磁致伸缩/压电叠层复合材料磁-机-电耦合系数分析

分析和推导了磁致伸缩/压电叠层复合材料的机-电耦合系数、磁-机耦合系数及磁-电耦合系数与磁致伸缩层和压电层性能参数及几何参数之间的关系.进一步分析表明,叠层复合材料低频时的磁电电压系数正比于磁-电耦合系数,谐振时的磁电电压系数正比于磁-电耦合系数与机械品质因素的乘积;磁电电压系数还与复合结构的本征阻抗有关,本征阻抗越大磁电电压系数越大.通过性能差异较大的Terfenol-D和FeNi基弹性合金分别与压电材料PZT5-H和PZT8相互组合构成复合材料的比较分析,进一步阐明了磁电复合材料磁-电耦合系数和机械品 关键词： 磁电效应 磁-机-电耦合系数 磁致伸缩材料 压电材料     

Electromechanical properties of lanthanum-doped lead hafnate titanate thin films for integrated piezoelectric MEMS applications

This paper focuses on the deposition and electromechanical characterization of lanthanum-doped lead hafnate titanate (PLHT) thin films as key material in piezoelectric microelectromechanical systems (pMEMS). PLHT (x/30/70) and PLHT(x/45/55) films with a thickness between 150 nm and 250 nm were deposited by chemical solution deposition (CSD). Thereby x varies between 0 and 10% La content. The electrical characterization shows that undoped (x=0) PLHT exhibit ferroelectric behavior similar to PZT of the same composition. La doping results in reduced ferroelectric properties and also affects the electromechanical properties. Measurements using a double beam laser interferometer yield a piezoelectric coefficient d ₃₃ of 60 pm/V, which stays constant with an increasing electric field. This leads to a linear displacement compared to undoped PLHT or conventional PZT films used for MEMS applications.     

Dynamic modeling of thickness-mode piezoelectric transducer using the block diagram approach

This paper aims to provide an alternative method to determine the characteristics of a piezoelectric transducer from measurement. A block diagram approach is proposed to analyze the dynamic characteristics of a thickness-mode piezoelectric transducer at its resonance frequency. Based on the feedback loop framework, the input-output relations of the electromechanical interaction of the transducer are described in terms of linear block diagram models. Furthermore, the closed-loop relations from external force to vibration velocity and electric current from generated voltage are easily found by Mason’s rule to characterize the equivalent mechanical admittance and electrical impedance, respectively. An example of a Langevin transducer with 28.15 kHz resonance frequency is illustrated for dynamics analysis. The frequency responses of the piezoelectric transducer, resulting from a force and current input, are respectively measured to identify the system parameters of the feedback model. The experimental results demonstrate the effectiveness of the proposed method.     

Electromechanical impedance measurement from large structures using a dual piezoelectric transducer

This study develops a new electromechanical (EM) impedance measurement technique specifically for continuous monitoring of large structures. Conventionally, a single surface-mounted lead zirconate titanate (PZT) transducer is often used to measure the EM impedance of a coupled PZT-structure system for damage diagnosis. However, when the target structure is massive, the impedance measurement becomes challenging. In this study, a dual piezoelectric transducer, composed of two separate but concentric PZT segments, is used for effective measurement of the EM impedance from large-scale structures. The impedance measurement using the dual PZT is theoretically formulated and numerically verified. Then, a series of experiments are carried out on a laboratory-size specimen and full-scale bridge and building structures. The experimental results reveal that the proposed technique successfully measures the EM impedance signals from massive structures with a high signal-to-noise ratio (SNR) and good repeatability even when the conventional techniques fail to do so. At the same time, the proposed technique allows low-cost and fast measurement of impedance signals.     

Theoretical modelling of frequency dependent elastic loss in composite piezoelectric transducers

The large number of degrees of freedom in the design of piezoelectric transducers requires a theoretical model that is computationally efficient so that a large number of iterations can be performed in the design optimisation. The materials used are often lossy, and indeed loss can be used to enhance the operational characteristics of these designs. Motivated by these needs, this paper extends the one-dimensional linear systems model to incorporate frequency dependent elastic loss. The reception sensitivity, electrical impedance and electromechanical coupling coefficient of a 1–3 composite transducer, with frequency dependent loss in the polymer filler, are investigated. By plotting these operating characteristics as a function of the volume fraction of piezoelectric ceramic an optimum design is obtained. A device with a non-standard, high shear attenuation polymer is also simulated and this leads to an increase in the electromechanical coupling coefficient. A comparison with finite element simulations is then performed. This shows that the two methods are in reasonable agreement in their electrical impedance profiles in all the cases considered. The plots are almost identical away from the main resonant peak where the frequency location of the peaks are comparable but there is in some cases a 20% discrepancy in the magnitude of the peak value and in its bandwidth. The finite element model also shows that the use of a high shear attenuation polymer filler damps out the unwanted, low frequency modes whilst maintaining a reasonable impedance magnitude.     

