Detailed profiling of CNTs arrays along the growth window in a floating catalyst reactor

We report a detailed longitudinal and depth profiles of multi-wall carbon nanotubes (CNTs) arrays synthesized using xylene and ferrocene in a floating catalyst reactor. Point to point analyses of the CNTs grown in a “growth window” with CNTs arrays longer than 0.5 mm were performed using optical microscopy, Raman spectroscopy, FESEM, high-resolution TGA/DTA, and TEM techniques. The heights of the CNTs arrays show a maximum at a mid point of the growth window, while a reverse trend of minimum is observed for iron-to-CNTs atomic ratios. The ratio of amorphous carbon to CNTs sharply increases along the growth window and from the bottom to top of CNTs arrays. The CNTs diameter also increases along the growth window, due to deposition of the amorphous carbon, which can be almost removed by temperature programmed oxidation up to around 500 °C. A base growth mechanism, the variations of catalyst content, residence time and temperature profile along the growth window, the adsorption and decomposition of polycyclic aromatic hydrocarbons to amorphous carbon, and a limited diffusion of hydrocarbon species through the arrays covered by excessive amorphous carbon may explain the results.     

快速生长超长定向碳纳米管阵列的制备及机理

 采用一种无模板的化学气相沉积法裂解金属有机物,以二茂铁为催化剂,二甲苯为碳源,利用单温炉加热装置在100 min内成功制备了2.7 mm超长定向碳纳米管阵列,生长速率高达27 μm·min^-1。运用扫描电子显微镜、透射电子显微镜、拉曼光谱对定向碳纳米管阵列进行形貌观察和表征,结果表明:制得的碳纳米管阵列具有优越的定向性和管结构,并且石墨化程度高。给出了快速生长超长定向碳纳米管阵列的优化制备条件,结合表征结果讨论了碳纳米管阵列的生长机制,认为超长碳纳米管阵列采用的是一种催化剂固定不动的开口生长方式,碳源和催化剂的连续供应保证了超长碳纳米管阵列的快速生长。     

Growth of multiwalled carbon nanotube arrays by chemical vapour deposition over iron catalyst and the effect of growth parameters

Multiwalled carbon nanotube (CNT) arrays were grown by catalytic thermal decomposition of acetylene, over Fe-catalyst deposited on Si-wafer in the temperature range 700-750 °C. The growth parameters were optimized to obtain dense arrays of multiwalled CNTs of uniform diameter. The vertical cross-section of the grown nanotube arrays reveals a quasi-vertical alignment of the nanotubes. The effect of varying the thickness of the catalyst layer and the effect of increasing the growth duration on the morphology and distribution of the grown nanotubes were studied. A scotch-tape test to check the strength of adhesion of the grown CNTs to the Si-substrate surface reveals a strong adhesion between the grown nanotubes and the substrate surface. Transmission electron microscopy analysis of the grown CNTs shows that the grown CNTs are multiwalled nanotubes with a bamboo structure, and follow the base-growth mechanism.     

Synthesis of carbon nanotubes on diamond-like carbon by the hot filament plasma-enhanced chemical vapor deposition method

Carbon nanotubes (CNTs) have attracted considerable attention as possible routes to device miniaturization due to their excellent mechanical, thermal, and electronic properties. These properties show great potential for devices such as field emission displays, transistors, and sensors. The growth of CNTs can be explained by interaction between small carbon patches and the metal catalyst. The metals such as nickel, cobalt, gold, iron, platinum, and palladium are used as the catalysts for the CNT growth. In this study, diamond-like carbon (DLC) was used for CNT growth as a nonmetallic catalyst layer. DLC films were deposited by a radio frequency (RF) plasma-enhanced chemical vapor deposition (RF-PECVD) method with a mixture of methane and hydrogen gases. CNTs were synthesized by a hot filament plasma-enhanced chemical vapor deposition (HF-PECVD) method with ammonia (NH₃) as a pretreatment gas and acetylene (C₂H₂) as a carbon source gas. The grown CNTs and the pretreated DLC films were observed using field emission scanning electron microscopy (FE-SEM) measurement, and the structure of the grown CNTs was analyzed by high resolution transmission scanning electron microscopy (HR-TEM). Also, using energy dispersive spectroscopy (EDS) measurement, we confirmed that only the carbon component remained on the substrate.     

