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1.
CrNx films were deposited on stainless steel and Si (1 1 1) substrates via medium frequency magnetron sputtering in a N2 + Ar mixed atmosphere. The influence of N2 content on the deposition rate, composition, microstructure, mechanical and tribological properties of the as-deposited films was investigated by means of the X-ray photoelectron spectrometry (XPS), X-ray diffraction (XRD), field emission scanning electron microscope (FESEM), nanoindentation and tribometer testing. It was found that the N atomic concentration increased and the phase transformed from a mixture of Cr2N + Cr(N) to single-phase Cr2N, and then Cr2N + CrN to pure CrN phase with the increase of N2 content. The Cr 2p3/2 and N 1s of XPS spectra also confirmed the evolution of phase. Accordingly, all films exhibited a typical columnar structure which lies in the zone T of Thornton Model. The mixed Cr2N and Cr(N) phases showed low hardness and high friction coefficient. Cr2N possessed higher hardness than CrN while CrN exhibited lower friction coefficient.  相似文献   

2.
Compositionally gradient CrNx coatings were fabricated using arc ion plating by gradually increasing N2 flow rate during the deposition process. The effect of substrate bias, ranging from 0 to −250 V, on film microstructure and mechanical properties were systematically investigated with XRD, SEM, HRTEM, nanoindentation, adhesion and wear tests. The results show that substrate bias has an important influence on film microstructure and mechanical properties of gradient CrNx coatings. The coatings mainly crystallized in the mixture of hexagonal Cr2N, bcc Cr and fcc rock-salt CrN phases. N2 flow rate change during deposition results in phase changes in order of Cr, Cr + Cr2N, Cr2N, Cr2N + CrN, and CrN, respectively, along thickness direction. Phase fraction and preferred orientation in CrNx coatings vary with substrate bias, exerting an effective influence on film hardness. With the increasing of bias, film microstructure evolves from an apparent columnar structure to a highly dense one. The maximum hardness of 39.1 GPa was obtained for the coatings deposited at a bias of −50 V with a friction coefficient of 0.55. It was also found that adhesion property and wear resistance of gradient CrNx coatings were better than that of homogeneous CrN coatings.  相似文献   

3.
AlTiN films with different nitrogen partial pressures were deposited using arc ion plating (AIP) technique. In this study, we systematically investigated the effect of the nitrogen partial pressure on composition, deposition efficiency, microstructure, macroparticles (MPs), hardness and adhesion strength of the AlTiN films. The results showed that with increasing the nitrogen partial pressure, the deposition rate exhibited a maximum at 1.2 Pa. Results of X-ray photoelectron spectroscopy (XPS) analysis revealed that AlTiN films were comprised of Ti–N and Al–N bonds. XRD results showed that the films exhibited a (1 1 1) preferred growth, and AlTi3N and TiAlx phases were observed in the film deposited at 1.7 Pa. Analysis of MPs statistics showed MPs decreased with the increase in the nitrogen partial pressure. In addition, the film deposited at 1.2 Pa possessed the maximum hardness of 38 GPa and the better adhesion strength.  相似文献   

4.
(Cr, Al)N films were deposited by pulsed bias arc ion plating on HSS and 316L stainless steel substrates. With pulsed substrate bias ranging from −100 V to −500 V, the effect of pulsed bias on film composition, phase structure, deposition rate and mechanical properties was investigated by EDX, XRD, SEM, nanoindentation and scratch measurements. The high-temperature (up to 900 °C) oxidation resistance of the films was also evaluated. The results show that Al contents and deposition rates decrease with increasing pulsed bias and the ratio of (Cr + Al)/N is almost constant at 0.95. The as-deposited (Cr, Al)N films crystallize in the pseudo-binary (Cr, Al)N and Al phases. The film hardness increases with increasing bias and reaches the maximum 21.5 GPa at −500 V. The films deposited at −500 V exhibit a high adhesion force, about 70 N, and more interestingly good oxidation resistance when annealed in air at 900 °C for 10 h.  相似文献   

