Unified design of wavelength-independent deep-etched fused-silica gratings

We present a unified design of wavelength-independent deep-etched fused-silica gratings as polarizing beam splitters and polarization-independent two-port beam splitters by using the simplified modal method. By defining unified grating parameters as the ratio of incident wavelength to grating period and the ratio of groove depth to grating period, unified grating structures are found to be approximately wavelength-independent, which is based on the modal view of the accumulated phase difference of two excited propagating grating modes. Diffraction efficiencies given by the rigorous coupled-wave analysis (RCWA) verified this unified design at the wavelength of 1064 nm. It should be noted that this unified design of wavelength-independent gratings is an analytic result, which is impossible to be derived with the well-known numerical RCWA. Modal method is powerful and presents a clear physical picture for us to obtain this unified design. Therefore, this unified design can be used as a general guideline for designing deep-etched fused-silica gratings as beam splitters for practical applications from ultraviolet to near infrared.     

A reflective surface-relief two-layer grating for splitting beams with the polarization-selective property

A polarization-selective beam splitter is presented based on a reflective surface-relief two-layer grating with a metal slab. The grating is composed of two dielectric layers and a metal slab on the substrate. For TE polarization, efficiencies of 97.58% can be diffracted into the reflective −1st order. For TM polarization, two-port output of 47.55% and 47.11% can be split into the 0th order and the −1st order, respectively. Such a polarization-selective beam splitter can be fulfilled by one grating in reflection. The grating depths of two layers are optimized by using rigorous coupled-wave analysis with the given duty cycle of 0.6 and period of 1100 nm. The performance for different incident conditions is investigated when the incident wavelength and angle deviate from the central wavelength and the Bragg angle, respectively. For TM polarization, good uniformity can still be achieved within the given incident wavelength and angle regions. For TE polarization, the reflective polarization-selective beam splitter can have merits of wideband for different incident wavelengths.     

A mixed metal dielectric sandwiched grating for polarization-selective reflection

A mixed metal dielectric sandwiched grating is described for polarization-selective reflection. The novel grating is composed of substrate, metal slab, two dielectric grating layers, and covering layer. The polarization-selective grating is optimized by using rigorous coupled-wave analysis for the usual duty cycle of 0.5. With the optimized grating parameters, reflective efficiency of 96.49% can be diffracted into the −1st order for TE polarization. And two-port output of 48.26%/48.27% can be diffracted into the 0th and the −1st orders for TM polarization. Polarization-selective reflection with good performance can be obtained by the mixed metal dielectric sandwiched grating. The usual duty cycle of 0.5 makes it easy and simple to be fabricated for practical applications. Moreover, the polarization-selective beam splitter based on the mixed metal dielectric sandwiched grating has advantages of wide incident wavelength range for TE polarization and angular bandwidth for TM polarization.     

共振域矩形介质光栅的逆向设计

采用模态法研究了共振域光栅分束器及闪耀光栅等光学器件的设计原理及逆向设计方法,给出了-1级非偏振闪耀光栅的典型设计示例。研究表明,自准直角入射时,光束在光栅内传输将激发产生离散模,通过调节离散模透过光栅传输时的累积相位差,可对衍射光进行调控,实现偏振(非偏振)分束、偏振(非偏振)闪耀等功能。采用严格耦合波法对基于模态法逆向设计的-1级非偏振石英闪耀光栅的几何参数进行验证,计算结果显示两者非常吻合,证明了该方法的正确性。     

Grazing incidence off-plane lamellar grating as a beam splitter for a 1-Å free electron laser

A beam splitter based on the diffraction grating working in the grazing incidence conical diffraction is proposed for x-ray free-electron laser (XFEL) experiments with coherent beams in plasma and atomic physics. Such a beam splitter can provide undistorted wavefronts, high-power radiation scattering, and split beams with equal intensities, which propagate with delay along different paths to the target chamber of the XFEL end station. Using the PCGrate software based on rigorous electromagnetic theory and developed for the short-wavelength range, it is shown that the plane grating with lamellar groove profile of a certain depth, operating in grazing conical incidence mount (grooves are parallel to the incident beam), separates three beams in the ?1, 0, and +1 orders with close diffraction efficiency. Numerical simulation predicts 23–27% absolute efficiency for 0.1-nm incident radiation in each separated order of a bulk or multilayer grating, taking into account the atomic level roughnesses and interdiffusion. When using a multilayer coating based on Ru/C or Ru/B₄C pairs, the optimum grazing angle providing approximately equal efficiencies is ～1.038° which is four times higher than for the Pt-coated grating. Such optimization of radiation geometry, groove profile shape, and multilayer coating parameters can be performed for various XFEL wavelengths. The proposed grating, in addition to diffraction, technological, and design advantages over the beam splitter based on a set of perfect crystals, can be fabricated and tested using currently available methods.     

