射频磁控溅射制备氧化钒薄膜的研究

氧化钒（VOx）薄膜是一种广泛应用于红外热成像探测的薄膜材料,研究VOx薄膜的制备工艺、获取高电阻温度系数（TCR）的VOx薄膜具有重要意义。以高纯金属钒作靶材,采用射频磁控溅射的方法在室温下制备了VOx薄膜。主要研究了氩氧流量比以及功率等工艺参数对薄膜TCR的影响,获得了较好的工艺参数。采用万用表和X射线光电子能谱仪（XPS）分别测试了不同条件下射频磁控溅射法制备的VOx薄膜的电阻特性和薄膜成分,测试结果表明,采用所获得的较好工艺参数制备的VOx薄膜TCR值大于1.8%。     

Fe_3O_4纳米颗粒/聚二甲基硅氧烷复合材料磁电容效应的研究

提出了一种以Fe3O4纳米颗粒和聚二甲基硅氧烷(PDMS)组成的复合材料为介质的平行板磁电容结构,并对其产生的磁电容效应的特点以及影响磁电容效应的因素进行了研究.对不同粒径的Fe3O4纳米颗粒按不同比例与PDMS混合形成的复合材料进行了测试.研究表明,与无磁场情况相比,在外磁场作用下,Fe3O4纳米颗粒/PDMS复合材料的电容值和介电损耗均发生了改变,产生了磁电容效应.由该复合材料磁电容效应所产生的电容变化量随着纳米颗粒混合浓度的增大而增大,并且当纳米颗粒粒径尺寸大于常温超顺磁临界尺寸时,材料的电容变化量随着颗粒尺寸的减小而增大.     

掺杂N的浓度对SiC薄膜的光敏特性影响(英文)

在热丝化学汽相沉积(HFCVD)法制备SiC薄膜过程中,研究不同的N掺杂下制备样品的光敏特性.对薄膜在室温和较高温度(410℃)下进行光敏特性测试,结果表明,薄膜的制备工艺参量对其光敏特性有较大影响;较高温度下其敏感特性和室温下测试的结果大体一致;在合适条件下制备的薄膜对不同波长的光有较好的敏感特性.可以看出,SiC薄膜在研究高温光敏器件领域具有很好的应用前景.     

感压复合材料压阻性能

随着机械装置向结构复杂化发展，常需要对复杂装置的层间挤压应力等接触应力进行研究，这需要利用薄型挤压应力传感器来进行接触测量。进行层间接触测量的传感器不但应具备良好的应力敏感特性，而且应具有优良的柔韧力学性能，选用高导电纳米炭黑、球形石墨为导电粒子，硅橡胶、天然橡胶为基材开展了颗粒填充型导电高分子复合材料的配方工艺优化研究、薄膜制备及均匀性控制方法研究及感压复合材料薄膜的压力一电阻关系研究。     

U形阵列式微机械悬臂梁的研究

为提高悬臂梁的分辨率，实现悬臂梁的多功能性，设计了一种U形阵列式压阻悬臂梁.从理论上对悬臂梁的应力、噪声和灵敏度进行分析，优化了悬臂梁及力敏电阻的几何尺寸.选用多晶硅为力敏材料，基于硅微机械加工技术，制备U形阵列式悬臂梁.测量悬臂梁的噪声及灵敏度，得到多晶硅力敏材料的Hooge因子和应变灵敏度系数，分别为3×10^-3和27.在6V偏压和1000Hz测量带宽条件下，计算悬臂梁的最小可探测位移为0.5nm.同时对多晶硅力敏电阻噪声的产生机理进行了探讨. 关键词： 悬臂梁 噪声 灵敏度 最小可探测位移     

用于TES测辐射热计的Al/Ti双层薄膜制备及其超导特性研究

本文报道了用于超导TES(Transition Edge Sensor)测辐射热计的Al/Ti双层薄膜制备及其超导特性研究.通过分析Al薄膜表面粗糙度和室温电阻率在不同溅射功率和氩气压力下的变化关系,优化了Al薄膜的制备工艺.使用磁控溅射技术生长了一系列不同厚度的Al/Ti双层薄膜,在氦三制冷机中测量了双层膜的超导特性.测试结果表明,Al/Ti双层薄膜具有良好的超导相变特性,在10μA测试电流下,其相变宽度保持在3mK~6mK范围内,在超导临界温度下电阻对温度的灵敏度参量α在300左右;由于超导邻近效应(Proximity effect),双层薄膜的临界温度可以通过控制Ti薄膜的厚度实现在470mK~800mK温区内的调节.Al/Ti双层薄膜的这些性能满足了制备超导TES测辐射热计的需要.     

