共查询到19条相似文献,搜索用时 312 毫秒
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超声技术的基石——超声换能器的原理及设计 总被引:9,自引:0,他引:9
超声换能器是在超声频率范围内将交变的电信号转换成声信号或者将外界声场中的声信号转换为电信号的能量转换器件,它是超声技术中的关键器件,其性能好坏直接关系到超声应用技术的效果和使用范围.由于超声技术的应用范围很广,且超声新技术层出不穷,因而与此对应的超声换能器的种类也很多.文章对不同应用背景下多种类型超声换能器的原理及设计进行了阐述,分析了不同类型超声换能器的性能参数及设计要求,简要总结了超声换能器的性能参数测试方法,并对超声换能器的发展趋势进行了一定的分析. 相似文献
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针对不同厚度的病变组织,改变声焦域轴向长度能提高高强度聚焦超声在临床治疗过程中的安全性和有效性。基于多频超声波叠加原理,该文提出了变厚度(多频)聚焦换能器,并设计了两种类型变厚度聚焦换能器。根据瑞利积分法推导了变厚度聚焦换能器声场,计算和分析了变厚度聚焦换能器的声焦域轴向长度,并与等厚度(单频)聚焦换能器声焦域轴向长度进行对比。结果显示,变厚度聚焦换能器中心到边缘的厚度变化趋势与声焦域轴向长度变化相关,中间薄两边厚换能器声焦域轴向长度缩短,中间厚两边薄换能器声焦域轴向长度变长,且实验验证了理论的正确性。研究结果可为变厚度聚焦换能器声场研究和高强度聚焦超声的临床治疗提供参考。 相似文献
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功率超声振动系统是功率超声技术中的关键部分,其主要部分包括功率超声换能器、超声变幅杆以及超声工具头或超声辐射器。本文就功率超声换能振动系统设计中经常遇到的一些关键问题进行了简要的归纳和总结,目的在于为功率超声换能器的优化设计和性能改善提供一些有用的设计指南和解决措施。同时,对一些新的功率超声振动系统进行了介绍,并简要分析了其发展趋势和应用领域。 相似文献
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A modified sol-gel method is used to prepare PZT thick film on Pt-coated silicon substrate. A new method of vacuum filling sol-gel precursor solution is introduced to improve film quality. The effects of the filling on PZT thick film structure and ferroelectric properties are discussed. The fabrication of a high frequency transducer with the PZT film as the actuating layer is described. The performance of the transducer is measured and results show that the transducer backed by E-Solder without a matching layer has a center frequency of 103 MHz and a bandwidth of 70%. Beam profile measurements show that the transducer has an axial resolution of 9.2 microm and a lateral resolution of 33 microm. 相似文献
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Fabrication and comparison of PMN-PT single crystal, PZT and PZT-based 1-3 composite ultrasonic transducers for NDE applications 总被引:2,自引:0,他引:2
Ki-Bok Kim David K. Hsu Bongyoung Ahn Young-Gil Kim Daniel J. Barnard 《Ultrasonics》2010,50(8):790-797
This paper describes fabrication and comparison of PMN-PT single crystal, PZT, and PZT-based 1-3 composite ultrasonic transducers for NDE applications. As a front matching layer between test material (Austenite stainless steel, SUS316) and piezoelectric materials, alumina ceramics was selected. The appropriate acoustic impedance of the backing materials for each transducer was determined based on the results of KLM model simulation. Prototype ultrasonic transducers with the center frequencies of approximately 2.25 and 5 MHz for contact measurement were fabricated and compared to each other. The PMN-PT single crystal ultrasonic transducer shows considerably improved performance in sensitivity over the PZT and PZT-based 1-3 composite ultrasonic transducers. 相似文献
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Maréchal P Haumesser L Tran-Huu-Hue LP Holc J Kuscer D Lethiecq M Feuillard G 《Ultrasonics》2008,48(2):141-149
Solidly mounted integrated transducers with a Bragg cell inserted between the piezoelectric film and the substrate are investigated for high frequency ultrasonic applications. A numerically stable recursive one dimensional transmission/reflection model was used to analyze the behavior of the periodic structure. This theoretical analysis includes the study of the influence of the acoustic properties of the constitutive layer, the effect of the number of cells and their arrangement. A 35 MHz integrated transducer consisting in a PZT ceramic laid down on a Au/PZT Bragg cell deposited on a porous substrate was fabricated and characterized. Both theoretical and experimental results highlight the interest of using a periodic structure for high frequency ultrasonic applications. 相似文献
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Kiyong Choi Duck Kyun Choi Dong-Yeon Lee Jaesool Shim Sungho Ko Jae Hong Park 《Applied Physics A: Materials Science & Processing》2012,108(1):161-170
