由于表面粗糙引起的激光声表面波色散的实验和理论研究

表面粗糙是材料制造过程中必有的副产物, 粗糙表面会引起其中传播的声表面波的速度发生变化. 在利用激光声表面波对材料性质进行评估时, 常用宽带的激光声表面波速度频散特性对材料性质进行反演. 为了研究表面粗糙度是否能作为反演的特征参数之一, 本文建立了激光在表面粗糙样品中激发声表面波、聚偏氟乙烯换能器宽带接收声表面波的实验装置来研究不同粗糙度表面对声表面波速度的影响; 理论上建立了激光在粗糙表面中激发声表面波的计算模型, 利用有限元法得到声表面波的时域特征, 并进一步得到声表面波的速度色散曲线, 理论结果和实验结果能很好地拟合. 这为利用激光声表面波对表面粗糙的评估提供理论和实验依据. 关键词： 表面粗糙 激光声表面波 速度色散 聚偏氟乙烯传感器 有限元法     

A comparison of laser ultrasound measurements and finite element simulations for evaluating the elastic properties of tissue mimicking phantoms

Advances in the field of laser ultrasonics have opened up new possibilities in medical applications. This paper presents a finite element modelling technique, which studies laser generated surface acoustic waves in different concentration of soft tissue mimicking agar-agar phantoms. In addition, we propose a novel approach that utilises a low coherence interferometer to detect the laser-induced surface acoustic waves from the tissue mimicking phantoms. A Nd:YAG focused laser line-source is applied to the agar-agar phantoms, which as the same with the FE simulation. The generated SAW signals are detected by a time domain low coherence interferometry system. SAW phase velocity dispersion curves from both of the FE simulation and experiment are calculated. By comparison, we show that the experimental results agree well with those of the FE simulation and theoretical expectations. This study is the first report that a laser-generated SAW phase velocity dispersion technique is applied to soft materials. This technique may open a way for laser ultrasonics to detect the mechanical properties of soft tissues, such as skin.     

环形定子的激光致表面波机理及可视化探测研究

开展了用于新型激光驱动马达的环形定子的激光致表面波机理及实验研究. 提出一种带有凹槽阵列结构的环形定子新设计, 建立了激光在环形定子表面激发表面波的物理模型, 揭示了影响表面波幅值的关键因素; 采用一种新颖的激光致表面波可视化探测方法, 在波长1053 nm, 脉宽30 ns, 单脉冲能量1 mJ的激光激发下, 对表面波在铜质环形定子表面的传播特性进行了可视化探测实验. 理论与实验研究表明: 当激发光斑的位置紧邻凹槽阵列时, 沿着圆环向凹槽方向传播的表面波会被齿状凹槽阵列迅速衰减和吸收, 而沿着圆环向远离凹槽方向传播的表面波能够持续传递, 从而首次实现了激光致表面波在环形定子上的单向传播; 而对没有凹槽阵列结构的圆环进行的对比实验表明, 激光致表面波在圆环表面双向传播, 最终因相互混叠和串扰等而处于混乱状态. 由激光在该种环形定子表面激发出的单向表面波, 可望在光致表面波马达及驱动机构中获得应用. 关键词： 激光致表面波 环形定子 表面波可视化 激光驱动     

Frequency dependence of laser ultrasonic SAW phase velocities measurements

Advances in the field of laser ultrasonics have opened up new possibilities in applications in many areas. This paper verifies the relationship between phase velocities of different materials, including hard solid and soft solid, and the frequency range of SAW signal. We propose a novel approach that utilizes a low coherence interferometer to detect the laser-induced surface acoustic waves (SAWs). A Nd:YAG focused laser line-source is applied to steel, iron, plastic plates and a 3.5% agar–agar phantom. The generated SAW signals are detected by a time domain low coherence interferometry system. SAW phase velocity dispersion curves were calculated, from which the elasticity of the specimens was evaluated. The relationship between frequency content and phase velocities was analyzed. We show that the experimental results agreed well with those of the theoretical expectations.     

