ZnO：Sb薄膜的光致发光及拉曼特性研究

利用射频磁控溅射法（MS．RF）在玻璃基片上制备了不同掺杂浓度的ZnO：Sb薄膜．借助X射线衍射仪（XRD）、透射光谱、光致发光谱（PL）和拉曼散射光谱（Raman）等手段研究了Sb掺杂浓度对ZnO薄膜的微结构、光致发光和拉曼特性的影响．结果表明：所有样品均呈现ZnO六角纤锌矿结构且具有高度C轴择优取向;在Sb掺杂ZnO薄膜的拉曼光谱中观察到位于532cm^-1的振动模式,结合XRD分析认为此峰归因于Sb替代Zn位且与0成键的局域振动模式（LVMSb--O）;光致发光谱测试发现,仅在ZnO：Sb薄膜中观察到位于3．11eV附近的紫光发射峰,结合拉曼光谱分析认为此峰与XbZn-O复合体缺陷相关．     

Al/Al_2O_3复合薄膜的制备及表面等离子体共振性能研究

为了探究氧化层对金属薄膜表面等离子体共振(SPR)特性的调制作用,实验采用直流磁控溅射技术,通过控制沉积功率和沉积时间制备不同厚度的金属铝基薄膜,而后调控退火时间和温度得到相应的铝/氧化铝(Al/Al203)复合薄膜。采用X射线衍射仪(XRD)、原子力显微镜(AFM)、紫外-可见-近红外分光光度计及拉曼光谱仪分别表征样品的结构、表面形貌及SPR特性。XRD测试结果表明,随着金属铝基薄膜厚度的增加,Al/Al203复合薄膜由非晶态转变为较低表面能方向择优生长,薄膜结晶质量提高。其吸收光谱在220 nm附近处出现由双层复合薄膜SPR吸收峰,830 nm附近的峰对应金属铝膜的本征吸收峰。以罗丹明B为例的拉曼光谱测试结果表明,拉曼散射强度随着铝薄膜厚度增加表现为先增强后减弱的趋势,当铝膜厚度为14.5 nm时,表面增强拉曼散射(SERS)效果最显著。实验结果表明,氧化铝膜层对不同厚度的金属铝基薄膜的SPR特性有很好的调制作用,氧化铝化学性质稳定,对样品起到很好的保护作用。     

射频磁控溅射法制备SnS薄膜及其结构和光学特性

利用射频磁控溅射法在玻璃衬底上沉积SnS薄膜并对其进行快速退火处理,利用X射线衍射(XRD)、拉曼光谱(Raman)、X射线能量色散谱(EDS)、原子力显微镜(AFM)和紫外-可见-近红外(UV-Vis-NIR)分光光度计研究了不同溅射功率(60~120 W)条件下制备的SnS薄膜的晶体结构、物相组成、化学组分、表面形貌以及有关光学特性。结果表明:经快速退火的薄膜均已结晶,提高溅射功率有利于改善薄膜的结晶质量、生长择优取向程度和化学配比,薄膜的平均颗粒尺寸呈增大趋势;溅射功率为100 W的薄膜样品的结晶质量和择优取向度高,薄膜应变最小,且为纯相SnS薄膜,Sn/S组分的量比为1∶1.09,吸收系数达10~5cm~(-1)量级,直接禁带宽度为1.54 eV。     

衬底温度对氧化锌薄膜的光谱学特性影响研究

采用脉冲激光沉积技术,在不同沉积温度下制备了氧化锌薄膜。对衬底温度为400和700℃的薄膜进行了结构和光谱学性能表征。结果表明:沉积温度为400和700℃时,氧化锌薄膜均为C轴取向生长;但是表面晶粒生长模式由岛状生长转为柱状晶生长,柱状晶的出现导致了氧化锌薄膜拉曼光谱信号的增强、谱线的展宽、以及拉曼禁戒模式的出现;氧化锌UV峰由3.29 eV红移到3.27 eV,这可能是由于沉积温度为700℃时,氧化锌颗粒尺寸显著增大造成的。     

