透光导电ITO膜的制备及其光电特性的研究

采用溶胶-凝胶方法制备ITO膜,并从制备工艺上研究了各种因素对ITO膜光电特性的影响.最后制出的ITO膜厚度约为50nm,在可见光区平均透射比达97%,最高达99.55%,电阻率在2.0Ω·cm左右,最低达到0.31Ω·cm.     

低压反应离子镀方法制备ITO透明导电膜

溅射镀膜方法是制备ITO透明导电膜最常用也是实验研究最多的方法。实验使用一种不同于溅射方法的另一种制备工艺—低压反应离子镀方法—制备ITO透明导电膜。实验对不同沉积速率和不同氧气流量对ITO透明导电膜的方块电阻以及光学透过率的影响进行了详细地分析,并综合比较得到了当沉积速率为0.5nm/s,氧气流量为24cm3/min时,在波长为550nm处,方块电阻为20Ω,λ=550nm透过率为90.8%的优质ITO透明导电膜。     

基于金属掺杂ITO透明导电层的紫外LED制备

为降低ITO薄膜对紫外波段的光吸收,制备低电压高功率的紫外LED,研究了一种基于金属掺杂ITO透明导电层的365 nm紫外LED的制备工艺。利用1 cm厚的石英片生长了不同厚度ITO薄膜以及在ITO上掺杂不同金属的新型薄膜,并研究了在不同的退火条件下这种薄膜的电阻和透过率,分析了掺杂金属ITO薄膜的带隙变化。将这种掺杂的ITO薄膜生长在365 nm外延片上并完成电极生长,制备成14 mil×28 mil的正装LED芯片。利用电致发光（EL）设备对LED光电性能进行测试并对比。实验结果表明:掺Al金属的ITO薄膜能够相对ITO薄膜的带隙提高0.15 eV。在600℃退火后,方块电阻降低6.2 Ω/□,透过率在356 nm处达到90.8%。在120 mA注入电流下,365 nm LED的电压降低0.3 V,功率提高14.7%。ITO薄膜掺金属能够影响薄膜带隙,改变紫光LED光电性能。     

大尺寸0.55mm ITO透明导电膜玻璃的翘曲度

ITO透明导电膜玻璃的翘曲度是评价大尺寸薄基片ITO玻璃的重要指标之一。利用磁控射频溅射技术制备了ITO薄膜。研究了基片加热前、后的翘曲度和ITO膜层应力对ITO玻璃翘曲度的影响以及ITO成膜温度分布对ITO玻璃翘曲度的影响。结果表明,薄基片ITO玻璃的翘曲度主要是在镀膜时ITO膜层压应力大引起的,选择合适的成膜温度分布可明显减小ITO玻璃的翘曲度。     

在有机玻璃上射频溅射ITO组合薄膜

利用射频磁控溅射技术在有机玻璃表面上一次完成表面活化、ITO膜制备、SiO2 减反射膜制备过程。利用低能等离子体对有机玻璃表面进行改性以提高ITO膜的附着力。研究了氧分压等工艺参数对ITO膜导电性能及光学性能的影响。     

两种方法制备ITO薄膜的红外特性分析

比较了用电束加热蒸发法和直流磁控溅射法制备的氧化锡铟(ITO)薄膜在红外波段的光学特性实验发现,通过直流磁控溅射在常温下制备的ITO薄膜在红外波段折射率稳定、消光系数小,比电子束加热蒸发制备的膜有较高的透过率在波长1550nm附近的透过率可达86%以上,消光系数约为004,方电阻最低为100Ω/□.     

ITO导电膜红外发射率理论研究

根据红外辐射理论和薄膜光学原理计算了高品质ITO(indium tin oxide)导电膜的红外发射 率,其理论曲线与实测曲线基本符合. 并得出方块电阻小于30Ω时,ITO膜在红外波段8—14μ m的平均红外发射率理论值小于0.1.实际制备方块电阻小于10Ω的ITO膜具有优良的红外隐身 性能. 讨论了高品质ITO膜具有低红外发射率的物理机理,并提出了低红外发射率临界方块电 阻值,这有利於理论研究和工艺制备红外隐身ITO膜. 关键词： 红外发射率 ITO薄膜 理论计算 方块电阻     

聚合物基片对柔性有机发光器件性能的影响

以聚合物基片柔性ITO膜为透明电极，制备了ITO／TPD／Alq3／Al结构柔性有机发光器件，并与在相同条件下制备的玻璃基片相同结构器件作了比较。研究了不同基片对有机材料及器件性能的影响，指出选择不易吸湿、耐温高、热胀系数小的聚合物材料，提高柔性ITO膜的附着力和导电性，结合柔性ITO膜的具体特性。优化有机层的蒸镀条件，是提高柔性有机发光器件发光亮度和稳定性的重要途径。     

柔性有机电致发光器件导电基板的工艺性能

在聚对苯二甲酸乙二醇酯(PET)柔性衬底上采用直流磁控溅射技术制备了氧化铟锡(ITO)透明导电薄膜,研究了衬底温度、溅射功率和溅射压强等工艺条件对薄膜光电性能的影响,并利用原子力显微镜(AFM)表征了衬底及ITO薄膜的表面形貌。结果表明,在PET衬底温度50℃、溅射功率100W和溅射压强2.66×10-1Pa的条件下,可以得到低方阻(50Ω/□)和高透过率(>90%)的透明导电薄膜。以此柔性ITO衬底为阳极,制备了结构为PET/ITO/NPB/Alq3/Mg∶Ag的柔性有机电致发光器件,在驱动电压为13V时,器件的发光亮度达到了2834cd/m2。     