掺杂N的浓度对SiC薄膜的光敏特性影响

在热丝化学汽相沉积（HFCVD）法制备SiC薄膜过程中，研究不同的N掺杂下制备样品的光敏特性．对薄膜在室温和较高温度（410℃）下进行光敏特性测试，结果表明，薄膜的制备工艺参量对其光敏特性有较大影响；较高温度下其敏感特性和室温下测试的结果大体一致；在合适条件下制备的薄膜对不同波长的光有较好的敏感特性．可以看出，SiC薄膜在研究高温光敏器件领域具有很好的应用前景．     

固体电解质ZrO_2薄膜气敏光学特性的研究

本文采用溶胶凝胶法制备了 Zr O2 薄膜 ,并研究它在乙醇蒸汽和氨蒸汽中的透射光谱 ,发现当掺入适量的稳定剂后 ,其光学特性显著增大 ,光学透过率随乙醇蒸汽和氨蒸汽的浓度增大而单调上升 ,敏感波段扩展至整个可见光区域 .其气敏光学特性的灵敏度、单调性、可重复性表明了该材料是一种有实用价值的气敏光纤传感器新材料 .本文亦讨论了 Zr O2 薄膜的气敏光学机理     

体声波力传感器灵敏度的微分-综合分析法

为了分析基于应力/应变效应的体声波(BAW)力传感器的敏感机理、准确计算其灵敏度,提出了一种用于BAW力传感器灵敏度分析的微分-综合分析法。该方法借鉴了微积分的原理,在Mason等效电路模型中将一个完整的BAW谐振器替换为多个谐振器微元的并联,从而将谐振器有源区面积A上应力/应变场的有限元计算结果与压电薄膜材料的力学特性、谐振器微元的电声学特性关联起来;最后,在射频电路仿真软件中进行等效电路的综合,得到整个BAW谐振器在应力/应变场作用下的阻抗特性曲线及其串/并联谐振频率。当BAW谐振器微元的划分足够细密时,获得的灵敏度分析结果将足够精确。为了论证该方法的原理,给出了一个直观的校核案例。以一个嵌入式FBAR结构的四梁BAW加速度计表头为例,介绍了该方法用于BAW力传感器灵敏度分析的详细过程。虽然案例中只讨论了一种应力/应变型BAW力传感器的单一力敏机理,但该方法具有普适性。并且,当谐振器微元小到接近其压电材料晶格的尺度时,就能与压电薄膜的力-声-电特性的第一性原理计算结果关联起来,实现从微观材料特性到介观器件物理的多尺度计算。     

体声波力传感器灵敏度的微分-综合分析法

为了分析基于应力/应变效应的体声波(BAW)力传感器的敏感机理、准确计算其灵敏度,提出了一种用于BAW力传感器灵敏度分析的微分-综合分析法。该方法借鉴了微积分的原理,在Mason等效电路模型中将一个完整的BAW谐振器替换为多个谐振器微元的并联,从而将谐振器有源区面积A上应力/应变场的有限元计算结果与压电薄膜材料的力学特性、谐振器微元的电声学特性关联起来;最后,在射频电路仿真软件中进行等效电路的综合,得到整个BAW谐振器在应力/应变场作用下的阻抗特性曲线及其串/并联谐振频率。当BAW谐振器微元的划分足够细密时,获得的灵敏度分析结果将足够精确。为了论证该方法的原理,给出了一个直观的校核案例。以一个嵌入式FBAR结构的四梁BAW加速度计表头为例,介绍了该方法用于BAW力传感器灵敏度分析的详细过程。虽然案例中只讨论了一种应力/应变型BAW力传感器的单一力敏机理,但该方法具有普适性。并且,当谐振器微元小到接近其压电材料晶格的尺度时,就能与压电薄膜的力-声-电特性的第一性原理计算结果关联起来,实现从微观材料特性到介观器件物理的多尺度计算。     

Simulation of chemical adsorption of hydrogen by carbon nanotubes

The hydrogen chemical adsorption on a single-walled carbon nanotube (6, 6) has been studied by quantum-chemical computer simulation. Different variants of hydrogen coverage of the nanotube have been considered, and the dependences of the adsorption energy and the nanotube strain energy on the coverage density have been found. In addition, the adsorption has been considered on both the outer and inner surfaces of the nanotube wall. It has been established that some adsorption conformations are unstable, which leads to fracture of the nanotubes.     