Ga-Ti共掺杂ZnO薄膜的制备及其光电性能

采用ZnO:Ga2O3:TiO2为靶材,在玻璃衬底上射频磁控溅射制备了多晶Ga-Ti共掺杂ZnO(GTZO)薄膜,通过XRD、四探针、透射光谱测试研究了生长温度对薄膜结构和光电性能的影响.结果表明:所制备的薄膜具有c轴择优取向,光学带隙均大于本征ZnO的禁带宽度.当生长温度为620K时GTZO薄膜的结晶质量最佳、电阻率最低、透射率最大、品质因数最高.     

MOCVD法生长SAWF用ZnO/Diamond/Si多层结构

使用等离子体辅助MOCVD系统在金刚石,硅衬底上成功地制备了氧化锌多层薄膜材料,通过两步生长法对薄膜质量进行了优化。XRD测试显示优化后的样品具有c轴的择优取向生长,PL谱测试表明样品经优化后不仅深能级发射峰消失,同时紫外发射峰增强。对优化后的样品的表面测试显示出较低的表面粗糙度。比较氧化锌多层薄膜结构的声表面波频散曲线,ZnO薄膜声表面滤波器受膜厚和衬底材料的影响较大。当ZnO薄膜较薄时,在它上面的传播速度将与衬底上的传播速度接近,与其他衬底上生长的薄膜相比,以金刚石这种快声速材料为衬底的ZnO多层薄膜结构,声表面波滤波器的中心频率将提高1倍左右。     

PLD制备的Cu掺杂SnS薄膜的结构和光学特性

利用脉冲激光沉积(PLD)在玻璃衬底上制备了Cu掺杂SnS薄膜.靶材是由SnS和Cu₂S粉末混合压制而成(Cu和Sn的量比分别为0%、2.5%、5%、7.5%和10%).利用X射线衍射(XRD)、拉曼光谱仪(Raman)、原子力显微镜(AFM)、紫外-可见-近红外分光光度计(UV-Vis-NIR)、Keithley 4200-SCS半导体参数分析仪研究了Cu掺杂量对SnS薄膜的晶体结构、表面形貌、光学性质和电学性能的影响.结果表明:所制备的SnS薄膜样品沿(111)晶面择优取向生长, SnS :5%Cu薄膜的结晶质量最好且具有SnS特征拉曼峰.随着Cu掺杂量的增大, 平均颗粒尺寸逐渐增大.不同Cu掺杂量的薄膜在可见光范围内的吸收系数均为10⁵ cm^-1数 量级.SnS :5%Cu薄膜的禁带宽度E_g为2.23 eV, 光暗电导率比值为2.59.同时, 在玻璃衬底上制备了p-SnS :Cu/n-ZnS 异质结器件, 器件在暗态及光照的条件下均有良好的整流特性, 并具有较弱的光伏特性.     

电子束蒸发沉积CdS掺Cl~-薄膜及其性能研究

以CdS、CdCl2混合物为薄膜材料运用电子束蒸发法,制备了不同比例的CdS掺Cl-薄膜。利用X射线衍射仪(XRD)、四探针测试仪和紫外可见光光谱仪,对所制备薄膜的结构、光学及光电导性能进行了测试。结果表明:采用此方法制备的CdS薄膜为六角纤锌矿结构的多晶薄膜,且具有垂直于基底c轴的(002)晶面优势取向。Cl-掺杂摩尔分数为0.1%时可提高薄膜的结晶性且掺杂浓度变化对光能隙的影响很小,仅变化0.07eV;其中亮方块电阻最小值为100Ω/□,光敏性达到了2.9×105。说明经过Cl-的掺杂处理可以明显改善CdS薄膜结晶质量和光学及光电导性能。     