Investigation of surface acoustic waves in laser shock peened metals

Laser shock peening is a well-known method for extending the fatigue life of metal components by introducing near-surface compressive residual stress. The surface acoustic waves (SAWs) are dispersive when the near-surface properties of materials are changed. So the near-surface properties (such as the thickness of hardened layers, elastic properties, residual stresses, etc.) can be analyzed by the phase velocity dispersion. To study the propagation of SAWs in metal samples after peening, a more reasonable experimental method of broadband excitation and reception is introduced. The ultrasonic signals are excited by laser and received by polyvinylindene fluoride (PVDF) transducer. The SAW signals in aluminum alloy materials with different impact times by laser shock peening are detected. Signal spectrum and phase velocity dispersion curves of SAWs are analyzed. Moreover, reasons for dispersion are discussed.     

Photoacoustic diagnosis of human teeth using interferometric detection scheme

We have investigated the mechanical and acoustic properties of human teeth using the laser generation of surface acoustic wave (SAW) technique. The materials investigated included normal and decayed teeth, which have similar grain sizes and different thicknesses. The tissue responds to the laser-induced stress by thermoelastic expansion. The informative features of this method allow one to determine sample thermal, optical, and acoustical properties that depend on the peculiarities of the sample compositional structure. An interferometric detection experimental scheme is applied for detection generated SAW pulses. The surface displacement curves shape of normal and decayed human teeth are shown. The dispersion curves for SAW pulses were determined by Fourier analysis. The result is an almost linear dependence of SAW velocity on frequency for a normal tooth, the magnitude of the thermoelastic expansion of the normal tooth reaches its peak at 0.344 μs, a SAW phase velocity of 2500 ms^?1 between 0.0008 and 5 MHz was determined. For abnormal teeth, the magnitude of thermoelastic expansion of the normal tooth reaches its peak at 1.3 μs, the measured velocity was 3225 ms^?1. Due to the inhomogeneity of abnormal teeth perpendicular to the propagation direction, strong differences in their dispersion curves were obtained. The detection of acoustic waves is the basis of photoacoustic methods, which can be used for diagnostic purposes.     

Visualization of 50 MHz Surface Acoustic Wave Propagation Using Stroboscopic Phase-Shift Interferometry

A Stroboscopic phase-shift interferometry has been developed to visualize surface acoustic wave (SAW) propagation on SAW devices quantitatively. The developed interferometry is a Fizeau-type one with a multi-mode semiconductor laser diode and an optical isolator. With the laser light illuminating stroboscopically, observed interference intensity gives information about average displacements of the vibrations. Fifty MHz SAW propagation on the surface of the SAW device has been measured with the interferometry. Distribution of the SAW along the propagation path has been observed, whose amplitude is 3 nm (p-p). Repetition accuracy evaluated with the root mean square method is 1/2500 of the laser wavelength. The system is useful for estimating and improving performances of micro-devices.Presented at 1996 International Workshop on Interferometry (IWI ‘96), August 27-29, Saitama, Japan.     

固体中脉冲激光激发声表面波的理论研究

本文运用本征函数展开的方法对固体材料中脉冲激光激发的声表面波进行了理论研究，在考虑热弹激发的条件下，利用三维的轴对称模型，得到了脉冲激光光源的脉冲宽度以及聚焦半径对固体材料中声表面波信号的时域及频域的影响，对进行超短脉冲激光激发超声的研究具有指导意义。     

低频水下声信号的激光探测

根据表面波声光效应的原理,提出了一种低频水下声信号的激光探测技术,并建立了实验装置。在几十赫兹的低频段,对水下声源所产生的表面声波进行了探测。实验过程中,利用MATLAB软件对拍摄的衍射图样进行扫描分析,得到了衍射图样中条纹的像素差。根据波长与条纹间距的解析关系式,得到了低频液体表面声波波长,其大小在毫米量级。利用计算机编程,根据最小二乘法拟合色散关系的回归曲线,测量结果与理论色散关系吻合。该方法具有实时、非接触的特点。     

Efficient intensity modulation due to surface acoustic waves on windows of the AlGaN/InGaN multiple quantum well laser

An alternative method for modulation of light generated by AlGaN/InGaN multiple quantum well laser with quartz antireflective (AR) coatings covering the resonator windows was modelled and studied theoretically. Disturbance of the piezoelectric coatings caused by surface acoustic waves (SAW) results in efficient intensity modulation of the laser beam. The model for the laser diode operating at DC demonstrates that the modulation factor can exceed 0.2 in sub-nanometer SAW displacement. For quarter-wave AR films, the carrier frequency of modulated beam has twice the frequency of SAW.     

