基于压电换能器谐振网络幅频特性的频率跟踪技术

本文分析了压电换能器谐振网络的幅频特性,介绍了利用该特性进行频率跟踪的实现方法,并对眼科白内障超声乳化仪中的超声手柄进行了频率跟踪实验。实验研究表明利用谐振网络的幅频特性,对超声振动系统进行频率跟踪是一种简单、有效、可行的方案。     

四激励二维正交复合夹心式压电超声换能器的设计

提出了一种四激励二维正交复合夹心式压电超声换能器,换能器由四组纵向极化压电陶瓷晶堆、一个中心耦合金属块和四个外部金属圆锥组成。基于二维耦合振动机理和机电类比原理,建立了换能器的等效电路模型并推导了其谐振频率方程。利用有限元软件仿真分析了四激励正交复合换能器的频响特性和振动特性,并与其单独一个方向振子的振动特性进行了对比。加工了反相和同相模态的换能器,利用阻抗分析仪和激光测振仪测试了其频率响应和二维四向纵振动输出特性,并进行了大功率二维四向超声乳化实验测试。理论、仿真和实验结果表明:换能器具有反相和同相两个纵向正交共振模态,在这两种共振模态下均可实现二维四向纵振动输出,且换能器两个正交方向振子的纵向振动具有相互耦合加强的作用;等效电路法和有限元法所得换能器的共振频率和有效机电耦合系数与实验测试结果吻合,通过与单激励正交复合夹心式压电超声换能器的有效机电耦合系数对比,发现该换能器具有更高的有效机电耦合系数。     

铌酸钾钠基无铅压电陶瓷纵振换能器*

高性能环境友好型无铅压电陶瓷及其应用是当前压电材料研究的热点之一,为了探究其在水声换能器领域的应用潜力,该文对铌酸钾钠基无铅压电陶瓷和锆钛酸铅压电陶瓷纵振式换能器进行了对比研究。依据仿真结果优化结构尺寸,制作了两种换能器样机并测试了其在空气中和水中的电声性能。测试结果表明,铌酸钾钠基无铅压电陶瓷换能器的谐振频率为35kHz,最大发送电压响应为 151dB,声源级可达 190dB,在 26kHz~67kHz 的频率范围内发送电压响应的起伏不超过±4.5dB,谐振频率处-3dB 的指向性开角约为 76°。该无铅压电陶瓷换能器具有和锆钛酸铅压电陶瓷换能器相当的发射性能,有望推动无铅压电材料在水声换能器领域的应用进程。     

压电管堆式宽带换能器*

研究了一种具有管状叠堆结构的圆管换能器,其敏感元件是由纵向极化压电陶瓷单元组成的薄壁管状压电叠堆,探讨利用管状叠堆纵向和径向振动耦合实现宽带发射。利用压电柱壳振动理论推导了管堆的频率方程,分析了换能器的纵向和径向模态的振动耦合特性。在理论分析的基础上利用有限元方法对换能器的带宽和发射电压响应进行优化并研制换能器样机。测试结果表明,纵向极化的管状压电叠堆结构具有良好的发射电压响应和宽带特性,与理论及仿真结果相符。     

高频宽带嵌套式复合材料换能器*

研制了一种嵌套式高频宽带复合材料换能器,利用1-3型压电复合材料Q值较低、频带较宽的特点,采用组合式的结构拓展换能器的工作带宽。通过切割框型压电陶瓷、灌注环氧树脂得到压电复合材料框型敏感元件,再将不同厚度的框型敏感元件沿轴向嵌套从而制成多层嵌套的压电复合材料敏感元件。建立1-3型压电复合材料中压电小柱的等效电路,根据等效电路计算出压电小柱的谐振频率,并与1-3型压电复合材料的谐振频率理论计算结果进行对比。通过ANSYS软件对敏感元件结构进行仿真,并根据仿真结果确定了敏感元件的最佳设计方案。最终制作出的换能器进行水下测试,该换能器的谐振频率为310kHz,最大发送电压响应为188.5dB,-3dB带宽可达130kHz,接收灵敏度最大可达-186.8dB,-3dB带宽可达90kHz,谐振频率处-3dB的指向性开角约为2.4°。该嵌套式敏感元件可实现换能器宽带发射与接收声波的目标。     

