MEMS微变形镜测试技术及算法研究

介绍了基于计算机控制的频闪显微干涉测量技术,实现了对MEMS微变形镜的表面形貌、离面变形、静态电压-位移曲线和谐振频率的测量。采用频闪成像、计算机微视觉技术以及基于最小二乘曲面拟合法的亚像素定位技术实现了对平面内微位移的测量;利用频闪成像以及5步相移干涉技术实现了对干涉相位的提取,建立了适合于MEMS微变形镜特性测试的相位解缠算法,恢复了代表被测物体表面形貌的真实相位,实现了微变形镜静动态特性的测试。测试结果表明:频闪显微相移干涉测量技术具有测量速度快、精度高、易实现自动控制等特点。     

频闪剪切散斑干涉术的研究

提出了一种用于振动研究的方法——频闪剪切散斑干涉照相法。该方法由于采用了剪切镜,能得到较为精确的散斑剪切图,提高了测量的精度,是一种用于振动研究较为理想的散斑照相的新方法。讨论了频闪剪切散斑干涉术的基本原理,给出了频闪剪切散斑图的全场分析的平均光强分析的解析式,并给出了实验结果。理论和实验都表明频闪剪切散斑干涉照相法要优于时间平均剪切散斑干涉照相法。该方法在全场滤波分析时,能给出任一瞬时物体振动信息,得到清晰的、高衬比的全场干涉条纹图,是一种实用可行的方法。     

Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem

In this paper, vibration measurement and analysis of microsystems, such as micro-electro-mechanical systems (MEMS) by using stroboscopic digital speckle pattern interferometry (DSPI) is presented. Because of the speckle interferometry, the technique is suited for samples which have a rough surface or whose surfaces can be sprayed into a scattering surface. A laser speckle microinterferometer incorporated with optoelectronic devices for a stroboscopic illumination and a synchronization of the signals between excitation and stroboscopic illumination is described and demonstrated. The system can measure both out-of-plane and in-plane displacement under either a static or dynamic loading. The fundamental is explained and some applications are demonstrated.     

Synchrotron Mössbauer reflectometry using stroboscopic detection

The concept of the heterodyne/stroboscopic detection of nuclear resonance scattering of synchrotron radiation is extended to the grazing incidence geometry. Model calculations for an antiferromagnetic [⁵⁷Fe/Cr]₂₀ multilayer are shown and discussed. Principles and methodological aspects of stroboscopic synchrotron Mössbauer reflectometry are briefly reviewed.     

Holographic vibration measurement using a tv speckle interferometer with silicon target vidicon

A basic realization of a TV speckle interferometer applying a silicon target vidicon is described. The increased detectivity compared with other vidicons reduces the laser power requirements. This enables stroboscopic operation in a fairly straightforward manner with a He-Ne laser source. Time average- and stroboscopic fringe patterns for a vibrating test object are presented.     

In-plane vibration characterization of microelectromechanical systems using acousto-optic modulated partially incoherent stroboscopic imaging

A technique using acousto-optic modulated partially incoherent stroboscopic imaging for measurement of in-plane motion of microelectromechanical systems (MEMS) is presented. Vibration measurement is allowed by using flashes of the partially incoherent light source to freeze the positions of the microstructure at 12 equally spaced phases of the vibration period. The first-order diffracted beam taken out by an acousto-optic modulator (AOM) from the light beam of a laser is made partially incoherent by a rotating diffuser and then serves as the stroboscopic light source. Both the MEMS excitation signal and the flash control signal are provided by a dual-channel function generator. The main advantage of this measurement method is the absence of a stroboscopic generator and a high speed digital camera. Microscale prototypes are fabricated and tested. Quantitative estimates of the harmonic responses of the prototypes are obtained from the recorded images. The results agree with those obtained with a commercial MEMS motion analyzer^TM with relative errors less than 2%.     

微结构特性的光学测试平台

微结构是微机电系统的基本元件,其几何尺寸、运动特性、材料及力学特性直接影响微机电系统的整体性能。提出一种将计算机微视觉、米劳显微干涉、频闪成像和激光多普勒测振等技术充分融合的微结构静态和动态特性的光学测试平台,分别对微谐振器的平面和离面周期运动特性和微机械扭转镜的离面瞬时运动特性进行测试研究。实验结果表明,利用计算机微视觉和频闪成像技术能够实观微结构的平面位移、运动相位及喈振频率等周期运动参量的测试．位移的重复精度为30nm;利用显微干涉和频闪成像技术可实现微结构的离面位移及表面扭曲等周期运动参量的测试．位移的重复精度为3nm;激光多普勒测振技术具有在频域上对微结构瞬态运动进行分析的优点．是时域上周期运动测试的重要补充。     

Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm

A dynamic 3D nano-scale surface profilometer using stroboscopic white-light interferometry with novel signal deconvolution was developed to deliver dynamic surface profilometry with a measurement bandwidth of up to a MHz scale and a vertical resolution reaching 1 nm. Previous work using stroboscopic microscopic interferometry for dynamic characterization of micro-(opto)electromechanical systems (M(O)EMS) has been limited in measurement bandwidth of less than a few hundred kHz due to physical length limitation of stroboscopic light. For high-resonance mode analysis, the stroboscopic light pulse is too lengthy to capture the moving fringes from dynamic motion of the detected structure. In view of this need, a novel deconvolution algorithm using correction of the light response was developed for removing potential image blurs caused by the unavoidable vibration of the tested parts. With this advance in technology, the bandwidth of dynamic measurement can be significantly increased without sacrificing measurement accuracy. A microcantilever beam used in AFM was measured to verify the capability of the system in accurate characterization of dynamic behaviors of M(O)EMS.     

