基于无源超高频射频识别标签的湿度传感器设计

针对无源超高频射频识别传感器标签大规模运用的需求,采用中芯国际0.35μm互补金属氧化物半导体(CMOS)工艺设计并制造了一种低成本、低功耗的湿度传感器.湿度传感器单元采用聚酰亚胺作为感湿材料,利用顶层金属层制作叉指结构电极,制造过程与标准CMOS制造工序兼容,无需任何后处理工艺.接口电路部分基于锁相环原理,采用全数字电容.数字直接转换结构,能够工作在接近工艺阈值电压下.后期测试结果显示,该湿度传感器在常温下灵敏度为36.5 fF%RH,最大回滞偏差为7%,响应时间为20 ms,0.6 V电源电压下消耗2.1μW功率.     

Humidity sensor based on a single-mode hetero-core fiber structure

Using a small-core single-mode fiber (SCSMF), a novel relative humidity (RH) sensor based on an SMF28-SCSMF-SMF28 fiber structure was proposed in this paper. By depositing a humidity sensitive material, such as poly (ethylene oxide) (PEO) on the bare SCSMF fiber, the proposed structure can act as an RH sensor with high sensitivity. Experiments demonstrated that the proposed RH sensor with PEO coating can achieve a sensitivity of 430 nm per relative humidity unit (RHU) in the RH range from 80% to 83% RH and a sensitivity of 50 nm per RHU in the RH range from 83% to 95% RH.     

A rapid synthesis/growth process producing massive ZnO nanowires for humidity and gas sensing

We report a rapid and simple process to massively synthesize/grow ZnO nanowires capable of manufacturing massive humidity/gas sensors. The process utilizing a chemical solution deposition with an annealing process (heating in vacuum without gas) is capable of producing ZnO nanowires within an hour. Through depositing the ZnO nanowires on the top of a Pt-interdigitated-electrode/SiO₂/Si-Wafer, a humidity/gas-hybrid sensor is fabricated. The humidity sensitivity (i.e., ratio of the electrical resistance of the sensor at 11–95 % relative humidity level) is approximately 10⁴. The response and recovery time with the humidity changing from 11 to 95 % directly and reversely is 6 and 10 s, respectively. The gas sensitivity (i.e., ratio of electrical resistance of the sensor under the air to vaporized ethanol) is increased from 2 to 56 when the concentration of the ethanol is increased from 40 to 600 ppm. Both the response and recovery times are less than 15 s for the gas sensor. These results show the sensor utilizing the nanowires exhibits excellent humidity and gas sensing.     

Humidity sensing properties of Ni(OH)2 nanoparticles synthesized via sonochemical method

This work focuses on humidity sensor based Ni(OH)₂ nanoparticles. The sonochemical method was employed to prepare nanoparticles and impedance analysis was used to characterize sensitivity, response, and recovery time of the prepared sensor. The Ni(OH)₂ sensor was found to have high sensitivity and fast response/recovery time to humidity, and its impedance changed approximately two orders of magnitude from about 2.01 MΩ in dry air 20% RH (relative humidity) to 0.0258 MΩ in 90% RH air. Our results demonstrate the potential application of Ni(OH)₂ nanoparticles for fabricating high performance humidity sensors.     

基于Nafion-结晶紫传感膜的光纤湿度传感器研究

通过研究基于荧光和可见光吸收的两种湿度传感方法,从数种湿度分子探针中优选出结晶紫为分子识别器,包埋于Nafion溶胶中,制备成基于可见光吸收原理的光纤化学湿度传感膜。该传感膜与电荷耦合二极管阵列检测器等构成的光纤湿度传感器,于640 nm波长处对30%～100%范围内的相对湿度(relative humidity, RH)具有较快的响应时间(＜2 min)、较高的灵敏度(≤5%RH)、选择性和良好的可逆性(RSD≤2.6%)。     