5.
This research investigates the effect of ion implantation dosage level and further thermal treatment on the physical characteristics of chromium coatings on Si(1 1 1) substrates. Chromium films had been exposed to nitrogen ion fluencies of 1 × 1017, 3 × 1017, 6 × 1017 and 10 × 1017 N+ cm−2 with a 15 keV energy level. Obtained samples had been heat treated at 450 °C at a pressure of 2 × 10−2 Torr in an argon atmosphere for 30 h. Atomic force microscopy (AFM) images showed significant increase in surface roughness as a result of nitrogen ion fluence increase. Secondary ion mass spectroscopy (SIMS) studies revealed a clear increased accumulation of Cr2N phase near the surface as a result of higher N+ fluence. XRD patterns showed preferred growth of [0 0 2] and [1 1 1] planes of Cr2N phase as a result of higher ion implantation fluence. These results had been explained based on the nucleation-growth of Cr2N phase and nitrogen atoms diffusion history during the thermal treatment process.  相似文献   

6.
Ti-Al coatings with ∼14.7, 18.1, 25.2 and 29.7 at.% Al contents were fabricated on pure Ti substrate by laser cladding. The laser cladding Ti-Al coatings were analyzed with X-ray diffraction (XRD), scanning electron microscope (SEM) and X-ray energy dispersive spectroscopy (EDS). It was found that with the increase of Al content, the diffraction peaks shifted gradually to higher 2θ values. The laser cladding Ti-Al coatings with 14.7 and 18.1 at.% Al were composed of α-Ti and α2-Ti3Al phases, while those with 25.2 and 29.7 at.% Al were composed of α2-Ti3Al phase. With the increase of Al content, the cross-sectional hardness increased, while the fracture toughness decreased. For the laser cladding Ti-Al coatings, when the Al content was ≤18.1 at.%, the wear mechanism was adhesive wear and abrasive wear; while when the Al content ≥25.2 at.%, the wear mechanism was adhesive wear, abrasive wear and microfracture. With the increase of Al content, the wear rate of laser cladding Ti-Al coatings decreased under 1 N normal load, while the wear rate firstly decreased and then increased under a normal load of 3 N. Due to its optimized combination of high hardness and high fracture toughness, the laser cladding Ti-Al coating with 18.1 at.% Al showed the best anti-wear properties at higher normal load.  相似文献   

7.
Chromium aluminum nitride (Cr1−xAlxN) coatings were deposited onto AISI H13 steel and silicon substrates by r.f. reactive magnetron co-sputtering in (Ar/N2) gas mixture from chromium and aluminum targets. Properties of deposited Cr1−xAlxN coatings such as compositional, structural, morphological, electrochemical, mechanical and tribological, were investigated as functions of aluminum content. X-ray diffraction patterns of Cr1−xAlxN coatings with different atomic concentrations of aluminum (0.51 < x < 0.69) showed the presence and evolution of (1 1 1), (2 0 0), and (1 0 2) crystallographic orientations associated to the Cr1−xAlxN cubic and w-AlN phases, respectively. The rate of corrosion of the steel coated with Cr1−xAlxN varied with the applied power; however, always being clearly lower when compared to the uncoated substrate. The behavior of the protective effect of the Cr1−xAlxN coatings is based on the substitution of Cr for Al, when the power applied to the aluminum target increases. The mechanical properties were also sensitive to the power applied, leading to a maximum in hardness and a reduced elastic modulus of 30 and 303 GPa at 350 W and a monotonic decrease to 11 and 212 GPa at 450 W, respectively. Finally, the friction coefficient measured by pin-on disk revealed values between 0.45 and 0.70 in humid atmosphere.  相似文献   

8.
NbNx films were deposited on Nb substrate using pulsed laser deposition. The effects of substrate deposition temperature, from room temperature to 950 °C, on the preferred orientation, phase, and surface properties of NbNx films were studied by X-ray diffraction, atomic force microscopy, and electron probe micro analyzer. We find that the substrate temperature is a critical factor in determining the phase of the NbNx films. For a substrate temperature up to 450 °C the film showed poor crystalline quality. With temperature increase the film became textured and for a substrate temperature of 650−850 °C, mix of cubic δ-NbN and hexagonal phases (β-Nb2N + δ′-NbN) were formed. Films with a mainly β-Nb2N hexagonal phase were obtained at deposition temperature above 850 °C. The c/a ratio of β-Nb2N hexagonal shows an increase with increased nitrogen content. The surface roughness of the NbNx films increased as the temperature was raised from 450 to 850 °C.  相似文献   

