轴对称非球面超精密磨削的几何模型研究

超精密磨削轴对称非球面光学器件是提高加工效率和加工精度的有效方法。根据轴对称非球面的轴对称性采用了加工简便的二轴联动超精密磨床,给出了NC加工中的砂轮中心位置计算的几何模型,分析了加工中影响精度的主要误差源及所产生的误差,提出了相应的误差补偿策略,并给出砂轮形状改进方法。     

先进光学制造技术进展

针对高功率固体激光发展的需求,总结了先进光学制造技术方面的研究进展。采用超精密制造技术提高了非球面等元件的加工精度和制造效率,并为解决低缺陷加工提供了技术途径。围绕面形误差控制,特别是中频波前误差控制,发展了多种确定性抛光技术。针对熔石英元件建立了去除-抑制模型及新的抛光技术,有效抑制了亚表面缺陷的产生。     

高精度非回转对称非球面加工方法研究

本文提出一种高精度非回转对称非球面加工方法。首先,通过范成法铣磨出非回转对称非球面的最佳拟合球;然后,利用古典抛光修正小磨头确定抛光难以修正的中频误差;最后,利用高精度气囊抛光设备(IRP)精确对位精修面形,在不引入额外中频误差条件下,通过高精度对位检测技术实现非回转对称非球面高精度加工。将该方法应用于定点曲率半径为970.737 mm、k=-1、口径为106 mm三次非球面加工,降低了加工难度,提高了加工精度,面形误差收敛到1/30λ(RMS)。实验结果验证了本文加工方法的正确性和可行性,对高精度非回转对称非球面加工具有一定的指导意义。     

非球面元件精密铣磨加工技术研究

通过对Φ42 mm和Φ82 mm口径非球面光学零件精密铣磨成型过程的加工特点和加工误差因素的分析,在工艺中引入刀具与工件变形、刀具半径误差等因素,结合经典Hertz接触理论建立了刀具与工件变形量及刀具半径误差和补偿理论模型,并且应用在精密铣磨成型过程中,通过实验,Φ42 mm口径非球面光学零件经一次精密铣磨成型后元件面形精度PV值为1.91μm,RMS值达到0.288μm;Φ82 mm口径非球面光学零件经一次精密铣磨成型后元件面形精度PV值为1.60μm,RMS值达到0.385μm,完全满足加工精度要求,加工时间节省了50%以上。实验验证了理论分析及误差补偿方法的正确性,实现了精密光学非球面元件的快速精密铣磨成型加工。     

Ф1300mm非球面反射镜的加工与检测

介绍一块Ф1300mmULE材料非球面反射镜的加工与检测方法。采用非球面超声铣磨、机器人研抛等多个工序组合加工技术完成了非球面反射镜的加工。在非球面检测中,采用大口径三坐标测量的方法进行了研磨阶段的面形检测,通过Z向滤波的方法对面形拟合过程中的噪点误差进行了处理,将研磨阶段的面形精度提高至5μm PV值。在干涉仪测量阶段,采用气囊支撑方法对反射镜的重力误差进行了卸载,通过非线性误差矫正的方法去除了零位补偿检测所带来的非线性误差,反射镜的最终精度达到0.016λRMS。试验结果表明,大口径非球面反射镜各项技术指标均满足设计要求,所用工艺方法适用于加工更大口径的非球面反射镜及其他类型的大口径非球面光学元件。     

小口径非球面加工技术及装备综述

小口径非球面零件是一种非常重要的光学零件。介绍了国内外小口径非球面超精密加工技术的发展现状和装备。对单点金刚石车削、超精密磨削、透镜成型、超精密铣削和特种加工技术进行了综述。指出了小口径非球面加工的发展趋势和产业化需要解决的问题。     

倾斜计算全息板标定补偿器误差EI北大核心CSCD

为了标定利用补偿器检测非球面的精度,提出采用倾斜计算全息法(CGH)校验补偿器,并将补偿器精度提高。介绍补偿器检测离轴非球面基本原理,同时结合工程实例,设计补偿器检测860 mm×600 mm的离轴高次非球面,通过加工与装配,仿真分析出装配后的补偿器精度为2.91 nm[均方根(RMS)值]。设计了利用倾斜式的计算全息板检测该补偿器的实验,并分析出利用该CGH校验补偿器的精度为1.79 nm(RMS值)。结果表明,受限于补偿器光学元件加工和组装精度,其检测精度未知,通过对补偿器误差进行检测与标定,可以确定利用该补偿器检测非球面的可行性并将其精度提高。     

