多脉冲飞秒激光对锗材料的烧蚀效应

 开展了脉宽为40 fs的不同数量激光脉冲对锗材料的烧蚀效应实验,采用扫描电镜、激光共聚焦显微镜等方法对不同数量的飞秒激光脉冲作用下锗材料表面烧蚀区进行了检测,并对作用后材料烧蚀形貌演化规律进行了分析,初步分析了锗材料烧蚀区周围形成的不同环区的形貌特征及成因,对各环区烧蚀形貌特征随激光作用脉冲数的增加而产生的形貌演化过程进行了观测。并给出单脉冲飞秒激光对锗材料的烧蚀阈值为1.2 J·cm^-2,采用激光共聚焦显微镜测得该阈值条件下单个飞秒激光脉冲对锗材料的烧蚀深度约为150 nm。     

Femtosecond laser induced microripple on PDMS surface

We find the femtosecond laser induced microripple beside the focused femtosecond laser spot and along the movement direction of the laser spot on polydimethylsiloxane （PDMS） surface. The microripple may be due to the melting of PDMS induced by femtosecond laser pulses and the subsequent cool-down solidification of the melting PDMS along with the movement of the femtosecond laser spot. This result will be helpful to understand the interaction between the femtosecond laser and the polymer.     

Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator

We demonstrate that a Raman sensor integrated with a micro-heater, a microfluidic chamber, and a surface-enhanced Raman scattering (SERS) substrate can be fabricated in a glass chip by femtosecond laser micromachining. The micro-heater and the SERS substrate are fabricated by selective metallization on the glass surface using a femtosecond laser oscillator, whereas the microfluidic chamber embedded in the glass sample is fabricated by femtosecond laser ablation using a femtosecond laser amplifier. We believed that this new strategy for fabricating multifunctional integrated microchips has great potential application for lab-on-a-chips.     

Laser Fabrication of Nanostructures on a Pure Aluminum Surface in Air

We report on the fabrication of surface nanoparticles and micro/nanograting structures on bulk pure aluminum in air using a 150 fs, 775 nm femtosecond laser. We investigate the size of the generated surface nanoparticles under irradiation with different femtosecond laser pulses. Smaller nanoparticles can be induced by a larger number of laser pulses and a lower laser fluence. In addition, we observe the formation of micro/nanogratings when the laser focus is scanned across a pure aluminum surface in air. We obtain micro- and nano-grating composite structures on a pure aluminum surface by adjusting the laser fluence and scan velocity. Femtosecond laser surface ablation of bulk pure aluminum in air is potentially a promising technique for efficient fabrication of surface nanostructures.     

聚合物飞秒激光加工的分子动力学建模与仿真

通过合理选择聚合物分子结构模型和高精度势能函数,建立了聚合物飞秒激光烧蚀加工的分子动力学仿真模型,并使用该模型研究了聚乙烯和聚苯乙烯飞秒激光烧蚀加工中的激光能量辐照和扩散过程。研究结果表明:激光烧蚀加工中聚合物材料的去除方式包括单链热激发引起的表面蒸发和单链热运动引起的内部热膨胀。聚苯乙烯单链的微观变形方式包括单链的整体移动和单链自身结构的变化。聚乙烯和聚苯乙烯的分子结构差异对聚合物单链变形行为和材料去除体积等烧蚀加工结果具有显著的影响。     

飞秒激光脉冲与金属光阴极相互作用

本文从理论上分析了飞秒激光与光阴极相互作用过程，采用双温模型分析了飞秒激光脉冲辐照下金属薄膜的温度效应。通过建立一个简单的光电效应模型，获得了最佳的金属光阴极厚度，通过该模型可以发现，产生的光电流对在飞秒激光脉冲辐照下的电子温度和晶格温度有着很大的依赖关系。     

Direct femtosecond laser surface nano/microstructuring and its applications

This paper reviews a new field of direct femtosecond laser surface nano/microstructuring and its applications. Over the past few years, direct femtosecond laser surface processing has distinguished itself from other conventional laser ablation methods and become one of the best ways to create surface structures at nano‐ and micro‐scales on metals and semiconductors due to its flexibility, simplicity, and controllability in creating various types of nano/microstructures that are suitable for a wide range of applications. Significant advancements were made recently in applying this technique to altering optical properties of metals and semiconductors. As a result, highly absorptive metals and semiconductors were created, dubbed as the “black metals” and “black silicon”. Furthermore, various colors other than black have been created through structural coloring on metals. Direct femtosecond laser processing is also capable of producing novel materials with wetting properties ranging from superhydrophilic to superhydrophobic. In the extreme case, superwicking materials were created that can make liquids run vertically uphill against the gravity over an extended surface area. Though impressive scientific achievements have been made so far, direct femtosecond laser processing is still a young research field and many exciting findings are expected to emerge on its horizon.     

