PZT厚膜及高频超声换能器的研究

近年来,基于PZT厚膜的超声换能器研究受到了广泛的重视。本文综述了PZT厚膜制备技术的发展情况,简要介绍了水下声纳和医用超声领域中PZT厚膜型高频超声换能器的应用研制进展。     

夹心复合材料宽带超声换能器的研制

本文采用高频夹心PZT(3-3)复合材料、单层前匹配和高损耗声阻抗背村全匹配的结构,研制出窄脉冲宽带超声换能器.所研制的中心频率为1MHz的换能器,在水负载中有高传输效率,得到声压脉冲长仅一个周期的接收波形.对铝合金和灰岩等较低声阻抗负载,也得到了一个周期脉冲的接收波形.     

共晶键合与减薄技术的压电能量采集器（英）

采用微硅 锆钛酸铅（Si-PZT）悬臂梁结构并在悬臂梁末端附加镍质量块,构成可以工作于低频环境（小于1 000 Hz）的微压电能量采集器,一种利用压电效应将环境振动能转换为电能的器件。利用金薄膜作为中间层的共晶键合技术和PZT研磨减薄技术制备了微压电悬臂梁结构,PZT减薄实验最好结果为减薄至8 m。镍质量块（2 mm2 mm0.6 mm）采用微电铸工艺制备。通过对硅片与块材PZT的共晶键合工艺与PZT减薄技术的研究,制备出总厚度约为71 m的Si-PZT悬臂梁结构,其中硅梁厚约为47 m,PZT梁厚约为24 m。制备的微压电振动能量采集器样品的测试结果表明:在谐振频率为950 Hz,1.0g加速度激励条件下,其交流输出峰值电压可达958 mV。     

基于键合图法的叶片泵启动特性仿真

采用功率键合图法对叶片泵启动过程进行动态特性仿真,结合叶片泵系统内部的能量供给、传递、转化、消耗等要素建立描述叶片泵启动过程的键合图,并基于键合图建立状态方程组进而求解。介绍了叶片泵启动试验装置和试验方法,给出了试验结果,并将数值仿真的结果与试验结果进行比较。仿真结果和试验结果在启动过程整体趋势上以及各参数变化过程上都能够较好的吻合,说明基于键合图法的数值仿真能较好预测叶片泵启动过程的动态特性。     

检测超声换能器用1-3型压电PZT/环氧复合材料及换能器的研究

本文介绍了一种制做1—3型压电 PZT/环氧复合材料的新方法.此方法采用了PZT小柱非周期性均匀分布,有效地消除了由于PZT小柱周期性分布而产生的有害横向结构共振模式,获得了振动模式较单纯的1—3型压电复合材料晶片,研制出宽带(低Q)换能器及高斯型换能器.     

键合界面阻抗对VCSEL的电、热学特性的影响

采用一电阻层来表征键合界面处的阻抗.通过求泊松方程、电流密度方程、载流子扩散方程以及有源层结压降方程自洽解的方法，计算了VCSEL的电势分布，进而求解热传导方程，得到VCSEL的温度分布.详细分析了键合界面阻抗对晶片键合结构垂直腔面发射激光器内部的电势分布、温度分布以及有源层中的注入电流密度、载流子浓度、结压降和温度沿径向分布的影响.     

1-3型压电复合材料

1－3型压电复合材料是目前研究和应用得比较广泛的一种压电材料．本文简述了这种压电复合材料的理论模型、制作方法和实验结果；指出除了圆形PZT压电材料所具有的径向模和厚度模以外，1－3型压电复合材料还具有横向结构模．本文介绍了这种压电复合材料的特点，如低声阻抗、低介电常数、高静水压压电常数以及PZT相分布的可控制性等．这些特点有利于改善压电复合材料换能器的时间响应和空间响应．     

夹心复合PZT材料及其应用

本文主要描述致密-多孔-致密夹心复合PZT材料及其在窄脉冲超声换能器方面的应用。通过两类六种不同夹心复合材料的换能器实验表明,未充硅橡胶的夹心复合材料是一种制作窄脉冲超声换能器的新型换能材料。     