Use of polyethylene glycol coatings for optical fibre humidity sensing

Humidity induced change in the refractive index and thickness of the polyethylene glycol (PEG) coatings are in situ investigated for a range from 10 to 95%, using an optical waveguide spectroscopic technique. It is experimentally demonstrated that, upon humidity change, the optical and swelling characteristics of the PEG coatings can be employed to build a plastic fibre optic humidity sensor. The sensing mechanism is based on the humidity induced change in the refractive index of the PEG film, which is directly coated onto a polished segment of a plastic optical fibre with dip-coating method. It is observed that PEG, which is a highly hydrophilic material, shows no monotonic linear response to humidity but gives different characteristics for various ranges of humidity levels both in index of refraction and in thickness. It undergoes a physical phase change from a semi-crystalline structure to a gel one at around 80% relative humidity. At this phase change point, a drastic decrease occurs in the index of refraction as well as a drastic increase in the swelling of the PEG film. In addition, PEG coatings are hydrogenated in a vacuum chamber. It is observed that the hydrogen has a preventing effect on the humidity induced phase change in PEG coatings. Finally, the possibility of using PEG coatings in construction of a real plastic fibre optic humidity sensor is discussed.     

Multi-functional metamaterial sensor based on a broad-side coupled SRR topology with a multi-layer substrate

This paper intends to demonstrate the feasibility of a miniaturized multi-purpose metamaterial sensor that can be effectively used for chemical, biological and pressure sensing in microwave and terahertz applications. This novel sensor design makes use of the double-sided split ring resonator (DSRR) topology that is modified to have an additional sensing medium sandwiched between two identical broadside coupled SRR unit cells. The resonance frequency of the resulting DSRR sensor shifts as the dielectric permittivity or thickness of this interlayer medium changes in response to variations in an environmental parameter such as temperature, humidity, density, concentration or pressure. As a proof of concept study, both numerical and experimental results are presented with very good agreement for a multi-functional miniaturized metamaterial sensor prototype operating in X-band. Simulations for three different real-life scenarios are also presented for this sensor topology to demonstrate a moisture sensor, a density sensor and a temperature sensor with very good sensitivities where the interlayer medium is occupied by sawdust, silica aerogel and seawater, respectively.     

Characterization of hardened cylindrical samples using photothermal radiometry

The results of measurements of surface acoustic wave (SAW) humidity sensor with nafion layer are described in the paper. The sensitivity, response time as well as hysteresis for different temperatures have been investigated. The sensor sensitivity, linearity and hystersis are discussd. The results show that such sensor may be suitable for accurate humidity measurements in dry or hot enough environment.     

Relative humidity sensor with optical fiber Bragg gratings

A novel concept for an intrinsic relative humidity (RH) sensor that uses polyimide-recoated fiber Bragg gratings is presented. Tests in a controlled environment indicate that the sensor has a linear, reversible, and accurate response behavior at 10-90% RH and at 13-60 degrees C. The RH and temperature sensitivities were measured as a function of coating thickness, and the thermal and hygroscopic expansion coefficients of the polyimide coating were determined.     

Humidity sensor based on localized surface plasmon resonance of multilayer thin films of gold nanoparticles linked with myoglobin

Layer-by-layer self-assembled multilayer thin films of gold nanoparticles (GNPs) linked with myoglobin (Mb) show substantial sensitivity to humidity at room temperature according to measurements of localized surface plasmon resonance (LSPR) absorption that relies on the interparticle interaction present in the film. The sensor response is reversible, with response and recovery times as low as 5 s. The sensing mechanism is as follows: as the ambient humidity changes, Mb molecules change their size, making the GNP-to-GNP spacing and thereby the interparticle interaction change; the change in the interparticle interaction causes a change in the LSPR absorption of the multilayer thin film. We found that the LSPR band of the multilayer thin film was almost insensitive to both the surrounding refractive index and the adlayer thickness, rendering the multilayer-film-based humidity sensor highly immune to ambient disturbances.     

Enhanced-performance relative humidity sensor based on MOF-801 photonic crystals

We proposed an enhanced-performance relative humidity (%RH) nano-sensor based on MOF-801/TiO₂ one-dimensional photonic crystals (1DPC). The maximum reflectance-peak wavelength of it shifted obviously in the range of 20%-90% under varying %RH levels, due to the highly moisture-sensitive MOF-801 film in the 1DPC structure. It was demonstrated that the linear spectrum sensitivity of the MOF-801/TiO₂ %RH 1DPC sensor is exceeding 119 pm/%RH from 20%RH to 90% RH, and the sensitivity of reflection power variations exhibits 1.34 dB/%RH with the resolvable relative humidity variation less than 0.1%RH at 15°C. Meanwhile, the sensor shows a fast optical response time less than 100 ms with exceptional repeatability and reliability, which promises successful measurements of human respiration. Moreover, the sensor performance on the structure of 1DPC is investigated, representing a tradeoff between the sensing sensitivity and response time.     

