SAW器件在扩展频谱通信中的应用

扩展频谱(以下简称“扩频”)通信在现代通信中是一种很重要的技术,具有抗干扰性强和保密性好的能力;在测距中可以改善测距精度,因为测距精度与扩展带宽有关;利用具有相同谱的码分多址,多个用户可以共用一个信道。 SAW器件在通信系统中有很多应用。本文主要是介绍SAW-MSK信号调制器/产生器和SAW卷积器在扩频通信系统中的应用并报道某些实验结果。     

声表面波Chirp滤波器及卷积器组成的信号谱分析系统

本文报告了两种声表面波(SAW)器件组成的频谱分析系统及其实验结果.使用SAW Chirp滤波器与SAW卷积器组成两种类似的实验系统,进行了连续波信号、调制脉冲信号、以及上述两种信号同时输入的谱分析,还进行了信号加窄带干扰的谱分析.两种系统获得一致的结果.实验表明,这些系统具有8MHz带宽,可分析10μs时宽的信号,其等效滤波器数目等于80.文内给出一些实验照片. 由SAW器件组成的谱分析系统是一种模拟信号处理系统.它具有结构简单、实时、时带积大、体积小、重量轻及功耗低等优点,是七十年代发展起来的,颇受人们的重视.我们在国内首次实现了由SAW Chirp滤波器或/和卷积器组成的两类系统.     

SAW谐振器谐振频率微秒级快速检测方法

针对高速旋转环境下的谐振式声表面波(SAW)传感器信号快速检测,提出基于回波损耗测量原理的SAW谐振器谐振频率微妙级快速检测方法.对SAW谐振器进行线性扫频激励的过程中,将反射信号经功率检波与比较器转换为数字脉冲信号,使用计时器实时计算脉冲信号中心对应频率快速求得SAW传感器谐振频率.在8000 r/min转速范围内对...     

用声表面波技术实现扩展频谱通信有效的MSK信号

本文描述了扩展频谱通信有效的MSK信号的特点和性质,及用声表面波(SAW)技术调制/产生这种信号的工作原理、方法和结构。是一种较理想的技术。给出了用SAW技术实现MSK信号的各种方法和结构的实验结果,结果是优良的。 文中我们提出了MSK-SAW发生器的一种新结构。     

陶瓷SAW电视中频滤波器

本文报告了陶瓷SAW电视中频滤波器的研制,着重讨论了器件的设计原理和采用多晶压电陶瓷材料制作SAW电视中频滤波器所带来的新的问题和困难,以及解决的具体方法.文中还提出了不同于国外且更有利于减小二阶效应的频率函数作为积木式单元,并将它与国外采用的进行了比较.     

热声转换的声表面波电压传感机制

提出了一种基于热声转换的高灵敏声表面波(SAW)电压传感机制并开展实验验证。从传热角度以及微扰理论出发建立了基于热声转换机制的SAW电压传感理论模型,探索了结构参数以及环境因素对SAW电压传感器灵敏度的影响规律。为了验证理论模型,在Y切石英基底上同芯片集成设计MEMS微型加热器与200 MHz声表面波器件以制备SAW电压传感器件,并搭建电压测试平台对传感器件开展性能测试。实验结果表明所制备的SAW传感器件电压与频率响应之间具有二次线性关系且在室温(20℃)下具有与理论相近的电压灵敏度(22.4 kHz/V),此外实验获得的环境温度对电压灵敏度的影响规律与理论相符。基于热声转换机制的SAW电压传感器能够显著的提高电压检测灵敏度。     

Influence on the propagation velocity of SAW by a force applied on surface

When a force is directly applied to the propagation surface of surface acoustic wave （SAW）, the velocity of SAW is varied. Then the loading force can be introduced by effective material coefficients and the velocity of SAW is calculated via the general Green＇s Function. The experimental results accord with the above numerical calculation very well. It also shows that the propagation loss will increase with the force load, and the velocity variation of SAW is proportional to the force loaded to the surfaces of SAW resonators, which has a high sensitivity about 5.97 m/s·N.     

