Depth‐selective elemental imaging of microSD card by confocal micro XRF analysis

A semiconductor device, a microSD card, was measured by using two XRF instruments. 2D elemental images were obtained using a micro‐XRF system with a spatial resolution of 10 µm. Elemental distributions of the near‐surface region of the sample were clearly shown. Titanium was observed in the resin constituting the sample. Nickel and gold were observed on a terminal and localization of the sample. Elemental distribution of copper reflected the circuit structure of the measurement area that was in the neighborhood of the sample surface. Moreover, the elemental depth distributions of the sample were measured by using a confocal micro‐XRF instrument. The confocal micro‐XRF instrument was constructed in the laboratory with fine‐focus polycapillary x‐ray optics. The depth resolution of the developed spectrometer was 13.7 µm at an energy of Au Lβ (11.4 keV). The elemental images obtained at near‐surface by confocal micro‐XRF were the same as the results obtained from 2D micro‐XRF. However, different Cu images were obtained at a depth of several tens of micrometers. This indicates that microSD cards consist of a few different Cu‐circuit structure designs. The elemental depth distributions of each circuit structure of the semiconductor device were clearly shown by confocal micro‐XRF. Copyright © 2013 John Wiley & Sons, Ltd.     

Development of a high‐resolution confocal micro‐XRF instrument equipped with a vacuum chamber

A confocal micro‐X‐ray fluorescence (micro‐XRF) instrument equipped with a vacuum chamber was newly developed. The instrument is operated under a vacuum condition to reduce the absorption of XRF in the atmosphere. Thin metal layers were developed to evaluate the confocal volume, corresponding to depth resolution. A set of thin metal layers (Al, Ti, Cr, Fe, Ni, Cu, Zr, Mo, and Au) was prepared by a magnetron sputtering technique. The depth resolutions of the new instrument were varied from 56.0 to 10.9 µm for an energy range from 1.4 to 17.4 keV, respectively. The lower limit of detection (LLD) was estimated by comparison with a glass standard reference material NIST SRM 621). The LLDs obtained by a conventional micro‐XRF were compared with the LLDs obtained by a confocal micro‐XRF instrument. The LLDs were improved in the measurement under confocal configuration because of the reduction of background intensity. Finally, layered materials related to forensic investigation were measured. The confocal micro‐XRF instrument was able to nondestructively obtain the distribution of light elements that cannot be detected by measurement in air. Copyright © 2013 John Wiley & Sons, Ltd.     

Quantitative or semi‐quantitative?–laboratory‐based WD‐XRF versus portable ED‐XRF spectrometer: results obtained from measurements on nickel‐base alloys

‘Semi‐quantitative’ analytical procedures are becoming more and more popular. Using such procedures, the question of the accuracy of results arises. The accuracy of an analytical procedure depends to a great extent on spectral resolution, counting statistics and matrix correction. Two ‘semi‐quantitative’ procedures are compared with a quantitative analytical program. Using a laboratory‐based wavelength‐dispersive x‐ray fluorescence (WD‐XRF) spectrometer and a portable energy‐dispersive x‐ray fluorescence (ED‐XRF) spectrometer, 28 different nickel‐base alloy Certified Reference Materials (CRMs) were analyzed. Line interferences and inaccurate matrix correction are reasons for deviations from the reference value. As the comparison shows, ‘semi‐quantitative’ analyses on the WD‐XRF spectrometer can be accepted as quantitative determinations. The investigations show that the results obtained with the portable ED‐XRF spectrometer do not meet the quality requirements of laboratory analysis, but they are good enough for field investigations. Copyright © 2004 John Wiley & Sons, Ltd.     

Simulation of layer measurement with confocal micro‐XRF

A simple model to simulate the measurement of layered structures with confocal micro X‐ray fluorescence (micro‐XRF) was developed and implemented as a computer program. The model assumes monochromatic excitation, considers at the moment only K lines, and simplifies the volume defined by excitation and detection foci as a circle area. First simulation results and comparison with data acquired using the Atominstitut confocal micro‐XRF spectrometer are very promising. The simulation software enables us to perform parameter studies to have a better understanding of the analysis of layered structures with confocal micro‐XRF. Copyright © 2014 John Wiley & Sons, Ltd.     