硅微ZnO压电薄膜传声器的研制

本文介绍了一种利用ZnO压电薄膜为换能器的硅微压电薄膜传声器的制备,并且对微机械加工工艺过程进行了较为详细的描述。本文对传声器的部分结构进行改进,与通常设计相比较大幅提高了传声器的性能,1000Hz基准频率的灵敏度达到-85dB(相对于1V/Pa),500Hz到10000Hz的频率响应的平坦度在±3dB范围内。     

外接LC电路的可调压电换能器的频率特性

压电换能器往往因受到温度与负载的影响,导致其谐振频率、反谐振频率和机械品质因数等特征参数发生变化。通过在压电换能器中设计用于调节的压电陶瓷片,并在调节压电陶瓷片两端外接电负载,可以实现压电换能器的频率调节,修正由于温度和负载导致的频率漂移。基于压电换能器的Mason等效电路,建立外接LC调节电路的压电换能器的谐振频率、反谐振频率模型,分析LC调节电路中调节电感对频率调节特性的影响;通过实验研究外接LC调节电路对可调压电换能器机械品质因数的影响,并验证调节电感对频率调节特性的影响。理论分析和实验研究的结果表明:随着调节电感的增大,调节电容对频率的调节灵敏度提高,可调压电换能器的频率调节宽度拓宽,但也会使压电换能器的机械品质因数降低。合理选择调节电感和调节电容能兼顾频率调节宽度和机械品质因数的要求。此研究可为后续自适应压电换能器的频率调节系统设计提供指导。      

弛豫铁电单晶/压电陶瓷混合激励换能器EI北大核心CSCD

为了降低纵向换能器尺寸并提高发射带宽和发送电压响应,研究了一种弛豫铁电单晶/压电陶瓷混合激励换能器,换能器由[011]方向极化PIN-PMN-PT单晶和PZT-4压电陶瓷混合激励,利用多模态振动耦合的原理,通过单晶的32模式振动,可以灵活调整两种振子之间的驱动能力和刚度分配。首先通过四端网络法得到了换能器等效电路并计算了其谐振频率,然后利用有限元方法对换能器进行了仿真优化,最后制作了试验样机并进行了测试分析。换能器样机外径86 mm、长度80 mm,工作频带13~38 kHz,最大发送电压响应为144.9 dB,带内发送电压响应起伏小于6 dB,具有良好的宽带、小尺寸工作性能。     

具有阻抗匹配层的宽带纵向振动压电换能器设计

本文研究纵向振动压电换能器的频带展宽问题。在复合棒纵向换能器的辐射端加工适当材料的阻抗匹配层,可以使其工作在非单谐振状态下,在单层阻抗匹配层的情况下,合理地选择匹配层的厚度可以调整其谐振点之间的位置,从而改善换能器的辐射特性。本研究结果表明,对于机械品质因素Qm=6,发射响应带宽△f=4kHz的纵向振子,采用四分之一波长厚度的匹配层,在不降低发射响应的条件下,可展宽频带一倍以上。     

非线性工作状态压电换能器匹配技术

针对压电换能器在大功率下存在复杂非线性而导致匹配参数难以优化的问题,以大功率超声金属焊接为例,通过采集测试焊接过程换能器两端电压的幅值与频率,建立换能器反谐振电阻与驱动电压有效值、频率之间的数学模型;提出基于反谐振电阻模型的最优功率匹配方法,推导了匹配电感电容的计算公式。最后实验验证了数学模型的准确性,且当换能器输入功率在最优功率附近时,匹配网络电能传输效率最高。     

Dynamic response of sensor diaphragm with residual stress in contact with liquids

The dynamic response of a sensor diaphragm with residual stress in contact with a liquid is theoretically investigated in this paper. The liquid is assumed to be incompressible and inviscid. The acoustic radiation as the main source of energy dissipation in a medium virtually added the mass of the diaphragm and decreased the quality factor of the diaphragm. The effects of the residual stress on the added virtual mass and the quality factor of the diaphragm are presented. Finally, forced oscillations of the sensor diaphragm with residual stress in contact with a liquid are investigated. It is found that the requirements of high sensitivity and large vibration displacement are contradictory. The analysis and results are valuable for conducting the design of circular sensor diaphragms for biological applications.     