微小非球面玻璃透镜超精密模压成型数值模拟

利用非线性有限元软件MSC.Marc,建立了微小非球面玻璃透镜超精密模压的有限元模型,并进行了微小非球面玻璃透镜模压数值模拟分析.通过对比模拟出的不同加工参量下的成型透镜和模具的残余应力分布结果,得出最优的超精密模压成型的模压速率和模压温度范围,并解释了模压速率和模压温度影响微小非球面玻璃透镜成型质量的原因.模拟可以对实际的大批量生产微小非球面玻璃透镜提供有力的帮助.     

微小非球面玻璃透镜超精密模压成型数值模拟

利用非线性有限元软件MSC.Marc,建立了微小非球面玻璃透镜超精密模压的有限元模型,并进行了微小非球面玻璃透镜模压数值模拟分析.通过对比模拟出的不同加工参量下的成型透镜和模具的残余应力分布结果,得出最优的超精密模压成型的模压速率和模压温度范围,并解释了模压速率和模压温度影响微小非球面玻璃透镜成型质量的原因.模拟可以对实际的大批量生产微小非球面玻璃透镜提供有力的帮助.     

倾斜计算全息板标定补偿器误差

为了标定利用补偿器检测非球面的精度,提出采用倾斜计算全息法(CGH)校验补偿器,并将补偿器精度提高。介绍补偿器检测离轴非球面基本原理,同时结合工程实例,设计补偿器检测860 mm×600 mm的离轴高次非球面,通过加工与装配,仿真分析出装配后的补偿器精度为2.91 nm[均方根(RMS)值]。设计了利用倾斜式的计算全息板检测该补偿器的实验,并分析出利用该CGH校验补偿器的精度为1.79 nm(RMS值)。结果表明,受限于补偿器光学元件加工和组装精度,其检测精度未知,通过对补偿器误差进行检测与标定,可以确定利用该补偿器检测非球面的可行性并将其精度提高。     

Femtosecond pulsed laser ablation with spatial filtering

With the rise in demand for miniaturized features with better acute edge acuity and negligible thermal damage zone, one of the key vital areas lies in the refinement of the quality of the laser beam itself. Spatial filter is routinely used in optical micromachining systems to smoothen the Gaussian profile of the machining spot in order to obtain a feature of the desired quality. However, its profile smoothening effect has never been investigated for femtosecond pulsed laser micromachining process since the extremely high peak power of femtosecond pulses will cause damage on the filtering aperture of spatial filter. During the development of an acousto-optical micromachining system using femtosecond pulses, we found that if the damage of the filtering aperture can be circumvented, spatial filter can improve the machining quality of femtosecond pulse ablation, especially when ablation is conducted at low-fluency range (just above the ablation threshold fluency). In this paper, we investigate and demonstrate both the improvement and potential that beam refinement can bring about. In our experiment, a series of test patterns were ablated with a 400 nm second-harmonic Ti:Sapphire femtosecond laser of 150 fs duration at varying pulse energy ranging from 31 to 39 nJ. The specimen used in the experiment is a platinum- (Pt) sputtered coating of 100 nm thickness on a quartz substrate. The results show a significant improvement in the constancy of the shape as well as the size of ablated feature, revealing an improved beam profile and beam energy distribution due to spatial filtering.     

单点金刚石车削加工切削距离的计算

讨论了大型金属反射镜在金刚石车削中,金刚石刀具的磨损对加工精度的影响;详细介绍了超精密加工中几种典型零件形状单点金刚石车削加工的切削距离计算方法,经计算在加工直径为1000mm的圆盘工件时,当刀具的进给量为2μm/r,切削距离达到近400km。通过计算为加工大型光学元件刀具磨损规律的研究提供分析基础。     

A simple phase unwrapping approach based on filtering by windowed Fourier transform: A note on the threshold selection

A simple phase unwrapping approach based on windowed Fourier filtering was proposed recently [K. Qian et al. A simple phase unwrapping approach based on filtering by windowed Fourier transform. Opt Laser Technol 2005;37:458–62]. The windowed Fourier filtering algorithm is an essential ingredient that suppresses the noise effectively and makes the phase unwrapping trivial. This paper adds a note on the threshold selection in the windowed Fourier filtering algorithm. A large interval can be selected as the threshold to obtain almost optimal filtering results. Once the selected threshold is suitable, it is almost optimal. This makes the threshold selection in the windowed Fourier filtering algorithm extremely easy.     