Optimization of a thermal-CVD system for carbon nanotube growth

We illustrate the optimization of the operation of a thermal chemical vapor deposition (CVD) system for the growth of carbon nanotubes (CNT). We have studied the deposition parameters using the Taguchi matrix robust design approach. The CVD system, which employs solid precursors (camphor and ferrocene) carried by nitrogen gas flow through a hot deposition zone, where the deposition of carbon nanostructures takes place, involves a large number of tunable parameters that have to be optimized.With the aim of getting the best configuration for the development of massive and well-oriented CNT carpets, the Taguchi method allowed us to improve our system leading to the growth of extremely long CNTs (few millimeters) at a high deposition rate (500 nm/s) and yield (30% in weight of the carbon precursors feedstock), which were characterized by electron microscopy.We found that the growth temperature had the most important influence on the CNT diameter, whereas the substrate tilt wit respect to gas flow did not influence their growth (i.e. CNTs grow on every side of the silicon wafer substrates, always normal to the substrate surface). The carrier gas flow and catalyst concentration both showed a secondary impact on CNT growth, though they showed a consistent correlation to the growth temperature.     

Effects of Ni catalyst–substrate interaction on carbon nanotubes growth by CVD

An investigation of the effects of substrate type and various treatments on carbon nanotubes (CNT) growth, using an evaporated Ni thin film as a catalyst, is presented. Barrier layers of SiO₂, Si₃N₄, and TiN on Si were used as substrates. The catalyst-insulating substrate systems have been processed in several gaseous atmospheres (Ar, NH₃ and H₂) and in the temperature range 700–900 °C, in order to obtain the most appropriate morphology, size and density of catalyst particles as seeds for the subsequent CNT growth. On this kind of substrates, the smallest nanoparticles were obtained on SiO₂ layers, in H₂ or NH₃ atmosphere even at 700 °C. However, the best vertically aligned and well-graphitized CNT resulted from the NH₃ annealing process, followed by the CNT deposition at 900 °C in C₂H₂ and H₂.On TiN conducting substrates, the best vertically aligned CNT were deposited using a shorter annealing step and a deposition process at reduced pressure. The samples were characterized by means of scanning electron microscopy (SEM) and Raman spectroscopy analysis.     

Structural and morphological dependence of carbon nanotube arrays on catalyst aggregation

Catalyst aggregation affects the growth of carbon nanotube (CNT) arrays in terms of tubular structures, waviness, entanglement, lengths, and growth density etc., which are important issues for application developments. We present a systematic correlation between the aggregation of catalyst on the SiO₂/Si substrate and the structure and morphology of CNT arrays. The thickness of the catalyst film has a direct effect on the areal density of the catalytic particles and then the alignment of the CNT array. Introducing alumina as buffer layer and annealing the catalyst film at low pressure are two effective approaches to downsize the catalyst particles and then the diameter, wall number of the CNTs. Both the size and areal density of the catalyst also change with the CNT growth in accordance with Ostwald ripening process, with the bottom of the CNT array varying from well-aligned to disordered and adhesion between catalyst particles and the substrate getting enhanced. Strategies including tuning the thickness of the catalyst film, changing buffer layer, controlling on the growth time and the system pressure were used to regulate the aggregation of the catalyst. CNT arrays from disordered to well-aligned, from multi-walled to few-walled and further to single-walled were reproducibly synthesized by chemical vapor deposition of acetylene.     

Direct production of carbon nanotubes decorated with Cu2O by thermal chemical vapor deposition on Ni catalyst electroplated on a copper substrate

Carbon nanotubes (CNTs) decorated with Cu₂O particles were grown on a Ni catalyst layer deposited on a Cu substrate by thermal chemical vapor deposition from liquid petroleum gas. Ni catalyst nanoparticles with different sizes were produced in an electroplating system at 45 °C using the corrosive effect of H₂SO₄ which was added to solution. These nanoparticles provide the nucleation sites for CNT growth avoiding the need for a buffer layer. The surface morphology of the Ni catalyst films and CNT growth over this catalyst was studied by scanning electron microscopy (SEM). High temperature surface segregation of the Cu substrate into the Ni catalyst layer and its exposition to O₂ at atmospheric environment, during the CNTs growth, lead to the production of CNTs decorated with about 6 nm Cu₂O nanoparticles. We used SEM to study the surface characteristics of Ni catalyst films and characteristic of grown CNTs. Raman spectroscopy, transmission electron microscopy (TEM), electron diffraction (EDX), X-ray diffraction, and X-ray photoelectron spectroscopy (XPS) revealed the formation of CNTs. The selected area electron diffraction pattern, EDX, and XPS studies show that these CNTs were decorated with Cu₂O nanoparticles. This way of fabrication is the easiest and lowest cost method.     

