Mechanical properties an undercut evaluated resonance test and of silicon nanobeams with by combining the dynamic finite element analysis

Mechanical properties of silicon nanobeams are of prime importance in nanoelectromechanical system applications. A numerical experimental method of determining resonant frequencies and Young＇s modulus of nanobeams by combining finite element analysis and frequency response tests based on an electrostatic excitation and visual detection by using a laser Doppler vibrometer is presented in this paper. Silicon nanobeam test structures are fabricated from silicon-oninsulator wafers by using a standard lithography and anisotropic wet etching release process, which inevitably generates the undercut of the nanobeam clamping. In conjunction with three-dimensional finite element numerical simulations incorporating the geometric undercut, dynamic resonance tests reveal that the undercut significantly reduces resonant frequencies of nanobeams due to the fact that it effectively increases the nanobeam length by a correct value △L, which is a key parameter that is correlated with deviations in the resonant frequencies predicted from the ideal Euler-Bernoulli beam theory and experimentally measured data. By using a least-square fit expression including △L, we finally extract Young＇s modulus from the measured resonance frequency versus effective length dependency and find that Young＇s modulus of a silicon nanobeam with 200-nm thickness is close to that of bulk silicon. This result supports that the finite size effect due to the surface effect does not play a role in the mechanical elastic behaviour of silicon nanobeams with thickness larger than 200 nm.     

Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves

The surface acoustic wave （SAW） technique is a precise and nondestructive method to detect the mechanical charac- teristics of the thin low dielectric constant （low-k） film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is inves- tigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young＇s moduli of the Black DiamondTM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square （RMS） of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films.     

Mechanical design and analysis of a low beta squeezed half-wave resonator

A superconducting squeezed type half-wave resonator （HWR） of β=0.09 has been developed at the Institute of Modern Physics, Lanzhou. In this paper, a basic design is presented for the stiffening structure for the detuning effect caused by helium pressure and Lorentz force. The mechanical modal analysis has been investigated the with finite element method （FEM）. Based on these considerations, a new stiffening structure is proposed for the HWR cavity. The computation results concerning the frequency shift show that the low beta HWR cavity with new stiffening structure has low frequency sensitivity coefficient df/dp and Lorentz force detuning coefficient KL, and stable mechanical properties.     

Role of helium in the sliding and mechanical properties of a vanadium grain boundary:A first-principles study

The effects of helium （He） on the sliding and mechanical properties of a vanadium （V） E5（310）/[001] grain boundary （GB） have been investigated using a first-principles method. It has been found that He was energetically favorable sitting at the GB region with a segregation energy of -0.27 eV, which was attributed to the special atomic configurations and charge density distributions of the GB. The maximal sliding energy barrier of the He-doped GB was calculated to be 1.73 J/m^2, 35% larger than that of the clean GB. This suggested that the presence of He would hinder the V GB mobility. Based on the thermodynamic criterion, the total energy calculations indicated that the embrittlement of V GB would be enhanced by He segregation.     

New Type of Conserved Quantities of Lie Symmetry for Nonholonomic Mechanical Systems in Phase Space

The new types of conserved quantities, which are directly induced by Lie symmetry of nonholonomie mechanical systems in phase space, are studied. Firstly, the criterion of the weak Lie symmetry and the strong Lie symmetry are given. Secondly, the conditions of existence of the new type of conserved quantities induced by the weak Lie symmetry and the strong Lie symmetry directly are obtained, and their form is presented. Finaily, an Appell-Hamel example is discussed to further illustrate the applications of the results.     

Mechanical and thermodynamic properties of cubic YH_2 under high pressure:Prediction from first-principles study

First-principles calculations are used to investigate the mechanical and thermodynamic properties of cubic YH2 at different pressures and temperatures. The generalized gradient approximation （GGA） with Perdew-Burke-Ernzerhof （PBE） method is used to describe the exchange-correlation energy in the present work. The calculated equilibrium lattice constant a and bulk modulus B are in good accordance with the available experimental values. According to the Born-Huang criteria for mechanical stability, elastic constants are calculated from the strain-induced stress method in a pressure range from 0 to 67.1 GPa. Isotropic wave velocities and sound velocities are discussed in detail. It is found that the Debye temperature decreases monotonically with the increase of pressure and that YH2 has low anisotropy in both longitudinal and shear-wave velocities. The calculated elastic anisotropic factors indicate that YH2 has low anisotropy at zero pressure and that its elastic anisotropy increases as pressure increases. Through the quasi-harmonic Debye model, in which phononic effects are considered, the thermodynamic properties of YH2, such as the relations of （V-Vo）/Vo to the temperature and the pressure, the dependences of heat capacity Cv and thermal expansion coefficient a on temperature and pressure ranging from 0 to 2400 K and from 0 to 65 GPa, respectively, are also discussed.     