一种适用于湿度传感的表面等离子微环传感器

提出了一种适用于湿度传感的表面等离子微环传感器。该传感器纵向上采用表面等离子多层波导结构,横向上采用U型微环结构,以聚酰亚胺(polyimide,PI)为感湿材料。根据传输矩阵法推导表面等离子微环传感器结构的传递函数,外界环境的相对湿度变化引起聚酰亚胺的折射率变化,从而多层波导结构的有效折射率发生改变,导致传感器的输出光谱发生漂移。重点分析讨论了多层波导结构的传输特性以及感湿部位折射率的变化对输出光谱的影响。根据计算和仿真得出：当U型波导的两个耦合点间的距离为微环周长的整数倍时,传感器的输出光谱水平漂移量较大,自由光谱范围(FSR)加倍,达到128 nm,当外界环境相对湿度从10%RH变化到100%RH时,漂移量Δλ_m在0.005～0.038 μm之间变化,相比于其他湿度传感器,灵敏度提高了10～50倍,高达0.0005 μm/%RH,并且传输稳定。结果表明：设计的表面等离子微环传感器,灵敏度较好,性能稳定,可以应用于湿度测量,并且实现了在高灵敏度感湿的同时兼顾大范围的滤波选频,为微型光学器件的制备提供了理论基础。     

Optical fiber humidity sensor based on evanescent-wave scattering

The phenomenon of evanescent-wave scattering (EWS) is used to design an optical-fiber humidity sensor. Porous solgel silica (PSGS) coated on the surface of a silica optical-fiber core scatters evanescent waves that penetrate the coating layer. Water molecules in the gas phase surrounding the optical fiber can be absorbed into the inner surface of the pores of the porous silica. The absorbed water molecules form a thin layer of liquid water on the inner surface of the porous silica and enhance the EWS. The amount of water absorbed into the PSGS coating is in dynamic equilibrium with the water-vapor pressure in the gas phase. Therefore the humidity in the air can be quantitatively determined with fiber-optic EWS caused by the PSGS coating. The humidity sensor reported here is fast in response, reversible, and has a wide dynamic range. The possible interference caused by EWS to an optical-fiber gas sensor with a reagent-doped PSGS coating as a transducer is also discussed.     

光纤光栅锈蚀传感器在不同湿度下的特性研究

钢结构的锈蚀监测对于钢结构安全的早期预警非常重要.本文提出了一种制备布喇格光纤光栅锈蚀传感器的方法,并研究了该传感器在不同湿度环境下的传感规律.结合磁控溅射和电镀的方法在光栅侧表面制备了Fe-C合金传感膜|利用扫描电子显微镜观察其侧表面形貌|检测在相对湿度60%和99%下中心波长的变化,进而分析该光纤光栅探头在不同湿度下的传感规律.实验和数据分析结果表明:在相对湿度为60%时,锈蚀进程缓慢,随着时间的推移波长呈线性化增加|相对湿度达到99%时光栅光谱出现多峰现象.据此得出:一定湿度条件下,该传感器可监测锈蚀进展|当环境湿度较高（达到99%）时,该传感器可用于锈蚀出现的早期预警.     

光纤SPR湿敏传感器及其共振光谱特性研究

提出并研制了基于光纤SPR传感探针的新型湿敏传感器。首先研究了光纤SPR传感探针对环境湿度变化的敏感特性,在此基础上提出在光纤SPR传感探针表面增覆不同厚度且具有水分子吸附功能的PVA薄膜来实现环境相对湿度的监测。研究结果表明,增覆双层PVA薄膜的光纤SPR传感探针在高湿区具有较好监测效果,其共振强度对应的相对湿度测量灵敏度达到1.59%/%RH,较光纤SPR探针呈现显著提高。而增覆单层PVA薄膜的光纤SPR传感探针在高湿区共振波长对应的相对湿度监测灵敏度达到2.411nm/%RH。此外所提出的新型光纤SPR湿敏探针在PVA薄膜失效后经过特殊工艺处理仍可重复镀膜使用。     