Use of wavelet in specifying optics

Using power spectral density (PSD) function to specify large aperture optical components' quality of laser system is universal. But it cannot provide effective guidance to eliminate certain frequency segment error.In order to solve this problem, two-dimensional discrete wavelet transform (2D-DWT) is used to separate frequency segment error and detect the corresponding region of certain frequency segment error, which is used as feedback to a machining process. The experimental results show that the corresponding region of certain frequency segment can be found and machining can be guided effectively by using wavelet.     

基于古斯-汉欣位移的双通道窄带滤波器

本文利用光束在对称金属包覆波导表面反射得到的异常大的古斯-汉欣(Goos-Hänchen)位移,通过实验实现了双通道窄带滤波.当入射激光波长为859.60 nm时,两通道滤波的峰值位置分别为859.604 nm和859.688 nm,峰值半宽(FWHM)为0.036 nm,而消光比达到15.3 dB.峰值波长可通过改变入射角或小孔位置实现调谐. 关键词： 古斯-汉欣(Goos-Hä nchen)位移 光波导 双通道 滤波器     

基于引导滤波的Mie散射光谱分析

为提高白光散射法反演粒子粒径精度,消除散射谱噪声,使用一维引导滤波对不同角度的Mie散射光谱数据进行滤波,并分析了引导滤波的特性。为解决引导数据引起的局部噪声问题,提出了小波-引导滤波联合算法。在小散射角时,引导滤波的结果与小波滤波类似,但在大散射角时,引导滤波的效果要比小波滤波好,并且滤除了脉冲噪声。小波-引导联合滤波的结果在15°附近与引导滤波相同,在45°到90°时的滤波效果明显比单独的小波滤波或引导滤波效果好,并且去除了由引导数据引起的局部噪声。     

The elimination of zero-order diffraction of 10.6 μm infrared digital holography

A new method of eliminating the zero-order diffraction in infrared digital holography has been raised in this paper. Usually in the reconstruction of digital holography, the spatial frequency of the infrared thermal imager, such as microbolometer, cannot be compared to the common visible CCD or CMOS devices. The infrared imager suffers the problems of large pixel size and low spatial resolution, which cause the zero-order diffraction a severe influence of the reconstruction process of digital holograms. The zero-order diffraction has very large energy and occupies the central region in the spectrum domain. In this paper, we design a new filtering strategy to overcome this problem. This filtering strategy contains two kinds of filtering process which are the Gaussian low-frequency filter and the high-pass phase averaging filter. With the correct set of the calculating parameters, these filtering strategies can work effectively on the holograms and fully eliminate the zero-order diffraction, as well as the two crossover bars shown in the spectrum domain. Detailed explanation and discussion about the new method have been proposed in this paper, and the experiment results are also demonstrated to prove the performance of this method.     

Frequency-selective quantitation of short-echo time 1H magnetic resonance spectra

Accurate and efficient filtering techniques are required to suppress large nuisance components present in short-echo time magnetic resonance (MR) spectra. This paper discusses two powerful filtering techniques used in long-echo time MR spectral quantitation, the maximum-phase FIR filter (MP-FIR) and the Hankel-Lanczos Singular Value Decomposition with Partial ReOrthogonalization (HLSVD-PRO), and shows that they can be applied to their more complex short-echo time spectral counterparts. Both filters are validated and compared through extensive simulations. Their properties are discussed. In particular, the capability of MP-FIR for dealing with macromolecular components is emphasized. Although this property does not make a large difference for long-echo time MR spectra, it can be important when quantifying short-echo time spectra.     

Construction of Commutative Filters for LES on Unstructured Meshes

A method of constructing discrete filters for large eddy simulation of turbulent flows on unstructured meshes is presented. The commutation error between differentiation and filtering can be made arbitrarily small with these filters. The filtering method is applied to various test cases to demonstrate commutation. An extension to three dimensions and implementation into an unstructured solver for LES are discussed.     

提高三维激光扫描系统图像质量技术的研究

对其中三维激光扫描图像处理的关键技术———二值化、细化以及离散数据点云的滤波进行了研究,提出了一种先加权中值滤波,然后再小波分析滤波的新的降噪方法,并通过遗传算法对权重值进行了优化。在通常情况下,由于小波分析计算工作量大,所以提出了一种相对简单的算法,实现了在单台PC机上的运算。