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1.
Zinc sulfide nano layers were deposited on glass substrates at 300 K by physical vapor deposition method, under high vacuum conditions and different deposition angles. Thickness of the layers were measured 73 nm, by quartz crystal method. Optical reflectance and transmittance of the layers were measured in the wave length of 300?C1100 nm. Optical constants were calculated by Kramers-Kronig relations. The influence of deposition angle in optical properties of ZnS nano layers are investigated. By using Generalized Gradient Approximations in context of plane wave pseudo-potentials (norm conserving and Ultrasoft) and full-potential linearized augmented plane wave methods, Band structure calculated and compared with experimental results. Possible energy transitions are also reported.  相似文献   

2.
Titanium dioxide films of different thicknesses, ranging from 10 to 110 nm were deposited on glass substrate, at room temperature by physical vapor deposition method. Topography, roughness and crystallography of produced layers were determined by AFM and XRD methods respectively. Optical properties were measured by transmission spectroscopy in the spectral range of 300–1100 nm wave length range. The optical constants were obtained using Kramers-Kronig analysis of the reflectivity curves. It was found that film thickness plays an important role on the nanostructures as well as optical properties of layers and cause significant variations in behavior of thin titanium oxide films.  相似文献   

3.
Tantalum oxide nano layers were deposition on glass substrate with different thicknesses (30, 60, 90 and 120 nm) in vertical deposition angle and high vacuum condition at room temperature by using electron gun evaporation method. There were no specific peaks in XRD patterns because of amorphous nature of these layers. AFM results show that surface roughness is reduced by increasing the thickness of the layers. FESEM images show nucleation, growth, accession and integration as interconnected islands in the lower thickness and re-nucleation at higher thicknesses (120 nm). We studied Raman spectra of the produced Ta2O5 amorphous layers. The calculated optical coefficients by using Kramers-Kronig relations show that with increasing film thickness, dielectric properties, absorption coefficient and band gap energy have increased.  相似文献   

4.
赵培  刘定权  徐晓峰  张凤山 《光子学报》2008,37(12):2482-2485
为了研究制备条件对射频溅射ZnS薄膜光学常量和微结构的影响,在浮法玻璃上制备了不同溅射气压、溅射功率和溅射温度的ZnS薄膜,利用紫外可见近红外分光光度计在300~2 500 nm的波长范围内测量了薄膜的透射和反射光谱,并通过光谱拟和计算出ZnS薄膜的光学常量以及禁带宽度.通过X射线衍射分析了薄膜的微结构随溅射温度的改变.研究结果表明,随着制备条件的不同,ZnS薄膜的光学常量和微结构会发生变化.  相似文献   

5.
Thin films derived from linalyl acetate were fabricated using the Radio Frequency (RF) plasma polymerisation technique between RF power levels of 10 and 75 W. The optical properties of the films were investigated using spectroscopic ellipsometry and UV-vis spectroscopy between 200 and 1000 nm. An optical band gap of approximately 3 eV for all power levels was determined from Tauc plots. The surface morphology and hardness of the material were studied using AFM and nano-indentation respectively to determine the effect of RF power on the thin film properties. Smooth surfaces with an average roughness of approximately 0.2 nm with consistent morphology were obtained across all power levels, while hardness demonstrated a linearly increasing dependence on RF deposition power, with values ranging between 0.29 and 0.44 GPa. These studies indicate the ability to tailor film characteristics by varying the RF deposition power, and the potential for the films to be used within electronic devices as encapsulation layers, insulating layers, or as semiconducting layers with the introduction of charge carriers to the chemical structure of the material.  相似文献   

6.
Zinc oxide (ZnO) thin films were deposited on a polycrystalline (poly) 3C-SiC buffer layer using RF magnetron sputtering and a sol-gel method. The post-deposition annealing was performed on ZnO thin films prepared using both methods. The formation of ZnO piezoelectric thin films with less residual stress was due to a close lattice mismatch of the ZnO and SiC layers as obtained by the sputtering method. Nanocrystalline, porous ZnO film prepared using the sol-gel method showed strong ultraviolet UV emission at a wavelength of 380 nm. The 3C-SiC buffer layer improved the optical and piezoelectric properties of the ZnO film produced by the two deposition methods. Moreover, the different structures of the ZnO films on the 3C-SiC intermediate layer caused by the different deposition techniques were also considered and discussed.  相似文献   

