Characteristics of an atmospheric‐pressure radio frequency‐driven Ar/H2 plasma discharge with copper wire in tube

This paper investigates a plasma discharge driven by a 13.56 MHz radio frequency (RF) power supply at atmospheric pressure, in which a copper wire is inserted in the discharge tube for the deposition of Cu films. The results show that the jet plasma formation originates from the discharge between the copper wire and induction coil because of its electrostatic field. The axial distribution of the plasma parameters in the RF plasma jet, namely the gas temperature, excitation temperature, and electron number density, is determined by diatomic molecule OH fitting, Boltzmann slope, and H_β Stark broadening, respectively. The discharge current significantly declines when a small amount of hydrogen is added to the argon as the plasma‐forming gas, and the gas temperature of discharge plasma increases considerably.     

大气压氩气射流等离子体的光谱特性研究

等离子体喷枪是一种重要的等离子体源,已成为近几年低温等离子体研究的一个重要课题。本文利用钨针-钨丝网电极制作了直流喷枪装置,在大气压空气中产生了稳定的等离子体羽,并采用发射光谱的方法,对等离子体羽的等离子体参数进行了研究。在钨针电极与钨丝网电极之间放出耀眼的白光,钨丝网电极出口的气流下游有火苗形状的等离子体羽喷出。在电压保持不变的条件下(13.5 kV),等离子体羽长度随气体流量增加而增大;在气体流量保持不变的条件下(10 L·min-1),羽长度随外加电压的增大而增大。在气体流量一定的条件下,放电电压和放电电流呈反比例关系,即电压随着电流的增大而减小,说明放电属于辉光放电。采集了该喷枪在300～800 nm范围内的放电发射光谱,通过玻尔兹曼方法对放电等离子体电子激发温度进行了测量。结果表明,电子的激发温度随外加电压的增大而降低,随着工作气体流量的减小而升高。利用放电的基本理论对上述现象做了解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

一种新型大气压毛细管介质阻挡放电冷等离子体射流技术

介绍一种结构设计简单、操作运行方便的新型毫米量级大气压冷等离子体射流发生技术.这种射流可以在大气压条件下，利用多种工作气体(如Ar,He,N₂)，通过毛细管介质阻挡放电(DBD)的方式实现.使用频率为33kHz，峰值电压为1—12kV的双向脉冲电源，利用Ar,He,N₂等工作气体，在毛细管内形成了稳定的冷等离子体射流.放电区域的光辐射空间分布利用商用CCD摄像机记录，从中研究放电形态和空间分布，观察到了在DBD区域的流动气体放电和在毛细管出口处形成的等离子体射流 关键词： 冷等离子体射流 毛细管介质阻挡放电 射流射程 射流激发温度     

针板型大气压氦气冷等离子体射流的二维模拟

大气压冷等离子体射流的传播机理一直是人们研究的一个热点. 本文采用自洽的二维等离子体流体模型, 研究了大气压氦气冷等离子体射流在自身环境气体中以及在介质管中的传播问题. 得到了电子密度、电离速率、空间电场以及电子温度等参量的时空分布规律, 分析了介质管大小以及介质管介电常数对射流放电性质的影响, 得到了一种提高电子密度和射流尺寸的新方法. 关键词： 大气压冷等离子体射流 等离子体子弹 数值模拟 流体模型     

不同电极结构下大气压Ar等离子体射流的流体模拟研究

采用二维轴对称流体模型对比研究了3种不同电极结构下大气压Ar等离子体射流的基本特性。第一种是带绝缘介质的针电极结构（电场方向和气体流方向平行）,第二种是在第一种电极结构的介质管外增加一个垂直气流方向的接地环电极,第三种是不带绝缘介质的裸针电极结构。研究结果表明,接地环电极的引入对介质管内外的射流传播影响不同。在介质管内,接地环电极使管内表面附近的径向电场增加,电子密度升高,射流传播速度加快,但对中心轴附近的电场和电子密度影响很小;然而在介质管外,接地环电极的引入导致轴向和径向电场均减小,从而引起射流的传播长度减小,射流通道径向收缩。通过带绝缘介质的针电极和裸针电极结构的对比研究发现,保持其他条件不变,去掉包裹在针电极上的介质后,由于等离子体电势升高,电场增加,射流的传播长度几乎增加一倍,峰值电子密度增加近一个数量级,而且在整个射流通道内电子密度都保持相对高的值。此外,对3种电极结构下的主要活性粒子的产生和输运进行了比较研究。     

