Controllable off-plane deflection of cantilevers for multiple scanning proximity probe arrays

The presented work reports the fabrication of 4×32 arrays of fully addressable proximity probes, which are initially and controllably off-plane deflected (bent). Such a deflection is required for the simultaneous approach and scanning of all cantilevers. It is realized by deposition of the silicon cantilevers with Si₃N₄ film inducing tensile stress. ANSYS simulations are used to calculate the off-plane deflection for different thickness of the cantilever and the Si₃N₄ layer and compared with experimentally obtained values. Cantilever arrays with set bending up to 50 μm, employing LPCVD silicon nitride film with a tensile stress of 750 MPa are fabricated.