Carbon nanotubes as nanoparticles collector

This communication reports on a new method for the collection of nanoparticles using carbon nanotubes (CNT) as collecting surfaces, by which the problem of agglomeration of nanoparticles can be circumvented. CNT (10–50 nm in diameter, 1–10 μm in length) were grown by thermal CVD at 923 K in a 7 v/v% C₂H₂ in N₂ mixture on electroless nickel-plated copper transmission electron microscopy (TEM) grids and Monel coupons. These samples were then placed downstream of an arc plasma reactor to collect individual copper nanoparticles (5–30 nm in diameter). It was observed that the Cu nanoparticles preferentially adhere onto CNT and that the macro-particles (diameter >1 μm), a usual co-product obtained with metal nanoparticles in the arc plasma synthesis, are not collected. Cu–Ni nanoparticles, a catalyst for CNT growth, were deposited on CNT to grow multibranched CNT. CNT-embedded thin films were produced by re-melting the deposited nanoparticles.     

TEM investigation on the growth mechanism of carbon nanotubes synthesized by hot-filament chemical vapor deposition

Carbon nanotubes (CNTs) were synthesized using hot-filament chemical vapor deposition on Ni film-coated Si substrate. The CNTs were well-aligned perpendicular to the substrate. The as-grown CNTs were bamboo-like in their morphology, and were investigated using SEM and high-resolution transmission electron microscopy (HRTEM). The SEM and HRTEM studies show that the both ends of a CNT contain metallic catalytic particles, which is different from results previously reported. Our analysis results provide strong evidence that the metallic catalyst remains in a liquid state during nanotube growth. The upward-growth pulling force of the CNT layer elongates the liquid nanoparticles, which are finally broken into two parts. One part remains at the substrate surface (base of the CNTs) and is responsible for the catalytic growth of the CNTs. The other part is enclosed at the tip of the CNTs and is inactive during CNT growth.     

Controlling the size and the activity of Fe particles for synthesis of carbon nanotubes

The properties of carbon nanotubes (CNTs) are controlled by their structure and morphology. Therefore, their selective synthesis, using catalytic chemical vapor deposition, requires precise control of a number of parameters including the size and activity of the catalyst nanoparticles. Previously, an environmental scanning transmission electron microscope (ESTEM) has been used to demonstrate that electron beam-induced decomposition (EBID) of Fe containing precursor molecules can be used to selectively deposit Fe catalyst nanoparticles that are active for CNT growth. We have extended these in situ ESTEM observations to further our understanding of the EBID parameters, such as deposition time, and substrate temperature, that control the size and placement of Fe catalyst particles for two precursors, namely diiron nonacarbonyl (Fe(2)(CO)(9)) and ferrocene (Fe(C(5)H(5))(2)). We found that the diameter of deposited particles increased with increasing deposition time. Electron energy-loss spectra, collected during deposition, show the incorporation of C in the Fe particles. The C content decreased as the substrate temperature was increased and was negligible at 100°C for Fe(2)(CO)(9). However, C and Fe were co-deposited at all temperatures (up to 450°C) when Fe(C(5)H(5))(2) was used as an iron source. After deposition, the substrate was heated to the CNT growth temperature in flowing hydrogen to remove the co-deposited C, which was an important step to activate the deposited Fe catalyst for the growth using acetylene. Our measurements revealed that the Fe nanoparticles fabricated from Fe(2)(CO)(9) had higher activity for CNT growth compared to the ones fabricated using Fe(C(5)H(5))(2). We also found that the co-deposited carbon could not be removed by heating in hydrogen in the case of Fe(C(5)H(5))(2). The particles deposited from Fe(C(5)H(5))(2) at 300°C to 450°C formed a core-shell structure with Fe surrounded by graphitic carbon. We speculate that the reduced activity for Fe(C(5)H(5))(2) is due to the C content in the deposit.     