基于反射型延迟线结构的无线无源声表面波测温系统

从传感器核心元件及无线测温雷达的优化设计出发,研制了一种集成电子标签的高性能声表面波(SAW)无线无源测温系统。基于耦合模(COM)理论对作为传感元件的反射型SAW延迟线进行了优化设计,基于仿真结果,实验研制了采用YZ LiNbO_3石英基片的434 MHz反射型SAW延迟线,该器件是由一个换能器与8个反射器构成的反射型延迟线,其中3个反射器用于温度检测,另外5个反射器则用于采用相位编码的电子标签。测试结果显示所研制的反射型SAW延迟线具有良好的时域特性与较高的信噪比,并与理论仿真结果极为吻合。设计并研制了采用步进调频(FSCW)模式的测温雷达,利用高精度高低温箱对所研制的无线无源SAW测温系统进行了无线测试,系统表现出良好的线性特性,测温准确度达到了士1℃以内。      

Interaction of a Surface Acoustic Wave with a Two-dimensional Electron Gas

When a surface acoustic wave （SAW） propagates on the surface of a GaAs semiconductor, coupling between electrons in the two-dimensional electron gas beneath the interface and the elastic host crystal through piezoelectric interaction will attenuate the SAW. The coupling coemcient is ~alculated for the SAW propagating along an arbitrary direction. It is found that the coupling strength is strongly dependent on the propagating direction. When the SAW propagates along the [011] direction, the coupling becomes quite weak.     

嵌入压电基底蜂窝状声子晶体声表面波带隙特性

提出了将部分镍圆柱体镶入128°YX-LiNbO₃基底的二维蜂窝状压电型声子晶体。用有限元法结合低反射边界条件计算并分析了该结构的能带结构与传输损失。结果显示:与倒圆锥体结构相比,镶入型结构具有更低的声表面波(SAW)带隙,原因是将部分柱体嵌入到基底中增加了共振体的质量。通过分析带隙边缘处振动本征模态结合传输损失发现,第一SAW带隙是由局域共振机理打开,第二SAW带隙同时具有Bragg散射特性和局域共振特性。应用质量弹簧振动系统估算了第一SAW带隙的起始频率,结果为82.98 MHz。此外,讨论了柱体几何参数对带隙特性的影响。该研究为微米尺度SAW声子晶体的带隙调控奠定了一定基础。      

TEMPERATURE DEPENDENCE OF FREQUENCY MEASUREMENT WITH SAW CZT PROCESSOR

Usually,frequency measurement with SAW chirp Z transform processor is something temperature depen-dent because of performance changes of SAW chirp delay lines used in processor with temperature.Hence,afull knowledge of the temperature dependence is necessary for practical processor design and compensation.So far,as we know,no adequate quantitative analysis has been given.In this paper a theoretical model is setup for the analysis of temperature dependence of ferequency measurement with a SAW CZT processorbased on time scale principle.A closed form expression is given to formulate the deviation of the measuredfrequency from the actual input when the temperature changes.The deviation is not only related with SAWtime delay temperature coefficient of the substrate used in SAW device and the parameters of SAW chirp de-lay lines,but also with the input frequency.A good agreement between our experiment and theory is shownand a reasonable explanation is given to the discrepancy between Claude Lardat‘s theory a     

REFLECTIVE CHARACTERISTICS OF SAW BY SLANTING METAL STRIP ARRAYS

The reflective characteristics of SAW by slanting metal strips on the surface of YZ-LiNbO_3 havebeen studied.By using both Simple Model and Multi-Reflection Model,the reflective characteristics ofSAW by a periodic metal strip array and the SAW distribution in the array have been calculated.Furthermore,By using an improved laser probe,the reflective SAW field by the array has also beenmeasured.By comparing the theoretical results with the experiments,it is shown that the results of Mul-ti-Reflection Model,being more exact than the Simple one,are in better agreement with the experiment     