采用系统函数分析换能器阻抗测量方法的性能

在分析传统三电压法测量阻抗优缺点的基础上,提出了一种发射换能器阻抗测量方法,以解决海上单模激发现场检修发射相控阵一致性的难题。该方法仍利用三电压法电路结构,但修改了测量参数。首先介绍了基于系统函数的换能器阻抗测量方法的原理,然后报道了当串联电阻选取不同数值时换能器阻抗测量的结果以及它们与高精度阻抗分析仪测量结果的比较,最后进行误差分析和测量曲线的等效电路参数拟合。通过对它的性能分析可以看到,在保证采样精度条件下,选择阻值相对换能器阻抗偏小的电阻值,其测量精度完全能达到高精度阻抗分析仪的精度。最后,通过对实验测量阻抗曲线的等效电路参数的最小二乘拟合表明,其拟合电参数准确,能应用到换能器匹配网络的设计。      

钛酸铋钠钡系超声用压电陶瓷新材料

目前,国内外使用的超声换能器材料大多为锆钛酸铅(简称PZT)压电陶瓷,为了获得更高的测量精度(如测厚)和更清晰的图象(如B型超声诊断仪),对超声换能器材料提出了更高的要求.PZT类陶瓷由于径向振动机电耦合系数(Kp)和介电系数 太大和频率常数(Nt)较低,应用时不太令人满意.此外,PZT类陶瓷都含有70%左右的PbO,铅的毒性引起公害,而且由于PbO在烧结过程中的挥发使工艺复杂.所以到六十年代中期,国际上开始了非铅系统压电陶瓷的探索.19乃年,日本电子材料工业会还专门组织了对压电陶瓷无铅化的调查,可见探索无铅压电陶瓷新材料的重要性. 从197…     

Electromechanical impedance measurement from large structures using a dual piezoelectric transducer

This study develops a new electromechanical (EM) impedance measurement technique specifically for continuous monitoring of large structures. Conventionally, a single surface-mounted lead zirconate titanate (PZT) transducer is often used to measure the EM impedance of a coupled PZT-structure system for damage diagnosis. However, when the target structure is massive, the impedance measurement becomes challenging. In this study, a dual piezoelectric transducer, composed of two separate but concentric PZT segments, is used for effective measurement of the EM impedance from large-scale structures. The impedance measurement using the dual PZT is theoretically formulated and numerically verified. Then, a series of experiments are carried out on a laboratory-size specimen and full-scale bridge and building structures. The experimental results reveal that the proposed technique successfully measures the EM impedance signals from massive structures with a high signal-to-noise ratio (SNR) and good repeatability even when the conventional techniques fail to do so. At the same time, the proposed technique allows low-cost and fast measurement of impedance signals.     

Determination of acoustic impedances of multi matching layers for narrowband ultrasonic airborne transducers at frequencies <2.5 MHz - Application of a genetic algorithm