Piezoelectric properties of PbHfO3–PbTiO3–Pb(Mg1/3Nb2/3)O3 ternary ceramics

(1 – x)Pb(Hf_1–yTi_y)O₃–x Pb(Mg_1/3Nb_2/3)O₃ (x = 0.1 ～ 0.25, y = 0.555) ternary piezoelectric ceramics were prepared using the two‐step precursor method. Morphotropic phase boundary (MPB) compositions, located at x = 0.18 ～ 0.22, were confirmed using X‐ray diffraction and by their dielectric, piezoelectric and ferroelectric properties. The optimum dielectric and piezoelectric properties were achieved for the MPB composition 0.8Pb(Hf_0.445Ti_0.555)O₃–0.2Pb(Mg_1/3Nb_2/3)O₃, with dielectric permittivity ε_r, piezoelectric coefficient d₃₃, planar electromechanical coupling k_p and Curie temperature T_C being on the order of 2800, 680 pC/N, 70% and 276 °C, respectively. Of particular significance is that the new ternary ceramics exhibit comparable piezoelectric and electromechanical properties to commercial PZT5H ceramics, but with much improved T_C, showing a potential for applications at elevated temperature. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

基于2-2型压电复合材料的新型宽频带径向振动超声换能器

本文提出了一种基于2-2型压电复合材料的新型宽频带径向振动超声换能器,它主要由内金属圆环和外压电陶瓷复合材料圆环组成.首先利用Newnham串并联理论和均匀场理论推导了2-2型压电复合材料的等效参数;其次利用解析法得到了金属圆环和径向极化压电复合陶瓷圆环径向振动的机电等效电路;最后得到了换能器的六端机电等效电路,从而得到了换能器的频率方程.接着分析了换能器共振频率和反共振频率以及有效机电耦合系数与几何尺寸、两相体积占比的关系,采用仿真软件对新型换能器的径向振动进行了数值模拟.结果表明,利用解析法得到的共振频率和反共振频率与数值模拟结果吻合较好.此外,对换能器在水下的辐射声场进行了仿真研究,结果表明新型复合材料径向换能器相比传统纯陶瓷径向换能器,发射电压响应幅值更大,工作带宽提高接近一倍,声匹配更佳.     

Investigation of dielectric, piezoelectric and ferroelectric properties of b-axis grown triglycine sulphate single crystal

Large single crystal of triglycine sulphate (dimension 100 mm along monoclinic b-axis and 15 mm in diameter) was grown using the unidirectional solution growth technique. The X-ray diffraction studies confirmed the growth/long axis to be b-axis (polar axis). The dielectric studies were carried out at various temperatures to establish the phase transition temperature. The frequency response of the dielectric constant, dielectric loss and impedance of the crystal along the growth axis, was monitored. These are typically characterized by strong resonance peaks in the kHz region. The piezoelectric coefficients like stiffness constant (C), elastic coefficient (S), electromechanical coupling coefficient (k) and d ₃₁ were calculated using the resonance-antiresonance method. Polarization (P)-Electric field (E) hysteresis loops were recorded at various temperatures to find the temperature-dependent spontaneous polarization of the grown crystal. The pyroelectric coefficients were determined from the pyroelectric current measurement by the Byer and Roundy method. The ferroelectric domain patterns were recorded on (010) plane using scanning electron microscopy and optical microscopy.     

Study of compressive type accelerometer based on lead-free BNKBT piezoceramics

Lead-free piezoelectric 0.90(Bi_1/2Na_1/2)TiO₃-0.05(Bi_1/2K_1/2)TiO₃-0.05BaTiO₃ ceramics(abbreviated as BNKBT-5) rings were fabricated using a conventional mixed oxide method. The ceramics have a piezoelectric constant d₃₃=168 pC/N, electromechanical coupling factors k_p=0.313 and k_t=0.487. The BNKBT lead-free ceramic rings were used as the transduction elements in a compressive type accelerometer and its performance compared with a lead zirconate titanate (PZT) APC 840 ceramic accelerometer with similar structure. The lead-free accelerometer shows good performance and has a broader frequency response compared to the lead-based PZT accelerometer. PACS 77.22.Ej; 77.84.-s; 85.50.-n     

Effects of reflecting layers on resonance characteristics of a solidly mounted resonator with ¼ λ mode configuration