基于中性水凝胶/取向碳纳米管阵列高电压柔性固态超级电容器

随着科技发展和时代进步,发展质轻便携、安全环保的高性能储能器件变得日趋重要,对柔性固态超级电容器的研究也应运而生.柔性电极材料及电解质的选用是设计柔性固态超级电容器的关键因素,近年来一直是研究的热点.考虑到环境污染及实际需求问题,本文采用中性凝胶电解质对具有高比表面积、良好导电性及取向性的碳纳米管阵列进行包埋处理,所形成的柔性复合薄膜作为电极材料,设计制备三明治结构的柔性超级电容器件.通过改变凝胶电解质中所加入的无机盐电解质种类,调控器件的电化学储能性质.最终在聚乙烯醇PVA-NaCl作为凝胶电解质时,整个器件比容量最高达104.5 mF·cm~(–3),远高于有机离子凝胶与碳管阵列形成的复合器件以及无规分布的碳纳米管与水凝胶形成的复合器件,同时获得了0.034 mW·h·cm~(–3)的最大能量密度,并且具有良好的倍率性能、循环稳定性及抑制自放电的效果,并在高电压1.6 V下依然保持良好的化学稳定性.这种中性凝胶/碳管阵列复合超级电容器件不仅满足了绿色安全、柔性便携的要求,未来在医学可植入器件等领域也具有很好的应用前景.     

Dependence of the electrical properties of defective single-walled carbon nanotubes on the vacancy density

The relationship between the electric properties and the vacancy density in single-walled carbon nanotubes has been investigated from first principles as well as the dependence of the influencing range of a vacancy in the nanotube on the nanotube chirality.Compared with the long-range interaction of the vacancies in a single-walled carbon nanotube with non-zero chiral angle,a much shorter interaction was found between vacancies in a zigzag single-walled carbon nanotube.In this study,we investigated the bandstructure fluctuations caused by the nanotube strain,which depends on both the vacancy density and the tube chirality.These theoretical results provide new insight to understand the relationship between the local deformation of a defective single-walled carbon nanotube and its measurable electronic properties.     

ZA27/CNT界面特性电子理论研究

依据原子结合能定义了界面结合能. 采用递归法计算了纳米管增强锌铝基复合材料中ZA27/CNT界面电子结构，揭示了纳米管在ZA27合金晶界分布的微观物理本质，及其ZA27/CNT弱界面结合的电子层面的原因. 研究发现：金属基体对纳米管增强相上的碳原子态密度影响很大，而纳米管对基体金属中的铝、锌原子影响很小. 碳原子态密度与基体金属原子趋于同化，使纳米管与基体金属结合，但因同化程度不高导致界面结合较弱，影响强化效果. 如果在纳米管装饰或镀上与基体金属性质相近的原子层，会极大改善复合材料的界面结合强度，提高复合材料性能. 关键词： 复合材料 纳米管 电子结构 界面     

Dynamic strain measurement using two wavelength-matched fiber Bragg grating sensors interrogated by a cascaded long-period fiber grating

In this work, we describe a fiber Bragg grating (FBG) sensing system using two wavelength-matched FBG sensors for static and dynamic strain measurement. A cascaded long-period fiber grating (CLPG)-based demodulation technique has been used to interrogate the two wavelength-matched FBG sensors. Experimental results of static strain measurement show that the proposed system has a strain resolution of 1 με. This system has also been used for dynamic strain measurement. An eddy current displacement meter-based system has been used as a comparison measurement. Experimental results of dynamic strain measurement have proved that the FBG sensing system has a good performance in the measurement of dynamic strain. The results of static and dynamic strain measurement indicate that the sensing system using two wavelength-matched FBG sensors is superior to the single FBG sensor system.     

Low-voltage soft robots based on carbon nanotube/polymer electrothermal composites

Nowadays, soft robots have become a research hot spot due to high degree of freedom, adaptability to the environment and safer interaction with humans. The carbon nanotube (CNT)/polydimethylsiloxane (PDMS) electrothermal composites have attracted wide attention in the field of flexible actuations due to large deformation at low voltages. Here, the preparation process of CNT/PDMS composites was designed and optimized, and electrothermal actuators (ETAs) were fabricated by cutting the CNT/PDMS composite films into a "U" shape and coating conductive adhesive. The deformation performance of the ETAs with different thicknesses at different voltages was studied. At a low voltage of about 7 V, the ETA has a deformation rate of up to 93%. Finally, two kinds of electrothermal soft robots (ETSRs) with four-legged and three-legged structures were fabricated, and their inchworm-like motion characteristics were studied. The ETSR2 has the best motion performance due to the moderate thickness and three-legged electrode structure.     