The effective ultrasonic energy radiation into the air of piezoelectric transducers requires using multilayer matching systems with accurately selected acoustic impedances and the thickness of particular layers. One major problem of ultrasonic transducers, radiating acoustic energy into air, is to find the proper acoustic impedances of one or more matching layers. This work aims at developing an original solution to the acoustic impedance mismatch between transducer and air. If the acoustic impedance defences between transducer and air be more, then finding best matching layer(s) is harder. Therefore we consider PZT (lead zirconate titanate piezo electric) transducer and air that has huge acoustic impedance deference. The vibration source energy (PZT), which is used to generate the incident wave, consumes a part of the mechanical energy and converts it to an electrical one in theoretical calculation. After calculating matching layers, we consider the energy source as layer to design a transducer. However, this part of the mechanical energy will be neglected during the mathematical work. This approximation is correct only if the transducer is open-circuit. Since the possibilities of choosing material with required acoustic impedance are limited (the counted values cannot always be realized and applied in practice) it is necessary to correct the differences between theoretical values and the possibilities of practical application of given acoustic impedances. Such a correction can be done by manipulating other parameters of matching layers (e.g. by changing their thickness). The efficiency of the energy transmission from the piezoceramic transducer through different layers with different thickness and different attenuation enabling a compensation of non-ideal real values by changing their thickness was computer analyzed (base on genetic algorithm). Firstly, three theoretical solutions were investigated. Namely, Chebyshev, Desilets and Souquet theories. However, the obtained acoustic impedances do not necessarily correspond to a nowadays available material. Consequently, the values of the acoustic impedances are switched to the nearest values in a large material database. The switched values of the acoustic impedances do not generally give efficient transmission coefficients. Therefore, we proposed, in a second step, the use of a genetic algorithm (GA) to select the best acoustic impedances for matching layers from the material database for a narrow band ultrasonic transducer that work at frequency below the 2.5 MHz by considering attenuation. However this bank is rich, the results get better. So the accuracy of the propose method increase by using a lot of materials with exact data for acoustic impedance and their attenuation, especially in high frequency. This yields highly more efficient transmission coefficient. In fact by using increasing number of layer we can increase our chance to find the best sets of materials with valuable both in acoustic impedance and low attenuation. Precisely, the transmission coefficient is almost equal to unity for the all studied cases. Finally the effect of thickness on transmission coefficient is investigated for different layers. The results showed that the transmission coefficient for air media is a function of thickness and sensitive to it even for small variation in thickness. In fact, the sensitivity increases when the differences of acoustic impedances to be high (difference between PZT and air).     

Fabrication and comparison of PMN-PT single crystal, PZT and PZT-based 1-3 composite ultrasonic transducers for NDE applications

This paper describes fabrication and comparison of PMN-PT single crystal, PZT, and PZT-based 1-3 composite ultrasonic transducers for NDE applications. As a front matching layer between test material (Austenite stainless steel, SUS316) and piezoelectric materials, alumina ceramics was selected. The appropriate acoustic impedance of the backing materials for each transducer was determined based on the results of KLM model simulation. Prototype ultrasonic transducers with the center frequencies of approximately 2.25 and 5 MHz for contact measurement were fabricated and compared to each other. The PMN-PT single crystal ultrasonic transducer shows considerably improved performance in sensitivity over the PZT and PZT-based 1-3 composite ultrasonic transducers.     

Advantage analysis of PMN-PT material for free-flooded ring transducers

The acoustic radiation characteristics of free-flooded ring transducers made of PZT4 and PMN-PT materials are calculated and compared.First,the theoretical formulae for free-flooded ring transducers are studied.The resonant frequencies of a transducer made of PZT4 and PMN-PT materials are calculated.Then,the transmitting voltage responses of the free-flooded ring transducers are calculated using the finite element method.Finally,the acoustic radiation characteristics of the free-flooded ring transducers are calculated using the boundary element method.The calculated results show that the resonant frequencies of the free-flooded ring transducer made of PMN-PT are greatly reduced compared with those made of PZT4 with the same size.The transmitting voltage response of the transducer made of PMN-PT is much higher than that of the transducer made of PZT4.The calculated 3-dB beamwidth of the acoustic radiated far-field directivity of the free-flooded ring transducer made of PZT4 at the resonant frequency 1900 Hz is 63.6 and that of the transducer made of PMN-PT at the resonant frequency 1000 Hz is 64.6.The comparison results show that the free-flooded ring transducer made of PMN-PT material has many advantages over that made of PZT4.The PMN-PT is a promising material for improving the performance of free-flooded ring transducers.     

High frequency broadband PZT thick film ultrasonic transducers for medical imaging applications

A modified sol-gel method is used to prepare PZT thick film on Pt-coated silicon substrate. A new method of vacuum filling sol-gel precursor solution is introduced to improve film quality. The effects of the filling on PZT thick film structure and ferroelectric properties are discussed. The fabrication of a high frequency transducer with the PZT film as the actuating layer is described. The performance of the transducer is measured and results show that the transducer backed by E-Solder without a matching layer has a center frequency of 103 MHz and a bandwidth of 70%. Beam profile measurements show that the transducer has an axial resolution of 9.2 microm and a lateral resolution of 33 microm.     