Laser-ultrasonic surface wave dispersion measurements on surface-treated metals

Surface acoustic wave (SAW) velocity spectroscopy has been long considered to be one of the leading candidates for nondestructive characterization of surface-treated metals because of its ability to probe the material properties at different penetration depths depending on the inspection frequency. We developed a high-precision laser-ultrasonic technique to study the feasibility of SAW dispersion spectroscopy for residual stress assessment on shot-peened metals. This technique is capable of measuring SAW dispersion with a relative error of 0.1% over a frequency range from 2 to 15 MHz. Our experimental results obtained from shot-peened aluminum 2024-T351 samples indicate that the dispersion of the surface wave is a superposition of different effects of surface treatment in the material, including surface roughness, compressive residual stress, and cold work. Although the surface roughness induced component is often the dominating part of the overall dispersion, the experimental results also indicate that it is feasible to observe a perceivable change in the dispersion of the SAW when the specimen is heat-treated at different temperatures, which has no perceivable effect on the surface roughness. The part of the dispersion, which changes during annealing via thermal relaxation, is due to near-surface residual stresses and the decay of texture, although at high frequencies nonuniform grain coarsening could also play a significant role.     

Effects of surface roughness on surface acoustic wave propagation in semiconductor materials

The effect of surface roughness on adhesion and tribological properties of films and interfaces is of key importance. Therefore, it is of utmost importance to be able to measure this quantity and to predict the effects that different roughness levels may cause. Roughness affects the propagation of surface acoustic waves on a material but there is little useful quantitative data on the topic. This work investigates the dispersive effect of roughness on surface acoustic wavepackets (30-200 MHz frequency range) for different degrees of nanometer roughness on silicon (0 0 1) and (1 1 1) surfaces, we show that the roughness-induced frequency dispersion effect is significant, and that although available theories agree qualitatively with the results, the theory is not adequate to predict the real SAW dispersion. These experimental results have considerable implications for design of SAW devices, for accuracy of Brillouin spectroscopy measurements, and for possible applications to non-destructive testing of materials. Previously unknown dispersive effects on anisotropic crystal surfaces are also demonstrated.     

SAW spectral characteristics of the YZ-LiNbO3-thin-lead-film layered structure

An acousto-optical study of the effect of a lead film on propagation of high-power surface acoustic waves (SAW) along the Z direction on the Y cut of LiNbO₃ is reported. The presence of the metal film has been found to stimulate spatial oscillations of SAW components and suppress the onset of nonlinearity. If the film is more narrow than the SAW aperture, one observes considerable inflow of acoustic energy from the free surface to the film region. A study of the film-induced sound-velocity dispersion revealed it to have a linear pattern. An analysis of the results within the present theoretical models of soliton development showed that a soliton-like monopulse can form only if a very thin (～150 Å) lead film is present.     

低频声表面波对细激光束的衍射效应

对于频率为几十赫兹的液体表面声波,实验上观察到反射光所形成的稳定、清晰的激光干涉图样.改变表面声波振幅,进一步发现了干涉图样的调制效应.调制效应明显地表现为干涉条纹的缺级,并且随表面声波振幅变化.依据波动光学原理,分析了调制作用下光束干涉所产生的光强解析分布及条纹特征,得到了干涉条纹角宽度与表面声波之间的解析关系,并据此对表面声波的特性参量波长和振幅及各级条纹相对光强分布规律进行了测定.     

