Impact of an extended source in laser ablation using pulsed digital holographic interferometry and modelling

Pulsed digital holographic interferometry has been used to study the effect of the laser spot diameter on the shock wave generated in the ablation process of an Nd:YAG laser pulse on a Zn target under atmospheric pressure. For different laser spot diameters and time delays, the propagation of the expanding vapour and of the shock wave were recorded by intensity maps calculated using the recorded digital holograms. From the latter, the phase maps, the refractive index and the density field can be derived. A model was developed that approaches the density distribution, in particular the ellipsoidal expansion characteristics. The induced shock wave has an ellipsoid shape that approaches a sphere for decreasing spot diameter. The ellipsoidal shock waves have almost the same centre offset towards the laser beam and the same aspect ratio for different time steps. The model facilitates the derivation of the particle velocity field. The method provides valuable quantitative results that are discussed, in particular in comparison with the simpler point source explosion theory.     

Femtosecond and nanosecond laser damage thresholds of doped and undoped triazenepolymer thin films

The influence of pulse duration on the laser-induced damage in undoped or infrared-absorbing-dye doped thin triazenepolymer films on glass substrates has been investigated for single, near-infrared (800 nm) Ti:sapphire laser pulses with durations ranging from 130 fs up to 540 fs and complementarily for infrared (1064 nm) Nd:YAG ns-laser single-pulse irradiation. The triazenepolymer material has been developed for high resolution ablation with irradiation at 308 nm. Post-irradiation optical microscopy observations have been used to determine quantitatively the threshold fluence for permanent laser damage. In contrast to our previous studies on a triazenepolymer with different composition [J. Bonse, S.M. Wiggins, J. Solis, T. Lippert, Appl. Surf. Sci. 247 (2005) 440], a significant dependence of the damage threshold on the pulse duration is found in the sub-picosecond regime with values ranging from ∼500 mJ/cm² (130 fs) up to ∼1500 mJ/cm² (540 fs). Other parameters such as the film thickness (50 nm and 1.1 μm samples) or the doping level show no significant influence on the material behavior upon irradiation. The results for fs- and ns-laser pulse irradiation are compared and analyzed in terms of existent ablation models.     

Dynamics of ZnO laser produced plasma in high pressure argon

Pulsed laser deposition of ZnO in high pressure gas offers a route for the catalyst-free preparation of ZnO nanorods less than 10 nm in diameter. This paper describes the results of some experiments to investigate the laser plume dynamics in the high gas pressure (5 × 10³-10⁴ Pa) regime used for PLD of ZnO nanorods. In this regime the ablation plume is strongly coupled to the gas and the plume expansion is brought to a halt within about 1 cm from the target. A 248 nm excimer laser was used to ablate a ceramic ZnO target in various pressures of argon. Time- and space-resolved UV/vis emission spectroscopy and Langmuir probe measurements were used to diagnose the plasma and follow the plume dynamics. By measuring the spatial profiles of Zn I and Zn II spectral lines it was possible to follow the propagation of the external and internal shock waves associated with the interaction of the ablation plume with the gas. The Langmuir probe measurements showed that the electron density was 10⁹-10¹⁰ cm⁻³ and the electron temperature was several eV. At these conditions the ionization equilibrium is described by the collisional-radiative model. The plume dynamics was also studied for ZnO targets doped with elements which are lighter (Mg), comparable to (Ga), and heavier (Er) than Zn, to see if there is any elemental segregation in the plume.     

Time resolved laser-induced plasma dynamics

The structure and evolution of the laser-induced vapor plume and shockwave were measured from femtosecond time resolved shadowgraph images. By changing the wavelength of the probe beam (400 and 800 nm), differences in the opacity of the vapor plume were measured as a function of delay time from the ablation laser pulse. The evolution of the temperature and electron number density during and after the ablation laser pulse were determined and compared for ablation in argon and helium background gases. A laser supported detonation wave (LSD) observed for ablation in argon, blocks the incoming laser energy and generates a high-pressure region above the vapor plume.     