大气压直流氩等离子体射流工作特性研究

介绍了一种新型大气压直流双阳极等离子喷枪,并对其电特性参数和发射光谱进行了测量.通过对氩等离子体射流的电信号进行时域和频域分析,研究了载气流量和弧电流的变化对射流脉动的影响,结果表明氩等离子体电弧的伏安特性呈上升趋势,射流脉动属于接管模式,电源特性中的交流分量引起的电压波动是影响氩等离子体射流脉动的主要因素. 通过光谱法测量了氩等离子体射流在弧室内和弧室出口的发射光谱,利用玻尔兹曼曲线斜率法计算了射流的激发温度,根据Ar I谱线的斯塔克展宽得到了射流的电子密度,并对等离子体射流满足局域热力学平衡(LTE) 关键词： 等离子喷枪 射流脉动 激发温度 局域热力学平衡     

大气压氖气介质阻挡放电脉冲等离子射流特性

采用自行研制的低造价、小体积、可产生幅值0~35 kV、重复频率1 kHz的高压s脉冲电源,设计了一套以大气压氖气为工作气体的介质阻挡放电（DBD）等离子体射流源,通过测量并计算放电过程中的电压-电流波形、拍摄放电图像、光谱分析等手段,对电压幅值、气体流速对氖气等离子体射流特性的影响进行了研究。结果表明:s脉冲电源激励下大气压氖气DBD能产生锥状的等离子射流且其等离子强度适中;s脉冲电源电压幅值的快速上升,可在放电空间瞬间施加高的过电压,能有效促进放电功率、电子密度、电子激发温度和射流长度的增加;工作气体流速的增加使得放电功率、电子激发温度和电子密度减小,而射流长度变化很小;一定条件下,能形成长距离的射流。     

纳秒脉冲等离子体射流的产生及其特征研究

利用纳秒脉冲放电在单针、环状、以及单针加环状三种不同电极结构下产生了均匀稳定的等离子体射流;通过光学和电学诊断研究了三种不同结构下等离子体射流的运行特性及相应的物理机制。实验结果表明,以上三种等离子体射流的转动温度均为295K,振动温度分别为1900K,2000K和2100K,都属于非平衡态等离子体;其中,基于单针和环状电极的混合型射流可产生更为均匀稳定的等离子体,且富含较多的活性物种,有望在材料表面处理及消毒灭菌等领域发挥一定作用。     

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利用纳秒脉冲放电在单针、环状、以及单针加环状三种不同电极结构下产生了均匀稳定的等离子体射流;通过光学和电学诊断研究了三种不同结构下等离子体射流的运行特性及相应的物理机制。实验结果表明,以上三种等离子体射流的转动温度均为295K,振动温度分别为1900K,2000K和2100K,都属于非平衡态等离子体;其中,基于单针和环状电极的混合型射流可产生更为均匀稳定的等离子体,且富含较多的活性物种,有望在材料表面处理及消毒灭菌等领域发挥一定作用。     

Development of Ionization waves in an Atmospheric‐Pressure Micro‐Plasma Jet

Present study investigated the development of ionization waves in an atmospheric‐pressure plasma jet. Plasma was ignited by 6 kHz sinusoidal voltage applied to a cylindrical electrode surrounding the 500 μm inner diameter quartz tube and positioned 10 mm upstream from the tube orifice. The plasma current was observed using a plane electrode placed 20 mm downstream from the tube orifice. The spatial development of ionization waves was monitored by registering the optical emission along the axis of the tube. At voltages in range of 5.5 ‐ 7.5 kV only one pulse occurred during positive half‐period while at higher voltages the number of pulses increased up to 6 ‐ 7 per half‐period. The development of the first and subsequent pulses during one half‐period was essentially different. For the first pulse the sharp rise of optical emission characterizing the front of the ionization wave occurred initially near the high‐voltage electrode and moved towards the tube orifice and further in the He jet. The propagation of ionization wave coincided with the rise of the displacement current measured at the plane electrode. For subsequent ionization waves of the same half‐period, the emission occurred initially at the tube orifice and the ionization wave developed simultaneously in two directions: towards the high‐voltage electrode and towards the end of the jet. The velocity of ionization wave inside the tube was in range of (2. 5 ‐ 5.0) · 10⁴ m/s for first wave and as high as 1.2 · 10⁵ m/s for subsequent waves. (© 2016 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Simple Physical Model of Generation of the Low-Pressure Radio Frequency Supersonic Plasma Jet

The paper presents a simple theoretical model of the breakdown of the supersonic plasma jet generated by the hollow cathode discharge inside the nozzle in the low pressure RF plasma-chemical reactor. Through the nozzle which is drilled in the RF electrode the working gas flows to the reactor chamber. If at the outlet of the nozzle the gas flow is supersonic the well defined plasma jet is created inside the reactor chamber. The results of our model are in qualitative agreement with experimental data.     