应用于无线传感器的声表面波反射型延迟线的耦合模分析

基于耦合模理论对一种应用于无线传感器的声表面波(SAW)反射型延迟线的性能进行了优化模拟分析。结合混合等效电路模型推导出评价这种器件性能的时域反射系数S₁₁。典型的SAW反射型延迟线包含置于压电基片之上的一个换能器与沿声波传播方向设置的多个反射器。讨论了器件性能的各种结构性影响因素如换能器结构以及反射器类型等,并以此获得优化的器件设计参数。在理论优化分析的基础上,以41°YX LiNbO₃为压电基片,结合铝电极试验制作了采用单向单相换能器(SPUDT)与3个短路栅反射器的440 MHz SAW反射型延迟线器件,并与理论分析结果予以对比与评价分析。      

SAW卷积器在扩频通讯中的应用

本文介绍了SAW卷积器在扩频通讯中实现快捕的原理及一些实现方法,并对目前SAW弹性卷积器的性能、水平及国内外应用情况作了概述。     

Focusing of Surface Acoustic Wave on a Piezoelectric Crystal

We investigate the focusing phenomena of a surface acoustic wave （SAW） field generated by a circular-arc interdigital transducer （IDT） on a piezoelectric crystal. A rigorous vector field theory of surface excitation on the crystal we developed previously is used to evaluate the convergent SAW field instead of the prevalent scalar angular spectrum used in optics. The theoretical results show that the anisotropy of a medium has great impact on the focusing properties of the acoustic beams, such as focal length and symmetrical distributions near the focus. A dark field method is used in experiment to observe the focusing of the SAW tield optically. Although the convergent phenomena of SAW field on the anisotropic media or piezoelectric crystals are very complicated, the experimental data are in agreement with those from the rigorous theory.     

差分式SAW温度应变复合传感器*

本文基于声表面波(SAW)理论和微扰理论,首次提出了并研制由三个谐振器组成的差分式SAW 温度应变复合传感器。通过COMSOL对AT切型和XY切型的两种SAW谐振器进行了仿真,根据其频率-应变响应和频率-温度响应,设计并研制了能够进行温度补偿和应力应变补偿的温度应变传感器,传感器的应力测量灵敏度为100Hz/u,温度测量灵敏度为80kHz/。该传感器成功应用到了隔离开关的状态监测,现场测试表明,该传感器对隔离开关触指温度和应变的检测可实现对隔离开关工作状态的有效判别,在未来的电力系统设备在线检测中具有重要的应用前景。     

Investigation of titanium nitride coating by broadband laser ultrasonic spectroscopy

We present a laser ultrasonic method to investigate a titanium nitride(TiN) coating specimen.The technique is based on the principle of surface acoustic wave (SAW) dispersion during acoustic propagation on a half-space with the presence of a thin layer.Due to the high efficiency of laser line-source excitation,we have been able to generate and detect a SAW with an excellent signal-to-noise ratio in a wide frequency band.An inverse fitting algorithm was employed to extract simultaneously the thickness and the elastic parameters of the TiN coating from the experimental SAW velocity dispersion curve.     

THE DETECTION OF SAW FIELD IN PULSE COMPRESSOR BY LASER SCANNING PROBE

The theory of acousto-optic interaction for the SAW field with metal strip reflective arrays(MSRA)onthe piezoelectric substrate is presented.The original optical probe system is improved to detect and displaythe SAW distribution in the pulse compressor with MSRA deposited on the surface of YZ-LiNbO_3,and theresults are analysed and discussed briefly.     

高Q值的嵌陷换能器SAW沟槽谐振器的研制

嵌陷叉指换能器沟槽谐振器,不但具有SAW沟槽谐振器的Q值高,老化性能好的优点,而且能够克服处于谐振腔中的叉指电极对SAW的反射干扰畸变,可以一次光刻成型、重复性好,制作方便,叉指电极不易被磨损,是制作高基频谐振器频率源和窄带滤波器的较理想结构. 本文阐述此种沟槽谐振器的研制.目前研制的器件中心频率为102MHz,其中最好的获得了在空气中的无载Q=24000,带外抑制28dB,插入损失6dB的结果.此外,我们还对沟槽刻蚀深度和叉指换能器嵌陷情况对器件性能的影响,进行了实验研究.     

Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves

The surface acoustic wave （SAW） technique is a precise and nondestructive method to detect the mechanical charac- teristics of the thin low dielectric constant （low-k） film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is inves- tigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young＇s moduli of the Black DiamondTM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square （RMS） of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films.