Preparation of carbon nanotubes as the conductive coating layer on flexible thermal-resistant substrate by permeating method and its residual stress analysis

A polyarylate (PAR) substrate was first prepared by hot pressing and then carbon nanotubes (CNTs) were coated on its surface by a low-temperature spraying method. In order to eliminate the residual stress and enhance the adhesive ability between the substrate and the coated CNT layer, an optimal thermo-permeating process is proposed. The relationship between the thickness of the permeating layer and the residual stress of coating layers was investigated. Triple-layer structure models were provided to evaluate the residual stress of coating layers. The experimental results show that if the sample was treated by the optimal thermo-permeating process, its residual stress was dramatically reduced from 1.7×10³ MPa to 0.45 Pa; meanwhile, its adhesive ability was intensively enhanced from 1B to 5B according to ASTM D3359 adhesion classifications.     

A novel anti-shock silicon etching apparatus for solving diaphragm release problems

This paper presents a novel anti-shock bulk silicon etching apparatus for solving a universal problem which occurs when releasing the diaphragm (e.g.\ SiNx), that the diaphragm tends to be probably cracked by the impact of heating-induced bubbles, the swirling of heating-induced etchant, dithering of the hand and imbalanced etchant pressure during the wafer being taken out. Through finite element methods, the causes of the diaphragm cracking are analysed. The impact of heating-induced bubbles could be the main factor which results in the failure stress of the SiNx diaphragm and the rupture of it. In order to reduce the four potential effects on the cracking of the released diaphragm, an anti-shock bulk silicon etching apparatus is proposed for using during the last etching process of the diaphragm release. That is, the silicon wafer is first put into the regular constant temperature etching apparatus or ultrasonic plus, and when the residual bulk silicon to be etched reaches near the interface of the silicon and SiNx diaphragm, within a distance of 50--80~\mu m (the exact value is determined by the thickness, surface area and intensity of the released diaphragm), the wafer is taken out carefully and put into the said anti-shock silicon etching apparatus. The wafer's position is at the geometrical centre, also the centre of gravity of the etching vessel. An etchant outlet is built at the bottom. The wafer is etched continuously, and at the same time the etchant flows out of the vessel. Optionally, two symmetrically placed low-power heating resistors are put in the anti-shock silicon etching apparatus to quicken the etching process. The heating resistors' power should be low enough to avoid the swirling of the heating-induced etchant and the impact of the heating-induced bubbles on the released diaphragm. According to the experimental results, the released SiNx diaphragm thus treated is unbroken, which proves the practicality of the said anti-shock bulk silicon etching apparatus.     

基于XRD的镀锌钝化膜残余应力试验研究

利用XRD技术测试了镀锌钝化膜结合界面的残余应力，同时通过电解抛光法检测了其厚度方向残余应力的分布规律，分析了残余应力对镀锌钝化膜结合强度的影响. 试验结果表明，镀锌钝化膜的残余应力均表现为压应力，并随着基体表面残余应力的增大而减小；钝化膜在2—10μm厚度方向的残应力为-274.5—-428.3MPa，其应力为梯度分布；镀锌钝化膜与基体的界面结合强度与其残余应力成反比，减小薄膜残余应力，有利于提高镀锌钝化膜与基体的结合强度. 关键词： X射线衍射法(XRD) 镀锌钝化膜 结合强度 残余应力     

Be薄膜应力的X射线掠入射侧倾法分析

由于铍薄膜极易被X射线穿透, 传统的几何模式下很难获得有效的X射线衍射应力分析结果. 本文采用掠入射侧倾法分析SiO₂基底上Be薄膜残余应力, 相比其他衍射几何方法, 提高了衍射的信噪比, 获得的薄膜应力拟合曲线线形较好. 对Be薄膜的不同晶面分析, 残余应力结果相同, 表明其力学性质各向同性; 利用不同掠入射角下X射线的穿透深度不同, 获得应力在深度方向上的分布; 由薄膜面内不同方向的残余应力相同, 确定薄膜处于等双轴应力状态. 关键词： Be薄膜 X射线衍射 应力     