LIF diagnostics of hydroxyl radical in a methanol containing atmospheric-pressure plasma jet

In this paper, a pulsed-dc CH_3OH/Ar plasma jet generated at atmospheric pressure is studied by laser-induced fluorescence(LIF) and optical emission spectroscopy(OES). A gas–liquid bubbler system is proposed to introduce the methanol vapor into the argon gas, and the CH3OH/Ar volume ratio is kept constant at about 0.1%. Discharge occurs in a 6-mm needle-to-ring gap in an atmospheric-pressure CH_3OH/Ar mixture. The space-resolved distributions of OH LIF inside and outside the nozzle exhibit distinctly different behaviors. And, different production mechanisms of OH radicals in the needle-to-ring discharge gap and afterglow of plasma jet are discussed. Besides, the optical emission lines of carbonaceous species, such as CH, CN, and C_2 radicals, are identified in the CH_3OH/Ar plasma jet. Finally, the influences of operating parameters(applied voltage magnitude, pulse frequency, pulsewidth) on the OH radical density are also presented and analyzed.     

RF discharges at atmospheric pressure

The described plasma source is based on the RF torch discharge. The powered RF electrode of the torch discharge plasma source is made from the thin metal pipe with an inner diameter of 1–2 mm and with a length of several cm. The working gas (argon pure or with an admixture of reactive components) flows through the RF electrode as the nozzle. The electrode is connected through the matching unit to the RF generator of the frequency of 13.56 MHz.The advantage of this described plasma source consists in the fact that the torch discharge remains stable up to the atmospherical pressure of the working gas even in the liquid environments. Up to now the torch discharge has been used only for treatment in liquid environment only for archaeological artefacts. For further applications it is necessary to additional study of this phenomenon. While in previous papers we presented a measurement of different temperatures from spectra emitted by plasma, there is drawn attention to equiintensity maps inside the nozzle.     

发射光谱研究大气压等离子体射流的气体温度

采用介质阻挡放电等离子体喷枪装置,在大气压下流动氩气中产生了射流等离子体。利用光电倍增管,对射流等离子体进行了时空分辨测量,分析了等离子体喷枪内介质阻挡放电和外部等离子体羽的放电特性。利用高分辨率光谱仪采集等离子体羽处的发射光谱,通过对发射光谱中OH(A2Σ+→X2Π,307.7～308.9nm)及N2+的第一负系(B2Σ+u→X2Π+g,390～391.6nm)谱线拟合得到了射流等离子体的转动温度,拟合得到的转动温度分别为443和450K。在5%的误差范围内,这2种方法得到的结果是一致的。由于在大气压下,转动温度近似等于产生气体放电的气体温度,所以可以确定大气压射流等离子体气体温度。利用该方法研究了不同电压下的气体温度,发现气体温度随着外加电压增加而增大。     

大气压氦气多路低温等离子体射流

为了研究大气压低温等离子体多路射流阵列的放电特性,设计一个实现7路低温等离子体射流的放电装置,采用单电极放电结构,在开放的大气环境下通入氦气。采用高压窄脉冲重复频率电源激励驱动该放电装置,电源脉冲宽度约230 ns,脉冲上升沿约为120 ns。在重复频率为500 Hz的条件下,通过高速摄影初步发现放电电流脉宽约为110 ns,且无反向放电。试验结果表明:平均射流长度随电压幅值增加而增加,在一定电压幅值时射流长度有达到饱和的趋势,这是由于射流通道尾部有空气进入,电压幅值已不再是主要原因;只有在合适的气体流量值时,才能够获得较长的平均射流长度,这是由于气体流量过大或过小时射流均不足以维持形成的放电通道;此外,中心电极放电射流长度受气体流量影响较大,气体流量在一定值时可以观察到中心电极有较长的射流,射流放电强度较弱,气体流量过大或过小时中心电极几乎无放电,这是由于四周电极更易形成放电射流,削弱了中心电极放电。 ,     