7.
Copper nano-layers with different incident angles as vertical, 20 and 30 degrees, same 73.3 nm thicknesses, and same deposition rate, were deposited on glass substrates, at 373K temperature, under UHV conditions. Their nano-structures were determined by AFM and XRD methods. Their optical properties were measured by spectrophotometry in the spectral range of 300–1100 nm. Kramers–Kronig relations were used for the analysis of the reflectivity curves of Cu films to obtain the optical constants of the nano layers. Different incident angles show important effects on both structural and optical properties. The effective medium approximation was employed to establish the relation between structure zone model (SZM) and EMA predictions. By increasing incidence angle the separation of metallic grains increases, hence the volume fraction of voids increases. That is in agreement with AFM analysis. The predictions of Drude free-electron theory are compared with experimental results for dielectric functions of these nano layers. There is a good agreement between our optical results and Hangman's optical results for a bulk standard Cu sample.  相似文献   

8.
Transparent and conductive tin-doped indium oxide (ITO) films have been prepared by rf sputtering in an Ar and Ar+O2 gas mixture, both with and without additional substrate heating. The influence of both deposition conditions and post-annealing treatment on optical, electrical, structural and microstructural properties of the ITO films has been investigated. The optical constants have been calculated in the range 320–2500 nm using a combination of several theoretical models. A schematic diagram for the film properties change versus composition has been proposed in terms of a generalized parameter characterising the energy efficiency of the film formation. The deposition conditions and the optical and electrical properties of the films have been optimized with respect to the requirements for their application in art protection coatings. PACS 78.66-w; 68.55.Jk; 81.15.Cd; 81.40-z  相似文献   

9.
沉积温度对热舟蒸发MgF2薄膜性能的影响   总被引:1,自引:0,他引:1       下载免费PDF全文
 采用热舟蒸发方法沉积了氟化镁(MgF2)材料的单层膜,沉积温度从200 ℃上升到350 ℃,间隔为50 ℃。测量了样品的透射率和反射率光谱曲线,进行了表面粗糙度的标定,并在此基础上进行了光学损耗及散射损耗的计算。同时对355 nm波长处的激光诱导损伤阈值进行了测量。结果表明:随着沉积温度的升高,光学损耗增加;在短波长范围散射损耗在光学损耗中所占比例很小,光学损耗的增加主要由吸收损耗引起;在355 nm波长处的损伤阈值变化与吸收损耗的变化趋势相关,损伤机制主要是吸收起主导作用。样品的微缺陷密度也是影响损伤阈值的一个重要因素,损伤阈值随缺陷密度的增加而降低。  相似文献   

10.
We report the preparation of planar 15-layer dielectric mirrors by a thermal evaporation of alternating high refractive index contrast amorphous chalcogenide Sb-Se and Ge-S layers, exhibiting a high-reflection band around 1.55 μm. The layer deposition quality and the thickness accuracy of such prepared chalcogenide multilayers were then checked using transmission electron microscopy. The layer thickness deviation of chalcogenide layers did not exceed ∼7 nm in comparison with the desired thicknesses. The width of Sb-Se/Ge-S layer boundary was approximately ∼3 nm, which is in good agreement with the surface roughness values of thermally evaporated Sb-Se and Ge-S single layers. The optical properties of the prepared 15-layer dielectric mirrors were consistent in temperature range of 20-120 °C; however, at higher temperatures there started apparent structural changes of Sb-Se films, which were followed by their crystallization. Excellent optical properties of chalcogenide materials in the infrared range make them interesting for applications, e.g., in optics and photonics.  相似文献   

11.
ZnO thin films with thikness d = 100 nm were deposited onto different substrates such as glass, kapton, and silicon by radio frequency magnetron sputtering. The structural analyses of the films indicate they are polycrystalline and have a wurtzite (hexagonal) structure.The ZnO layer deposited on kapton substrate shows a stronger orientation of the crystallites with (0 0 2) plane parallel to the substrate surface, as compared with the other two samples of ZnO deposited on glass and silicon, respectively.All three layers have nanometer-scale values for roughness, namely 1.7 nm for ZnO/glass, 2.4 nm for ZnO/silicon, and 6.8 nm for ZnO/kapton. The higher value for the ZnO layer deposited on kapton substrate makes this sample suitable for solar cells applications. Transmission spectra of these thin films are strongly influenced by deposition conditions. With our deposition conditions the transparent conducting ZnO layer has a good transmission (78-88%) in VIS and NIR domains. The values of the energy gap calculated from the absorption spectra are 3.23 eV for ZnO sample deposited onto glass substrate and 3.30 eV for the ZnO sample deposited onto kapton polymer foil substrate. The influence of deposition arrangement and oxidation conditions on the structural, morphological, and optical properties of the ZnO films is discussed in the present paper.  相似文献   

