Influence of thermal treatment of low dielectric constant SiOC(H) films using MTES/O2 deposited by PECVD

Low dielectric constant SiOC(H) films are deposited on p-type Si(100) substrates by plasma enhanced chemical vapor deposition (PECVD) using methyltriethoxysilane (MTES, C₇H₁₈O₃Si) and oxygen gas as precursors. The SiOC(H) films are deposited at room temperature, 100, 200, 300 and 400 °C and then annealed at 100, 200, 300 and 400 °C temperatures for 30 min in vacuum. The influence of deposition temperature and annealing on SiOC(H) films are investigated. Film thickness and refractive index are measured by field emission scanning electron microscopy and ellipsometry, respectively. Chemical bonding characteristics of as-deposited and annealed films are investigated by Fourier transform infrared (FTIR) spectroscopy in the absorbance mode. As more carbon atoms are incorporated into the SiOC(H) films, both film density and refractive index are decreased due to nano pore structure of the film. In the SiOC(H) film, CH₃ group as an end group is introduced into OSiO network, thereby reducing the density to decrease the dielectric constant thereof. The dielectric constant of SiOC(H) film is evaluated by C-V measurements using metal-insulator-semiconductor (MIS), Al/SiOC(H)/p-Si structure and it is found to be as low as 2.2 for annealed samples deposited at 400 °C.     

Near infrared spectroscopy of organic acids: comparing OH and CH oscillator frequencies and intensities

This work investigates the vibrational spectroscopy of a series of organic acids, CH₃(CH₂)_nCOOH (n = 1-5), previously unobserved in the IR and near-IR (2000-15 000 cm⁻¹). The work obtains frequencies and relative intensities for all OH and CH stretching transitions. Comparison of the frequencies and intensities of CH and OH stretching transitions reveal interesting trends in acid chain length that are discussed. Literature values for acetic acid (CH₃COOH) and formic acid (HCOOH) are used to gain a broader understanding for the spectroscopy of the organic acids CH₃(CH₂)_nCOOH. The observation of several combination bands involving the CH and OH stretching vibrations and possible rotational isomer and hot band transitions are reported.     

Structural study of thin films prepared from tungstate glass matrix by Raman and X-ray absorption spectroscopy

Thin films were prepared using glass precursors obtained in the ternary system NaPO₃BaF₂WO₃ and the binary system NaPO₃WO₃ with high concentrations of WO₃ (above 40% molar). Vitreous samples have been used as a target to prepare thin films. Such films were deposited using the electron beam evaporation method onto soda-lime glass substrates. Several structural characterizations were performed by Raman spectroscopy and X-ray Absorption Near Edge Spectroscopy (XANES) at the tungsten L_I and L_III absorption edges. XANES investigations showed that tungsten atoms are only sixfold coordinated (octahedral WO₆) and that these films are free of tungstate tetrahedral units (WO₄). In addition, Raman spectroscopy allowed identifying a break in the linear phosphate chains as the amount of WO₃ increases and the formation of POW bonds in the films network indicating the intermediary behavior of WO₆ octahedra in the film network. Based on XANES data, we suggested a new attribution of several Raman absorption bands which allowed identifying the presence of WO⁻ and WO terminal bonds and a progressive apparition of WOW bridging bonds for the most WO₃ concentrated samples (above 40% molar) attributed to the formation of WO₆ clusters.     

Low temperature catalytic performance of nanosized TiNiO for oxidative dehydrogenation of propane to propene

Nanosized TiNiO catalysts prepared by a modified sol-gel method have been investigated in the oxidative dehydrogenation of propane (ODP) to propene. At 300 °C the yield to propene of 12.1% was obtained on 9.1 wt.% TiNiO catalyst with the selectivity of 43%. The continued variety of lattice parameter and variation of chemical value of nickel and titanium ion on the surface indicates that there are strong interactions of TiO₂ and NiO. The decreased low temperature oxygen desorption and the weaker reducibility seems to be responsible for the decreased activity and enhanced selectivity of propane oxidative dehydrogenation over TiNiO catalysts.     

