纵磁作用下真空电弧单阴极斑点等离子体射流三维混合模拟

真空电弧的特性直接受到从阴极斑点喷射出的等离子体射流的影响,对等离子体射流进行数值仿真有助于我们深入了解真空电弧的内部物理机制.然而,磁流体动力学和粒子云网格仿真方法受限于计算精度和计算效率的原因,无法有效地应用于真空电弧等离子体射流仿真模拟.本文开发了一套三维等离子体混合模拟算法,并在此基础上建立了真空电弧单阴极斑点射流仿真模型,模型中将离子作宏粒子考虑,而电子作无质量流体处理,仿真计算了自生电磁场与外施纵向磁场作用下等离子体的分布运动状态.仿真结果表明,单个阴极斑点情况下真空等离子体射流在离开阴极斑点后扩散至极板间,其整体几何形状为圆锥形,离子密度从阴极到阳极快速下降.外施纵向磁场会压缩等离子体,使得等离子体射流径向的扩散减少并且轴线上的离子密度升高.随着外施纵向磁场的增大,其对等离子体射流的压缩效应增强,表现为等离子体射流的扩散角度逐渐减小.此外,外施纵向磁场对等离子体射流的影响也受到电弧电流大小的影响,压缩效应随电弧电流的增加而逐渐减弱.     

Effect of the discharge parameters on the generation of deuterium ions in the plasma of a high-current pulsed vacuum arc with a composite zirconium deuteride cathode

We have studied the mass and charge composition of an ion beam extracted from the plasma of a vacuum arc with a zirconium deuteride cathode for various durations of the arc current pulse (half width at half amplitude) of 2, 4, 7, and 17 μs. It has been established that the fraction of deuterium ions in the vacuum arc plasma increases with the current and the dependence achieve saturation for current of about 1 kA. For the fraction of deuterium atoms in the cathode at a level of 40%, the fraction of deuterium ions in the vacuum arc plasma can exceed 80%. The experimental results have been interpreted theoretically. It has been shown that the main sources of deuterium ions in a microsecond arc discharge are cathode spots. We have developed a model of deuterium desorption during the operation of cathode spots for quantitatively estimating the concentration of deuterium ions in the arc plasma.     

Ion Flux from the Cathode Region of a Vacuum Arc

This paper reviews the properties of the cathode ion flux generated in the vacuum arc. The structure and distribution of mass erosion from individual cathode spots and the characteristics of current carriers from the cathode region at moderate arc currents are described. An appreciable ion flux (～10% of total arc current) is emitted from the cathode of a vacuum arc. This ion flux is strongly peaked in the direction of the anode, though some ion flux may be seen even at angles below the plane of the cathode surface. The observed spatial distribution of the ion flux is expressed quite well as an exponential function of solid angle. The ion flux is quite energetic, with average ion potentials much larger than the arc voltage, and generally contains a considerable fraction of multiply-charged ions. The average ion potential and ion multiplicity increase significantly for cathode materials with higher arc voltages, but decrease with increasing arc current for a particular material. The main theories concerning ion acceleration in cathode spots are the potential hump theory (PH), which assumes that all ions are created at the same potential, and the gas dynamic theory (GD), which assumes that all ions are created with the same flow velocity. Experimental data on the potentials and energies of individual ions indicates that these theories in their original forms are not quite correct, however extensions or modifications of the PH and GD theories seem very likely to be able to predict correct values for the charge states, potentials, and energies of individual ions.     

Ion flux from the cathode region of a vacuum arc

The properties of the ion flux generated in a vacuum arc are reviewed. The structure and distribution of mass erosion from individual cathode spots and the characteristics of current carriers from the cathode region at moderate arc currents are described. An appreciable ion flux (~10% of the total arc current) is emitted from the cathode of a vacuum arc. This ion flux is strongly peaked in the direction of the anode, although some ion flux may be seen even at angles below the plane of the cathode surface. The observed spatial distribution of the ion flux is expressed quite well as an exponential function of the solid angle. The ion flux is quite energetic, with average ion potentials much larger than the arc voltage, and generally contains a considerable fraction of multiply charged ions. The average ion potential and ion multiplicity increase significantly for cathode materials with higher arc voltages but decrease with increasing arc current for a particular material. The main theories concerning ion acceleration in cathode spots are the potential hump theory and the gas dynamic theory. Experimental data indicate that these theories serve reasonably well when used to predict the mean values of the charge state, ion potential, and ion energies for the ion flux, but are quite insufficient when compared with the results for the potentials and energies of individual ions     