Deep silicon grating as high-extinction-ratio polarizing beam splitter

A deep binary silicon grating as high-extinction-ratio reflective polarizing beam splitter （PBS） at the wavelength of 1550 nm is presented. The design is based on the phenomenon of total internal reflection （TIR） by using the rigorous coupled wave analysis （RCWA）. The extinction ratio of the rectangular PBS grating can reach 2.5~105 with the optimum grating period of 397 nm and groove depth of 1.092 μm. The efficiencies of TM-polarized wave in the 0th order and TE-polarized wave in the -1st order can both reach unity at the Littrow angle. Holographic recording technology and inductively coupled plasma （ICP） etching could be used to fabricate the silicon PBS grating.     

Polarizing beam splitter based on a double-layer subwavelength grating

A Si–ZnS double-layer subwavelength grating is theoretically used as a high-efficient polarizing beam splitter. To design this structure, the rigorous coupled-wave analysis (RCWA) is applied to study the reflectivity and transmissivity for the TE and TM polarization, respectively. Simulation results show that both the zero-order reflection for TE polarization and the zero-order transmission for TM polarization can exceed 90% in a wide tunable working incident angle range from 48° to 72°. Moreover, the proposed polarizing beam splitter has a working wavelength that is in the range of 1500–1600 nm.     

Polarizing beam splitter of deep-etched triangular-groove fused-silica gratings

We investigated the use of a deep-etched fused-silica grating with triangular-shaped grooves as a highly efficient polarizing beam splitter (PBS). A triangular-groove PBS grating is designed at a wavelength of 1550 nm to be used in optical communication. When it is illuminated in Littrow mounting, the transmitted TE- and TM-polarized waves are mainly diffracted in the minus-first and zeroth orders, respectively. The design condition is based on the average differences of the grating mode indices, which is verified by using rigorous coupled-wave analysis. The designed PBS grating is highly efficient over the C+L band range for both TE and TM polarizations (>97.68%). It is shown that such a triangular-groove PBS grating can exhibit a higher diffraction efficiency, a larger extinction ratio, and less reflection loss than the binary-phase fused-silica PBS grating.     

The design of a polarizing beam splitter made from a dielectric rectangular-groove grating

It has been reported that a polarizing beam splitter based on a rectangular-groove grating (a grating polarizing beam splitter) can be easily designed for specific applications using the modal method. In this paper, the eigenvalue equation of the modal method is transformed to a new form. Using this new form of the eigenvalue equation, it is shown that the design of a grating polarizing beam splitter can be independent of the incident wavelength. The period and the groove depth can be designed using values normalized to the incident wavelength, which apply to a range of wavelengths as long as the effects of dispersion can be neglected. Numerical simulations of fused silica gratings are presented and analyzed. It is concluded that the preferable choice for the grating period is 0.8–0.9 times the incident wavelength.     

Broadband polarizing beam splitter based on the form birefringence of a subwavelength grating in the quasi-static domain

We propose a novel broadband polarizing beam splitter with a compact sandwich structure that has a subwavelength grating in the quasi-static domain as the filling. The design is based on effective-medium theory an anisotropic thin-film theory, and the performance is investigated with rigorous coupled-wave theory. The design results show that the structure can provide a high polarization extinction ratio in a broad spectral range.     

Optimal design of sub-wavelength metal rectangular gratings for polarizing beam splitter based on effective medium theory

A novel optimal design of sub-wavelength metal rectangular gratings for the polarizing beam splitter (PBS) is proposed. The method is based on effective medium theory and the method of designing single layer antireflection coating. The polarization performance of PBS is discussed by rigorous couple-wave analysis (RCWA) method at a wavelength of 1550~nm. The result shows that sub-wavelength metal rectangular grating is characterized by a high reflectivity, like metal films for TE polarization, and high transmissivity, like dielectric films for TM polarization. The optimal design accords well with the results simulated by RCWA method.     

Broad band beam splitter based on the double-groove fused silica grating

In this paper, we propose a broad band 1 × 3 beam splitter operating in the telecommunication wavelength band under normal incidence, this device consisting of a double-groove fused silica grating layer is designed with using the inverse mathematical method and rigorous vector diffraction theory. It is shown from our calculations that the device presents excellent beam splitter ability for TE polarization light with the average diffraction efficiencies is more than 95% over ∼100 nm wavelength range, moreover, the uniformity of our beam splitter is better than 2% in the whole wavelength band. Furthermore, the physical understanding of the diffraction behaviors taking place inside the beam splitter gratings can be explained by the modal method.     

Connecting-layer-based polarizing beam splitter grating with high efficiency for both TE and TM polarizations

We describe a novel polarizing beam splitter (PBS) of transmission connecting-layer-based grating, which can show high efficiency for TE polarization in the ?1st order and TM polarization in the 0th order. According to the modal method, grating duty cycle and period are prescribed to obtain high efficiency for TM polarization. Using the rigorous coupled-wave analysis, grating depth and thickness of the connecting layer are optimized to achieve high efficiency for TE polarization. The presented PBS has advantages of wideband properties for incident wavelength and angle. Most importantly, the efficiency is improved greatly for TE polarization compared with the reported PBS based on fused-silica grating.     

Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating

We have fabricated a novel device that acts as a quarter-wave plate at normal incidence and as a polarizing beam splitter at an angle of incidence of ~40 deg . The device is made from a multilayer (SiO(2) /Si(3)N(4)) surface-relief zeroth-order one-dimensional grating with a period of 0.3 mum . The device is designed for an operating wavelength of 632.8 nm. We designed the device by using rigorous coupled-wave analysis and fabricated it by direct-write electron-beam lithography and reactive ion etching. Measurements confirmed the performance of the device as a wave plate and as a polarizing beam splitter.     

计算机模拟双层矩形位相光栅的实时变分束特征

双层矩形光栅随入射角的不同可得到不同数目的光束。基于这一现象，通过改变双层光栅的入射角，并对其进行优化就可得到效率高且光强分布均匀的光束。对利用双层矩形相位光栅实时变分束特征制作新型分束器的方法进行了理论探讨，并对2束、3束、4束光分束分别进行了分析。通过计算机模拟，从理论上求出了优化参数，并对结果进行了讨论。理论分析表明， 通过对入射角进行优化可以得到衍射效率高且光强分布均匀的分束器。该研究为制作方便实用、造价低廉的分束器提供了理论基础。     

Polarizing beam splitter of a deep-etched fused-silica grating

We described a highly efficient polarizing beam splitter (PBS) of a deep-etched binary-phase fused-silica grating, where TE- and TM-polarized waves are mainly diffracted in the -1st and 0th orders, respectively. To achieve a high extinction ratio and diffraction efficiency, the grating depth and period are optimized by using rigorous coupled-wave analysis, which can be well explained based on the modal method with effective indices of the modes for TE/TM polarization. Holographic recording technology and inductively coupled plasma etching are employed to fabricate the fused-silica PBS grating. Experimental results of diffraction efficiencies approaching 80% for a TE-polarized wave in the -1st order and more than 85% for a TM-polarized wave in the 0th order were obtained at a wavelength of 1550 nm. Because of its compact structure and simple fabrication process, which is suitable for mass reproduction, a deep-etched fused-silica grating as a PBS should be a useful device for practical applications.     

Tunable multi-function broadband splitter with optical bistability based on surface plasmon

A tunable multi-function broadband splitter consisted of a silver film, Kerr medium and a silver grating sandwiched between linear dielectrics waveguides is proposed and numerically investigated. This splitter can realize the functions of the beam splitter, the polarization splitter and wavelength beam splitter. This surface plasmon based device provides a unique approach for polarization sensitive manipulation of light in an integrated circuit and will be essential for future classical and quantum information processes.     

基于金属狭缝阵列的各向异性偏振分束器

在金属-电介质结构的基础上提出了一种基于金属狭缝阵列的各向异性偏振分束器,并采用有限元法研究了横磁(TM)和横电(TE)偏振光入射后结构所表现出的负反射和镜面反射等特性.计算结果表明,当偏振光的入射角设定在20?—70?时,入射的TM光发生强烈的负反射,而TE光的负反射很弱,并随着波长的增加而急剧下降.分析可得偏振分束光栅的理想负反射点和反射面的完美对称响应效果.通过仿真得到了理想负反射点的取值范围.结合严格耦合波法软件,计算不同偏振光入射时负反射和镜面反射条件下的反射率,其消光比高达10~6.     

一种亚波长偏振分波/合波器的研制

针对传统偏振分束器窄波段、窄角度范围的不足,研制了一种在宽波段宽角度范围内具有180°分光功能的偏振分束器/耦合器。该器件基于线栅偏振器和亚波长光栅结构原理设计,利用半导体工艺的刻蚀技术制作。利用一维金属线栅对入射电磁波的偏振响应和亚波长光栅仅存在零级衍射的特性,实现了较宽的通带宽度与可接受角度范围、极大的分光角度、高消光比和低插入损耗。实验测得透射、反射消光比均大于20 dB,插入损耗小于0.5dB。通过自行搭建的微结构测试平台,测量了p、s光的透射率、反射率随入射角度变化的曲线,和严格耦合波理论模拟结果符合。深入分析了制作中的过刻蚀对性能产生的影响。     

Two-exposure quasi-common-path point diffraction interferometric phase microscopy using a four-step algorithm

A two-exposure nearly common-path point diffraction interferometric phase microscopy (IPM) is presented using polarization modulation and one-step grating shifting to implement quantitative phase imaging. The IPM is constructed by an improved Michelson configuration with a reflective grating, and its frequency spectrum generated by a circularly polarized object beam makes double copies through a beam splitter. One copy is low-pass filtered and reflected by a reflective pinhole mirror to create a reference beam, and the other copy is converted by a polarizer and then reflected by a reflective grating to achieve a 45° linearly polarized object beam. By the combination of a polarizing cube beam splitter with 45° tilted angle and a translation of the reflective grating with a π phase shift, four interferograms with π/2 phase shift can be obtained in two exposures. The standard four-step algorithm can then be used to reconstruct the phase of the specimen. The utility of the proposed method was demonstrated with measurements on a phase plate, cells and an oil drop.