An electro-mechanical impedance model of a cracked composite beam with adhesively bonded piezoelectric patches

A model of a laminated composite beam including multiple non-propagating part-through surface cracks as well as installed PZT transducers is presented based on the method of reverberation-ray matrix (MRRM) in this paper. Toward determining the local flexibility characteristics induced by the individual cracks, the concept of the massless rotational spring is applied. A Timoshenko beam theory is then used to simulate the behavior of the composite beam with open cracks. As a result, transverse shear and rotatory inertia effects are included in the model. Only one-dimensional axial vibration of the PZT wafer is considered and the imperfect interfacial bonding between PZT patches and the host beam is further investigated based on a Kelvin-type viscoelastic model. Then, an accurate electro-mechanical impedance (EMI) model can be established for crack detection in laminated beams. In this model, the effects of various parameters such as the ply-angle, fibre volume fraction, crack depth and position on the EMI signatures are highlighted. Furthermore, comparison with existent numerical results is presented to validate the present analysis.     

Lead-free transducer for non-destructive evaluation

Lead-free piezoelectric ceramics with the formula 0.90(Bi_0.5Na_0.5)TiO₃ - 0.05(Bi_0.5K_0.5)TiO₃ - 0.015(Bi_0.5Li_0.5)TiO₃-0.05BaTiO₃ (abbreviated as BNKLBT-1.5) were prepared by a conventional mixed-oxide method. A disc of this material was fabricated and used to construct an ultrasonic transducer suitable for use in non-destructive evaluation (NDE). Using a laser vibrometer, it was observed that both BNKLBT and PZT exhibited a surface displacement pattern indicative of coupling of the radial mode vibration with the thickness mode vibration. This is consistent with the measurements of electrical impedance vs frequency which showed that for both discs a strong radial mode with many harmonics was clearly observed and many (usually undesired) modes existed near the thickness mode resonance frequency. The discs were mounted in stainless steel housings with appropriate electrical connections to form transducers. Tungsten/epoxy backing was incorporated to provide a very short ring-down time, a characteristic required for many NDE applications. The characteristics of the BNKLBT transducer were quite similar to that of a PZT transducer of similar structure, showing that this lead-free material has the potential to replace PZT in transducers for NDE applications. PACS 43.20.Tb; 43.20.Ye; 43.35.Zc; 43.35.Yb; 43.38.Ar; 43.35.Fx     

Miniature piezoelectric conical transducer: fabrication, evaluation and application

This paper reports a new type miniature-conical transducer for acoustic emission measurements. The transducer follows the basic idea and structure of a conventional NBS conical transducer, but is much compact in size and easier to use. The improvements are made possible by introducing an excimer laser micromachining method for fabricating smaller PZT conical elements, which play a key role in the transducer. Conical PZT elements with contact size less then 300 microm are laser-machined and the miniature-conical transducers are constructed. Standard quantitative acoustic emission testing is performed on a plate using the fabricated transducers and good results are observed. The transducers can be very useful in many applications involving quantitative measurements of transient elastic waves.     

电容式微超声波换能器的设计与电容值测试*

本文设计的微电容超声波换能器(CMUT)是由电容阵列组成的超声波传感器,主要是利用电容的改变来实现能量的转换。是基于硅硅键合技术的MEMS电容式超声传感器,制作的传感器误差小,并且工艺流程简单且能进行量产。在利用E4990A阻抗分析仪对传感器进行C—V测试分析而得出其电容的实际值与理论值的误差仅为1.6%。并且利用该仪器测试传感器电容在工作电压下随频率的变化,得出其在工作电压下,频率为400K的时候电容值为617.67PF,为对传感器进行理论计算提供了重要支撑,并且为后续转换电路的设计提供了数据支撑。