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在HL-2A装置上采用石英晶体微天平(QCM)测量碳元素及其化合物的沉积质量,从测量的数据可知,每次等离子体放电后QCM的沉积量都会有细微变化,每次放电测得的沉积质量约为0.1~10μg.沉积量的变化与沉积物质再腐蚀或者溅射有关.根据一天的测量结果,可以计算得出HL-2A装置偏滤器区域平均每次放电(非H模放电)的沉积厚度约为10nm.     

石英晶体微天平在HL-2A装置上的应用

在HL-2A装置上采用石英晶体微天平(QCM)测量碳元素及其化合物的沉积质量,从测量的数据可知,每次等离子体放电后QCM的沉积量都会有细微变化,每次放电测得的沉积质量约为0.1~10μg。沉积量的变化与沉积物质再腐蚀或者溅射有关。根据一天的测量结果,可以计算得出HL-2A装置偏滤器区域平均每次放电(非H模放电)的沉积厚度约为10nm。     

谐振式检测器指条厚度对质量型声表面波传感器灵敏度的影响

研究了谐振器指条厚度对质量型声表面波传感器灵敏度的影响.利用耦合模方程推导出耦合模参量与周期栅阵禁带边界频率的关系,结合有限元及P矩阵模型,获得了声表面波传感器灵敏度随指条厚度的变化关系。制备3种不同铝指条厚度(1600?,1900?,3100?)的声表面波谐振器,通过对其表面中心区域沉积SiO_2层验证了计算结果。结果表明:采用ST-X石英基底的声表面波谐振器对SiO_2负载检测时,传感器的灵敏度随铝指条厚度的增加先变大后减小,最优归一化指条厚度为1.9%。分析表明,指条厚度对传感器灵敏度的影响主要来自于传播速度和耦合系数的共同作用,通过优化指条厚度的方法可改善传感器的灵敏度.     

The different self-assembled way of n- and t-dodecyl mercaptan on the surface of copper

The self-assembled monolayers (SAMs) of n- and t-dodecyl mercaptan on the surface of copper have been obtained. As evidenced by electrochemical impedance spectroscopy (EIS), two kinds of the alkanethiols can self-assemble on the copper surface. But the results of the quartz crystal microbalance (QCM) show that the self-assembled way of the two alkanethiols are different. The SAMs of n-dodecyl mercaptan can increase the weight of the QCM electrode and the SAMs of t-dodecyl mercaptan, on the contrary, make the weight of the QCM electrode decrease. Inspected with the SEM, it is found that a lot of pits spread all over the copper surface after having been modified with t-dodecyl mercaptan. All the results suggest that the self-assemble of t-dodecyl mercaptan on the copper surface can erode and dissolve copper surface sharply.     

高Q值薄壁液芯毛细管微腔电场传感器

为提高电场传感器的抗电磁干扰能力、灵敏度和稳定性,将高Q值薄壁液芯毛细管微腔和电泳效应结合,增强回音壁模共振微腔对外加电场的感知能力,并进行了实验验证.基于时域有限差分法得到了液芯毛细管微腔回音壁模式共振特性随毛细管直径、壁厚等结构参数的变化规律,发现随着壁厚变薄灵敏度增加.采用熔融拉锥法制备了直径为86μm,壁厚约为2μm的薄壁毛细管微腔,通过高精度位移平台实现了锥形光纤和毛细管微腔的高效率耦合,测得回音壁模式Q值为2.8×10^6.毛细管微腔内注入不同浓度的蛋白质溶液,利用电泳原理和蛋白质分子在缓冲溶液里带电的特性,实现的最大电场传感灵敏度为10.6 pm/(kV/m).     

Ammonia sensing characteristics of ZnO nanowires studied by quartz crystal microbalance

The ZnO nanowires have been prepared and studied as the sensing element for the detection of ammonia. The ZnO nanowires were first synthesized by evaporating high purity zinc pellets at 900 °C and then distributed onto the electrode surfaces of quartz crystals at room temperatures. Gas sensitive properties of ZnO nanowires layer were studied in terms of the quartz crystal microbalance (QCM) at room temperature. It is found that the obtained response of the sensors varied with the thickness of the ZnO nanowires layer. ZnO nanowires showed high sensitivity to ammonia in the range of 40-1000 ppm. The response time of the sensor was as fast as ∼5 s at any concentration (40-1000 ppm) of ammonia gas. The ZnO nanowires-coated sensors have a good frequency stability and reproducibility. All results demonstrated that the ZnO nanowire was a potential gas sensing material for practical use.     