Investigation of the Directional Velocities of Ions in a Vacuum Arc Discharge by Emission Methods

This paper is devoted to an investigation of the directional velocities of the ions generated in cathode spots of vacuum arc discharges. By using emission methods of studying the processes in a vacuum arc discharge, which involve the determination of the parameters and characteristics of the discharge plasma by analyzing the ion current extracted from the plasma and the ion charge states, the velocities of ions have been determined for the majority of cathode materials available in the periodic table. Is has been shown that at a low pressure of the residual gas in the discharge gap the directional velocities of the ions do not depend on the ion charge state. Comparison of the data obtained with calculated values allows the conclusion that the acceleration of ions in a vacuum arc occurs by the magnetohydrodynamic mechanism.     

微空心阴极放电的流体模型模拟

采用流体模型研究了微空心阴极放电(MHCD)的特点，对放电中电场的形成，电子和离子的密度分布，电子能量分布进行了数值模拟.该计算是针对高气压，圆筒形阴极结构下的He放电.结果表明放电中存在空心阴极效应，从电子能量分布可以看出，放电中存在高能电子，放电空间的电场分布主要表现为径向电场.此外，通过改变气压，阴极孔径等参数计算出它们对放电的影响.分析表明减小孔径有利于负辉区更充分的重合.提高气压将缩短阴极位降区. 关键词： 微空心阴极放电 流体模型     

Determination of the specific ion erosion of the vacuum arc cathode by measuring the total ion current from the discharge plasma

The specific ion erosion γ_i of cathodes made of C, Mg, Al, Ti, Co, Cu, Y, Mo, Cd, Sm, Ta, W, Pt, Pb, and Bi is determined by measuring the total ion current from the vacuum arc plasma. It is demonstrated that the ratio of the total ion current to the discharge current, α_i in a vacuum arc varies from 5 to 19%, depending on the cathode material. It is found experimentally that the ion current fraction α_i is inversely proportional to the atomic bond energy of the cathode material. It is shown that an increase in the total ion current extracted from the discharge plasma when applying an external magnetic field to the cathode region of the discharge is related solely to the appearance of ions with higher charge numbers in the plasma, while the magnitude of the specific ion erosion γ_i remains unchanged.     

Investigation of ion behavior associated with anode-spot modetransition in vacuum arcs

The ion behavior phenomenon associated with transitions of the anode discharge mode to the anode-spot mode is studied by measuring the wall ion current and by spectroscopic observation in vacuum arcs. The anode mode transfers when the wall ion current attains a certain magnitude that is independent of the cathode, but dependent on the anode. The ion-current function to the arc current increases when the arc current increases in the diffuse arc. Spectral-line intensity of Cu III emitted from the plasma in the anode region increases with an instantaneous arc current of a 5-kA peak (kAp) sinusoidal half-wave. These findings suggest an idea for the mode transition, that an ion generation region appears, and that an increase in the ion density produces a positive potential hump near the anode, which results in the negative anode voltage drop triggering the mode transition. After the mode transition, an arc current is found to reduce the ion current near the crest of a sinusoidal current in a copper arc. This appears to be significant for the arc on a small anode. The decrease in the ion current is attributed to the recombination of ions decelerated by anode vapor with electrons emitted from the hot spot on the anode     

