ crystal. This crystal has a flat and broad gain curve at 1.5–1.6 μm and so is also a potential gain medium for tunable and short pulse lasers.     

Mid-infrared laser-absorption diagnostic for vapor-phase measurements in an evaporating n-decane aerosol

A novel three-wavelength mid-infrared laser-based absorption/extinction diagnostic has been developed for simultaneous measurement of temperature and vapor-phase mole fraction in an evaporating hydrocarbon fuel aerosol (vapor and liquid droplets). The measurement technique was demonstrated for an n-decane aerosol with D ₅₀∼3 μ m in steady and shock-heated flows with a measurement bandwidth of 125 kHz. Laser wavelengths were selected from FTIR measurements of the C–H stretching band of vapor and liquid n-decane near 3.4 μm (3000 cm ⁻¹), and from modeled light scattering from droplets. Measurements were made for vapor mole fractions below 2.3 percent with errors less than 10 percent, and simultaneous temperature measurements over the range 300 K<T<900 K were made with errors less than 3 percent. The measurement technique is designed to provide accurate values of temperature and vapor mole fraction in evaporating polydispersed aerosols with small mean diameters (D ₅₀<10 μ m), where near-infrared laser-based scattering corrections are prone to error.     

The use of the platinum electrode coated with ultrathin poly(allylamine hydrochloride)/Nafion films for selective detection of hydrogen peroxide

In this paper, a novel polyelectrolyte multilayer (PEM) film-coated platinum electrode for the selective detection of H₂O₂ was presented. The PEM film was formed by the layer-by-layer assembly technique. The quartz crystal microbalance experiments showed that the thickness of the prepared Nafion layer was about 8 nm and depended on the pH of poly(allylamine hydrochloride) solution. The combination of different polyanions and polycations layers was investigated, and it is found that ploy(allylamine hydrochloride) (PAH) and Nafion composited film functioned best as a diffusion barrier toward uric acid (UA) and ascorbic acid (AA) while allowed H₂O₂ to pass through smoothly. When the platinum electrode coated with two-bilayer film, (PAH/Nafion)₂, the amperometric responses of 0.1 mM UA and 0.1 mM AA were respectively 0.008 and 0.006 μA, which were only 0.2% or less of the response of 0.1 mM H₂O₂ (4.0 μA). The linear response range of the electrode toward H₂O₂ was from 1.0 μM to 1.0 mM, and the detection limit was 0.3 μM. The electrode also displayed high operational stability and long-term storage stability.     

Two-colour HgCdTe infrared detectors operating above 200 K

The performance of dual waveband HgCdTe photodiodes fabricated using metaloorganic chemical vapour deposition operated at high temperatures is presented. The effect of additional separating layer on the quantum efficiency and cross-talk of the photodiodes is analyzed. The photodiodes with cutoff wavelengths up to 6 μm, good R₀A product, and high quantum efficiency at 200 K have been demonstrated. The temperature dependence of the differential resistance is discussed. It is shown that the multilayer heterojunction P-n-N-n-P structure operating in a simultaneous mode has better performance than a structure operating in a sequential mode.