This study examines the fabrication process and mechanical properties of piezoelectric films with the substrate, which is made from silicon carbide. After depositing the PZT thick film on silicon carbide substrate and silicon substrate respectively, it was shown that silicon carbide substrate formed a stable interface with PZT thick film up to 950?°C, compared with silicon substrate. In addition, the dielectric constant of the PZT thick film sintered at 950?°C on a silicon carbide substrate was 843, and this value was about over 25 % improved value compared with that on a silicon substrate. A thick film piezoelectric micro transducer of a micro cantilever type was fabricated by using a multifunctional 3C–SiC substrate. The fabricated micro cantilever was a micro cantilever with multiple thin films on either silicon or silicon carbide substrate. The piezoelectric thick-film micro cantilever that was fabricated by using a SiC substrate showed excellent mechanical and thermal properties. The piezoelectric micro cantilever on the SiC substrate shows an excellent sensitivity towards the change of mass compared with the piezoelectric micro cantilever on the Si substrate. 相似文献
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This work reports the potential use of high-overtone self-focusing acoustic transducers for high-frequency ultrasonic Doppler. By using harmonic frequencies of a thick bulk Lead Zirconate Titanate (PZT) transducer with a novel air-reflector Fresnel lens, we obtained strong ultrasound signals at 60 MHz (3rd harmonic) and 100 MHz (5th harmonic). Both experimental and theoretical analysis has demonstrated that the transducers can be applied to Doppler systems with high frequencies up to 100 MHz. 相似文献
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电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势,已经成为一种重要的新型超声换能器。该文针对图像声呐系统对新型超声换能器的迫切需求,提出了一种电容式微机械超声换能器结构和参数,并利用硅微加工技术制备出了该换能器,最后对其主要性能参数进行了测试和分析。测试结果表明该换能器具有发射和接收超声波的功能,中心工作频率为1.965 MHz,6 dB相对带宽达到109.4%,在1 MHz、2 MHz和3 MHz频率时的接收灵敏度分别为-218.29 d B、-219.39 dB和-218.11 dB。该文研制的电容式微机械超声换能器显示出了优秀的宽频带特性,且工作频率和接收灵敏度性能均基本满足了高频图像声呐系统的需求。 相似文献
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Zhihong Wang Jianmin Miao Weiguang Zhu 《Applied Physics A: Materials Science & Processing》2008,91(1):107-117
This paper reports on the design, fabrication, and characterization of diaphragm-type piezoelectric micromachined ultrasonic
transducer (pMUT) and arrays. A combination of piezoelectric composite thick film techniques and silicon micromachining has
been proven to be a promising approach for a batch production of pMUTs, especially pMUT transmitter arrays for ultrasound
radiation. In this paper, some important issues related to the pMUT element design and micromachining processes are addressed.
Thanks to the well-developed processing technology, pMUTs and arrays operating at different resonance frequencies by dimension
variation have been successfully fabricated with a high yield for possible mass manufacturing. The characterization of piezoelectric
composite thick film will be briefly reported. The performance of the prototype devices has been characterized in terms of
vibration modes, dependency of the resonance frequency on bias voltage, nonlinearity, electromechanical coupling efficiency,
equivalent circuit, output sound pressure level and directivity of a two-dimensional pMUT array.
PACS 85.50.-n; 85.85.+j 相似文献
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MEMS(micro-electromechanical systems)超声换能器(MEMS ultrasonic transducer,简称MUT)是采用微电子和微机械加工技术制作的新型超声换能器。与传统超声换能器相比,MUT具有体积小、重量轻、成本低、功耗低、可靠性高、频率控制灵活、频带宽、灵敏度高以及易于与电路集成和实现智能化等特点。是超声换能器的重要的研究方向之一。MUT的研究主要包括压电MUT(piezoelectric MUT,简称PMUT)和电容MUT(capacitiveMUT,简称CMUT)两个方面。本文概述了PMUT研究的发展进程和研究成果,展望了PMUT的研究和应用前景。 相似文献