GE‐MXRF analysis of multilayer films

Polycapillary x‐ray optics (capillary x‐ray lens) is now popular in x‐ray fluorescence (XRF) analysis. Such an x‐ray lens can collect x‐rays emitted from an x‐ray source in a large solid angle and form a very intense x‐ray microbeam which is very convenient for micro x‐ray fluorescence (MXRF) analysis. In this paper, a new method called grazing exit micro x‐ray fluorescence analysis (GE‐MXRF), which combines an x‐ray lens used to form an intense XRF source was developed and applied in multilayer film analysis. Such a method can give the information of film composition, density, and thickness. Through two‐dimensional scan of the film sample, the information of film uniformity can be acquired; meanwhile, this method is also useful in adjusting experiment condition during the film preparation with metal vapor vacuum arc (MEVVA) source ion implantation. Copyright © 2008 John Wiley & Sons, Ltd.     

Elemental depth profile of faux bamboo paint in Forbidden City studied by synchrotron radiation confocal µ‐XRF

A three‐dimensional (3D) analysis of micro x‐ray fluorescence (XRF), namely confocal µ‐XRF, has been constructed at 4W1B beamline of the Beijing synchrotron radiation facility (BSRF). A KB mirror is applied to focus the incident beam and a polycapillary half‐lens in front of the Si(Li) detector is used to limit the visual field of the detector. The faux bamboo paint in Emperor Qianlong's Lodge of Retirement in Forbidden City was analyzed nondestructively by this method. A stratified structure in the paint is disclosed and the results show that the painting was probably restored once in the past, following the same painting technique as originally used. Copyright © 2008 John Wiley & Sons, Ltd.     

A confocal set‐up for micro‐XRF and XAFS experiments using diamond‐anvil cells

A confocal set‐up is presented that improves micro‐XRF and XAFS experiments with high‐pressure diamond‐anvil cells (DACs). In this experiment a probing volume is defined by the focus of the incoming synchrotron radiation beam and that of a polycapillary X‐ray half‐lens with a very long working distance, which is placed in front of the fluorescence detector. This set‐up enhances the quality of the fluorescence and XAFS spectra, and thus the sensitivity for detecting elements at low concentrations. It efficiently suppresses signal from outside the sample chamber, which stems from elastic and inelastic scattering of the incoming beam by the diamond anvils as well as from excitation of fluorescence from the body of the DAC.     

Confocal macro X‐ray fluorescence spectrometer on commercial 3D printer

Novel confocal X‐ray fluorescence (XRF) spectrometer was designed and constructed for 3D analysis of elementary composition in the surface layer of spatially extended objects having unlimited chemical composition and geometrical shape. The main elements of the XRF device were mounted on a moving frame of a commercial 3D printer. The XRF unit consists of a silicon drift detector and a low‐power transmission‐type X‐ray tube. Both the excitation and secondary X‐ray beams were formed and regulated by simple collimator systems in order to create a macro confocal measuring setup. The spatial accuracy of the mechanical stages of the 3D printer achieved was less than 5 μm at 100‐μm step‐size. The diameter of the focal spot of the confocal measuring arrangement was between 1.5 and 2.0 mm. The alignment of the excitation and secondary X‐ray beams and the selection of the measuring spot on the sample surface were ensured by two laser beams and a digital microscope for visualization of the irradiated spot. The elements of the optical system together with the XRF spectrometer were mounted on the horizontal arm of the 3D printer, which mechanical design is capable of synchronized moving the full spectroscopic device within vertical directions. Analytical capability and the 3D spatial resolution of the confocal spectrometer were determined. Copyright © 2017 John Wiley & Sons, Ltd.     

A sub‐micrometer resolution hard X‐ray microprobe system of BL8C at Pohang Light Source

A microprobe system has been installed on the nanoprobe/XAFS beamline (BL8C) at PLS‐II, South Korea. Owing to the reproducible switch of the gap of the in‐vacuum undulator (IVU), the intense and brilliant hard X‐ray beam of an IVU can be used in X‐ray fluorescence (XRF) and X‐ray absorption fine‐structure (XAFS) experiments. For high‐spatial‐resolution microprobe experiments a Kirkpatrick–Baez mirror system has been used to focus the millimeter‐sized X‐ray beam to a micrometer‐sized beam. The performance of this system was examined by a combination of micro‐XRF imaging and micro‐XAFS of a beetle wing. These results indicate that the microprobe system of the BL8C can be used to obtain the distributions of trace elements and chemical and structural information of complex materials.     