Investigations of the spatio-temporal build-up of atomic oxygen inside the micro-scaled atmospheric pressure plasma jet

The ascent of atomic oxygen densities created inside the micro-scaled atmospheric pressure plasma jet has been investigated spatially resolved under parameter variations such as applied power, gas mixture and gas velocity using two-photon absorption laser induced fluorescence spectroscopy. Along the discharge channel an increase of the atomic oxygen density within the plasma is observed. The density shows an exponentially asymptotic convergence into an equilibrium close to the effluent. In the post-discharge effluent an exponential spatial decrease can be found. Typical ascent distances of a few hundreds of μm decrease with the applied power and increase with gas velocity and oxygen admixture. The maximum atomic oxygen density increases with applied power and admixed molecular oxygen up to more than 10¹⁶ cm^-3. An increase of the maximum atomic oxygen density with increasing gas velocity has been found. Optical emission spectroscopy measurements indicate a strong increase of the nitrogen emission at low gas flow rates along the channel.     

Two-dimensional numerical study of an atmospheric pressure helium plasma jet with dual-power electrode

In this paper,the characteristics of an atmospheric pressure helium plasma jet generated by a dual-power electrode(DPE) configuration are investigated by using a two-dimensional fluid model.The effect of a needle electrode on the discharge is studied by comparing the results of the DPE configuration with those of the single ring electrode configuration.It is found that the existence of the needle leads to the generation of a helium plasma jet with a higher propagation velocity,higher species density,and larger discharge width.Furthermore,the influences of the needle radius and needle-to-ring discharge gap on the generation of a plasma jet are also studied.The simulation results indicate that the needle electrode has an evident influence on the plasma jet characteristics.     

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研究了氮氧源大气压等离子体射流对表面大肠杆菌灭活作用,分析了氮氧源大气压等离子体射流的光谱性质.结果表明,在放电电压为6.8kV,气体流速为4L?min-1,处理3min时,氮氧比为1:4的大气压等离子体射流对大肠杆菌的灭活率达到98.4%,接近氧气源大气压等离子体射流灭菌效果.通过大气压等离子体射流发射光谱(OES)分析了氮氧源大气压等离子体射流中活性物质,进而解释大肠杆菌微生物灭活机理,认为NO-γ、OI、·OH等活性物质在表面大肠杆菌灭活过程中起到了重要作用.这将为大气压氮氧等离子体射流在环境卫生、微生物灭活等方面的应用研究提供实验基础和技术支持.     

大气压氮氧等离子体射流灭活表面大肠杆菌及其发射光谱分析研究

研究了氮氧源大气压等离子体射流对表面大肠杆菌灭活作用,分析了氮氧源大气压等离子体射流的光谱性质。结果表明,在放电电压为6.8kV,气体流速为4L?min?1,处理3min时,氮氧比为1:4的大气压等离子体射流对大肠杆菌的灭活率达到98.4%,接近氧气源大气压等离子体射流灭菌效果。通过大气压等离子体射流发射光谱(OES)分析了氮氧源大气压等离子体射流中活性物质,进而解释大肠杆菌微生物灭活机理,认为NO?γ、OI、?OH等活性物质在表面大肠杆菌灭活过程中起到了重要作用。这将为大气压氮氧等离子体射流在环境卫生、微生物灭活等方面的应用研究提供实验基础和技术支持。     

Corona discharge as a temperature probe of atmospheric air microwave plasma jet

We developed and tested a new method for temperature measurements of near-LTE air plasmas at atmospheric pressure. This method is specifically suitable for plasmas at relatively low gas temperature (800–1700 K) with no appropriate radiation for direct spectroscopic temperature measurements. Corona discharge producing cold non-equilibrium plasma is employed as a source of excitation and is placed into the microwave plasma jet. The gas temperature of the microwave plasma jet is determined as the rotational temperature of N₂? produced in the corona discharge. The corona probe temperature measurement was tested by the use of a thermocouple. We found a fairly good agreement between the two methods after correcting the thermocouple measured temperatures for radiative losses. The corona probe method can be generally applied to determine the temperature of the near-LTE plasmas and contrary to the thermocouple it can be used for higher plasma temperatures and is not affected by radiative losses and problems of interaction with the microwave plasma and electromagnetic fields.