飞秒激光制造微型光纤法布里-珀罗干涉传感器

基于飞秒激光光刻技术,提出了光纤端面光刻制造微型光纤法布里-珀罗干涉传感器的方案.该方案解决了传统飞秒激光制造光纤F-P传感器的平行度差的问题,制造了对比度超过20 dB的高灵敏度和高分辨率的微型F-P光纤传感器件.该制造方法简单、参量可控,制作的器件可应用恶劣温度条件下应变的精确测量.     

Excitation of terahertz surface polaritons in a cylindrical waveguide by femtosecond laser pulses

Generation of terahertz surface polaritons in homogeneous round cross-section plasma waveguides upon nonlinear optical rectification of femtosecond laser pulses is analyzed theoretically. It is assumed that nonlinear polarization inducing a surface electromagnetic wave is formed at the waveguide boundary in a thin layer of the nonlinear dielectric that surrounds the waveguide. The efficiency of the femtosecond radiation conversion into surface polaritons is studied as a function of the waveguide radius and duration of the exciting laser pulse.     

Removal of doped poly(methylmetacrylate) from tungsten and titanium substrates by femto- and nanosecond laser cleaning

The influence of different laser pulse lengths on the removal of a polymer layer from metal substrates was investigated. As model systems, doped poly(methylmetacrylate) (PMMA) on titanium and tungsten substrates were selected.The ablation threshold and irradiation spot morphology of titanium and tungsten were compared for femtosecond (fs) and nanosecond (ns) laser irradiation and different pulse numbers. Nanosecond laser treatment resulted in a non-homogeneous surface morphology for both titanium and tungsten substrates. Femtosecond irradiation of tungsten revealed a homogeneous ablation spot with little changes in the surface morphology. For titanium, the formation of columnar structures within the irradiation spot was observed.Two different dopant concentrations were used for PMMA to achieve an equal linear absorption coefficient for the femto- and nanosecond laser wavelengths of 790 and 1064 nm. The best results were achieved for the removal of doped PMMA by femtosecond laser irradiation, where only a minimal modification of the metal surface was detected. In the case of nanosecond laser exposure, a pronounced change of the structure was observed, suggesting that damage-free cleaning of the selected metal may only be possible using femtosecond laser pulses. Different experimental parameters, such as laser fluence, pulse repetition rate and sample speed were also investigated to optimize the cleaning quality of doped PMMA from tungsten substrates with femtosecond laser pulses.     

Surface roughness assisted 100 kHz femtosecond laser induced nanostructure formation on silicon surface

Spontaneous nanostructure formations on roughened and smooth silicon surface by the femtosecond laser irradiation with the repetition rate of 100 kHz were systematically studied. In addition to the widely accepted so-called coarse ripple, which has the period analogous to the wavelength of the laser beam and aligns perpendicularly to the electric field of the incident laser beam, the ripple which has the period similar to the wavelength of the incident laser beam but aligns parallel to the electric field of the laser beam was observed on the roughened surface for the lower fluence and the higher number of pulse irradiation. Furthermore, the ensemble of dots formed by the enhancement of the local electric field was found on the roughened surface. This structure is preferentially formed around the scratches aligned perpendicularly to the electric field of the laser beam. These novel nanostructures are considered to be peculiar to the femtosecond laser irradiation and open the possibilities for precise control of the spontaneous nanostructure formation by femtosecond laser irradiation.     

Laser-induced damage threshold of sapphire in nanosecond, picosecond and femtosecond regimes

The surface laser-induced damage threshold fluence of sapphire is determined under various experimental conditions concerning the material irradiation (femtosecond, picosecond and nanosecond temporal regimes) and preparation (surface state). The results are of interest for optimising laser micromachining processes and for robust operation of high-peak power femtosecond Ti:sapphire laser chains.     

飞秒激光诱导硒化锌晶体表面自组织生长纳米结构

 以250 kHz高重复频率钛宝石飞秒激光聚焦到硒化锌晶体表面,利用扫描电子显微镜观测飞秒激光辐照后晶体的表面结构。发现线偏振激光辐照的区域形成了自组织周期性纳米结构,其周期为160 nm左右,并且可以通过改变激光的偏振方向调节纳米光栅结构的取向;当晶体相对于激光光束以10 mm/s速度移动,经激光扫描后,在晶体表面形成了长程类布拉格光栅。当飞秒激光光束为圆偏振光时,辐照区域形成均匀的纳米颗粒。     

Research progress of femtosecond surface plasmon polariton

As the combination of surface plasmon polariton and femtosecond laser pulse,femtosecond surface plasmon polariton has both nanoscale spatial resolution and femtosecond temporal resolution,and thus provides promising methods for light field manipulation and light-matter interaction in extreme small spatiotemporal scales.Nowadays,the research on femtosecond surface plasmon polariton is mainly concentrated on two aspects:one is investigation and characterization of excitation,propagation,and dispersion properties of femtosecond surface plasmon polariton in different structures or materials;the other one is developing new applications based on its unique properties in the fields of nonlinear enhancement,pulse shaping,spatiotemporal super-resolved imaging,and others.Here,we introduce the research progress of properties and applications of femtosecond surface plasmon polariton,and prospect its future research trends.With the further development of femtosecond surface plasmon polariton research,it will have a profound impact on nano-optoelectronics,molecular dynamics,biomedicine and other fields.     