Laser-ultrasonic surface wave dispersion measurements on surface-treated metals

Surface acoustic wave (SAW) velocity spectroscopy has been long considered to be one of the leading candidates for nondestructive characterization of surface-treated metals because of its ability to probe the material properties at different penetration depths depending on the inspection frequency. We developed a high-precision laser-ultrasonic technique to study the feasibility of SAW dispersion spectroscopy for residual stress assessment on shot-peened metals. This technique is capable of measuring SAW dispersion with a relative error of 0.1% over a frequency range from 2 to 15 MHz. Our experimental results obtained from shot-peened aluminum 2024-T351 samples indicate that the dispersion of the surface wave is a superposition of different effects of surface treatment in the material, including surface roughness, compressive residual stress, and cold work. Although the surface roughness induced component is often the dominating part of the overall dispersion, the experimental results also indicate that it is feasible to observe a perceivable change in the dispersion of the SAW when the specimen is heat-treated at different temperatures, which has no perceivable effect on the surface roughness. The part of the dispersion, which changes during annealing via thermal relaxation, is due to near-surface residual stresses and the decay of texture, although at high frequencies nonuniform grain coarsening could also play a significant role.     

Residual stresses deriving from holographic interferometry data on a base of inverse problem solution

A transition model, which is capable of obtaining both membrane and bending residual stress components from initial experimental information, is developed for thin-walled plane structures. The determination of residual stresses is based on the combined implementing of the hole-drilling method and reflection hologram interferometry. Required input data are obtained by simultaneous measurements on through hole distortions in two principal strain directions on opposite sides of thin plane specimen. These sides are faces of the drill entrance and exit. Superimposed residual stresses field, which consists of both membrane and bending components, is a reason for the various deviations of each specific fringe pattern from an ideal form. This fact is a clear experimental indication of the bending stress contribution in a total stress field. Two ways of decomposition of superimposed residual stresses field are proposed and analysed in detail. Emphasis is laid on a careful quantitative formulation of the inverse problem needed for an accurate deriving both membrane and bending residual stress components. It is shown that an availability of two-side initial data is both an essential and necessary condition of such a formulation. Detailed analysis of an accuracy of the results obtained is performed. This analysis is based on a wide set of both actual interferograms and analogous reference fringe patterns related to superimposed residual stress field under study. Comparing residual stress values obtained proceeding from one-side and two-side data are presented for different types of superimposed field of interest.     

Observation and analysis of residual stress development resulting from OH impurity in optical fibers

We report experimental results on the development of residual stress due to OH impurity in optical fibers. The effect of OH impurity on residual stress is demonstrated by direct residual stress measurement. The residual stress at the outer-cladding/jacketing-tube boundary of the fiber drawn at 3.48 N was found to be -61 MPa . The residual compressive stress is attributed to the viscosity decrease induced by a significant OH impurity at the boundary, as measured by a Fourier transform infrared microscope.     

基于神经网络的选区激光熔化残余应力预测

当前对选区激光熔化产生的残余应力预测方法主要为数值模拟,但由于设备、环境、粉末等因素差异性较大,且具有较大不确定性,很难建立符合实际情况的数值模拟模型。利用神经网络在预测多变量、复杂线性信息处理方面能力强的特点,建立适用于预测316L不锈钢粉末选区激光熔化残余应力的模型。使用选区激光熔化技术打印相当数量的不同工艺参数的试样,采用超声波检测其内部残余应力作为神经网络的训练样本,并使用这些样本对神经网络模型进行训练,获得具有预测功能的神经网络,将验证样本的工艺参数输入神经网络,计算出预测的残余应力值,与实际检测值进行对比。实验结果表明,预测值与实际测量值偏差较小,验证了所提方法的有效性。采用神经网络预测残余应力的方法,可以快速确定不同选区激光熔化工艺参数对应的残余应力,避免设置残余应力较高的工艺参数,有效缩短制备高质量工件试样的周期,降低成本。     

Computational and experimental study of a melt-hardened zone on a roller modified by wide-band laser treatment

A three-dimensional finite element model has been developed to simulate the wide-band laser remelting process and predict the thermal and mechanical properties in the melt-hardened zone. The simulation of the laser remelting process was performed using the nonlinear thermo-mechanical properties, based on a wide-band heat source model. The temperature fields, phase transformations, hardness and residual stress distributions in the melt-hardened zone were analyzed. In the remelting zone, the transformed volumetric percentage of martensite is beyond 80% and the excessive transformed martensitic structure greatly affects the mechanical properties in the melt-hardened zone with its volumetric expansion effect. After remelting, the hardness can be improved and the residual stress distributed within the melted zone is mainly of the compressive type, while the tensile stress in the heat-affected zone (HAZ) may cause the initiation of cracks. The computational results are in good agreement with experimental measurements.