基于衍射光栅的干涉式精密位移测量系统

介绍了基于几何莫尔条纹原理和衍射干涉原理的两种光栅精密位移测量系统及各自的特点。综述了国内外对光栅干涉式精密位移测量系统的研究进展,总结了系统存在的关键问题及发展趋势。光栅干涉式精密位移测量系统的优点是对环境要求小,测量分辨率和精度较高,结构紧凑,成本低。该系统需要解决的问题包括提高光栅以及光学元器件制造和安装精度;寻求一种更高精度的检测手段对光栅位移测量系统进行标定等。光栅干涉式精密位移测量系统的发展方向为更高测量分辨率和精度,大量程、多维度测量以及尺寸小巧。该系统在现代工业加工精密制造领域将具有更广阔的应用前景。     

Power-efficient Fourier domain optical coherence tomography setup for selection in the optical path difference sign using Talbot bands

A power-efficient Fourier domain optical coherence tomography fiber system is presented free of mirror terms. The object and reference beams from the interferometer are spatially separated to illuminate different parts of the diffraction grating in the spectrometer according to a method inspired from the use of Talbot bands. In this way, the system is made sensitive to only one sign of the optical path difference in the interferometer.     

Fourier optics analysis of grating sensors with tilt errors

Dynamic diffraction gratings can be microfabricated with precision and offer extremely sensitive displacement measurements and light intensity modulation. The effect of pure translation of the moving part of the grating on diffracted order intensities is well known. This study focuses on the parameters that limit the intensity and the contrast of the interference. The effects of grating duty cycle, mirror reflectivities, sensor tilt and detector size are investigated using Fourier optics theory and Gaussian beam optics. Analytical findings reveal that fringe visibility becomes <0.3 when the optical path variation exceeds half the wavelength within the grating interferometer. The fringe visibility can be compensated by monitoring the interfering portion of the diffracted order light only through detector size reduction in the expense of optical power. Experiments were conducted with a grating interferometer that resulted in an eightfold increase in fringe visibility with reduced detector size, which is in agreement with theory. Findings show that diffraction grating readout principle is not limited to translating sensors but also can be used for sensors with tilt or other deflection modes.     

用多级衍射全息光栅实现2-D自由空间光学互连网络

用Mach-Zehnder干涉仪分两步记录制作了具有多级衍射的全息光栅.利用其多级衍射效应,实现了一点到多点的光学互连.再将两个1-D光栅正交密接实现2-D自由空间光学互连网络.结果表明该方法是可行的,且结构简单、操作容易.     

Michelson interferometer with multichannel interferogram recording

A schematic diagram of a Michelson interferometer with a diffraction grating for which the length of one arm is a function of the transverse coordinate of the light beam is proposed. The possibility of recording the interferograms without mechanical displacement of optical elements of the interferometer is demonstrated.     

In-plane ESPI using an achromatic interferometer with low-coherence laser source

The use of an achromatic interferometer is explored as a means of doing in-plane ESPI measurements using a laser diode as the light source. This interferometer type, which uses a diffraction grating in place of the conventional beamsplitter, has two features that make it suitable for making ESPI measurements over extended areas, even when using a low-coherence laser diode source. First, the parallelogram optical geometry of the interferometer causes all rays passing through to have the same optical path lengths. Second, the interferometer is achromatic, whereby the piezo-actuated mirror that steps the illumination light does so by the same phase angle, independent of wavelength. This latter feature accommodates the spectral impurity of a laser diode source. A periodic variation of fringe visibility is observed in experiments, where narrow ranges of high visibility occur at regular spatial intervals. This behavior derives from the clustered discrete spectral character of laser diode light output. A method to “tune” the interferometer by slightly rotating the diffraction grating is described so as to achieve consistent high fringe visibility throughout the measured images.     

衍射式光栅干涉测量系统发展现状及趋势

在车间条件下操作时,光栅干涉仪在测量精度方面优于He-Ne激光干涉仪.基于光栅干涉测量系统有一些特别的优点,导致其在高精密测量中用途不断增加.阐述了衍射式光栅干涉测量系统的工作原理和特点,同时详细总结了国际上生产和研究衍射光栅干涉测量系统的厂家和研究机构及他们的产品.并指出该系统的发展趋势和存在的问题,为衍射式光栅测量...     

刻线误差与面型误差对平面光栅光谱性能影响的二维快速傅里叶变换分析方法

光栅刻线误差与基底面型误差影响平面光栅衍射波前、分辨本领、鬼线、卫线及杂散光等光谱性能,研究光栅性能指标与光栅刻线误差及基底加工误差之间的因果关系,对提高光栅质量极为重要。根据光栅衍射中产生的源于刻线误差与面型误差的光程差,推导出了在光栅锥面衍射情况下的光栅刻线误差、基底面型误差、入射角θ、衍射级次m与衍射波前关系的数学表达式,得到构建非理想光栅衍射波前的理论模型。以理论模型为依据,采用干涉仪测量光栅对称级次衍射波前,实现在测量结果中对光栅刻线误差与基底面型误差的分离,并基于二维快速傅里叶变换分析光栅衍射波前,考察了刻线误差与面型误差对光栅性能指标的影响。借助此方法通过重构的光栅衍射波前,分析光栅分辨本领、鬼线等光谱性能,还可以反演光栅全表面刻线误差与面型误差的大小,为光栅基底加工、光栅制造和使用技术提供理论依据。     

光学纳米测量方法及发展趋势

综述了光学方法中以频率跟踪方法、外差干涉仪、调频干涉仪、偏振干涉仪和光学光栅为代表的光学纳米测量方法。分析了它们的发展状况以及各自特点,指出建立适合于纳米测量的纳米环境是目前亟待解决的关键性问题,给出了光学纳米测量方法的发展方向和在设计测量系统时应该注意的问题     

关于利用激光光束偏转法测量热扩散率的研究

本文介绍了激光光束偏转法测量材料热扩散率的原理,从理论上分析了光的粒子性和光的衍射限制了该方法对热扩散率的测量精度,指出了提高测量精度的关键在于提高信号对光束偏转的灵敏度为此给出了一种带有Ronchi光栅的迈克耳孙干涉仪的探测装置,从而使灵敏度提高了约5.3倍.     