Pulsed laser ablation of borax target in vacuum and hydrogen DC glow discharges

The aim of our experiment was to produce a material with BH bonds for applications in hydrogen storage and generation. By using KrF excimer laser (λ = 248 nm) ablation of borax (Na₂B₄O₇) target, thin films were deposited on KBr and silicon substrates. Ablation was performed both in vacuum and in hydrogen atmosphere. DC glow discharge technique was utilized to enhance hydrogen gas ionization. Experiments were performed using laser fluence from 5 to 20 J/cm². Films were deposited under gas pressure of 1 × 10⁻⁵ to 5 × 10⁻² mbar and substrate temperatures of 130-450 °C. Scanning electron microscopy analysis of films showed presence of circular particulates. Film thickness, roughness and particulates number increased with increase in laser fluence. Energy dispersive X-ray spectroscopy analysis shows that sodium content in the particulates is higher than in the target. This effect is discussed in terms of atomic arrangements (both at surface and bulk) in systems where ionic and covalent bonds are present and by looking at the increased surface/bulk ratio of the particulates with respect to the deposited films. The Fourier transform infrared spectroscopy measurements showed presence of BO stretching and BOB bending bonds. Possible reasons for absence of BH bonds are attributed to binding enthalpy of the competing molecules.     

Surface modification of poly(propylene carbonate) by oxygen ion implantation

Poly(propylene carbonate) (PPC) was implanted by oxygen ion with energy of 40 keV. The influence of experimental parameters was investigated by varying ion fluence from 1 × 10¹² to 1 × 10¹⁵ ions/cm². XPS, SEM, surface roughness, wettability, hardness, and modulus were employed to investigate structure and properties of the as-implanted PPC samples. Eight chemical groups, i.e., carbon, CH, COC, CO, OCO, CO, , and groups were observed on surfaces of the as-implanted samples. The species and relative intensities of the chemical groups changed with increasing ion fluence. SEM images displayed that irradiation damage was related strongly with ion fluence. Both surface-recovering and shrunken behavior were observed on surface of the PPC sample implanted with fluence of 1 × 10¹⁵ ions/cm². As increasing ion fluence, the surface roughness of the as-implanted PPC samples increased firstly, reached the maximum value of 159 nm, and finally decreased down the minimum value. The water droplet contact angle of the as-implanted PPC samples changed gradually with fluence, and reached the minimum value of 70° with fluence of 1 × 10¹⁵ ions/cm². The hardness and modulus of the as-implanted PPC samples increased with increasing ion fluence, and reached their corresponding maximum values with fluence of 1 × 10¹⁵ ions/cm². The experimental results revealed that oxygen ion fluence closely affected surface chemical group, morphology, surface roughness, wettability, and mechanical properties of the as-implanted PPC samples.     

Pre-treatments applied to oxidized aluminum surfaces to modify the interfacial bonding with bis-1,2-(triethoxysilyl)ethane (BTSE): Part I. High-purity Al with native oxide

A remote microwave-generated H₂ plasma and heating to 250 °C were separately used to modify high-purity oxidized aluminum surfaces and to assess whether these treatments can help enhance adhesion with bis-1,2-(triethoxysilyl)ethane (BTSE) coatings. Different initial oxide surfaces were considered, corresponding to the native oxide and to surfaces formed by the Forest Products Laboratory (FPL) treatment applied for either 15 or 60 min. BTSE is applied from solution at pH 4, and competing processes of etching, protonation (to form OH groups) and coupling (to form AlOSi interfacial bonds) occur at the solid-liquid interface. Scanning electron microscopy (SEM) was used to determine how the topographies of the modified Al surfaces changed with the different pre-treatments and with exposure to a buffer solution of pH 4. Secondary-ion mass spectrometry (SIMS) was used to determine the direct amount of AlOSi interfacial bonds by measuring the ratio of peak intensities 71-70 amu, while X-ray photoelectron spectroscopy (XPS) was used to determine the overall strength of the silane coating adhesion by measuring the Si 2p signals before and after application of an ultrasonic rinse to the coated sample. Measured Al 2p and O 1s spectra helped assess how the different pre-treatments modified the various Al oxidized surfaces prior to BTSE coating. Pre-treated samples that showed increased AlOSi bonding after BTSE coating corresponded to surfaces, which did not show evidence of significant etching after exposure to a pH 4 environment. This suggests that such surfaces are more receptive to the coupling reaction during exposure to the BTSE coating solution. These surfaces include all H₂ plasma-treated samples, the heated native oxide and the sample that only received the 15 min FPL treatment. In contrast, other surfaces that show evidence of etching in pH 4 environments are samples that received lower amounts of AlOSi interfacial bonding. Overall, heating improved the BTSE adhesive bonding for the native Al oxide, while H₂ plasma treatment improved the BTSE bonding for surfaces that had initially been FPL-treated for 15 and 60 min.     