The effects of catalyst treatment on fast growth of millimeter-long multi-walled carbon nanotube arrays

An optimized strategy was developed for fast growth of millimeter-long CNT arrays using chemical vapor deposition (CVD). Growth temperature of 800 °C was firstly determined, and catalyst heat treatment conditions were then optimized to probe the full potential of growth rate. 1.5 mm long CNT arrays were obtained in 10 min under optimized growth and catalyst heat treatment conditions. The growth rate of CNT arrays strongly depends on the growth temperature and catalyst heat treatment. Insufficient reduction could not reduce iron oxide into metallic state or/and crack down catalyst film into particles, but excessive treatment may result in large particles due to Ostwald ripening process. This method would offer more freedoms in designing the fast growth of high-purity, long CNT arrays.     

Modulating the diameter of carbon nanotubes in array form via floating catalyst chemical vapor deposition

Based on the analysis of catalyst particle formation and carbon nanotube (CNT) array growth process in floating catalyst chemical vapor deposition (CVD), delicately controlled gaseous carbon sources and catalyst precursors were introduced into the reactor for the controllable growth of CNT array. The low feeding rate of ferrocene was realized through low-temperature sublimation. With less ferrocene introduced into the reactor, the collision among the in situ formed iron atoms decreased, which led to the formation of smaller catalyst particles. The mean diameter of the CNT array, grown at 800^oC, decreased from 41 to 31 nm when the ferrocene-sublimed temperature reduced from 80 to 60^oC. Furthermore, low growth temperature was adopted in synthesis, through the modulation of the CNT diameter, by controlling the sintering of catalyst particles and the collision frequency. When the growth temperature was 600^oC, the as-grown CNTs in the array were with a mean diameter of 10.2 nm. If propylene was used as carbon source, the diameter can be modulated in similar trends. The diameter of CNT can be modulated by the parameter of the operation using the same substrate and catalyst precursor without other equipment or previous treatment. Those results provide the possibility for delicately controllable synthesis of CNT array via simple floating catalyst CVD.     

化学气相沉积法制备定向碳纳米管阵列

以二茂铁和二甲苯分别作为催化剂和碳源，采用一种无模板的化学气相沉积法，使用单温炉设备，成功地制备了高度定向的碳纳米管阵列.分别用扫描电子显微镜、透射电子显微镜和电子能量散射谱、拉曼光谱对碳纳米管阵列进行形貌观察和表征, 并研究了不同工艺参数对碳纳米管阵列形貌的影响.结果表明：在生长温度为800℃，催化剂浓度为0.02g/mL，抛光硅片上容易获得高质量的定向碳纳米管阵列，在此优化条件下生长的定向碳纳米管的平均生长速率可达25μm/min.     

Coupled process of plastics pyrolysis and chemical vapor deposition for controllable synthesis of vertically aligned carbon nanotube arrays

Efficient conversion of waste plastics into advanced materials is of conspicuous environmental, social and economic benefits. A coupled process of plastic pyrolysis and chemical vapor deposition for vertically aligned carbon nanotube (CNT) array growth was proposed. Various kinds of plastics, such as polypropylene, polyethylene, and polyvinyl chloride, were used as carbon sources for the controllable growth of CNT arrays. The relationship between the length of CNT arrays and the growth time was investigated. It was found that the length of aligned CNTs increased with prolonged growth time. CNT arrays with a length of 500 μm were obtained for a 40-min growth and the average growth rate was estimated to be 12 μm/min. The diameter of CNTs in the arrays can be modulated by controlling the growth temperature and the feeding rate of ferrocene. In addition, substrates with larger specific surface area such as ceramic spheres, quartz fibers, and quartz particles, were adopted to support the growth of CNT arrays. Those results provide strong evidence for the feasibility of conversion from waste plastics into CNT arrays via this reported sustainable materials processing.     

Influence of oxygen on the growth of carbon nanotubes by the SiC surface decomposition method

The influence of oxygen on the development of carbon nanotubes (CNTs) during the annealing process of the surface decomposition method on SiC(000−1) surfaces was investigated. In the case of annealing a SiC substrate under ultra-high vacuum conditions, carbon nanofibers (CNFs) form between the CNT layer and the substrate. However, CNTs form without CNFs by annealing the substrate in an oxygen atmosphere. The mean length of CNTs is longer than those formed without an oxygen atmosphere. From cross-sectional transmission electron microscopy images, it was found that oxygen plays an important role in CNT growth by the surface composition method.     

