Be薄膜应力的X射线掠入射侧倾法分析

由于铍薄膜极易被X射线穿透, 传统的几何模式下很难获得有效的X射线衍射应力分析结果. 本文采用掠入射侧倾法分析SiO₂基底上Be薄膜残余应力, 相比其他衍射几何方法, 提高了衍射的信噪比, 获得的薄膜应力拟合曲线线形较好. 对Be薄膜的不同晶面分析, 残余应力结果相同, 表明其力学性质各向同性; 利用不同掠入射角下X射线的穿透深度不同, 获得应力在深度方向上的分布; 由薄膜面内不同方向的残余应力相同, 确定薄膜处于等双轴应力状态. 关键词： Be薄膜 X射线衍射 应力

Residual stress analysis by grazing-incidence X-ray diffraction on beryllium films

Measurements of residual stress in beryllium thin film under standard Bragg-Brentano geometry are always problematic. In this article, a new experimental method using grazing- incidence X-ray diffraction is presented according to the convential sin²Ψ method, which effectively increases the signal-to-noise ratio. Analysis shows that the assumption (isotropic material) is logical, because the values of stress results from the three families of planes are camparable. The stress gradient can be measured at diffrenent grazing incidence angles. The results indicate the uniformity of the residual stress of the thin film along various Φ directions.
Keywords： beryllium films X-ray diffraction residual stress