9.
Cr, CrN, TiCr coatings have been investigated as potential anti-multipactor coatings. The coatings were synthesized by cathodic-arc reactive evaporation in Ar-N2 atmosphere where the ion energy is controlled by substrate biasing. Chemical state analysis and surface composition were studied by X-ray photoemission spectroscopy (XPS), whereas bulk composition and depth profile were studied by glow discharge optical emission spectroscopy (GDOES). The surface morphology was studied by optical profilometry (OP) and scanning electron microscopy (SEM). The compositions of the coatings were CrN and Ti40Cr60 and they were homogeneous in depth. Surface oxidation was higher in Ti40Cr60 than in CrN. Coatings deposited at high negative bias show lower deposition rate and had lower surface roughness than those obtained at low bias. Secondary electron emission yield (SEY) was higher for CrN than for Ti40Cr60, both before and after low-energy Ar+ ion bombardment. The SEY of Ti40Cr60 (1.17 maximum) was clearly smaller than the others. The maximum yield, σm, and the first crossover electron energy, E1, are the most important parameters, and (E1/σm)1/2 is a good figure of merit. This quantity was approximately 3 eV1/2 for Cr and CrN and 4 eV1/2 for Ti40Cr. After Ar+ ion bombardment, the average value improved significantly to 8.9 eV1/2 for Cr and CrN and 10.2 eV1/2 for Ti40Cr60. The radio-frequency multipactor performance of these materials was simulated using the experimentally determined SEY parameters.  相似文献   

10.
Cr-modified silicide coatings were prepared on a Ti-Nb-Si based ultrahigh temperature alloy by Si-Cr co-deposition at 1250 °C, 1350 °C and 1400 °C for 5-20 h respectively. It was found that both coating structure and phase constituents changed significantly with increase in the co-deposition temperature and holding time. The outer layers in all coatings prepared at 1250 °C for 5-20 h consisted of (Ti,X)5Si3 (X represents Nb, Cr and Hf elements). (Ti,X)5Si4 was found as the only phase constituent in the intermediate layers in both coatings prepared at 1250 °C for 5 and 10 h, but the intermediate layers in the coatings prepared at 1250 °C for 15 and 20 h were mainly composed of (Ti,X)5Si3 phase that was derived from the decomposition of (Ti,X)5Si4 phase. In the coating prepared at 1350 °C for 5 h, single (Ti,X)5Si3 phase was found in its outmost layer, the same as that in the outer layers in the coatings prepared at 1250 °C; but in the coatings prepared at 1350 °C for 10-20 h, (Nb1.95Cr1.05)Cr2Si3 ternary phase was found in the outmost layers besides (Ti,X)5Si3 phase. In the coatings prepared at 1400 °C for 5-20 h, (Nb1.95Cr1.05)Cr2Si3 ternary phase was the single phase constituent in their outmost layers. The phase transformation (Ti,X)5Si4 → (Ti,X)5Si3 + Si occurred in the intermediate layers of the coatings prepared at 1350 and 1400 °C with prolonging co-deposition time, similar to the situation in the coatings prepared at 1250 °C for 15 and 20 h, but this transformation has been speeded up by increase in the co-deposition temperature. The transitional layers were mainly composed of (Ti,X)5Si3 phase in all coatings. The influence of co-deposition temperature on the diffusion ability of Cr atoms was greater than that of Si atoms in the Si-Cr co-deposition processes investigated. The growth of coatings obeyed inverse logarithmic laws at all three co-deposition temperatures. The Si-Cr co-deposition coating prepared at 1350 °C for 10 h showed a good oxidation resistance due to the formation of SiO2 and Nb, Cr-doped TiO2 scale after oxidation at 1250 °C for 10 h.  相似文献   