基于倏逝波的锥形光纤马赫-曾德尔湿度传感器

提出了一种基于倏逝波原理的光纤马赫-曾德尔湿度传感器,传感器是在2个单模光纤粗锥的传感臂中心通过绝热火焰熔融拉锥处理而成。光由传感器输入端传入,经过第1个粗锥时,将激发出若干高阶模,各模式光传输经过细锥区进入第2个粗锥时被耦合进入传感器输出端。当外界湿度变化时,细锥区倏逝场随之变化,最终导致透射谱能量变化。通过测量透射谱能量变化,可以实现环境湿度传感测量。实验结果表明,在35%~85%RH的湿度变化范围内,透射谱的能量具有相同变化趋势,处于水蒸气吸收峰附近的干涉谷湿度响应灵敏度可达0.157 dBm/%RH,温度交叉灵敏度仅为0.014 %RH/ ℃。该传感器因其制作简单、灵敏度高,温度交叉敏感小等特点,具有很好的应用前景。     

Preparation and mechanism investigation of highly sensitive humidity sensor based on Ag/TiO2

In this paper, a high-performance silver-doped titanium dioxide (Ag/TiO₂) humidity sensor was synthesized using a hydrothermal synthesis method for respiratory monitoring. The sensing mechanism was studied by the first principles of density functional theory (DFT). Calculations show that the doping of Ag⁺ ions increases the adsorption energy of TiO₂ to water molecules. Furthermore, the Ti–O bond in TiO₂ is broken due to the doping of Ag⁺ ions, which promotes the generation of Ti³⁺ defects. Experiments show that the doping of Ag⁺ ions can increase the hydroxide groups, Ti³⁺ defects and oxygen vacancies on the surface of TiO₂, thus effectively improving the responsivity, linearity and hysteresis of the TiO₂ humidity sensor. Compared to TiO₂, the resistance of the Ag/TiO₂ (0.5 mM) humidity sensor reaches 4.5 orders of magnitude with a high response of 39707.1, maximum hysteresis rate of 4.6%, response/recovery time of 31 s/15 s and the best linearity in a range of 11%–95% RH. In addition, the Ag/TiO₂ humidity sensor has been successfully used to detect different modes of respiration and determine the respiratory rate under different respiratory states. Significantly, this work demonstrates potential application value in human healthcare and activities monitoring.     

ZnO Thick Film Based Opto-electronic Humidity Sensor for a Wide Range of Humidity

Sensitivity of zinc oxide film to humidity is studied using prism based opto-electronic sensor configuration. Film is deposited on the base of the prism by screen printing. The film is crystalline in nature and has micropores on its surface which is suitable for humidity sensing. The sensing mechanism, here, is the modulation in emergent light intensity with change in ambient humidity. Response of the sensor configuration is repeatable and the configuration is found to be sensitive to relative humidity (RH%) ranging from 5 to 90 RH%.     

光纤光栅型温湿度传感器的设计与实现

针对目前温湿度测量过程中电量传感器长期稳定性和互换性差的不足,以光纤光栅为基础,以改性PI薄膜为湿敏涂层,研制出了一种新型非电量温湿度传感器.详细阐述了其测量原理、制作工艺及其主要参量的优化确定,对其测量范围、测量精度、湿滞特性等主要特征参量进行了试验测定.测试结果表明:该传感器可在20～80℃、10%～90%测量范围内实现精度为±0.2℃和±5%的实时测量,且具有响应时间短(≤15 s)和长期稳定性好等优点.     

Hydrogen sensors based on ZnO nanoparticles

Hydrogen sensing characteristics of thick films of nanoparticles (∼35 nm diameter) of ZnO, 3% Co doped ZnO, 1% Pt-impregnated ZnO and 1% Pt-impregnated 3% Co-ZnO have been investigated. The last composition exhibits the highest sensitivity for 10-1000 ppm H₂, reaching values upto 1700 as well as good response and recovery times at 125 °C or lower. The sensor is not affected significantly upto 50% relative humidity.