Wireless-electrodeless quartz-crystal-microbalance biosensors for studying interactions among biomolecules: A review

The mass sensitivity of quartz-crystal microbalance (QCM) was drastically improved by removing electrodes and wires attached on the quartz surfaces. Instead of wire connections, intended vibrations of quartz oscillators were excited and detected by antennas through electromagnetic waves. This noncontacting measurement is the key for ultrahigh-sensitive detection of proteins in liquids as well as quantitative measurements. This review shows the principle of wireless QCMs, their applications to studying interactions among biomolecules and aggregation reactions of amyloid β peptides, and the next-generation MEMS QCM, the resonance acoustic microbalance with naked embedded quartz (RAMNE-Q).     

Effects of electrodes on performance figures of thin film bulk acoustic resonators

The effects of mechanical losses and elastic properties of the electrodes on the performance figures of a thin film bulk acoustic resonator (FBAR) are analyzed by numerical simulation. Results indicate that the material loss of the electrode has no visible effect on the characterization of the effective electromechanical coupling factor, k(eff)2. The acoustic impedance ratio of the electrode to the piezo-film dominantly determines the behaviors of the k(eff)2 variation with the electrode thickness. The resonance Q value, Q(s), of the FBAR closely relies on the material Q values of film and of electrodes as expected. Besides, the variation of Q(s) versus the thickness of the electrodes crucially depends on the acoustic impedance ratio as well. Especially, three characteristic parameters, i.e., the maximum value of k(eff)2, the sectional mass ratio of the electrode to the piezo film corresponding to the maximum k(eff)2, and the tolerance range of the ratio to keep k(eff)2 near the maximum, are calculated for some typical samples. These results would be useful for optimizing FBAR designs and performances.     

电场作用下5CB液晶分子的近壁面层黏弹性的QCM研究

利用石英晶体微天平(quartz crystal microbalance,QCM)研究了电场对5CB液晶分子的近壁面层黏弹性的影响.对QCM结果的分析发现,电场作用对液晶的黏度影响分为两部分,通过建立含吸附膜的双层膜模型,分析了QCM的两部分结果,发现电场对近壁面吸附层及体相层的影响是不同的.根据QCM的双层膜模型,对近壁面层液晶分子的黏弹性及膜厚进行了定量的分析计算,结果表明5CB在石英晶体上电极附近有一层约100nm厚的近壁面吸附层,其复剪切黏度随电场强度的增加而减小,这与5CB液晶的体相黏度变化规 关键词： 5CB液晶 石英晶体微天平 近壁面 黏弹性     

Phosphoric acid and pH sensors based on polyaniline films

Polyaniline (PANI)-chemically coated the electrode of quartz-crystal microbalance (QCM) has been developed for the determination of phosphoric acid (H₃PO₄) in the liquid phase. The sensing mechanism is based on the fact that the QCM devices produce a change in the oscillating frequency when the PANI coating the electrode of QCM interacts with different concentration of the acid. This was made during the subsequent redoping–dedoping processes of the PANI film in acid and ammonia solutions, respectively. Also, this was made during the successive redoping in different acid solutions. The QCM sensor demonstrated a rapid response to the acid with an excellent reversibility. A linear response of the sensor for different concentrations of H₃PO₄ was found in region of 1 M. The conductivity at different concentration of the acid was also determined. Finally, pH dependence on the electronic absorption of PANI phosphate film was studied which indicates that the film can be used as a sensor over a wider pH range of 3–12. This is in comparison to a PANI-sulphate film which shows limited pH absorption dependence (5–8).     

Efficient Thickness of Solid Oxide Fuel Cell Composite Electrode

利用一个物理模型计算了固体氧化物燃料电池复合电极的有效厚度. 此模型考虑了复合电极内部的电化学反应,电子和离子的传递,以及电极的微结构. 电极的有效厚度对应于电极性能最优时电极的理论厚度,经过模型计算表明此厚度同时为电荷转移电阻率、有效离子(电子)电阻率以及单位体积内三相线长度的函数. 通过与实验数据比较验证了模型的可用性. 通过模拟表明电极成分、粒子大小、电极材料的本征电阻率、不同的操作温度以及电极反应的机理都影响着复合电极的有效厚度.     