11.
CrSiN coatings were deposited on stainless steel (Grade: SA304) and silicon Si(1 0 0) substrates, with varying argon-nitrogen gas proportions and deposition temperature, using reactive magnetron sputtering technique in the present work. The influence of sputtering (Ar) and reactive gas proportions (N2) and temperature on the structural properties of the CrSiN coating was investigated. A small amount of silicon content (3.67 at.% Si) plays a crucial role in addition to the nitrogen content for the formation of different phases in the CrSiN coatings as observed in the present work. For example, the coating with comparatively low nitrogen content, 40% N2, during deposition, formed a crystalline structure consisting of nano-crystalline CrN which is separated by an amorphous SiN phase, as evident from X-ray diffraction (XRD) and transmission electron microscopy (TEM), respectively. The formation of CrN(1 1 1) and Cr2N(1 1 1) phases has occurred at 30% N2 with 3.67% Si content, which transformed in to CrN(1 1 1) and CrN(2 0 0) with increase in N2 content but with same Si content. The surface topography and morphology of the coatings were analyzed by atomic force microscopy (AFM) and field emission scanning electron microscopy (FESEM), respectively. A less columnar growth is observed in CrSiN coatings deposited at low argon content, Ar:N2 (20:80), and with 3.67 at.% Si in the coatings. However, it becomes dense with increase in nitrogen content and temperature. The XRD analysis showed that the intensity of a dominating peak (1 1 1) is decreasing from (80:20) to (60:40) argon:nitrogen environment. With a further increase of nitrogen content, from (60:40), in the sputtering gas mixture, to (40:60) argon-nitrogen, there is a sudden increase in (1 1 1) peak and above (40:60), the peak reduction rate is very slow than the previous one. The (1 1 1) and (2 0 0) peak intensity variations are very limited due to high nitrogen content, above 50%, and considerable amount of Si atoms, 3.67 at.%, present in the CrN coatings.  相似文献   

12.
In this study, the deposition of La-Cr-O coatings on AISI 316 stainless steel was conducted by using a DC magnetron sputtering process. Three types of La-Cr-O coatings were designed, one type without interlayer, and another two types with an interlayer of Cr and CrN film, separately. This study aims to explore the interlayer effect on the properties of La-Cr-O coatings after post-annealing treatment. The coatings were characterized using the X-ray diffractionmeter (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and thermal gravimetric analysis (TGA)/differential scanning calorimetry (DSC).The results showed that the three as-deposited La-Cr-O coatings had an amorphous structure. After annealing at 800 °C for 1 h in the air, the structure was transformed to the LaCrO3 perovskite phase. Compared with the coatings without an interlayer, the double-layered coatings did not show the Cr2O3 phase in the structure. It implies that the use of the interlayer in the coatings could efficiently prohibit the diffusion of Cr to form oxide on the out-layer. Based on the TGA/DSC analysis and the electrical resistance measurement, it is understood that the annealed La-Cr-O coating with the CrN interlayer turns in the best performance in both chemical stability at high temperature and electrical resistance.  相似文献   

13.
The main purpose of this study is to develop trivalent chromium, Cr(III), conversion coatings on aluminum alloys. The influence of Cr(III) concentration and immersion time on structures and anticorrosive performance of the coatings has been investigated. Corrosion behaviors of the coatings were evaluated in a 0.5 M H2SO4 aqueous solution at room temperature using potentiodynamic polarization. The structure and valence state of the coatings were examined by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). The addition of Cr(III) ions to the conversion bath considerably changes structures and compositions of the coatings. The coatings with Cr oxides possess a denser and thinner structure. Moreover, the corrosion resistance of Cr(III) coatings tends to decline with increasing immersion time due to the dissolution of coatings in the dipping period. According to XPS analysis, the Cr(III) conversion coatings are composed of Cr2O3, Cr(OH)3, Al2O3, Al(OH)3, ZrO2, Zr(OH)4, AlF3, and ZrF4, but no hexavalent chromium component in the coatings. The result indicates that the coatings prepared in the solution with 0.01 M Cr(III) for 5 min have the smoothest and densest structure and the best anticorrosive performance among all of conversion coatings in this work.  相似文献   