The solidly mounted resonator (SMR) is composed of a piezoelectric thin film sandwiched between two electrodes and a Bragg reflector that comprises alternating high and low acoustic impedance with a thickness of a quarter wavelength. In this study, the combination Mo/SiO₂ is chosen as high/low acoustic impedance materials to form a Bragg reflector; aluminum nitride (AlN) is utilized as the piezoelectric layer. The purpose of this study is to investigate the resonance characteristics of solidly mounted resonators with various pairs of reflecting layers. The experimental results yield an electromechanical coupling (k_eff²)(k_{\mathrm{eff}}^{2}) of 1.926% and quality factor (Q) of 254 with three pairs of Mo/SiO₂ layers. The figure of merit (FOM), which is defined as the product of electromechanical coupling and quality factor, has a maximum of 489 with three pairs of Mo/SiO₂ layers.     

Comparison of several methods to characterise the high frequency behaviour of piezoelectric ceramics for transducer applications

Thickness mode resonances in commercial piezoelectric ceramics have been characterised as a function of frequency by two methods. The first is based on a fit on the electrical impedance for the fundamental and the overtones. This method has been applied to a large number of PZT ceramic samples and frequency dependence for all the parameters is investigated, in particular for the piezoelectric coefficient e33. The second is based on the measurement of the mechanical displacement at the centre of the surface of a PZT ceramic disk. With a modified KLM scheme, this displacement is modelled. The dielectric, elastic and piezoelectric parameters are extracted and compared for the fundamental and the third overtone. The results are found to be in good agreement.     

PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. In the transducer structure, the active element is fixed within the stainless steel needle housing. The measured center frequency and −6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the superior electromechanical coupling coefficient (k _t ) and high piezoelectric constant (d ₃₃) of PMNPT film, the transducer shows a good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency.     

Characteristics of backing impacts on the performance of the thickness mode piezoelectric transducer

The impacts of the thickness, the specific acoustic impedance and the mechanical loss factor of the backing on the performance of the thickness mode piezoelectric transducer are systemically studied, which are focused on the effective electromechanical coupling coefficient and the mechanical quality factor near the center frequency. The results show that with contin?uous increasing of the backing thickness, the effective electromechanical coupling coefficient and the mechanical quality factor are found rapidly declined by oscillation way. With the increase of the difference value of the acoustic impedance between the backing material and the piezoelec?tric material, the effective electromechanical coupling coefficient deceases and the mechanical quality factor increases. Under condition that the thickness of the piezoelectric material is fixed, the effective electromechanical coupling coefficient is found declined with the increase of the mechanical loss factor by monotonous way. The mechanical quality factor has minimum value and the electric characteristic curve tends to be smooth in a given frequency range. The equivalent circuit theory result is in good agreement with the ones by finite element method and the experimental results. The work mentioned above provides a theoretical guidance for the design and experimental fabrication of the thickness mode piezoelectric transducer.     

Some experimental data for the design of acoustic arrays

The frequency spectra of resonant vibration of a PZT4 piezoelectric plate was observed, for width-to-thickness ratios ranging from 0·3 to 4·0. The results give useful information for the design of line arrays applicable, for example, to medical diagnostic sonars. The effect of backing and impedance matching on PZT4 ceramic slabs was also studied experimentally.     

Dielectric and piezoelectric properties of manganese‐modified PbHfO3–PbTiO3–Pb(Mg1/3Nb2/3)O3 ternary ceramics with morphotropic phase boundary compositions

High piezoelectric and electromechanical properties were reported in the PbHfO₃–PbTiO₃–Pb(Mg_1/3Nb_2/3)O₃ ternary system with morphotropic phase boundary (MPB) compositions. This work focuses on the effect of MnO₂ addition on 0.8Pb(Hf_0.443Ti_0.557)O₃–0.2PMN (0.8PHT–0.2PMN) ceramics. It was observed that the Mn acceptor modification induced a “hardening” effect in 0.8PHT–0.2PMN, with decreased piezoelectric coefficients d₃₃ and dielectric loss tan δ and a significantly increased mechanical quality factor Q_m. Moreover, the 0.2 wt% MnO₂‐doped 0.8PHT–0.2PMN ceramics exhibited good piezoelectric and electromechanical properties with d₃₃, planar electromechanical coupling k_p and Q_m being on the order of 360 pC/N, 61% and 700, respectively, showing advantages compared to those of commercial hard PZT4 ceramics, which is attractive for high power applications. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