Nanofabrication by electrochemical routes of Ni-coated ordered arrays of carbon nanotubes

Ordered arrays of carbon nanotubes (CNT) have been coated by Ni nanoparticles and Ni thin films by using the chronoamperometry technique for nickel reduction. Two different kinds of nanotube arrays have been used: aligned bundles of CNT grown on Si substrates by chemical vapour deposition (CVD) and networks of CNT bundles positioned via a dielectrophoretic post-synthesis process between the electrodes of a multifinger device. The morphology and structure of the Ni-coated CNT bundles have been characterized by field emission scanning electron microscopy (FE-SEM) and X-ray diffraction (XRD). By changing the parameters of the electrochemical process, it is possible to modulate the morphological characteristics of the Ni deposits, which can be obtained in form of nanoparticles uniformly distributed along the whole length of the CNT bundles or of Ni thin films. A qualitative study of the nucleation and growth mechanism of Ni onto CNT has been performed using the theoretical model for diffusion-controlled electrocrystallization, and a correlation between growth mechanism and samples morphology is presented and discussed. The possibility to maintain the architecture of the pristine nanotube deposits after the Ni coating process opens new perspectives for integration of CNT/Ni systems in magnetic and spintronics devices.     

碳纳米管阵列、捆束的三步升温工艺制备及其形貌与结构

使用结构简单的单温炉设备，通过三步升温热解二茂铁、三聚氰氨混合物方法，在二氧化硅、多晶陶瓷基底上分别合成了碳纳米管阵列、碳纳米管捆束.使用扫描电子显微镜、透射电子显微镜、电子能量损失谱和x射线光电子能谱对合成样品进行了结构和成分分析.结果显示：两种基底上合成的纳米管均为多壁纯碳管；生长于光滑二氧化硅表面的碳纳米管具有高度取向性和一致的外径，长度为10—40μm.碳纳米管采取催化剂顶端生长模式并展示出类杯状形貌；生长于粗糙多晶陶瓷表面的碳纳米管捆束随机取向，碳纳米管直径为15—80nm，长度在几百微米，展示 关键词： 碳纳米管 热解法 三步升温工艺     

Selective growth, characterization, and field emission performance of single-walled and few-walled carbon nanotubes by plasma enhanced chemical vapor deposition

Single-walled carbon nanotubes (SWCNTs) and few-walled carbon nanotubes (FWCNTs) have been selectively synthesized by plasma enhanced chemical vapor deposition at a relative low temperature (550 °C) by tuning the thickness of iron catalyst. The parametric study and the optimization of the nanotube growth were undertaken by varying inductive power, temperature, catalyst thickness, and plasma to substrate distance. When an iron film of 3-5 nm represented the catalyst thickness for growing FWCNT arrays, SWCNTs were synthesized by decreasing the catalyst thickness to 1 nm. The nanotubes were characterized by field emission scanning electron microscopy, transmission electron microscopy, and Raman spectroscopy. Electron field emission properties of the nanotubes indicate that the SWCNTs exhibit lower turn-on field compared to the FWCNTs, implying better field emission performance.     

Super-hydrophobic transparent surface by femtosecond laser micro-patterned catalyst thin film for carbon nanotube cluster growth

In this work, super-hydrophobic surfaces were fabricated by femtosecond laser micro-machining and chemical vapor deposition to constitute hybrid scale micro/nano-structures formed by carbon nanotube (CNT) clusters. Nickel thin-film microstructures, functioning as CNT growth catalyst, precisely control the distribution of the CNT clusters. To obtain minimal heat-affected zones, femtosecond laser was used to trim the nickel thin-film coating. Plasma treatment was subsequently carried out to enhance the lotus-leaf effect. The wetting property of the CNT surface is improved from hydrophilicity to super-hydrophobicity at an advancing contact angle of 161 degrees. The dynamic water drop impacting test further confirms its enhanced water-repellent property. Meanwhile, this super-hydrophobic surface exhibits excellent transparency with quartz as the substrate. This hybrid fabrication technique can achieve super-hydrophobic surfaces over a large area, which has potential applications as self-cleaning windows for vehicles, solar cells and high-rise buildings.