12.
Tin oxide (SnO2) thin films have been grown on glass substrates using atmospheric pressure chemical vapour deposition (APCVD) method. During the deposition, the substrate temperature was kept at 400°C–500°C. The structural properties, surface morphology and chemical composition of the deposited film were studied by X-ray diffraction (XRD), scanning electron microscope (SEM) and Rutherford back scattering (RBS) spectrum. XRD pattern showed that the preferred orientation was (110) having tetragonal structure. The optical properties of the films were studied by measuring the transmittance, absorbance and reflectance spectra between λ = 254 nm to 1400 nm and the optical constants were calculated. Typical SnO2 film transmits ∼ 94% of visible light. The electrical properties of the films were studied using four-probe method and Hall-voltage measurement experiment. The films showed room temperature conductivity in the range 1.08 × 102 to 1.69 × 102 Ω−1cm−1.  相似文献   

13.
Tin oxide (SnO2) is an important oxide for efficient dielectrics, catalysis, sensor devices, electrodes and transparent conducting coating oxide technologies. SnO2 thin film is widely used in glass applications due to its low infra-red heat emissivity. In this work, the SnO2 electronic band-edge structure and optical properties are studied employing a first-principle and fully relativistic full-potential linearized augmented plane wave (FPLAPW) method within the local density approximation (LDA). The optical band-edge absorption α(ω) of intrinsic SnO2 is investigated experimentally by transmission spectroscopy measurements and their roughness in the light of the atomic force microscopy (AFM) measurements. The sample films were prepared by spray pyrolysis deposition method onto glass substrate considering different thickness layers. We found for SnO2 qualitatively good agreement of the calculated optical band-gap energy as well as the optical absorption with the experimental results.  相似文献   

14.
Silver films were deposited on glass substrates under different deposition conditions, i.e. different film thicknesses, deposition rates and deposition angles. Their optical properties were measured by spectrophotometry in the spectral range of 185–3300 nm. The Kramers–Kronig method was used to analyze the reflectivity curves of the silver films to obtain their optical constants. The influence of substrate temperature on the microstructure of thin metallic films, the structure zone model (SZM), is well established, whereas there has been some previous work on the influence of film thickness and morphology, deposition rate and deposition angle on the microstructure and morphology of thin films. An effective medium approximation (EMA) analysis was used to establish the relationship between the atomic force microscopy results, SZM predictions and EMA results, and hence the optical properties of silver thin films. The predictions of the Drude free-electron theory are compared with experimental results for dielectric functions of Ag films produced under different deposition conditions. The real part of the dielectric constant increases with film thickness and decreases with increasing deposition rate and with increasing incidence angle, whereas the imaginary part of the dielectric constant decreases with increasing film thickness and deposition rate and with decreasing incidence angle over the whole energy range measured, including the interaband and interband regions.  相似文献   

15.
吕起鹏  邓淞文  张绍骞  公发全  李刚 《中国物理 B》2017,26(5):57801-057801
Multi-layer optical coatings with complex spectrum requirements, such as multi-band pass filters, notch filters, and ultra-broadband antireflection coating, which usually contain very thin layers and sensitive layers, are difficult to be fabricated using a quartz crystal monitoring method or a single wavelength optical monitoring system(SWLOMS). In this paper, a broadband antireflection(AR) coating applied in the wavelength range from 800 nm to 1800 nm was designed and deposited by ion beam sputtering(IBS). Ta_2O_5 and Si O_2 were chosen as high and low refractive index coating materials,respectively. The optimized coating structure contains 9 non-quarter-wave(QW) layers totally with ultra-thin layers and sensitive layers in this coating stack. In order to obtain high transmittance, it is very important to realize the thickness accurate control on these thin layers and sensitive layers. A broadband optical monitoring mixed with time monitoring strategy was successfully used to control the layer thickness during the deposition process. At last, the measured transmittance of AR coating is quite close to the theoretical value. A 0.6% variation in short wavelength edge across the central 180 mm diameter is demonstrated. A spectrum shift of less than 0.5% for 2 continuous runs is also presented.  相似文献   