Surface charging and impulsive ion ejection during ultrashort pulsed laser ablation

We report time-resolved studies using femtosecond laser pulses, accompanied by model calculations, that illuminate the difference in the dynamics of ultrashort pulsed laser ablation of different materials. Dielectrics are strongly charged at the surface on the femtosecond time scale and undergo an impulsive Coulomb explosion. This is not seen from metals and semiconductors where the surface charge is effectively quenched.     

Thermoelastic wave induced by pulsed laser heating

In this work, a generalized solution for the thermoelastic plane wave in a semi-infinite solid induced by pulsed laser heating is developed. The solution takes into account the non-Fourier effect in heat conduction and the coupling effect between temperature and strain rate, which play significant roles in ultrashort pulsed laser heating. Based on this solution, calculations are conducted to study stress waves induced by nano-, pico-, and femtosecond laser pulses. It is found that with the same maximum surface temperature increase, a shorter pulsed laser induces a much stronger stress wave. The non-Fourier effect causes a higher surface temperature increase, but a weaker stress wave. Also, for the first time, it is found that a second stress wave is formed and propagates with the same speed as the thermal wave. The surface displacement accompanying thermal expansion shows a substantial time delay to the femtosecond laser pulse. On the contrary, surface displacement and heating occur simultaneously in nano- and picosecond laser heating. In femtosecond laser heating, results show that the coupling effect strongly attenuates the stress wave and extends the duration of the stress wave. This may explain the minimal damage in ultrashort laser materials processing. Received: 23 May 2000 / Accepted: 26 May 2000 / Published online: 20 September 2000     

Femtosecond laser structuring of titanium implants

In this study we perform the first femtosecond laser surface treatment of titanium in order to determine the potential of this technology for surface structuring of titanium implants. We find that the femtosecond laser produces a large variety of nanostructures (nanopores, nanoprotrusions) with a size down to 20 nm, multiple parallel grooved surface patterns with a period on the sub-micron level, microroughness in the range of 1-15 μm with various configurations, smooth surface with smooth micro-inhomogeneities, and smooth surface with sphere-like nanostructures down to 10 nm. Also, we have determined the optimal conditions for producing these surface structural modifications. Femtosecond laser treatment can produce a richer variety of surface structures on titanium for implants and other biomedical applications than long-pulse laser treatments.     

Fabrication of microelectrodes deeply embedded in LiNbO3 using a femtosecond laser

We present a novel technique to fabricate deeply embedded microelectrodes in LiNbO₃ using femtosecond pulsed laser ablation and selective electroless plating. The fabrication process mainly consists of four steps, which are (1) micromachining of microgrooves on the surface of LiNbO₃ by femtosecond laser ablation; (2) formation of AgNO₃ films on substrates; (3) scanning the femtosecond laser beam in the fabricated microgrooves for modification of the inner surfaces; and (4) electroless copper plating. The void-free electroless copper plating is obtained with appropriate cross section of microgrooves and uniform initiation of the autocatalytic deposition on the inner surface of grooves. The dimension and shape of the microelectrodes could be accurately controlled by changing the conditions of femtosecond laser ablation, which in turn can control the distribution of electric field inside LiNbO₃ crystal for various applications, opening up a new approach to fabricate three-dimensional integrated electro-optic devices.     

飞秒激光诱导自组织纳米周期结构及其光学特性的研究进展

飞秒激光具有超快、超强的特点.飞秒激光微纳加工发展非常迅速. 本文综述了近十年来利用飞秒激光在金属、半导体、介质等各类材料中制备的纳米周期结构, 阐述了若干关于飞秒激光诱导纳米周期结构的物理机理的观点.讨论了基于偏振调制的多光束 干涉在半导体表面制备纳米周期结构,简要叙述了周期结构对材料光学特性的影响. 关键词： 飞秒激光 纳米周期结构 多光束干涉 光学特性     

Femtosecond pulse laser-induced self-organized nanostructures on the surface of ZnO crystal

This paper reports self-organized nanostructures observed on the surface of ZnO crystal after irradiation by a focused beam of a femtosecond Ti：sapphire laser with a repetition rate of 250kHz. For a linearly polarized femtosecond laser, the periodic nanograting structure on the ablation crater surface was promoted. The period of self-organization structures is about 180 nm. The grating orientation is adjusted by the laser polarization direction. A long range Bragglike grating is formed by moving the sample at a speed of 10μm/s. For a circularly polarized laser beam, uniform spherical nanoparticles were formed as a result of Coulomb explosion during the interaction of near-infrared laser with ZnO crystal.