14.
The surface compositions and oxidation states of non-exposed and water exposed plasma sprayed oxide coatings were studied using X-ray photoelectron spectroscopy (XPS). Coating materials were TiO2, Al2O3 and Cr2O3 and their mixtures. Water exposures were performed for free standing coating disks at mild electrolyte (1 mmol NaCl solution) at pH 4, 7 and 9. The exposure time was two weeks.It was observed that pure plasma sprayed TiO2 material was chemically stable over whole experiment pH range and only slight surface hydroxylation was observed for this material.In case of plasma sprayed Al2O3 materials the surface O/Al ratio increased considerably during water exposure especially at exposure pH 7. This was probably result of surface conversion to hydrous form. No surface oxidation state changes were observed for this material.The non-exposed Cr2O3 materials contained both Cr(III) and Cr(VI) oxides. The water exposures increased the surface oxygen and Cr(VI) contents at the expense of Cr(III). The most probable reason for that was the dissolution of surface Cr(VI) oxide phase during water exposures and the (re)adsorption of dissolved Cr(VI) species back to the surface.  相似文献   

15.
The influence of deposition rate on crystalline to amorphous microstructure transition of Cr coatings was studied through preparation of Cr coatings deposited onto silicon wafers using magnetron sputtering technique. The microstructure and morphology of Cr coatings were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and transmission electron microscopy (TEM). Results show that Cr coating prepared at 400 W exhibits dense columnar crystalline structure and the crystallite size and crystallization rate are increased expressly in the initial 5 min. When the deposition rate achieved to the maximum, Cr coating shows a case of infinite periodic renucleation where new crystals are assumed to be nucleated periodically on the surfaces of growing crystals and strong persistence of the columnar growth morphology is apparent. However, Cr coating exhibits overall microstructure of amorphous phase mixed with a few nano-crystal grains as the deposition rate decreases to the minimum.  相似文献   

16.
Electron energy loss spectra (ELS) have been obtained from polycrystalline Cr and Cr2O3 before and after surface reduction by 2 keV Ar+ bombardment. The primary electron energy used in the ELS measurements was systematically varied from 100 to 1150 eV in order to distinguish surface versus bulk loss processes. Two predominant loss features in the ELS spectra obtained from Cr metal at 9.0 and 23.0 eV are assigned to the surface and bulk plasmon excitations, respectively, and a number of other features arising from single electron transitions from both the bulk and surface Cr 3d bands to higher-lying states in the conduction band are also present. The ELS spectra obtained from Cr2O3 exhibit features that originate from both interband transitions and charge-transfer transitions between the Cr and O ions as well as the bulk plasmon at 24.4 eV. The ELS feature at 4.0 eV arises from a charge-transfer transition between the oxygen and chromium ions in the two surface layers beneath the chemisorbed oxygen layer, and the ELS feature at 9.8 eV arises from a similar transition involving the chemisorbed oxygen atoms. The intensity of the ELS peak at 9.8 eV decreases after Ar+ sputtering due to the removal of chemisorbed oxygen atoms. Sputtering also increases the number of Cr2+ states on the surface, which in turn increases the intensity of the 4.0 eV feature. Furthermore, the ELS spectra obtained from the sputtered Cr2O3 surface exhibit features characteristic of both Cr0 and Cr2O3, indicating that Ar+ sputtering reduces Cr2O3. The fact that neither the surface- nor the bulk-plasmon features of Cr0 can be observed in the ELS spectra obtained from sputtered Cr2O3 while the loss features due to Cr0 interband transitions are clearly present indicates that Cr0 atoms form small clusters lacking a bulk metallic nature during Ar+ bombardment of Cr2O3.  相似文献   