Preparation of visible-light responsive PF-codoped TiO2 nanotubes

Fabrication of PF-codoped TiO₂ nanotubes was carried out using a one-step electrochemical anodization process by tailoring the composition of the electrolyte with the aim of PF-codoping to extend the optical absorption of TiO₂ to the visible-light region. The as-prepared PF-codoped TiO₂ nanotubes were characterized by SEM, XPS, and UV-vis diffuse reflectance absorption spectra (DRS). The results showed that the tube diameter of the nanotubes was approximately 100 nm and the tube length was approximately 510 nm. The phosphorus and fluorine were successfully doped into TiO₂ nanotubes, as evidenced by XPS. Moreover, the PF-codoped samples displayed remarkably strong visible-light response.     

UV assisted oxidation and nitridation of hafnia based thin films for alternate gate dielectric applications

The synergistic effects of NH₃ ambient and ultraviolet illumination on the dielectric properties of hafnia based gate dielectrics are reported in this paper. The films were processed at relatively low temperatures (∼400 °C) by pulsed laser ablation and UV oxidation technique. UV illumination and the NH₃ ambient created a thin and a denser interfacial layer (at the film-Si interface) comprised of HfSiON bonding. As a result of the interfacial layer modification, a leakage current density lower than 10⁻⁴ A/cm² and a dielectric constant of ∼21.7 were extracted from the best samples processed in NH₃ and under UV illumination. The nitrogen doped HfO₂ also exhibited a thinner interfacial layer (∼12 Å) in comparison to the films processed without NH₃ ambient.     

Ab initio studies of electronic spectra of the linear aluminum-bearing carbon chains AlC2nH (n = 1-5)

Geometries and stabilities of the linear aluminum-bearing carbon chains AlC_2nH (n = 1-5) in their ground states have been explored by the DFT-B3LYP and RCCSD(T) methods. Structures of the X¹Σ⁺ and 1¹Π electronic states have also been optimized by the CASSCF approach. The studies indicate that these species have single-triple bond alternate pattern, AlCCCC?CCH, and the electronic excitation from X¹Σ⁺ to 1¹Π leads to the shortening of the AlC bonds. The vertical excitation energies of the 1¹Π ← X¹Σ⁺ and 2¹Π ← X¹Σ⁺ transitions for AlC_2nH (n = 1-5) have been investigated by the CASPT2, EOM-CCSD, and TD-B3LYP levels of theory with the cc-pVTZ basis set, respectively. CASPT2-predicted 1¹Π ← X¹Σ⁺ transition energies are 3.57, 3.44, 3.33, 3.26, and 3.21 eV, respectively. For AlC₂H, our estimate agrees very well with the experimental value of 3.57 eV. In addition, the AlC bond dissociation energies and the exponential-decay curves for these vertical excitation energies are also discussed.     

Anharmonic force field and equilibrium structure of nitric acid

The quadratic, cubic and semi-diagonal quartic force field of nitric acid has been calculated at the CCSD(T) level of theory employing a basis set of triple-ζ quality. A semi-experimental equilibrium structure has been derived from experimental ground state rotational constants and rovibrational interaction parameters calculated from the ab initio force field. It is found that the A and B semi-experimental equilibrium rotational constants of the ¹⁸O isotopologues (for which the rotation of principal axes is large) cannot be accurately reproduced. This problem is discussed and a remedy is proposed. Finally, the semi-experimental structure is in agreement with the ab initio structure calculated at the CCSD(T) level of theory using a basis set of at least quadruple-ζ quality and a core correlation correction, except for the long NO single bond for which the CCSD(T) value is too short due to inadequate treatment of electron correlation. The empirical structures are also determined and their accuracy is discussed. The best equilibrium structure is: r_e(NO_syn) = 1.209(1) Å, r_e(NO_anti) = 1.194(1) Å, r_e(NO) = 1.397(1) Å, r_e(OH) = 0.968(1) Å, ∠(ONO_syn) = 115.8(1)°, ∠(ONO_anti) = 114.2(1)° and ∠(NOH) = 102.2(1)°.     

The surface modification of nanoporous SiOx thin films with a monofunctional organosilane

The surfaces of nanostructured, porous SiO_x/Si (air-oxidized Si) and SiO_x thin films, deposited by excimer laser ablation in He and He + O₂ gas ambients, respectively, have been modified by the deposition of a monofunctional organosilane. They were characterized using photoacoustic Fourier-transform infrared (FTIR) X-ray photoelectron (XPS) spectroscopies, and field-emission scanning electron microscopy (FESEM). Photoacoustic FTIR analysis indicates that the organosilane has hydrolyzed to form a silanol, which has chemically reacted with SiO_x through its surface silanol (SiOH) group, to form siloxane (SiOSi) structures. An enhanced IR spectral signal is found, due to the expansion and contraction of both the pores of the solid and the gas within them.     