Laser-ablation-induced refractive index fields studied using pulsed digital holographic interferometry

Pulsed digital holographic interferometry has been used to investigate the plume and the shock wave generated in the ablation process of a Q-switched Nd-YAG (λ=1064 nm and pulse duration=12 ns) laser pulse on a polycrystalline boron nitride (PCBN) target under atmospheric air pressure. A special setup based on two synchronised wavelengths from the same laser for simultaneous processing and measurement has been used. Digital holograms were recorded for different time delays using collimated laser light (λ=532 nm) passed through the volume along the target. Numerical data of the integrated refractive index field were calculated and presented as phase maps showing the propagation of the shock wave and the plume generated by the process. Radon inversion has been used to estimate the 3D refractive index fields measured from the projections assuming rotational symmetry. The shock wave density has been calculated using the point explosion model and the shock wave condition equation and its behaviour with time at different power densities ranging from 1.4 to 9.1 GW/cm² is presented. Shock front densities have been calculated from the reconstructed refractive index fields using the Gladstone–Dale equation. A comparison of the shock front density calculated from the reconstructed data and that calculated using the point explosion model at different time delays has been done. The comparison shows quite good agreement between the model and the experimental data. Finally the reconstructed refractive index field has been used to estimate the electron number density distribution within the laser-induced plasma. The electron number density behaviour with distance from the target at different power densities and its behaviour with time are shown. The electron number densities are found to be in the order of 10¹⁸ cm^?3 and decay at a rate of 3×10¹⁵ electrons/cm³ ns.     

强飞秒激光烧蚀石英玻璃的超快时间分辨光学诊断

采用超快时间分辨的光学诊断技术对飞秒激光脉冲烧蚀石英玻璃的动态过程进行了实验研究.首先,对烧蚀过程中石英玻璃外部的物质喷射进行了数字全息记录,获得了不同延迟时间下探测光的二维相位差分布图,并由此推断出了喷射物的成分和结构.此外,对石英玻璃内部的现象进行了时间分辨阴影图记录,从阴影图中观察到了石英玻璃内部的两个应力波的演化过程.这两个应力波与目标靶外部的两次物质喷射相关. 关键词： 脉冲数字全息 飞秒激光烧蚀 超快时间分辨 应力波     

In situ monitoring the pulse CO2 laser interaction with 316-L stainless steel using acoustical signals and plasma analysis

In most laser material processing, material removal by different mechanisms is involved. Here, application of acoustic signals with thermoelastic (below threshold) and breakdown origin (above threshold) together with plasma plume analysis as a simple monitoring system of interaction process is suggested. In this research the interaction of pulse CO₂ laser with 200 ns duration and maximum energy of 1.3 J operating at 1 Hz with austenitic stainless steel (316-L) is reported. The results showed that the non-linear point of the curve can serve as a useful indicator of melting fluence threshold (in this case ≈830 J cm⁻²) with corresponding temperature calculated using plasma plume analysis. Higher acoustic amplitudes and larger plasma plume volume indicates more intense interaction. Also, analysis showed that a phase explosion process with material removal (ejecta) in the form of non-adiabatic (i.e., d_t ? α⁻¹) is at play after laser pulse is ended. Also, SEM photographs show different surface quality medication at different laser intensities, which indicates the importance of recoil momentum pressure and possibly electrons and ions densities in heat transfer. Finally, electrochemical test indicate an improved corrosion resistance for laser treated samples compared to untreated ones.     

Effects of phase explosion in pulsed laser deposition of nickel thin film and sub-micron droplets

Nickel (Ni) thin films were deposited on glass substrates in high vacuum and at room temperature with third-harmonic or 355-nm output from a nanosecond Nd:YAG laser. At low laser fluence of 1 J/cm², the deposition rate was about 0.0016 nm/shot which increased linearly until 4 J/cm². Above 4 J/cm², the onset of phase explosion in the ablation abruptly increased the optical emission intensity from laser-produced Ni plume as well as thin-film deposition rate by about 6×. The phase explosion also shifted the size distribution and number density of Ni droplets on its thin-film surface. On the other hand, the surface structures of the ablated Ni targets were compared between the scan-mode and the fixed-mode ablations, which may suggest that droplets observed on the thin-film surface were caused by direct laser-induced splashing of molten Ni rather than vapour-to-cluster condensation during the plume propagation.     