背衬参数对厚度模压电换能器特性的影响

系统研究了厚度模压电换能器的背衬厚度、声阻抗率及机械损耗因子对换能器振动性能影响,重点分析了在所关心频率附近的有效机电耦合系数和机械品质因数。计算结果表明,随着背衬厚度增大,换能器的有效机电耦合系数和机械品质因数均震荡减小;背衬声阻抗率与压电片声阻抗率差值增大,换能器有效机电耦合系数减小,机械品质因数增大;保持压电片厚度不变,增大背衬的机械损耗因子,换能器有效机电耦合系数单调减小,机械品质因数有极小值,在给定频率范围内电特性曲线趋于光滑。用有限元方法验证了等效电路计算方法的正确性,并对比了换能器的测试结果和计算结果。计算所得规律为厚度模压电换能器的设计和实验制作提供了理论依据。      

Effect of carbon black on properties of 0–3 piezoelectric ceramic/cement composites

0–3 cement-based piezoelectric composites were fabricated using sulphoaluminate cement and piezoelectric ceramic [0.08Pb(Li_1/4Nb_3/4)O₃ · 0.47PbTiO₃ · 0.45PbZrO₃] [P(LN)ZT] as raw materials by compressing technique. The influences of carbon black content on the piezoelectric and dielectric properties, electric conductivity and impedance were investigated. The results indicate that the piezoelectric strain constant d₃₃ and piezoelectric voltage constant g₃₃ of the composites increase gradually with a suitable carbon black addition. When the carbon black content is 0.3 wt%, both of the piezoelectric strain constant d₃₃ and piezoelectric voltage constant g₃₃ of the composite exist the maximum value, which are 17.45 pC N⁻¹ and 36.3 mV m N⁻¹, respectively. As the carbon black content increases, the dielectric constant ε_r, dielectric loss tanδ and electric conductivity σ of the composites all increase, while the impedance decreases. In the frequency range tested, the more the carbon black content, the higher the ε_r value. The planar electromechanical coupling coefficient K_p, the thickness electromechanical coupling coefficient K_t and the mechanical quality factor Q_m are almost unaffected by the carbon black content.     

6 MHz BAW resonators fabricated using new piezoelectric crystals PrCa4O(BO3)3 and NdCa4O(BO3)3

Thickness shear mode Bulk Acoustic Wave (BAW) resonators with frequency of 6 MHz, were fabricated using monoclinic piezoelectric crystals PrCa₄O(BO₃)₃ (PrCOB) and NdCa₄O(BO₃)₃ (NdCOB). Zero temperature coefficient of frequency (TCF) characteristics were achieved over the temperature range of –140 °C to 200 °C for (YXt)–1.5° cut PrCOB and (YXt)15° cut NdCOB, with the turnover temperature at 20 °C. The electromechanical coupling factor k₂₆ and the piezoelectric coefficient d₂₆ were determined to be 30.2% and 15.8 pC/N for PrCOB, 29.0% and 15.1 pC/N for NdCOB resonators, respectively. The temperature independent frequency behavior, large coupling factor, high piezoelectric coefficient, together with noticeable mechanical quality factors (Q > 2,500), make PrCOB and NdCOB crystals good candidates for sensing applications with expanded temperature usage range. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Behavior of a PZT ring under non-uniform mechanical stress

Ring-shaped lead zirconate titanate (PZT) piezoelectric vibrators were subjected to non-uniform mechanical stress applied by bolt clamping. The effect of mechanical stress on the effective electromechanical coupling factor (k_eff) and mechanical quality factor (Q_m) of the thickness and wall thickness modes was studied by an equivalent electric circuit analysis. The initiation and propagation of cracks under mechanical stress were also discussed based on the resonance method and the indentation technique. k_eff for both the thickness and wall thickness modes decreased with increase in mechanical stress due to de-poling of the PZT. Q_m of the thickness mode dropped sharply with increase in mechanical stress while Q_m of the wall thickness mode remained almost unchange. Existence of microcracks in a PZT vibrator can be detected by the occurrence of spurious vibrations at the wall thickness mode in the electrical impedance vs. frequency spectra.     

Definition and measurement of the normalized electrical impedance of lossy piezoelectric resonators for ultrasonic transducers

Relevant equivalent circuit parameters and values of material constants of a piezoelectric resonator can be determined from measurements of its electrical input impedance as a function of frequency. The complex electrical impedance curves and the associated critical frequencies are the basis of this characterization by the piezoelectric resonance method. In this paper, the previously introduced concept of normalized electrical impedance of the lossy resonator, extended to include piezoelectric losses, is applied to the analysis of the effects of different types of intrinsic losses on peak values, bandwidths and characteristic frequencies. The resulting impedance patterns depend solely on the electromechanical coupling coefficient and the loss tangents, providing a useful tool for the analysis of low-Q resonators. The normalized impedance is experimentally evaluated from the basic data provided by an HP 4194A impedance analyser by means of specifically developed ASP programs.