Hybrid temperature effect on a quartz crystal microbalance resonator in aqueous solutions

The quartz crystal microbalance(QCM) is an important tool that can sense nanogram changes in mass. The hybrid temperature effect on a QCM resonator in aqueous solutions leads to unconvincing detection results. Control of the temperature effect is one of the keys when using the QCM for high precision measurements. Based on the Sauerbrey's and Kanazawa's theories, we proposed a method for enhancing the accuracy of the QCM measurement, which takes into account not only the thermal variations of viscosity and density but also the thermal behavior of the QCM resonator. We presented an improved Sauerbrey equation that can be used to effectively compensate the drift of the QCM resonator. These results will play a significant role when applying the QCM at the room temperature.     

双层声波导乐甫波传感器的质量敏感度分析

本文推导了双层声波导结构乐甫波传感器的频散方程和质量敏感度。首先,根据连续边界条件求解声波波动方程,并推导双层声波导结构下乐甫波传播的频散方程;然后根据微扰理论推导乐甫波传感器的质量敏感度。文中并最后给出基于ST-90°X石英基片的乐甫波传感器的算例分析。基片表面依次覆盖二氧化硅和金两层声波导,根据上述推导式子计算出乐甫波相速度及质量敏感度随着声波导层厚度变化的特性。结果表明:声波导层厚度增加时,乐甫波相速度减小,乐甫波模式增多,控制波导层厚度可以获得单一的乐甫波模式;选择波导层的厚度,乐甫波传感器可获得最大质量敏感度。     

基于PTCDA的有机/无机光敏二极管结构优化

以p型硅和苝四甲酸二酐 （perylene-3,4,9,10-tetracarboxylic acid dianhydride,PTCDA）为异质结,梳状金（Au）薄膜作为顶电极和光入射窗口制备了光敏二极管。研究表明,PTCDA的厚度和Au电极的厚度对光敏二极管的光响应度有很大的影响。对比不同PTCDA厚度的器件性能,在PTCDA厚度为100 nm时,光响应度最高达到0.3 A/W。进而采用最优化的100 nm厚的PTCDA薄膜制备硅基光敏二极管,对比不同Au电极厚度的器件性能。在Au厚度为20 nm时,器件的光响应度达到最优化的0.5 A/W。     

不同电极结构下双通道大气压He等离子体射流数值研究

采用二维轴对称流体模型对单电极结构（不锈钢针管）和双电极结构（不锈钢针管-高压环形电极）下同轴双通道进气的大气压氦气等离子体射流进行了对比研究。研究表明:相比于单电极结构,双电极结构下射流的传播速度明显降低,介质管内尤为严重。同时双电极结构下射流的空间结构也发生了显著变化。在单电极结构下,随射流发展由环形中空结构转变为实心圆盘结构;而在双电极结构下则呈现出实心圆盘结构至环形中空结构再至实心圆盘结构的演化过程,改善了射流空间分布的均匀性。此外,还研究了双电极结构下高压环形电极厚度对射流的影响。研究表明,随环形电极厚度的增加,射流的传播速度进一步降低,射流通道径向收缩,同时环形中空结构的射流内径减小,进而改善了射流径向分布的均匀性。     

Fabrication and analysis of ZnO thin film bulk acoustic resonators

This study employs RF magnetron sputter technique to deposit high C-axis preferred orientation ZnO thin film on silicon substrate, which is then used as the piezoelectric thin film for a thin film bulk acoustic resonator (FBAR). Electrical properties of the FBAR component were investigated by sputtering a ZnO thin film on various bottom electrode materials, as well as varying sputter power, sputter pressure, substrate temperature, argon and oxygen flow rate ratio, so that structural parameters of each layer were changed. The experimental results show that when sputter power is 200 W, sputter pressure is 10 mTorr, substrate temperature is 300 °C, and argon to oxygen ratio is 4:6, the ZnO thin film has high C-axis preferred orientation. The FBAR component made in this experiment show that different bottom electrode materials have great impact on components. In the experiment, the Pt bottom electrode resonant frequency was clearly lower than the Mo bottom electrode resonant frequency, because Pt has higher mass density and lower acoustic wave rate. The component resonant frequency will decrease as ZnO thin film thickness increases; when top electrode thickness is higher, its resonant frequency also drops, due to top electrode mass loading effect and increased acoustic wave path. Therefore, ZnO thin film and top/bottom electrode thickness can be fine-tuned according to the required resonant frequency.     