磁控溅射法制备钛掺杂WO3薄膜结构和性能的研究

采用中频孪生非平衡磁控溅射技术制备钛掺杂WO_3薄膜。运用X射线衍射(XRD),拉曼光谱、紫外分光光度计、计时安培分析仪和原子力显微镜(AFM)等测试手段分析了钛掺杂WO_3薄膜的结构和光学性能。实验结果表明,掺杂后的薄膜在相同的热处理条件下晶化程度降低,晶粒细化,离子抽出和注入的通道大大增多,钛掺杂原子数分数0．051的着色响应速度提高,循环寿命提高了4倍以上,但着色后透射率下降。     

Na-Mg共掺杂ZnO薄膜的结构和光学性质

利用溶胶-凝胶法,在普通载玻片上使用旋转涂膜技术制备了具有c轴择优取向生长的Na-Mg共掺杂的ZnO薄膜。用XRD、SEM、光致发光(PL)及透射光谱对薄膜样品进行了表征。结果表明:Na-Mg共掺杂有利于ZnO薄膜的c轴择优取向生长,并且随着Na+掺杂浓度的增加,晶粒尺寸先增大后减小;通过比较不同掺杂浓度ZnO薄膜的PL谱,推测发光峰值位于380nm的紫外发射与ZnO的自由激子复合有关;发现掺入Mg的确能使ZnO禁带宽度增大,掺杂组分为Na0.04Mg0.2Zn0.76O时,其PL谱只有一个很强的紫光发射峰,其近带边紫外光发射强度较未掺杂的ZnO增强了近10倍,极大地提高了薄膜紫外发光性能;并且随Na+浓度增加薄膜透光性减弱。     

Effects of oxygen pressures on pulsed laser deposition of ZnO films

Zinc oxide (ZnO) thin films on Si (1 1 1) substrates were deposited by pulsed laser ablation of ZnO target at different oxygen pressures. A pulsed Nd:YAG laser with wavelength of 1064 nm was used as laser source. The deposited thin films have been characterized by X-ray diffraction (XRD), Atomic force microscopy (AFM), and Raman spectroscopy. XRD measurements indicate that the ZnO thin films deposited at the oxygen pressure of 1.3 Pa have the best crystalline quality. AFM results show that the surface roughness of ZnO film increases with the increase of oxygen pressure. The Raman results indicate that oxygen ambient plays an important role in removing defects due to excess zinc.     

Characteraction of Ag-doped ZnO thin film synthesized by sol–gel method and its using in thin film solar cells

Pure 2% and 4% Ag-doped ZnO thin films have been synthesized on glass substrates by sol–gel method. The structure, morphology and optical properties of the samples have been studied by X-ray diffractometer (XRD), scanning probe microscope, UV–vis spectrophotometer, respectively. The XRD result shows that the pure ZnO has a wurtzite hexagonal structure, no phase segregation is observed. The surface morphology of pure ZnO thin film shows that the grains are growing preferentially along the c-axis orientation perpendicular to the substrates. The transmittance spectra reveal that all samples have high transmittance above 90% in visible region. With Ag doping content increase, a red shift is observed. The performance of Ag-doped ZnO films using in thin film solar cells are simulated. The results show that 4% Ag-doped ZnO thin film can greatly improve the absorption of the cells. Compare to pure ZnO, solar cell's energy conversion efficiency improvement of 2.47% is obtained with 4% Ag doped ZnO thin film.     

Influence of glucose on the structural and optical properties of ZnO thin films prepared by sol-gel method

In this work, ZnO thin films were prepared by sol-gel method on glass substrates followed by calcinations at 500 °C for an hour. The effect of glucose on the structure and optical properties of the films was studied. The structural characteristics of the samples were analyzed by X-ray diffractometer (XRD) and atomic force microscope (AFM). The optical properties were studied by a UV-visible spectrophotometer. The results show that some of the prepared ZnO thin films have a high preferential oriented c-axis orientation with compact hexagonal wurtzite structure due to a proper amount of glucose introducing. After introducing the glucose additive in ZnO colloids, the intensity of (002) peak, the transmittance, and the optical band gap of the ZnO thin films increases because of the enhanced ZnO crystallization. On the contrary, the absorbance, the film thickness, and the surface root-mean-square (RMS) roughness of the ZnO thin films decreases. The glucose additive could not only improve the surface RMS roughness and microstructure of ZnO thin films, but also enhance the transmittance and the energy band gap more easily.     