Determination of vibration phase by stroboscopic sandwich holography

This paper shows the application of the sandwich technique to the vibration analysis performed by stroboscopic hologram interferometry. The image reconstructed from the sandwich hologram replaced in its original position gives the same fringes of classic stroboscopic double exposure holography.The reconstruction with sandwich tilting allows the determination of the sign of the vibration phase by observing the distortion of the fringe pattern.     

Measuring in-plane and out-of-plane coupled motions of microstructures by stroboscopic microscopic interferometry

A stroboscopic Mirau microscopic interferometer system for measuring in-plane and out-of-plane periodic motions of microstructures is demonstrated. One full cycle of a periodic motion is divided into a number of motion phases. One sequence of interferograms with different phase shifting steps is collected at every motion phase by using stroboscopic imaging. A bright-field image can be extracted from one sequence of interferograms with the same motion phase. In-plane displacements are measured by applying an image matching method to all bright-field images, followed by a compensation for the relative positions of interferograms at the different motion phases, before calculating the phase distribution related to out-of-plane deformation. We demonstrate its capability for measuring a combination of out-of-plane deformation and in-plane displacement in a microresonator.     

频闪相移全息干涉计量

本文将相移技术应用在频闪全息干涉计量中,获得了振动物体的定量分析结果.分析了频闪光脉冲宽度对计算结果的影响,并给出了实验结果.     

Topography with synchrotron radiation

The capability of synchrotron radiation topography compared to related crystal defect imaging techniques is discussed. Recent experimental highlights in white beam, double crystal, and stroboscopic topography are reviewed. An outlook upon future experimental trends in synchrotron radiation topography is given.     

数字散斑干涉技术在振动分析中的应用

首次将相移技术应用于频闪数字散斑干涉计量中,对物体的振动进行了定量分析.实验证明,这种方法有广泛的实用价值.另外,介绍了一套自动分析系统,讨论了各参数对测量结果的影响.     

Bubble motions confined in a microspace observed with stroboscopic technique

Dynamic motions of gas bubble confined in a microspace, i.e., in a channel of a microreactor, were observed with a video microscope and stroboscopic technique using a light emitting diode operated in a pulsed mode. There are many important phenomena related to the bubble dynamics synchronized with ultrasonic wave and continued for more than a few minutes. With the stroboscopic technique, the time-expanded bubble motions synchronized with ultrasound wave and the real time background images can be simultaneously observed. A number of interesting phenomena resulting from the dynamic motions of a microbubble in a microspace were observed; nonspherical bubble oscillation, rectified diffusion, emergence of cavitation, and microstreaming of different patterns depending on the input power of ultrasound. The observation technique described in this investigation could be a convenient tool for taming the bubble under a microscope to investigate the bubble dynamics in detail.     

利用频闪结构光测量旋转叶片的三维面形

在对快速甚至高速运动物体进行研究时,需要对运动物体各个时刻的三维面形和形变量进行数字化描述。提出了一种利用频闪光作为结构照明光源,基于傅里叶变换轮廓术对旋转叶片每个时刻的三维面形和变形量进行动态测量的光学方法。使用自行设计的同步控制单元对风扇叶片旋转位置进行检测,用该检测信号同步驱动频闪结构光源的发光和图像采集系统“冻结”记录下旋转叶片表面变形条纹的瞬时图像,再运用傅里叶变换轮廓术计算出每一瞬间时刻旋转叶片的三维面形,分析这些三维面形数字化结果可以进一步得到旋转叶片的变形量。通过对家用电风扇的实验,验证了该方法的合理性和可行性。该方法可望在高速运动物体的面形和变形研究上有广泛运用。     

Structures on Josephson current-steps,bifurcation and chaos

Regions of negative differential resistance on ac-induced steps in the I-V characteristic of a Josephson junction are found to originate from competing chaotic regimes within a single locked state. The chaotic behavior is analyzed by amplitude spectra and stroboscopic maps using an analog simulation technique.     

Polarization fields and phase space densities in storage rings: Stroboscopic averaging and the ergodic theorem

A class of orbital motions with volume preserving flows and with vector fields periodic in the “time” parameter θ is defined. Spin motion coupled to the orbital dynamics is then defined, resulting in a class of spin-orbit motions which are important for storage rings. Phase space densities and polarization fields are introduced. It is important, in the context of storage rings, to understand the behavior of periodic polarization fields and phase space densities. Due to the 2π time periodicity of the spin-orbit equations of motion the polarization field, taken at a sequence of increasing time values θ,θ+2π,θ+4π,…, gives a sequence of polarization fields, called the stroboscopic sequence. We show, by using the Birkhoff ergodic theorem, that under very general conditions the Cesàro averages of that sequence converge almost everywhere on phase space to a polarization field which is 2π-periodic in time. This fulfills the main aim of this paper in that it demonstrates that the tracking algorithm for stroboscopic averaging, encoded in the program SPRINT and used in the study of spin motion in storage rings, is mathematically well-founded. The machinery developed is also shown to work for the stroboscopic average of phase space densities associated with the orbital dynamics. This yields a large family of periodic phase space densities and, as an example, a quite detailed analysis of the so-called betatron motion in a storage ring is presented.     

A modified stroboscopic method for non-linear vibration equations

A technique is developed for determining approximate periodic solutions to a class of non-linear differential equations which often arise in vibration theory. Although it is akin to the stroboscopic method of Minorsky, no topological arguments are utilized. The method is illustrated by application to a well known example and it is shown to give correct results.     

孔径旋转频闪散斑照相法测量物体的固有频率

提出了一种测量物体固有频率的新方法－－孔径旋转频闪散斑照相法。该方法能方便地测量振动物体的固有频率，具有精度高、全场显示、条纹可见度好等优点，给出了理论分析和实验结果。