Improvements of the low‐energy performance of a micro‐focus x‐ray source for XRF analysis with the SEM

X‐ray Fluorescence (XRF) with a scanning electron microscope (SEM) is a valuable completion of the analytical capabilities of SEMs. Small and compact micro‐focus x‐ray sources are mounted to the microscope chamber, and the x‐ray spectra are monitored with conventional EDS systems. Up to now the x‐ray tubes used for the micro‐focus x‐ray sources are equipped with beryllium windows about 100 µm thick. The poly‐capillary x‐ray lenses have their transmission maximum at photon energies around 10 keV. It drops down in both low‐ and high‐energy ranges. Hence, L‐radiation from an Mo or Rh target will be strongly attenuated, and the excitation of fluorescence in the soft x‐ray range becomes very ineffective. A new micro‐focus x‐ray source was developed. It is characterised by a lower self‐absorption in the tube target, thin beryllium windows and an x‐ray optics having a large distance between its foci and the maximum of transmission at about 5 keV. Thus K line fluorescence of light elements becomes effectively excited by the L‐radiation from Mo or Rh tube targets. The detection limit for sodium oxide in glass was found to be below 1 mass%. Copyright © 2009 John Wiley & Sons, Ltd.     

Methodological challenges of optical tweezers‐based X‐ray fluorescence imaging of biological model organisms at synchrotron facilities

Recently, a radically new synchrotron radiation‐based elemental imaging approach for the analysis of biological model organisms and single cells in their natural in vivo state was introduced. The methodology combines optical tweezers (OT) technology for non‐contact laser‐based sample manipulation with synchrotron radiation confocal X‐ray fluorescence (XRF) microimaging for the first time at ESRF‐ID13. The optical manipulation possibilities and limitations of biological model organisms, the OT setup developments for XRF imaging and the confocal XRF‐related challenges are reported. In general, the applicability of the OT‐based setup is extended with the aim of introducing the OT XRF methodology in all research fields where highly sensitive in vivo multi‐elemental analysis is of relevance at the (sub)micrometre spatial resolution level.     

Calculation of attenuation and x‐ray fluorescence intensities for non‐parallel x‐ray beams

With the nowadays widespreaded use of x‐ray optics in x‐ray fluorescence analysis, large convergence or divergence angles can occur. This experimental situation violates a basic assumption of the usual fundamental parameter quantification procedure. In order to take beam divergences in micro x‐ray fluorescence analysis into account, a way of calculating fluorescence intensities numerically by Monte Carlo integration is described. For three examples of typical micro‐XRF set‐ups the fluorescence intensities and their deviation from the parallel beam geometry are calculated. Furthermore, we propose a new approach with ‘equivalent angles’ which correct for the beam divergences in fundamental parameter methods. Copyright © 2003 John Wiley & Sons, Ltd.     

Improvement of spatial resolution of µ‐XRF by using a thin metal filter

An improvement of spatial resolution of µ‐XRF by using a thin metal filter was investigated. The size of the x‐ray beam focused by the polycapillary x‐ray lens depended on the energy of the characteristic x‐rays. Original spot sizes at the focal point were 48 µm for CrKα, 41 µm for NiKα, and 28 µm for MoKα, respectively. To make the x‐ray beam size small, Ti? Cu thin foil was placed between the output of the lens and the focal point as a metal filter to reduce the continuous x‐rays. Finally, the x‐ray microbeam size was improved to 30 µm by applying a filter. Clear 2D mapping images of Cr, Fe, and Ni in 300‐mesh stainless steel could be obtained by applying this filter. Copyright © 2008 John Wiley & Sons, Ltd.     

Monte Carlo simulation code for confocal 3D micro‐beam X‐ray fluorescence analysis of stratified materials

Stratified materials are of great importance for many branches of modern industry, e.g. electronics or optics and for biomedical applications. Examination of chemical composition of individual layers and determination of their thickness helps to get information on their properties and function. A confocal 3D micro X‐ray fluorescence (3D µXRF) spectroscopy is an analytical method giving the possibility to investigate 3D distribution of chemical elements in a sample with spatial resolution in the micrometer regime in a non‐destructive way. Thin foils of Ti, Cu and Au, a bulk sample of Cu and a three‐layered sandwich sample, made of two thin Fe/Ni alloy foils, separated by polypropylene, were used as test samples. A Monte Carlo (MC) simulation code for the determination of elemental concentrations and thickness of individual layers in stratified materials with the use of confocal 3D µXRF spectroscopy was developed. The X‐ray intensity profiles versus the depth below surface, obtained from 3D µXRF experiments, MC simulation and an analytical approach were compared. Correlation coefficients between experimental versus simulated, and experimental versus analytical model X‐ray profiles were calculated. The correlation coefficients were comparable for both methods and exceeded 99%. The experimental X‐ray intensity profiles were deconvoluted with iterative MC simulation and by using analytical expression. The MC method produced slightly more accurate elemental concentrations and thickness of successive layers as compared to the results of the analytical approach. This MC code is a robust tool for simulation of scanning confocal 3D µXRF experiments on stratified materials and for quantitative interpretation of experimental results. Copyright © 2011 John Wiley & Sons, Ltd.     