Crystallization behavior and origin of c-axis orientation in sol–gel-derived ZnO:Li thin films on glass substrates

Preferentially, c-axis-oriented lithium-doped zinc oxide (ZnO:Li) thin films were prepared on Pyrex borosilicate glass substrates by a sol–gel method starting from zinc acetate dihydrate, lithium chloride, 2-methoxyethanol and monoethanolamine. Decomposition and crystallization behavior of dip-coated amorphous precursor films during post-annealing treatments were investigated by thermogravimetry–differential thermal analysis (TG–DTA), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), optical transmittance measurements, field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). It was revealed that the films contained the organic compounds at temperatures up to 300°C, which was the key to the transformation from the amorphous to the crystalline state. Thermodynamical consideration of nucleation and crystal growth was made taking account of surface energies of the film and the glass substrate and an interfacial energy between them. Mechanisms underlying the c-axis orientation were proposed based upon the initial orientation due to nucleation and final growth orientation.     

过渡金属与F共掺杂ZnO薄膜结构及磁、光特性

采用溶胶-凝胶法在玻璃衬底上制备了过渡金属元素与F共掺杂Zn_0.98-xTM_xF_0.02O (TM_x=Cu_0.02, Ni_0.01, Mn_0.05, Fe_0.02, Co_0.05)薄膜, 进而利用X射线衍射仪、扫描电子显微镜、紫外-可见透过谱、光致发光及振动样品磁强计等研究了薄膜的表面形貌、微结构、禁带宽度及光致发光(PL)和室温磁学特性. 研究表明: 掺杂离子都以替位的方式进入了ZnO晶格, 掺杂不会破坏ZnO的纤锌矿结构. 其中Zn_0.93Co_0.05F_0.02O薄膜样品的颗粒尺寸最大, 薄膜的结晶度最好且c轴择优取向明显; Zn_0.93Mn_0.05F_0.02O薄膜样品的颗粒尺寸最小, 薄膜结晶度最差且无明显的c轴择优取; Cu, Ni, Fe与F共掺杂样品的颗粒尺寸大小几乎相同. TM掺杂样品均表现出很高的透过率, 同时掺杂后的薄膜样品的禁带宽度都有不同程度的红移. PL谱观察到Zn_0.98-xTM_xF_0.02O薄膜的发射峰主要由较强的紫外发射峰和较弱的蓝光发射峰组成. Zn_0.93Mn_0.05F_0.02O薄膜样品的紫外发光峰最弱, 蓝光发射最强, 饱和磁化强度最大; 与之相反的是Zn_0.96Cu_0.02F_0.02O薄膜, 其紫外发光峰最强, 蓝光发射最弱, 饱和磁化强度最小. 结合微结构和光学性质对Zn_0.98-xTM_xF_0.02O薄膜的磁学性质进行了讨论.     

Effect of dopants on the structural,optical and electrical properties of sol–gel derived ZnO semiconductor thin films

Undoped, Ga-, In-, Zr-, and Sn-doped ZnO transparent semiconductor thin films were deposited on alkali-free glasses by sol–gel method. 2-methoxyethanol (2-ME) and diethanolamine (DEA) were chosen as a solvent and a stabilizer, respectively. The doping concentration was maintained at 2 at.% in the impurity doping precursor solutions. The effects of different dopants on the structural, optical, and electrical properties of ZnO thin films were investigated. XRD results show that all annealed ZnO-based thin films had a hexagonal (wurtzite) structure. ZnO thin films doped with impurity elements obviously improved the surface flatness and enhanced the optical transmittance. All impurity doped ZnO thin films showed high transparency in the visible range (>91%). The Ga- and In- doped ZnO thin films exhibited higher Hall mobility and lower resistivity than did the undoped ZnO thin film.     