Nickel cluster functionalised carbon nanotube for CO molecule detection: a theoretical study

Using spin-polarised density functional theory calculation single-walled carbon nanotube (SWCNT) whose sidewall is functionalised with nickel cluster is studied for its possible application in CO molecule sensing. We have chosen (6,0) SWCNT functionalised with Ni₁₃ cluster as the model for nanotube-cluster system. Changes in the properties of nanotube-cluster system brought by the CO molecule are reported. The CO molecule binding is energetically more favourable to the nanotube-cluster system than the pristine nanotube. The electronic properties are investigated in terms of density of states and bandstructure calculations. Pristine carbon nanotubes are intrinsically non-magnetic but nanotubes functionalised with nickel cluster are observed to have a huge magnetic moment which reduced on adsorbing CO molecule. The change in magnetisation upon CO adsorption may be detected using a suitable magnetometer. This result suggests the possibility of using carbon nanotube-cluster system to detect CO molecules. Bader charge analysis shows that CO molecule withdraws electronic charge from the cluster atoms. Nature of chemical bonding is studied with crystal orbital Hamilton population (–COHP) analysis.     

Performance evaluation of fiber Bragg grating sensors by digital holographic technique, strain gauge measurement

In view of the growing interest for non-destructive tests of materials, geodynamical monitoring and in general remote sensing, there is a great effort to bring practical optical sensors from research labs to industrial and environmental applications. In this paper, we employ digital holographic technique as an efficient tool for evaluating the strain measurement capability of fiber Bragg gratings (FBG). A cantilever beam has been employed as a test structure under loading test. The strain measurements results obtained by fiber-based sensors have been compared to those obtained by using full-field digital holographic technique and point-wise strain gauge sensors glued on the same cantilever beam. A simple theoretical model is also presented to interpret and compare the experimental results coming from different techniques.     

形变碳纳米管场效应晶体管的电学性质

在紧束缚理论的基础上,推导出轴向拉伸和扭转形变时碳纳米管（CNT）的能带公式.结果显示拉伸和扭转形变都可以改变CNT的导电性质,在金属型和半导体型之间转变,特别是对于锯齿型CNT,根据n 与3的余数关系,在拉伸和扭转中分别显示出三种不同的变化规律.进一步应用场效应晶体管Natori理论模拟计算形变对CNT场效应晶体管的电流-电压特性的影响,锯齿型CNT根据n 与3的余数关系表现出不同的电流变化趋势,而对于扶手椅型CNT轴向拉伸不改变电流;在扭转形变时,CNT电流急剧升高,特别是扶手椅型CNT.锯齿型CNT和扶手椅型CNT的电流随扭转角度和外电压行为明显不同.在某些特定的扭转角度,电流随扭转角度变化非常显著,显示出锯齿型CNT和扶手椅型CNT发生半导体型与金属型之间的转变. 关键词： 碳纳米管 紧束缚理论 费米能级 能带结构     

Synthesis and gas sensing characteristic based on metal oxide modification multi wall carbon nanotube composites

A new type of gas sensing material based on metal oxide modification multi wall carbon nanotube (MO/MWCNT) composites is presented since the interface between the composites enhance the carrier density so as to improve the gas sensitivity. Three kinds of MO/MWCNT composite materials, such as ZnO/MWCNT, SnO₂/MWCNT and TiO₂/MWCNT, have been acquired in situ growth using catalytic pyrolysis method. The MO nano particles have decorated on side of MWCNTs, whereas the introduction of SnO₂ nano particles makes part of MWCNT showing two-dimensional form of carbon nano-wall structure. Among four kinds of cathode of ZnO/MWCNTs, SnO₂/MWCNTs, TiO₂/MWCNTs and pure MWCNT composite film, TiO₂/MWCNTs composite has the lowest threshold electric field required to draw current of 12 μA has been found to be ∼1.2 V/μm, and also TiO₂/MWCNTs composite has the highest sensitivity of 16% to ethanol. The TiO₂/MWCNTs composite is superior to the others both in vacuum electron transportation and gas sensitivity.