Mei Adiabatic Invariants Induced by Perturbation of Mei Symmetry for Nonholonomic Controllable Mechanical Systems

Two types of Mei adiabatic invariants induced by perturbation of Mei symmetry for nonholonomic controllable mechanical systems are reported. Criterion and restriction equations determining Mei symmetry after being disturbed of the system are established. Form and existence condition of Mei adiabatic invariants are obtained.     

Two New Types of Conserved Quantities of Mei Symmetry for Holonomic Mechanical System

Two new types of conserved quantities directly deduced by Mei symmetry of holonomic mechanical system are studied. The definition and criterion of Mei symmetry for holonomic system are given. A coordination function is introduced, the conditions under which the Mei symmetry can directly lead to the two types of conserved quantities and the forms of the two types of conserved quantities are obtained. An illustrative example is given. The result indicates that the coordination function can be selected properly according to the demand of the gauge function, thereby the gauge function can be found out more easily. Furthermore, since the choice of the coordination function has multiformity, much T more conserved quantity of Mei symmetry for holonomic mechanical system can be obtained.     

Perturbation to Noether-Lie Symmetry and Adiabatic Invariants for Mechanical Systems in Phase Space

Based on the concept of adiabatic invariant, the perturbation to Noether-Lie symmetry and adiabatic invariants for mechanical systems in phase space are studied. The criterion of the Noether Lie symmetry for the perturbed system is given, and the definition of the perturbation to Noether-Lie symmetry for the system under the action of small disturbance is presented. Meanwhile, the Noether adiabatic invariants and the generalized Hojman adiabatic invariants of the perturbed system are obtained.     

Solutions of the Schrodinger Equation with Quantum Mechanical Gravitational Potential Plus Harmonic Oscillator Potential

The solutions of the Schrodinger equation with quantum mechanical gravitational potential plus harmonic oscillator potential have been presented using the parametric Nikiforov-Uvarov method. The bound state energy eigen values and the corresponding un-normalized eigen functions are obtained in terms of Laguerre polynomials. Also a special case of the potential has been considered and its energy eigen values are obtained.     

Perturbation to Mei Symmetry and Adiabatic Invariants for Nonholonomic Systems in Terms of Quasi-Coordinates

Abstract Based on the concept of adiabatic invariant, the perturbation to Mei symmetry and adiabatic invariants for nonholonomic mechanical systems in terms of quasi-coordinates are studied. The definition of the perturbation to Mei symmetry for the system is presented, and the criterion of the perturbation to Mei symmetry is given. Meanwhile, the Mei adiabatic invariants for the perturbed system are obtained.     

New Conserved Quantities of Noether-Mei Symmetry for Nonholonomic Mechanical System

Two new types of conserved quantities deduced by Noether-Mei symmetry of nonholonomic mechanical system are studied. The definition and criterion of Noether-Mei symmetry for the system are given. A coordination function is introduced, and the conditions under which the Noether-Mei symmetry leads to the two types of conserved quantities and the forms of the two types of conserved quantities are obtained. An illustrative example is given. The coordination function can be selected according to the demand for finding the gauge function, and the choice of the coordination function has multiformity, so more conserved quantities deduced from Noether-Mei symmetry of mechanical system can be obtained.     

Mechanical Properties of Ni-Coated Single Graphene Sheet and Their Embedded Aluminum Matrix Composites

The effects of Ni coating on the mechanical behaviors of single graphene sheet and their embedded Al matrix composites under axial tension are investigated using molecular dynamics （MD） simulation method. The results show that the Young＇s moduli and tensile strength of graphene obviously decrease after Ni coating. The results also show that the mechanical properties of Al matrix can be obviously increased by embedding a single graphene sheet. From the simulation, we also find that the Young＇s modulus and tensile strength of the Ni-coated graphene/Al composite is obviously larger than those of the uncoated graphene/Al composite. The increased magnitude of the Young＇s modulus and tensile strength of graphene/Al composite are 52.27% and 32.32% at 0.01 K, respectively, due to Ni coating. By exploring the effects of temperature on the mechanical properties of single graphene sheet and their embedded Al matrix composites, it is found that the higher temperature leads to the lower critical strain and tensile strength.     

Convolution Theorem of Fractional Fourier Transformation Derived by Representation Transformation in Quantum Mechancis

Based on our previous paper （Commun. Theor. Phys. 39 （2003） 417） we derive the convolution theorem of fractional Fourier transformation in the context of quantum mechanics, which seems a convenient and neat way. Generalization of this method to the complex fractional Fourier transformation case is also possible.     