Improvement of photoluminescence properties of porous silicon by silica passivation

Porous silicon (PS) was passivated by silica film using a sol-gel method; the photoluminescence (PL) properties were significantly improved; namely, PL intensity and stability increased and PL peak shifted to shorter wavelength. Scanning electron microscope (SEM) and Fourier transformed infrared spectroscope (FTIR) results indicated that silica passivation produced a compact film on the PS surface and modified the surface state of PS. The number of stable surface bonds (HSiO₃, HSiSiO₂ and H₂SiO₂) increased due to the oxidation of SiH back-bonds during the gelation process, and thus the PL intensity and stability were improved. Moreover, the blue-shift of PL peak was determined due to the increase in the ratio of SiO/SiH.     

Configuration dependence of photon stimulated ion desorption from methyl ester compounds induced by core excitation

Photon stimulated ion desorption (PSID) from methyl ester terminated self-assembled monolayer (MHDA-SAM, HS(CH₂)₁₅COOCH₃) and methyl mercaptoacetate (MA, HSCH₂COOCH₃) on Ag has been investigated using soft X-ray in the C and O K-edge regions. In MHDA-SAM on Ag, site-selective ion desorption has been clearly observed at resonant core excitations of C_1s, O_1s(OCH₃) → σ^∗(OCH₃) and O_1s(OCH₃) → σ^∗(COCH₃). Ion intensity in MA on Ag is obviously reduced for (n = 1-3) at C_1s, O_1s(OCH₃) → σ^∗(OCH₃) excitations, and no site-selective reaction at O_1s(OCH₃) → σ^∗(COCH₃) excitations has been observed. These reactions may be influenced by configurational difference of reactive sites. It is suggested that surface effects on the selective reaction due to positioning methyl ester group near the surface plays an important role.     

Effects of NH3, O2, and N2 co-implantation on Cu out-diffusion and antimicrobial properties of copper plasma-implanted polyethylene

Metal antibacterial reagents are effective in the enhancement of the antimicrobial properties of medical polymers. However, incorporation of metal antibacterial reagents into polymers using conventional methods usually results in unstable antimicrobial effects. Our previous research demonstrates that plasma immersion ion implantation (PIII) can be used to effectively incorporate metal antibacterial reagents such as Cu into polyethylene (PE) in the near surface region up to several hundred nanometers without causing noticeable damage to the polymer matrix. In this work, various gases including NH₃, O₂, and N₂ were plasma-implanted in concert with Cu plasma immersion ion implantation to study the effects of these gas species on the release rate of Cu from the substrate. Our experimental results reveal that the copper depth profiles are not affected significantly by NH₃, O₂, or N₂ co-implantation and these gas elements have similar depth profiles as Cu. Chemical analyses demonstrate that polar functional CO, CO, CN, CN, and CN bonds formed in the substrate play an important role in regulating Cu out-diffusion. Among the three gas species, N₂ shows the best effects in regulating Cu out-diffusion and produces the best long term antibacterial properties. The Cu retention and out-diffusion mechanism in the ion-implanted polyethylene is described.     

The cleavage of the methane CH bond over PdO/H-BEA: A density functional theory study

Cluster models were used to represent the β-type cationic sites of the protonated beta zeolite (H-BEA) and the loading of PdO on these sites. The properties of these clusters and the cleavage of methane CH bond over these clusters were studied using density functional theory (DFT) method. The stability of H-BEA was enhanced due to the formation of hydrogen bonds. After PdO loading, the Pd atom bonds to four oxygen atoms among which three H-BEA framework oxygen atoms are included to form an approximate planar structure with Pd in the centre. This structure is very similar to that of bulk PdO. The acidic proton of H-BEA and the oxygen atom of PdO participate in the cleavage of methane CH bond, indicating that PdO is the active species for the activation of methane. Over the clusters constructed in the present work, the calculated energy barriers for the cleavage of methane CH bond are in the region between 17.54 and 21.02 kcal mol⁻¹.     

