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 共查询到10条相似文献,搜索用时 109 毫秒
1.
江秀娟  李菁辉  朱俭  林尊琪 《物理学报》2015,64(5):54201-054201
本文对基于简单透镜列阵的大口径激光均匀辐照光学系统的调焦能力进行了研究, 结果表明, 改变透镜列阵与靶镜之间的距离即可方便地改变靶面上光斑的大小. 文中详细分析了相关参数对调焦能力的影响, 并在此基础上设计出一个实用的光学系统. 用数值方法模拟了激光束通过光学系统后的传输, 发现尺寸不同的靶面光斑具有基本一致的强度结构特征. 定量地分析了光斑内部散斑间隔、调制对比度、顶部不均匀度及能量集中度等描述光斑均匀辐照质量的指标, 并研究了它们随靶面离焦量的变化关系.  相似文献   

2.
李淑红  牛憨笨 《光子学报》1997,26(10):941-945
本文讨论了时间分辨电子显微镜中电子束聚焦系统的设计.设计的聚焦系统为磁聚焦双聚光镜系统.采用有限元素法计算了聚焦系统的磁场分布,用Runge-Kutta法追迹了电子的运动轨迹,并给出了当样品面上照明光斑的尺寸为设计值时双聚光镜系统的工作参数.采用该双聚光镜系统可为样品提供1μm的照明光斑,满足了时间分辨电子显微镜实现10nm的空间分辨率、100ps的时间分辨率的要求.  相似文献   

3.
A comparative study of two methods used for dynamic focusing of ultrasound: the conventional phased arrays and a new method based on time reversal of acoustic signals is carried out. A laboratory model of the focusing system based on time reversal is developed and manufactured. One of the principal elements of the system is a reverberator with several piezoelectric transducers attached to its walls. Experiments are carried out to demonstrate the ability of such a system to generate one focus or several foci and to steer them electronically at considerable distances (50 mm at minimum) off the axis of the focusing system without causing the appearance of any grating lobes or other secondary intensity maxima. The focusing properties of the system are compared with the results of numerical simulation of two-dimensional phased arrays, whose parameters are taken to be typical for the arrays used in extracorporeal surgery. The important role of randomization is demonstrated for both of the aforementioned focusing methods. The prospects of practical application of the two methods are discussed.  相似文献   

4.
基于聚焦评价函数的自动调焦方法的研究   总被引:2,自引:0,他引:2  
针对使用图像清晰度的聚焦评价函数来实现显微镜系统中的自动调焦,介绍了几种常用的图像清晰度聚焦评价函数,在自动倒置显微镜下进行大量的实验,分别利用这几种函数对采集到的图像进行评价分析。研究结果表明,在显微镜系统下利用基于梯度类图像清晰度评价函数拉普拉斯(Laplacian)算子可以有效地抑止噪声干扰,并且单峰性、重复性和稳定性都比较良好,能实现快速高效的自动调焦。  相似文献   

5.
投影光刻机硅片调焦调平测量模型   总被引:4,自引:1,他引:4  
李小平  陈飞彪 《光学学报》2007,27(11):1987-1991
成像质量是光学光刻机的最主要指标,硅片调焦调平测量是光刻机控制成像质量的基础.为此建立了硅片调焦调平测量系统单个测量点的测量模型,并根据硅片形貌标准和集成电路尺寸标准,推导了近似运算规则,简化了曝光场高度与测量光斑在光电探测器上的位置之间的数学关系.运用最小二乘法和平面拟合曝光场曲面的方法,推导了基于多个测量点的曝光场高度和倾斜测量的数学模型.该模型能满足调焦调平实时测量和控制的需要,可用于测量精度优于10 nm的高精度调焦调平测量系统,能满足线宽小于100 nm投影步进扫描光刻机的需要.  相似文献   

6.
We study a possibility of improving the YerPhI synchrotron by changing the magnet structure of accelerating ring so that the beam dynamics preserves its stability. The proposed changes in magnet structure allow one to get free intervals of sufficient length between the magnets which will be used for installing the system of multiturn injection and ejection of the beam as well as for installing a “cooling” system for the ion beam acceleration. Besides, additional focusing or defocusing magnets may be installed in the formed long free intervals for more effective control of the “working point” location, as well as the sextupole magnets may be installed for control of the chromaticity of the beam.  相似文献   

7.
梁向春  陈泽尊 《光学学报》1992,12(3):13-217
由正六边形的球面透镜列阵和一个非球面的主聚焦透镜组成的聚焦系统,用于改善高功率激光(10~(12)W)聚焦照明靶面的均匀性,得到实验上的证明.文中报道了采用这个聚焦系统进行的激光驱动高压冲击波实验,显示出了均匀照明对改善激光冲击波平面性的良好的效果.  相似文献   

8.
The focusing of weak three-dimensional shock waves at an arête is examined. By aligning the co-ordinate system with the principal directions on the initial shock surface, it is shown that the focusing of an arbitrary three-dimensional shock may be regarded as locally two-dimensional. In addition, the scaling relating the two problems is given explicitly.  相似文献   

9.
 介绍了一种新型的多极式偏转器——8瓣状多极偏转器,它可通过将一旋转对称电极均匀开槽切割为8片而成。通过对圆周上各电极电位分布作傅里叶分析,获得了在其内部产生近乎均匀横向偏转场所需要的电极电位设置规律。由于其结构上的旋转对称性以及Laplace方程解的调和性,当在此8瓣偏转器各电极上同时叠加一聚焦透镜所需电位时,它所产生的场中多极场分量为16极场或者更多极场而不影响近轴区的聚焦效果,因而其能与常用的圆筒形电极相结合而形成复合聚焦-偏转系统。其具有的聚焦偏转特性也通过相关的定性分析得以验证。同时,这样结构上的优化也为变像管的小型化设计提供了可能性。  相似文献   

10.
This work describes a real-time echographic imaging device with lateral scanning and a new process for dynamic focusing. While, in reception, a time varying focus is a well-established process, the system that we propose is able to perform dynamic focusing also in transmission. This is carried out by emitting several acoustic pulses focused in different regions. This process, which we call dynamic focused insonification, gives good results and can be used either alone or in connection with dynamic focusing in reception.  相似文献   

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