Time-resolved measurements during backside dry etching of fused silica

The laser-induced backside dry etching (LIBDE) investigated in this study makes use of a thin metal film deposited at the backside of a transparent sample to achieve etching of the sample surface. For the time-resolved measurements at LIBDE fused silica samples coated with 125 nm tin were used and the reflected and the transmitted laser intensities were recorded with a temporal resolution of about 1 ns during the etching with a ∼30 ns KrF excimer laser pulse. The laser beam absorption as well as characteristic changes of the reflection of the target surface was calculated in dependence on the laser fluence in the range of 250-2500 mJ/cm² and the pulse number from the temporal variations of the reflection and the transmission. The decrease of the time of a characteristic drop in the reflectivity, which can be explained by the ablation of the metal film, correlates with the developed thermal model. However, the very high absorption after the film ablation probably results in very high temperatures near the surface and presumably in the formation of an absorbing plasma. This plasma may contribute to the etching and the surface modification of the substrate. After the first pulse a remaining absorption of the sample was measured that can be discussed by the redeposition of portions of the ablated metal film or can come from the surface modification in the fused silica sample. These near-surface modifications permit laser etching with the second laser pulse, too.     

Femtosecond laser micromilling of Si wafers

Femtosecond laser micromilling of silicon is investigated using a regeneratively amplified 775 nm Ti:Sapphire laser with a pulse duration of 150 fs operating at 1 kHz repetition rate. The morphological observation and topological analysis of craters fabricated by single-shot laser irradiation indicated that the material removal is thermal in nature and there are two distinct ablation regimes of low fluence and higher fluence with logarithmical relations between the ablation depth and the laser fluence. Crater patterns were categorized into four characteristic groups and their formation mechanisms were investigated. Femtosecond laser micromilling of pockets in silicon was performed. The effect of process parameters such as pulse energy, translation speed, and the number of passes on the material removal rate and the formation of cone-shaped microstructures were investigated. The results indicate that the microstructuring mechanism has a strong dependence on the polarization, the number of passes and laser fluence. The optimal laser fluence range for Si micromilling was found to be 2-8 J/cm² and the milling efficiency attains its maximum between 10 and 20 J/cm².     

Studies of craters’ dimension for long-pulse laser ablation of metal targets at various experimental conditions

Long pulse laser shots of the PALS iodine laser in Prague have been used to obtain metal target ablation at various experimental conditions. Attention is paid mainly to the dependencies of the crater diameter on the position of minimum laser-focus spot with regard to the target surface, by using different laser wavelengths and laser energies. Not only a single one, but two minima, independently of the wavelength, of the target irradiation angle and of the target material, were recorded. Significant asymmetries, ascribed to the non-linear effects of intense laser beam with pre-formed plasma, were found, too. Estimations of ejected mass per laser pulse are reported and used to calculate the efficiency of laser-driven loading. Results on metal target ablation and crater formation at high intensities (from 2 × 10¹³ to 3 × 10¹⁶ W/cm²) are presented and compared. Crater depth, crater diameter and etching yield are reported versus the laser energy, in order to evaluate the ablation threshold fluence.     

Laser ablation of metals by femtosecond pulses: Theoretical and experimental study

We have investigated ultrashort laser micromachining of metals, both from the point of view of the basic physical processes, and the technological implications. The process of hole drilling of Ni with ≈300 fs SHG (λ = 527 nm) Nd-glass and Al samples with 100 fs Ti:sapphire (λ = 800 nm) laser pulses, respectively, has been experimentally addressed by using time-gated optical emission spectroscopy of the ablated material and SEM analysis of the targets. The ablation process has also been analyzed by classical, molecular dynamics (MD) simulations, by using a Morse potential to describe the interaction between the atoms, and taking into account the electron heat diffusion contribution. The dependence of the ablation depth on laser fluence, as measured by SEM analysis, is in good agreement with the numerical simulations and is also well correlated with the optical emission yield of the expanding plume.     