含氘电极真空弧等离子体空间分布特性诊断研究

真空弧放电等离子体含有多种离子成分,并且各离子在空间上具有不同的分布规律.本文针对金属氘化物电极真空弧离子源,搭建了一台紧凑型磁分析装置,用来研究放电等离子体中氘离子与金属离子的空间分布.当离子源弧流为100 A左右时,该装置能有效地传输引出束流,并且具有较好的二次电子抑制效果,可准确获得各离子流强.利用该装置测量并获得了氘化钛含氘电极真空弧放电等离子体内氘离子和钛离子空间分布规律,结果表明:径向上,氘离子和钛离子都呈高斯分布,但氘离子分布均匀,而钛离子相对集中在轴线附近,导致轴线附近氘离子比例最低;轴向上,所有离子数量都以自然指数函数减少,而且相对幅度接近,所以氘离子比例几乎不变.本文研究结果不仅有助于理解真空弧放电等离子体膨胀过程,还可以指导金属氘化物电极真空弧离子源及其引出设计.     

Influence of a current jump on vacuum arc parameters

Based on time of flight method, influence of short time vacuum arc current jump on arc plasma parameters were investigated. Superposition of the current pulse of a vacuum arc with a high operating voltage results in the appearance of ions of higher charge state in the discharge plasma and in an increase in the mean ion charge state for most of the cathode materials used in the experiment. The method of a “short-time current jump” can be also used to investigate the parameters of a vacuum arc, in particular to estimate the ion direct velocities in vacuum arc plasmas. Our estimates show that in the presence of a current step the ion velocities are almost identical for all differently charged ions and depend only on the peak current and the ion mass     

Velocity distributions in magnetron sputter

Results of the particle simulation of magnetron sputter are presented. Using a kinetic code, we obtain the spatial profiles of plasma density, potential, and velocity distribution function, along with the electron temperature, the ion density, the current density, and the deposition profiles at the anode surface. The result of simulation is compared with the Child-Langmuir law applied to the magnetron discharge and the global model. The velocity distribution function of electrons is Maxwellian, but that of ions is non-Maxwellian near the cathode with the majority in the energy range below 50 eV     

流体-亚稳态原子传输混合模型模拟空心阴极放电特性

利用流体-亚稳态原子传输混合模型研究了氩气矩形空心阴极放电稳态时的参数. 数值计算得到了压强为10 Torr时的电势、电子、离子和亚稳态氩原子密度以及电子平均能量的分布. 结果表明电子和离子密度峰值为4.7×10¹² cm^-3, 亚稳态原子密度峰值为2.1×10¹³ cm^-3. 本文同时对流体-亚稳态原子传输混合模型和单一流体模型模拟得到的放电参数进行了比较. 结果表明, 分步电离是新电子产生的重要来源, 亚稳态原子对空心阴极放电特性有重要影响. 与单一流体模型相比, 混合模型计算得到的电子密度升高, 阴极鞘层宽度和电子平均能量降低. 关键词： 空心阴极放电 流体-亚稳态原子传输模型 电子密度 分步电离     

Phenomenological model of the unstable stage of a vacuum spark discharge

A model of the unstable stage of a spark discharge in vacuum is proposed, which describes all typical manifestations of this stage, including current spikes in the diode, an increase in the potential at the cathode flame front, collective acceleration of ions in vacuum and plasma diodes, change in the cathode erosion mechanism, and the emergence of electron microbeams with a high current density at the anode. It is shown that these processes are associated with the formation of a charged electron layer of a spatially inhomogeneous plasma at the cathode flame boundary at the unstable stage of the spark discharge in vacuum. The emergence of this layer is associated with a limited emissive ability of the plasma at the cathode flame front during its expansion in vacuum. This leads to disruption of the plasma (field-induced emission of electron from the boundary region of the flame) and the formation of a short-lived charged plasma, viz., high-density ion cluster at the cathode flame boundary. The estimates obtained using this model are in good agreement with the experimental data on physical processes at the unstable stage of a vacuum spark discharge.     

Experimental Measurements on the Current Balance at the Cathode of a Cylindrical Hollow Cathode Glow Discharge

The contribution of positive ions, photons and metastable particles to the secondary emission of electrons from the cathode of an argon glow discharge with cylindrical cathode is measured by sampling the plasma species through a small orifice in the cathode wall and analyzing them in a high vacuum region. Additional experiments are made with a second apparatus which enables the sampling fo plasma species from the negative glow and the dark space. The paper describes the experimental techniques used in both cases and presents estimates on the validity of the results obtained. The positive ions are found to be the dominant contribution to the discharge current at the cathode. The secondary emission of electrons is — in decreasing order of importance — due to impact fo singly charged ions, doubly charged ions and metastable atoms.     