Influence of Concentration of Vanadium in Zinc Oxide on Structural and Optical Properties with Lower Concentration

ZnO films doped with different vanadium concentrations are deposited onto glass substrates by dc reactive magnetron sputtering using a zinc target doped with vanadium. The vanadium concentrations are examined by energy dispersive spectroscopy （EDS） and the charge state of vanadium in ZnO thin films is characterized by x-ray photoelectron spectroscopy. The results of x-ray diffraction （XRD） show that all the films have a wurtzite structure and grow mainly in the c-axis orientation. The grain size and residual stress in the deposited films are estimated by fitting the XRD results. The optical properties of the films are studied by measuring the transmittance. The optical constants （refractive index and extinction coefficient） and the film thickness are obtained by fitting the transmittance. All the results are discussed in relation with the doping of the vanadium.     

电化学方法制备ZnO纳米颗粒掺杂类金刚石薄膜及其场发射性能研究

采用液相电化学沉积技术制备了ZnO纳米颗粒掺杂的类金刚石(DLC)薄膜, 研究了ZnO纳米颗粒掺杂对DLC薄膜场发射性能的影响. 利用X射线光电子能谱、透射电子显微镜、Raman光谱以及原子力显微镜分别对薄膜的化学组成、 微观结构和表面形貌进行了表征. 结果表明: 薄膜中的ZnO纳米颗粒具有纤锌矿结构, 其含量随着电解液中Zn源的增加而增加. ZnO纳米颗粒掺杂增强了DLC薄膜的石墨化和表面粗糙度. 场发射测试表明, ZnO纳米颗粒掺杂能提高DLC薄膜的场发射性能, 其中Zn与Zn+C的原子比为10.3%的样品在外加电场强度为20.7 V/μm时电流密度达到了1 mA/cm². 薄膜场发射性能的提高归因于ZnO掺杂引起的表面粗糙度和DLC薄膜石墨化程度的增加.     

Influence of annealing temperature on the properties of ZnO thin films deposited by thermal evaporation

ZnO thin films were deposited by thermal evaporation of a ZnO powder. The as-deposited films are dark brown, rich zinc and present a low transmittance. Then, these films were annealed in air atmosphere at different temperatures between 100 and 400 °C. Their microstructure and composition were studied using XRD and RBS measurements respectively. By increasing the temperature, it was found that film oxidation starts at 250 °C. XRD peaks related to ZnO appear and peaks related to Zn decrease. At 300 °C, zinc was totally oxidised and the films became totally transparent. The electrical conductivity measurement that were carried out in function of the annealing temperature showed the transition from highly conductive Zn thin film to a lower conductive ZnO thin film. The optical gap (E_g) was deduced from the UV-vis transmittance, and its variation was linked to the formation of ZnO.     

Deposition of ZnO multilayer on LiNbO3 single crystals by DC-magnetron sputtering

Zinc oxide (ZnO) thin films were deposited on LiNbO₃ (LN) single crystals with 200 nm thicknesses by three different ways, where coating of zinc (Zn) film was followed by thermal oxidation for four, two, and one steps with 50, 100, and 200 nm thicknesses repeatedly. Sample, which was produced at 4-step of deposition and oxidation of Zn layer, showed high transmittance and low structural defect due to a lower photoluminescence intensity and Urbach energy. Average grain size in X-ray diffraction (XRD), scanning electron microscopy (SEM) micrograph, and atomic force microscopy (AFM) images for multilayer of ZnO was lower than monolayer of ZnO thin films. Applying multilayer coating technique leads to decrease of surface roughness and scattering on light on surface and fabrication of LiNbO₃ waveguides with lower optical loss.