Non-contact acoustic tests based on nanosecond laser ablation: Generation of a pulse sound source with a small amplitude

A method to generate a pulse sound source for acoustic tests based on nanosecond laser ablation with a plasma plume is discussed. Irradiating a solid surface with a laser beam expands a high-temperature plasma plume composed of free electrons, ionized atoms, etc. at a high velocity throughout ambient air. The shockwave generated by the plasma plume becomes the pulse sound source. A laser ablation sound source has two features. Because laser ablation is induced when the laser fluence reaches 10¹²–10¹⁴ W/m², which is less than that for laser-induced breakdown (10¹⁵ W/m²), laser ablation can generate a lower sound pressure, and the sound source has a hemispherical radiation pattern on the surface where laser ablation is generated. Additionally, another feature is that laser-induced breakdown sound sources can fluctuate, whereas laser ablation sound sources do not because laser ablation is produced at a laser beam–irradiation point. We validate this laser ablation method for acoustic tests by comparing the measured and theoretical resonant frequencies of an impedance tube.     

Fs/ns-dual-pulse orthogonal geometry plasma plume reheating for copper-based-alloys analysis

Plasma plume emission spectroscopy signal enhancements between 12- and 280-fold were obtained in air at atmospheric pressure by reheating the fs-laser ablation plume (energy 0.75 and 3.0 mJ) with a 45 mJ ns-pulse in orthogonal geometry. The emission enhancements induced by the double pulse configuration (DP) at various inter-pulse delay times and distances of the second laser beam from the target surface were investigated for copper-based-alloy standards. Temporal surveys of the plasma plume temperatures induced by both fs-single pulse (fs-SP) and DP placed at a fixed distance of 0.5 mm from the target surface were carried out. Several copper-based-alloy standards were employed for drawing Zn calibration curves by using either fs-SP or DP configurations and considering Cu as internal standard. The experimental data show that, for high Zn contents, the fs-SP set-up is affected by a self-absorption phenomenon so that a deviation from the assumed calibration single linear response is observed and two linear regressions are considered. Conversely, it has been observed that the DP configuration is not affected by any self-absorption effect and provides an improvement of the Zn limit of detection (LOD) but worse calibration linear regressions than the fs-SP. Thus, the DP scheme can increase the analytical sensitivity of fs-SP and, furthermore, its process can be supposed to be independent from the matrix composition even for largely different Zn contents of the Cu-based-alloy standards used.     

Analyses of surface coloration on TiO2 film irradiated with excimer laser

TiO₂ film of around 850 nm in thickness was deposited on a soda-lime glass by PVD sputtering and irradiated using one pulse of krypton-fluorine (KrF) excimer laser (wavelength of 248 nm and pulse duration of 25 ns) with varying fluence. The color of the irradiated area became darker with increasing laser fluence. Irradiated surfaces were characterized using optical microscopy, scanning electron microscopy, Raman spectroscopy and atomic force microscopy. Surface undergoes thermal annealing at low laser fluence of 400 and 590 mJ/cm². Microcracks at medium laser fluence of 1000 mJ/cm² are attributed to surface melting and solidification. Hydrodynamic ablation is proposed to explain the formation of micropores and networks at higher laser fluence of 1100 and 1200 mJ/cm². The darkening effect is explained in terms of trapping of light in the surface defects formed rather than anatase to rutile phase transformation as reported by others. Controlled darkening of TiO₂ film might be used for adjustable filters.     

Small size TiO2 nanoparticles prepared by laser ablation in water

Titanium dioxide nanoparticles in distilled H₂O solvent were prepared by laser ablation. The experiments were performed irradiating a Ti target with a second harmonic (532 nm) output of a Nd:YAG laser varying the operative fluence between 1 and 10 J cm⁻² and for an ablation time ranging from 10 to 30 min. Electron microscopy measurements have evidenced the predominant presence of nanoparticles with diameter smaller than 10 nm together with agglomerations of 100-200 nm whose content increases with the laser fluence. At low laser fluence the particles’ size distribution shows that more than 85% of the nanoparticles have a size smaller than 5 nm while at mid and high fluences the presence of 5-7 nm nanoparticles is predominant. XPS analysis has revealed the presence of different titanium suboxide phases with the prevalence of Ti-O bonds from TiO₂ species. The optical bandgap values, determined by UV-vis absorption measurements, are compatible with the anatase phase.     