新型声表面波电流传感器*

将声表面波技术的快速响应特点与磁致伸缩薄膜的高磁敏特点相结合,可实现一种快速、高灵敏、稳定可靠的新型电流检测技术。传感器由双通道差分式振荡器与沉积在传感通道器件表面的声传播路径上的磁致伸缩薄膜组成。该文基于分层介质中声传播理论及磁致伸缩效应,对声表面波电流传感机理进行了分析,以实现对传感器结构的优化设计。实验研制了采用铁钴(FeCo)薄膜的声表面波电流传感器,测试结果表明,该传感器具有快速响应和高灵敏特点。为抑制磁致伸缩薄膜自身的剩磁效应所带来的高磁滞误差,采用的有效途径是将沉积的磁致伸缩薄膜进行图形化设计。实验结果表明,采用栅阵化FeCo薄膜结构的传感器表现出更高检测灵敏度、更好线性及更低的磁滞误差。     

Simulation on laser-induced surface acoustic wave on isotropic cylinders by finite element method

Based on the thermoelastic theory, a finite element model is developed to simulate the process of laser inducing ultrasonic field in isotropic cylinders, which can take the temperature dependence of thermal parameters into account. Using the finite element model, we have simulated the ultrasonic fields induced by a pulse laser line source impacting on the generatrix of aluminum cylinders with different diameters. And the intact waveforms of surface acoustic wave (SAW including cylindrical Rayleigh and Whispering gallery (WG) modes) are presented, which are in very good agreement with the calculated and experimental waveforms in other literatures. Furthermore, the dispersion properties of cylindrical Rayleigh waves are analyzed by the method of phase spectral analysis, and the results show that with the increasing frequency, the phase velocity of cylindrical Rayleigh wave rapidly increases to the maximum value, and then gradually decreases to that of plane Rayleigh wave. With the diameter of cylinder decreasing, the maximum value of phase velocity and the corresponding frequency increase.     

Acoustic wave effects on catalysis: design of surfaces with artificially controllable functions for chemical reactions

The effects of surface acoustic wave (SAW) and resonance oscillation (RO) of bulk acoustic waves on the catalysis of metals were studied in an attempt to design a catalyst surface with artificially controllable functions for chemical reactions. In ethanol decomposition on a thin Cu film catalyst deposited on the propagation path of a shear horizontal leaky SAW, the SAW-on increased the activity for ethylene production remarkably but a little for acetaldehyde production. A poled ferroelectric z-cut LiNbO₃ with a thickness extensional mode RO (TERO) and a x-cut LiNbO₃ with a thickness shear mode RO (TSRO) were employed as a substrate, on which a thin Ag film catalyst was deposited. For ethanol decomposition, TERO increased ethylene production activity and the selectivity for ethylene production from 79 to 96%, whereas TSRO caused little activity enhancement for both ethylene and acetaldehyde production. The combination with the results of laser Doppler measurements showed that the activity enhancement and selectivity changes with SAW and RO of the acoustic waves are associated with dynamic large lattice displacement vertical to the surface.     

High frequency SAW devices based on third harmonic generation

We demonstrate the third harmonic generation in a ZnO/Si layered structure to obtain high frequency SAW devices. This configuration eliminates the need of high lithography resolution and allows easy integration of such devices and electronics on the same wafer. A theoretical study was carried out for the determination of the phase velocity and the electromechanical coupling coefficient (K²) dispersion curves of the surface acoustic waves. These results are also in agreement with those measured on a SAW filter designed for the third harmonic generation and the operating frequency is up to 2468 MHz.     

Velocity of a SAW propagating in a 2D phononic crystal

We have studied the propagation of a surface acoustic waves (SAW), in a structure constituted by a 2D phononic film (a few micrometers thick and having lattice constants of a few hundreds of micrometers in the two directions of the propagation plane) deposited onto a homogeneous semi-infinite substrate. First, we have calculated the dispersion relations of the acoustic modes by using a plane waves expansion method. We found that the surface branch exhibits both the folding effect and a band gap for the propagation along some particular directions. This is a very interesting result which demonstrates that the effects related to the existence of the band gap (sound velocity dispersion, diffraction, refraction, ultrasound tunneling, etc.) can all appear, even if the thickness of the phononic film is much less than the penetration depth of the SAW. Then, we used an all-optical technique to monitor the spectral content of the SAW propagating along the GammaX direction in the reduced Brillouin zone. We show that a wave with frequency in the stop band, is destructively diffracted after it propagates through less than ten periods. Finally, we report on measurements of the Rayleigh wave phase velocity and we show that the transit time is independent of the distance traveled inside the phononic crystal, suggesting that tunneling trough the sample is involved.