16.
李悰  张培  姜利英  陈青华  闫艳霞  姜素霞 《发光学报》2016,37(10):1217-1222
采用等离子体增强化学气相沉积和后退火的方法制备了纳米锗/氮化硅(nc-Ge/SiN_x)多层薄膜。借助Raman光谱仪对其微结构进行表征,测得样品的晶化率大于46%。由样品的光吸收谱可知,nc-Ge的尺寸越小,其光学带隙越大。利用Z扫描技术对样品的非线性光学特性进行研究,以波长为1 064 nm、脉宽为25 ps的锁模激光作为激发光,测得样品的非线性折射率系数在10~(-10)cm~2/W数量级。实验结果表明,通过改变nc-Ge的尺寸可以使材料的非线性光学折射率由自散焦转变为自聚焦特性,而负的非线性折射率系数可归因于两步吸收产生的自由载流子散射效应。当激发光强增大时,在锗层厚度为6 nm的多层膜中同时存在两步吸收过程和饱和吸收过程。两种非线性光学吸收过程之间的竞争是样品呈现不同非线性光学特性的主要原因。  相似文献   

17.
田芃  黄黎蓉  费淑萍  余奕  潘彬  徐巍  黄德修 《物理学报》2010,59(8):5738-5742
利用金属有机化合物气相沉积设备生长了不同盖层结构的InAs/GaAs量子点,采用原子力显微镜和光致发光光谱仪对量子点的结构和光学性质进行了研究.量子点层之间的盖层由一个低温层和一个高温层组成.对不同材料结构的低温盖层的对比研究表明,In组分渐变的InGaAs低温盖层有利于改善量子点均匀性、减少结合岛数目、提高光致发光强度;当组分渐变InGaAs低温盖层厚度由6.8 nm增加到12 nm,发光波长从1256.0 nm红移到1314.4 nm.另外,还对不同材料结构的高温盖层进行了对比分析,发现高温盖层采用In组分渐变的InGaAs材料有利于光致发光谱强度的提高. 关键词: 半导体量子点 盖层 组分渐变  相似文献   

18.
We used a sensitive optical method to study the magnetic phase transition of antiferromagnetic MnS layers. The method is applicable for very small numbers of spins, e.g., thin single layers. We studied the optical and magnetic properties of MnS layers using the internal optical transition of the manganese 3d-shell. The temperature dependence of the Mn-emission exhibits a pronounced minimum revealing the para- to anti-ferromagnetic phase transition. The MnS layers were grown by molecular beam epitaxy, embedded between diamagnetic ZnSe cladding layers on a (100)-GaAs substrate. It was found that the Néel-temperature itself is influenced by the biaxial strain and can be changed in an external magnetic field in case of quasi 2D MnS-layers. The phase diagram reveals a weak Ising like anisotropic contribution in case of a 1.8 nm thin layer, whereas a 8.6 nm thick layer behaves still like an ideal isotropic Heisenberg system.  相似文献   

19.
陈城钊  郑元宇  黄诗浩  李成  赖虹凯  陈松岩 《物理学报》2012,61(7):78104-078104
利用超高真空化学气相淀积系统, 基于低温缓冲层和插入应变超晶格的方法, 在Si(100)衬底上外延出厚度约为880 nm的纯Ge层. 采用X射线双晶衍射、高分辨透射电镜、原子力显微镜和光致发光谱分别表征了其结构及光学性质. 测试结果显示外延Ge的X射线双晶衍射曲线半高宽为273", 表面均方根粗糙度为0.24 nm, 位错密度约为1.5×106 cm2. 在室温下观测到外延Ge的直接带跃迁光致发光, 发光峰值位于1540 nm. 表明生长的Si基Ge材料具有良好的结晶质量, 可望在Si基光电子器件中得到应用.  相似文献   

20.
刘欢  徐德刚  姚建铨 《物理学报》2008,57(9):5662-5669
基于非线性光学频率变换理论,采用已报道的利用非线性光学差频方法产生可调谐太赫兹波的实验条件作为理论分析的实验模型,计算模拟出在不同相位匹配条件下,GaSe和ZnGeP2晶体差频的相位匹配角、走离角、允许角和有效非线性系数,并对计算结果进行了分析比较,总结出对应输出不同太赫兹波长的最佳相位匹配方式.计算结果为利用非线性晶体差频产生可调谐太赫兹辐射的实验研究提供深入和全面的理论基础. 关键词: 太赫兹波 GaSe晶体 2晶体')" href="#">ZnGeP2晶体 差频  相似文献   

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