Distribution of Pb and Zn in slices of human bone by synchrotron µ‐XRF

Synchrotron radiation‐induced micro x‐ray fluorescence analysis (µ‐XRF) at HASYLAB beamline L was used to determine the distribution of Pb and other trace elements in slices of human bone. Using a focused synchrotron x‐ray beam of about 15 µm in diameter it was found that Pb was mostly located at the outer border of the cortical bone in various samples. Ratios of Pb intensities of cortical and trabecular bone varied from 0.027 for hip head to 0.408 for proximal tibia. Additionally Ca, Zn and Sr distributions were simultaneously recorded. A remarkable association between Pb and Zn content could be observed. Copyright © 2004 John Wiley & Sons, Ltd.     

Confocal depth‐resolved fluorescence micro‐X‐ray absorption spectroscopy for the study of cultural heritage materials: a new mobile endstation at the Beijing Synchrotron Radiation Facility

A confocal fluorescence endstation for depth‐resolved micro‐X‐ray absorption spectroscopy is described. A polycapillary half‐lens defines the incident beam path and a second polycapillary half‐lens at 90° defines the probe sample volume. An automatic alignment program based on an evolutionary algorithm is employed to make the alignment procedure efficient. This depth‐resolved system was examined on a general X‐ray absorption spectroscopy (XAS) beamline at the Beijing Synchrotron Radiation Facility. Sacrificial red glaze (AD 1368–1644) china was studied to show the capability of the instrument. As a mobile endstation to be applied on multiple beamlines, the confocal system can improve the function and flexibility of general XAS beamlines, and extend their capabilities to a wider user community.     

Numerical approach for depth profiling with GE‐XRF

The atomic percentage of implanted particles on the sample surface was estimated from the peak position of angle dependency of the experimental grazing exit X‐ray fluorescence (GE‐XRF) intensity profile. An algorithm for constructing three‐parametric Gaussian‐type depth profiles of atoms implanted in a substrate was developed. The position of the maximum and its value of the implanted particles distribution as well as a dispersion of that distribution were considered in the calculations. The model was applied to the intensity of the As Kα line emitted from As atoms implanted in a Si wafer. The least‐square method was used to minimize the overall difference between experimental and calculated GE‐XRF intensity. Optimum parameters of the particle distribution were determined in this procedure. Using that profile, the depth dependencies of effective real and imaginary parts of atomic scattering factor and complex index of refraction of the sample material were evaluated. Copyright © 2006 John Wiley & Sons, Ltd.     

Improvement of peak‐to‐background ratio in PIXE and XRF methods using thin Si‐PIN detectors

This paper describes the peak‐to‐background ratio improvement that can be achieved in PIXE and XRF applications by the use of thin crystal detectors. This improvement becomes apparent in the presence of an intense γ‐ray source, which can be produced either during proton irradiation of a sample (PIXE) or in the deexcitation of the radionuclide in radioisotope‐induced XRF analysis (RIXRF). In order to study theoretically the energy response of a silicon crystal in the x‐ray energy region with respect to its thickness and the energy of the incident γ‐radiation, a Monte Carlo simulation was performed. Experimentally, two detectors having crystal thicknesses of 300 µm and 3 mm were employed in specific analytical applications of PIXE, PIXE‐induced XRF and RIXRF techniques. The peak‐to‐background ratios obtained for various characteristic x‐rays were compared between the two detectors. The performances of the two detectors were also compared in the monochromatic XRF analysis of samples with low average atomic number matrix content. Copyright © 2003 John Wiley & Sons, Ltd.     

Energy‐dispersive XRF spectrometer for Ti determination (TITAN)

An energy‐dispersive XRF analyser was designed and constructed for determining Ti in plant and peat materials at low (ppm) concentrations. The XRF analyzer for Ti analysis (TITAN) uses monochromatic excitation obtained from a crystal diffraction monochromator and Co target x‐ray diffraction tube. In addition to precise and sensitive analyses of Ti, other minor elements (Ca, K, Cl, S, P, Ba) in powdered plant and peat samples can be measured with only a minimum of sample preparation (drying, milling). The limits of detection obtained are K 2.5, Ca 1.5, Ti 0.9, Cr 0.7 and Mn 0.5 ppm using a 600 s acquisition time. The instrument was used to determine Ti concentrations in pre‐anthropogenic peat samples up to 9000 years old. Copyright © 2004 John Wiley & Sons, Ltd.