17.
Upon nitriding ferritic iron-based Fe–Cr–Al alloys, containing a total of 1.50 at. % (Cr?+?Al) alloying elements with varying Cr/Al atomic ratio (0.21–2.00), excess nitrogen uptake occurred, i.e. more nitrogen was incorporated in the specimens than compatible with only inner nitride formation and equilibrium nitrogen solubility of the unstrained ferrite matrix. The amount of excess nitrogen increased with decreasing Cr/Al atomic ratio. The microstructure of the nitrided zone was investigated by X-ray diffraction, electron probe microanalysis, transmission electron microscopy and electron energy loss spectroscopy. Metastable, fine platelet-type, mixed Cr1? x Al x N nitride precipitates developed in the nitrided zone for all of the investigated specimens. The degree of coherency of the nitride precipitates with the surrounding ferrite matrix is discussed in view of the anisotropy of the misfit. Analysis of nitrogen-absorption isotherms, recorded after subsequent pre- and de-nitriding treatments, allowed quantitative differentiation of different types of nitrogen taken up. The amounts of the different types of excess nitrogen as function of the Cr/Al atomic ratio are discussed in terms of the nitride/matrix misfit and the different chemical affinities of Cr and Al for N. The strikingly different nitriding behaviors of Fe–Cr–Al and Fe–Cr–Ti alloys could be explained on this basis.  相似文献   

18.
Aluminum and ceramic (Al2O3) coatings were deposited onto the polymer substrate by air plasma spray (APS) to improve the mechanical properties of the polymer surface. The effect of spray parameters (current and spray distance in this paper) on the phase composition, microstructure and mechanical properties was investigated. Shear adhesion strength between the coatings and the substrates was also examined. The results indicate that the deposition parameters have a significant effect on the phase composition, microstructure and mechanical properties of as-spayed coatings. The maximum shear adhesion strength of the bond coats was 5.21 MPa with the current of 180 A and 190 mm spray distance.  相似文献   

19.
Cr-doped mullites were prepared from single-phase precursors containing up to 9.60 wt% Cr2O3 using a sol-gel technique followed by thermal treatment. Particle induced X-ray emission spectroscopy and X-ray powder diffraction were used to characterize the samples. Mullites were orthorhombic, space group Pbam. Cr doping caused the increase of unit-cell parameters. Strongest expansion was noticed along c-axis followed by a and bc/c=0.089, Δa/a=0.061, Δb/b=0.045% per mole Cr2O3). A second phase, namely θ-(Al,Cr)2O3, was revealed by XRD in the sample containing 9.60 wt% Cr2O3. The structure of mullites was refined by the Rietveld method, location of Cr3+ was performed by the EPR spectroscopy. At low chromium doping level (Cr2O3 content less than ∼5 wt%) Cr3+ ions were substituted for Al3+ in the AlO6 octahedra of the mullite structure (M1 site). For higher doping level, Cr3+ ions were additionally substituted for Al3+ in the AlO6 octahedra of the second phase [θ-(Al,Cr)2O3 at 1400 °C, or α-(Al,Cr)2O3 at 1600 °C] which segregated in the system. Substitution of Cr3+ for Al3+ on M1 site in the mullite structure resulted in increase of average distances in (M1)O6 octahedron and decrease of average distances in T*O4 tetrahedron, while average distances in TO4 tetrahedron stayed almost constant.  相似文献   

20.
J.L. Mo 《Applied Surface Science》2009,255(17):7627-7634
CrN coatings were prepared by filtered cathodic vacuum arc (FCVA) technique. The influence of the deposition parameters (nitrogen partial pressure PN2, substrate bias voltage Vs and preheating of the substrate) on the structural, mechanical and tribological properties of the FCVA CrN coatings was investigated. Further, the FCVA CrN coating was compared in dry reciprocating sliding with commercial multi-arc ion plating (MAIP) CrN coating as to friction and wear properties. Profilometer, scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDX) were used to evaluate the wear scars and the wear mechanisms were discussed. The results showed that the structural, mechanical and tribological properties of the FCVA CrN coatings were significantly dependent on the deposition parameters. The FCVA CrN coating deposited with PN2 of 0.1 Pa, Vs of −100 V and without preheating exhibited the optimal mechanical and tribological properties. The FCVA CrN coating exhibited much better anti-abrasive and anti-spalling properties than the MAIP CrN coating, which was resulted from significant reduction of macroparticles and pitting defects by the FCVA technique. The MAIP CrN coating suffered severe concentrated wear by a combination wear mechanisms of delamination, abrasive and oxidative wear when high normal load was applied, while for the FCVA CrN coating the wear mechanisms were ultra-mild abrasive and oxidative wear.  相似文献   

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