Investigation of unstable motion characteristics of vacuum arc cathode spots between transverse magnetic field contacts

With the improvement of the current level of power grids, the requirements of the opening level of the vacuum switches are also increasing. Vacuum arc cathode spots provide steam and electrons and, to a certain extent, determine the opening capacity of the vacuum switch. In this paper, a vacuum arc cathode spot research platform based on the de-mountable vacuum chamber is constructed. The characteristics of the vacuum arc cathode spots under the transverse magnetic field (TMF) contacts are assessed by a high-speed charge coupled device. The experimental results show that the cathode spot diffusion process can be divided into three processes through cathode spot distribution, arc voltage and current: initial diffusion stage of cathode spots, unstable motion stage of cathode spots, and extinguishing stage. The motion mode of cathode spots during unstable motion stage can be divided into cathode spots group stagnation (CSGS) to multi-cathode jet (MCJ) switch mode, cathode spots group motion (CSGM) to MCJ switch mode, CSGM mode, and MCJ mode. The effects of peak current and contact diameter on unstable motion mode were analysed.     

Reignitions in short vacuum gaps after interruption ofhigh-frequency currents caused by ion bombardment

The internal energy increase of the cathode material during the post arc period as a result of the high electrical field at the cathode surface and the highly energetic ions existing in the vacuum gap is studied in this paper by solving the conservation equations of mass, momentum, and energy together, with the equation of state of electrode material in the cathode region. Solving the heat conduction equation in the cathode region, the temperature distribution of the cathode material is determined. The results for copper indicate that a breakdown can occur at the cathode surface some 100 ns after current zero depending on the form of the cathode surface inhomogeneities, the steepness of the transient recovery voltage, and the initial plasma distribution in the vacuum gap. These results are in accordance with experimental measurements     

Untersuchung der Prozesse in der aktiven Zone der Hohlkatodenbogenentladung. II. Die Bilanzgleichungen,Ergebnisse

In [1] we studied the electron distribution function and the processes of excitation and ionization inside the cathode of hollow cathode arc discharge. In this paper we solve the equations of energy and particle balances using the results of [1]. Adding the minimum principle of energy it is possible to calculate the concentration and the temperature of electrons, the cathode drop, the temperature of the cathode wall and the current density in the active zone. Some of calculated values will be compared with experimental ones. We found satisfactory agreement.     

Self-extraction of negatively charged carriers from anodic vacuumarcs

Measurement and magnetic analysis of self-extracted negatively charged carriers (NCCs) from anodic vacuum arcs are presented. They flow to charge collectors made of stainless steel, which are electrically connected to a cathode. When a 60-Hz sinusoidal arc current of 40 kA is burned on 20-mm-diameter copper electrodes spaced 4 mm apart, a negative current of approximately 900 A flows to a cylindrical collector surrounding the arc. The floating collector potential relative to the cathode is measured, and the mean energy of the NCCs is estimated to be greater than 40 eV. It is difficult for the NCCs to flow from anodic vacuum arcs when an anode is made of zinc or cadmium, the atoms of which have electron affinities of less than 0 eV. A magnetic filter of about 500 G, which is placed between the arc and a 30-mm-diameter circular collector, does not affect the NCC's flow from a 4-kA arc burned on copper electrodes. It is possible to extract a large amount of negative copper ions from the anodic copper vacuum arcs     

Experimental observation of high-voltage, low-current vacuum arcs

A poorly explored type of discharge has been investigated in high vacuum (10^-7 to 10^-6 torr), with a DC high voltage across 0.2- to 0.8-mm gaps. The discharge has been found to be quite different from other widely known types of vacuum and gas discharges by the combination of its voltage-current characteristics (hyperbola-type), source and carriers of current (mostly electrons), and spatial potential distribution (a considerable electric field across the gap and a steep potential fall near the cathode)