Magnesia formed on calcination of Mg(OH)2 prepared from natural bischofite

Calcination of magnesium hydroxide, which was prepared from natural bischofite MgCl₂·6H₂O, leading to dehydration 2(MgOH) → MgOMg + H₂O, is accompanied by transition of phase not only to MgO but also to MgO_x at x < 1 (assigned to Mg₄O₃) at moderate temperatures. At higher temperatures, MgO_x is completely transformed into MgO. Magnesium hydroxide and oxide heated at different temperatures were studied using the TEM, XRD, IR, PCS, TG-DTA, nitrogen and argon adsorption methods. The electronic structure of MgO and Mg₄O₃ was studied using the ab initio quantum chemical method with periodic conditions. According to TEM images, the morphology of particles changing from Mg(OH)₂ laminae to aggregates of interpenetrated MgO cubelets and foils depend strongly on the calcination temperature. Significant changes in surface area are observed mainly at 325-470 °C on desorption of a major portion of eliminated water corresponding to 28.4 wt.% at its total amount of 30.9 wt.%. Pore size distribution (PSD) is sensitive to treatment conditions and the main PSD peaks shift towards larger pore size with elevating temperature. The characteristics of the surface hydroxyls as well as of the bulk MgO bonds depend on heating conditions, as noticeable changes are observed in the XRD patterns and the IR spectra of the samples undergoing the mentioned transformation of phase Mg(OH)₂ → MgO_x → MgO.     

Carbon monoxide adsorption on Pd-deposited Cu(1 1 0) surface: Infrared reflection absorption and temperature programmed desorption studies

We investigated carbon monoxide (CO) adsorption and desorption behaviors on 0.1-nm-, 0.15-nm-, and 0.3-nm-thick-Pd-deposited Cu(1 1 0) surfaces using infrared reflection absorption (IRRAS) and temperature-programmed desorption (TPD) spectroscopic methods. CO was exposed to the 0.1-nm-thick-Pd/Cu(1 1 0) surface at the substrate temperature of 90 K. The IR band attributable to CO bonded to Cu atoms emerged at 2092 cm⁻¹: the band was located at 2100 cm⁻¹ at saturation coverage, with a shoulder at 2110 cm⁻¹. In addition to these bands, weak absorptions attributable to the PdCO bonds appeared at 2050 and 1960 cm⁻¹. With increasing Pd thickness, the Pd related-bands became increasingly prominent. Particularly at the early stage of exposure, the band at 2115 cm⁻¹ became visible. The band at 2117 cm⁻¹ dominated the spectra all through the exposures for the 0.3-nm-thick-Pd surface. The TPD spectra of the surfaces showed two remarkable features at around 220-250 and 320-390 K, ascribable ,respectively, to CuCO and PdCO. The desorption peaks shifted to higher temperatures with increasing Pd thickness. Based on the TPD and IRRAS results, we discuss the adsorption-desorption behaviors of CO on the Pd/Cu(1 1 0) surfaces.     

An XPS study of pulsed plasma polymerised allyl alcohol film growth on polyurethane

The growth of highly functionalised poly allyl alcohol films by pulsed plasma polymerisation of CH₂CHCH₂OH on biomedical grade polyurethane has been followed by X-ray photoelectron spectroscopy (XPS) and contact angle measurements. Film thickness is observed to increase approximately linearly with plasma modification time, suggesting a layer-by-layer growth mode of poly allyl alcohol. Water contact angle measurements reveal the change in the surface free energy of wetting decreases linearly with plasma modification up to the monolayer point after which a constant limiting value of −24 mJ m⁻² was attained. Films prepared at 20 W plasma power with a duty cycle of 10 μs:500 μs exhibit a high degree of hydroxyl (OH) retention with minimal fragmentation of the monomer observed. Increasing the plasma power up to 125 W is found to improve OH retention at the expense of ether formation generating films close to the monomer stoichiometry. Duty cycle plays an important role in controlling both film composition and thickness, with longer off times increasing OH retention, while longer on times enhance allyl alcohol film growth.     

Adsorption structure of phenylphosphonic acid on an alumina surface

The adsorption structure of phenylphosphonic acid (PPOA) on an alumina surface was investigated as a function of exposure and temperature using infrared reflected absorption spectroscopy (IRAS) and a Kelvin probe. The alumina surface was held at room temperature during deposition. At monolayer adsorption, PO and Phenyl-P bands are observed, which indicate the creation of POAl bonds. The aromatic ring plane is positioned perpendicular to the surface, i.e. deprotonated PPOA stands vertically on the surface. At multilayer adsorption, PO and POH bands appear in the spectra. The multilayer PPOA film starts to desorb at 400 K. From 400 to 700 K, the IRAS spectra are similar to the monolayer spectrum, indicating that the multilayer structure reverses to the monolayer-like PPOA adlayer by heating. The acid molecules start to desorb at 700 K.