Sensitivity of a Lamb wave sensor with 2 microm AlN membrane

Anti-symmetrical Lamb wave mode A0 presents a large sensitivity to mass loading and can be used in contact with liquids with a small attenuation. The advantages of this system are the possibility to get a large mass sensitivity. The sensitivity increases when the thickness of membrane decreases. Therefore the problem is to obtain thin piezoelectric membranes. A membrane of AlN with a thickness of 2 microm has been made. The measured mass sensitivity with a fluid is 200 cm(2) g(-1). In a practical use point of view, the problem in this kind of sensor is its temperature sensitivity. In order to reduce effective temperature sensitivity, a device with thin metallic strips is presented. On the same membrane two different waves with perpendicular propagating directions are produced. Experimentally, temperature sensitivity is rather different depending on the propagation direction but mass sensitivity is almost the same, this allows distinguishing temperature effects from those due to mass loading on the frequency shift measurements.     

Influences of electrode material and design on the reliability of IRFPAs detector under thermal shock

Under thermal shock, high fracture probability in indium antimonide (InSb) infrared focal plane arrays (IRFPAs) limits its applicability. Typical fracture photographs under thermal shock shows that the cracks originating from the area above public electrode are dominant. In order to learn the influences of electrode material parameter and design on the reliability in InSb IRFPAs detector, the proposed improved equivalent modeling method is employed to build three dimensional InSb IRFPAs structure analysis model. Simulated results show that different electrode materials greatly influence the maximal thermal stress appearing in InSb chip and public electrode, and among the electrode material parameters, the coefficient of thermal expansion is the main affecting factor on thermal stress. With the increasing electrode thickness, the maximum thermal stresses in InSb chip and public electrode both decrease, which means the smaller electrode thickness leads to larger thermal stress in InSb chip and electrode. Besides, it is also found that adjusting the electrode layout to avoid the overlap between indium bumps and the embedded part of electrode can effectively reduce the stress concentration in the area of InSb chip above public electrode. All these are beneficial to optimize the structure of InSb IRFPAs and reduce the fracture probability.     

Synthesis and characterization of silver-polypyrrole film composite

In this work, we report the chemical polymerization of pyrrole to obtain thin film of polypyrrole (PPy) hydrochloride deposited onto the electrode of the quartz crystal microbalance (QCM). The film in the base form was exposed to a solution of AgNO₃. Electroless reduction for silver ions by the PPy film took place and silver particles were adsorbed onto the film surface. The silver particles content at the PPy films were analyzed by QCM and the results showed that the concentrations of silver uptakes increase as the original AgNO₃ solution increases. The morphology of the surface of the PPy film and the silver-PPy film composite were studied by the scanning electron microscopy (SEM) coupled with energy dispersive X-ray spectrometry (EDX). They showed that the obtained silver particles have spherical, cubic and tetrahedral structures. X-ray diffraction (XRD) and Fourier transformed infra-red spectroscopy (FTIR) were used to characterize the structure of the powder composite. This work reveals the capability of PPy film coating on QCM in sensing and removing silver from several environmental samples.     

Humidity sensing properties of Pd-doped ZnO nanotetrapods

Pd²⁺-doped ZnO nanotetrapods were prepared and studied for the humidity detection application. The humidity sensors developed were featured by combination of a quartz crystal microbalance (QCM) as a transducer and Pd²⁺-doped ZnO nanotetrapods as a sensing element. The ZnO nanotetrapods were synthesized by evaporating highly pure zinc pellets (99.999%) at 900 °C in air and PdCl₂ was doped on by traditional solution mixing process. Then the mixed solution distributed onto the electrode surfaces of the quartz crystal at room temperature. Pd²⁺-doped ZnO nanotetrapods were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The experimental results indicated that the response of the sensors varied with the different dosage PdCl₂. Linear regression algorithm was used for evincing the highly linear behavior of the Pd²⁺-doped ZnO nanotetrapods sensor. In this humidity sensing system, the Pd²⁺-doped ZnO nanotetrapods sensing material coated on the gold electrode of QCM showed good sensitivity (∼74.24324 Hz/%RH (relative humidity)), reproducibility, linearity (R² = −0.98834), short response and recovery time (less than 5 s).