The use of circular optical grating for measuring angular rotation of mirrors

This paper explores the feasible use of circular optical grating for measuring the rotation of mirrors that are commonly found in micro-systems. Both theoretical and experimental results show that distortion of the circular grating that is projected onto the mirror surface is a simple function of the angular rotation of the mirror. The circular grating may readily be generated using a standard Michelson interferometer or an LCD projector. Through manipulating the distance between the interferometer and the mirror surface, the diameter of the optical grating may be varied. Furthermore, the additional use of a converging lens enables a significant reduction in the size of the grating: with simple laboratory facility, small circular grating of about 400 μm is achieved for use on micro-systems. With the use of more sophisticated optical elements, the angular rotation of even smaller micro-mirrors may be measured.     

Optical transfer function analysis of Lau-Type grating atom interferometer

A grating interferometer composed of two transmission gratings in tandem irradiated incoherently was studied for an atom interferometer. Determination of its interference effect was made with consideration of the optical transfer function. An atom beam had a velocity distribution, which made the influence on the interference phenomenon. The calculated results show that the fringe (grating image) with relatively high contrast is obtained under a certain grating arrangement even if the interferometer is irradiated by a spatially incoherent polychromatic atom beam.     

多级衍射全息光栅

提出用Mach-Zehnder 干涉仪两步记录制作具有多级衍射的全息光栅方法。详细描述这种方法的原理,并提供了光栅样品的傅里叶谱及用这种多级衍射光栅实现图像多重的实验结果。     

Grating interferometer with an unusual fringe direction

A grating interferometer is described which has an astigmatic component in the collimator. In such an interferometer the fringes may be directed parallel to the shear direction. The adjustment procedure is given, and interferograms of shock wave diffraction at a nozzle edge are presented.     

Coherence properties of the supercontinuum source

Mutual–temporal coherence of the supercontinuum (SC) generation has been experimentally investigated using a diffraction grating based interferometer. A broadband SC generation was produced in a pyrex glass plate with a 1.6-μm coherence length at 550-nm center wavelength. The degree of mutual coherence of 0.34 was measured for a wavefront shift for zero and first diffraction orders of half of the beam diameter. A design of SC source with the capability of manipulating the amplitudes and phases of optical frequency components within the SC pulse is presented for coherence applications.     

点衍射干涉检测技术

本文介绍了点衍射干涉仪不同发展阶段的特点和应用。点衍射干涉仪由波长量级的针孔产生高质量的球面波作为参考波前,能够得到衍射极限性能的分辨率。按照不同的光路特点,点衍射干涉仪可分为点衍射共路干涉和点衍射非共路干涉两种结构,主要应用于高精度波前检测和面形检测。共路干涉结构简单紧凑,对环境振动不敏感,对光源相干度要求不高,可利用光束偏振态及光栅衍射分束的特性对传统点衍射板进行改造,在全共路点衍射干涉仪中引入时间相位调制技术和干涉对比度可调技术,可进一步提高波前检测精度。采用反射式针孔和各种光纤结构发展了非共路点衍射干涉仪,实现了大口径、高精度球面反射镜面形的测量。本文重点阐述了用于极紫外光刻投影物镜中高精度球面反射镜面形检测的反射式针孔点衍射干涉仪,并展望了点衍射检测技术在生物检测等领域的应用前景和发展趋势。     

A reflection interferometer with a noninverted response function based on a phase grating

It is shown that the inclusion of a simple phase grating in the optical scheme of a resonator provides the possibility of performing spectral investigations in reflected light with characteristics of a Fabry-Perot interferometer. The response function of the interferometer is examined, and experimental results are presented.     

Polarization Sagnac interferometer with a reflective grating beam splitter

All-reflective interferometric gravitational-wave detector configurations with a diffraction grating as a power beam splitter have been proposed to reduce thermal lensing. We demonstrate the use of a diffraction grating as a polarization beam splitter in a zero-area polarization Sagnac interferometer.     

Symmetric Talbot bands experiment

By impinging a step phase-shifted white light beam on a grating-based interferometer, one of diffraction orders is modulated and interference bands so-called “Talbot bands” are formed. Here, classical Talbot bands set up is generalized to the symmetry configuration, in which two glass plates of the same thickness instead of one plate, are inserted halfway into the grating interferometer aperture. Formation of Talbot bands were studied theoretically and experimentally. Frequency impulse response of the new Talbot bands setup was, also presented. It was demonstrated that symmetric set-up causes modulation of both of two opposite orders, according to the theory. In this manner, their visibility is the same. As a result, this similarity of the visibility is reduced while the symmetric arrangement of the glass plates with respect to the optical axis, is broken.     

Measurement technique for depth profiling in time-domain low-coherence interferometer

A measurement technique for depth profiling in a time-domain low-coherence interferometer has been proposed. The spatial variation of the optical path caused by a diffraction grating in the Littrow configuration produces a white-light interferogram. A one-dimensional charge-coupled device (1D-CCD) detector is used to measure the undersampled white-light interferogram. The position of the reflective boundary is calculated from the rate of phase change with spatial frequency, which is based on the sub-Nyquist sampling of the white-light interferogram in the frequency domain.