Local chemical transformations in poly(dimethylsiloxane) by irradiation with 248 and 266 nm

Poly(dimethylsiloxane) (PDMS) has been irradiated with a frequency quadrupled Nd:YAG laser and a KrF^*-excimer laser at a repetition rate of 1 Hz. The analysis of ablation depth versus pulse number data reveals a pronounced incubation behavior. The thresholds of ablation (266 nm: 210 mJ cm⁻², 248 nm: 940 mJ cm⁻²) and the corresponding effective absorption coefficients α_eff (266 nm: 48900 cm⁻¹, 248 nm: 32700 cm⁻¹, α_lin = 2 cm⁻¹) were determined. The significant differences in the ablation thresholds for both irradiation wavelengths are probably due to the different pulse lengths of both lasers. Since the shorter pulse length yields a lower ablation threshold, the observed incubation can be due to a thermally induced and/or a multi-photon absorption processes of the material or impurities in the polymer.Incubation of polymers is normally related to changes of the chemical structure of the polymer. In the case of PDMS, incubation is associated with local chemical transformations up to several hundred micrometers below the polymer surface. It is possible to study these local chemical transformations by confocal Raman microscopy, because PDMS is transparent in the visible. The domains of transformation consist of carbon and silicon, as indicated by the appearance of the carbon D- and G-bands between 1310 and 1610 cm⁻¹, a band appearing between 502 and 520 cm⁻¹ can be assigned to mono- and/or polycrystalline silicon.The ablation products, which are detected in the surroundings of the ablation crater consist of carbon and amorphous SiO_x (x ≈ 1.5) as detected by infrared spectroscopy.     

Application of interference microscopy to the study of hologram build-up in LiNbO3 crystals

Interference microscopy was applied to direct microscopic observation of temporal evolution of phase holograms in LiNbO₃:Fe photorefractive crystals. First a hologram was recorded in the sample, and diffraction efficiency was monitored during hologram build-up using inactinic laser light. Thus kinetics of hologram build-up could be determined. The initial hologram was erased using white light. Then a series of write-erase cycles were performed with increasing exposure times. Holograms were observed by interference microscope after each exposure. The time elapsed between the exposure and the microscopic observation was negligible compared to the relaxation time of the hologram. The obtained temporal evolution of the grating profile gives a deeper insight into the physical mechanism of hologram formation in photorefractive materials than simple diffraction efficiency measurements. A congruently grown sample of LiNbO₃ doped with 10⁻³ mol/mol Fe in melting was studied by this method. Sample thickness was set to 300 μm to allow correct microscopic observation. Plane-wave holograms were recorded in the samples using an Ar-ion laser at λ = 488.0 nm of grating constants of 3, 6.5 and 8.8 μm.     

Growth of titanium oxynitride layers by short pulsed Nd:YAG laser treatment of Ti plates: Influence of the cumulated laser fluence

Titanium oxynitride layers were formed by surface laser treatment of Ti plates in air using a Nd:YAG laser source of short pulse duration about 5 ns. The cumulated laser fluence was varied in the 100-1200 J cm⁻² range and its influence on the composition and the structure of the formed layers was studied by different characterization techniques providing physico-chemical and structural information. It was shown that the laser treatment induces the insertion of light elements as O, N and C in the formed layer with the amount increasing with the laser fluence. The in-depth composition of the layers and the co-existence of different phases were also studied.The way in which the laser parameters such as fluence affect the insertion of nitrogen and oxygen was discussed in connection with the effects of the plasma plume formed above the target.     

Laser heating and ablation at high repetition rate in thermal confinement regime

Laser heating and ablation of materials with low absorption and thermal conductivity (paint and cement) were under experimental and theoretical investigations. The experiments were made with a high repetition rate Q-switched Nd:YAG laser (10 kHz, 90 ns pulse duration and λ = 532 nm). High repetition rate laser heating resulted in pulse per pulse heat accumulation. A theoretical model of laser heating was developed and demonstrated a good agreement between the experimental temperatures measured with the infrared pyrometer and the calculated ones. With the fixed wavelength and laser pulse duration, the ablation threshold fluence of paint was found to depend on the repetition rate and the number of applied pulses. With a high repetition rate, the threshold fluence decreased significantly when the number of applied pulses was increasing. The experimentally obtained thresholds were well described by the developed theoretical model. Some specific features of paint heating and ablation with high repetition rate lasers are discussed.