Mei Symmetry and Hojman Conserved Quantity of Nonholonomic Controllable Mechanical System

A non-Noether conserved quantity, i.e., Hojman conserved quantity, constructed by using Mei symmetry for the nonholonomic controllable mechanical system, is presented. Under general infinitesimal transformations, the determining equations of the special Mei symmetry, the constrained restriction equations, the additional restriction equations, and the definitions of the weak Mei symmetry and the strong Mei symmetry of the nonholonomic controllable mechanical system are given. The condition under which Mei symmetry is a Lie symmetry is obtained. The form of the Hojman conserved quantity of the corresponding holonomic mechanical system, the weak Hojman conserved quantity and the strong Hojman conserved quantity of the nonholonomie controllable mechanical system are obtained. An example is given to illustrate the application of the results.     

Iron trichloride as oxidizer in acid slurry for chemical mechanical polishing of Ge2Sb2Te5

The effect of iron trichloride （FeC13） on chemical mechanical polishing （CMP） of Ge2Sb2Te5 （GST） film is inves- tigated in this paper. The polishing rate of GST increases from 38 nm/min to 144 nm/min when the FeC13 concentration changes from 0.01 wt% to 0.15 wt%, which is much faster than 20 nm/min for the 1 wt% H2O2-based slurry. This polish- ing rate trends are inversely correlated with the contact angle data of FeCl3-based slurry on the GST film surface. Thus, it is hypothesized that the hydrophilicity of the GST film surface is associated with the polishing rate during CMP. Atomic force microscope （AFM） and optical microscope （OM） are used to characterize the surface quality after CMP. The chemical mechanism is studied by potentiodynamic measurements such as Ecorr and Icorr to analyze chemical reaction between FeCl3 and GST surface. Finally, it is verified that slurry with FeCl3 has no influence on the electrical property of the post-CMP GST film by the resistivity-temperature （RT） tests.     

Mei Symmetry and Lutzky Conserved Quantity for Nonholonomic Mechanical System with Unilateral Constraints

In this paper, we study the Mei symmetry which can result in a Lutzky conserved quantity for nonholonomic mechanical system with unilateral constraints. The definition and the criterion of the Mei symmetry for the system are given. The necessary and sufficient condition under which the Mei symmetry is a Lie symmetry for the system is obtained. A Lutzky conserved quantity deduced from the Mei symmetry is gotten. An example is given to illustrate the application of our results.     

New 3-mode bosonic operator realization of SU（2） Lie algebra： From the point of view of squeezing

We consider the quantum mechanical SU(2) transformation e2λ JzJ± e-2λJz= e±2λJ± as if the meaning of squeezing with e±2λbeing squeezing parameter. By studying SU(2) operators(J±,Jz) from the point of view of squeezing we find that(J±,Jz) can also be realized in terms of 3-mode bosonic operators. Employing this realization, we find the natural representation(the eigenvectors of J+ or J-) of the 3-mode squeezing operator e2λ Jz. The idea of considering quantum SU(2) transformation as if squeezing is liable for us to obtain the new bosonic operator realization of SU(2) and new squeezing operators.     

Quantum-Mechanical Study on Surrounding-Gate Metal-Oxide-Semiconductor Field-Effect Transistors

As the channel length of metal-oxide-semiconductor field-effect transistors （MOSFETs） scales into the nanometer regime, quantum mechanical effects are becoming more and more significant. In this work, a model for the surrounding-gate （SG） nMOSFET is developed. The SchrSdinger equation is solved analytically. Some of the solutions are verified via results obtained from simulations. It is found that the percentage of the electrons with lighter conductivity mass increases as the silicon body radius decreases, or as the gate voltage reduces, or as the temperature decreases. The eentroid of inversion-layer is driven away from the silicon-oxide interface towards the silicon body, therefore the carriers will suffer less scattering from the interface and the electrons effective mobility of the SG nMOSFETs will be enhanced.     

Remarks on interpretations of the Eotvos experiment and misinterpretation of E=mc^2

The Eotvos experiment on the verification of equivalence between inertial mass and gravitational mass of a body is famous for its accuracy. A question is, however, can these experimental results be applied to the case of a physical space in general relativity, where the space coordinates could be arbitrary？ It is pointed out that it can be validly applied because it has been proven that Einstein＇s equivalence principle for a physical space must have a frame of reference with the Euclidean-like structure. Will claimed further that such an overall accuracy can be translated into an accuracy of the equivalence between inertial mass and each type of energy. It is shown that, according to general relativity, such a claim is incorrect. The root of this problem is due to an inadequate understanding of special relativity that produced the famous equation E=mc^2, which must be understood in terms of energy conservation. Concurrently, it is pointed out that this error is a problem in Will＇s book, ‘Theory and Experiment in Gravitational Physics＇.