薄膜光学 制膜技术与装置

O484.12006010529低压反应离子镀方法制备ITO透明导电膜=Preparationof ITOfil ms by reactive lowvoltageion plating[刊,中]/徐颖(中科院长春光机所光学技术研究中心.吉林,长春(130022)),高劲松…∥光学技术.—2005,31(5).—669-671使用一种不同于溅射方法的另一种制备工艺—低压反应离子镀方法制备ITO透明导电膜。实验对不同沉积速率和不同氧气流量对ITO透明导电膜的方块电阻以及光学透过率的影响进行了详细的分析,并综合比较得到了当沉积速率为0.5nm/s,氧气流量为24cm3/min时,在波长为550nm处,方块电阻为20Ω,λ=550nm,透过率为90…     

Determination of the Disperse Composition of a PbO Suspension Containing Aggregates of Particles of Lamellar Shape by the Laser-Polarimetry Method

The results of measurements of the scattering matrix at a wavelength of 0.63 μm in the range of scattering angles of 10°–155° are presented for an aqueous suspension of lead oxide containing particles of plate form and their aggregates of monomers with dimensions of ~5 nm. The results of the measurements are compared with the results of calculations for axially symmetric scatterers (ellipsoids of rotation, cylinders). It is shown that the presence of aggregates affects the scattering properties of such a medium. The results of reconstructing the distribution of particles of a disperse medium in sizes from the measurements data of the scattering matrix are presented. The reconstruction of the distributions was carried out by solving the problem of optimizing the sum of the squared deviations of the experimental and calculated values of matrix elements in the framework of the model of axially symmetric scatterers. It is shown that the distribution of particles by sizes is more accurately reconstructed by minimizing the sum of the squares of the deviations for the sum of the diagonal elements. The obtained distribution is compared with the distribution measured by the method of dynamic light scattering.     

Application of the neural network method for determining the characteristics of homogeneous spherical particles

The problem of reconstructing the characteristics of disperse particles from measurements of scattered radiation is considered. To solve this problem, the neural network method, based on the approximation of the parameters of particles by a linear combination of the results of measurements, is used. The capabilities of the method are studied on the examples of the reconstruction of the radius and the refractive index of spherical particles from measurements (for example, in flow-type cytometers) of the luminance of radiation scattered by individual particles, as well as the reconstruction of the mean radius, the coefficient of variation, and the refractive index from measurements of the luminance of radiation scattered by an ensemble of particles. Errors in the reconstruction of the characteristics of disperse particles depending on the structure of the neural network and the parameters of particles are studied.     

Modeling of the vibrational structure of the vibronic spectra of diphenylpolyenes by the parametric method

The structures of the electronic-vibrational spectra and of the excited states of a number of diphenylpolyene molecules are determined within the framework of the second approximation of the parametric method. The system of parameters of the structural fragments of molecules is improved and good agreement with spectral experiment is obtained. It is shown that there is a high degree of transferability of the polyene and acene parameters of the method and that the models obtained are adequate to the real structure of molecules. It is also shown that the method proposed makes it possible to perform predictive qualitative and quantitative calculations of the spectra of these molecules, as well as of the spectral characteristics necessary for modeling photochemical molecular transformations. In the series of diphenylpolyene molecules, an interpretation of the vibrational structure of the spectra is proposed and the specific features of variation of the geometry upon excitation of molecules are considered.     

The concept of the use of recycled uranium for increasing the degree of security of export deliveries of fuel for light-water reactors

The present paper deals with investigation of the possibilities for reducing the risk of proliferation of fissionable materials by means of increasing the degree of protection of fresh fuel intended for light-water reactors against unsanctioned use in the case of withdrawal of a recipient country of deliveries from IAEA safeguards. It is shown that the use of recycled uranium for manufacturing export nuclear fuel makes transfer of nuclear material removed from the fuel assemblies for weapons purposes difficult because of the presence of isotope ²³²U, whose content increases when one attempts to enrich uranium extracted from fresh fuel. In combination with restricted access to technologies for isotope separation by means of establishing international centers for uranium enrichment, this technical measure can significantly reduce the risk of proliferation associated with export deliveries of fuel made of low-enriched uranium. The assessment of a maximum level of contamination of nuclear material being transferred by isotope ²³²U for the given isotope composition of the initial fuel is obtained. The concept of further investigations of the degree of security of export deliveries of fuel assemblies with recycled uranium intended for light-water reactors is suggested.     

Nanostructures with Ge–Si quantum dots for infrared photodetectors

In this paper questions of optimization of growth conditions in the method of molecular beam epitaxy for creation of high-efficient quantum dot infrared photodetectors are considered. As a model material system for theoretical investigations, heterostructures with germanium-silicon quantum dots on the silicon surface are chosen. For calculations of the dependencies of quantum dots array parameters on synthesis conditions the kinetic model of growth of differently shaped quantum dots based on the general nucleation theory is proposed. The theory is improved by taking into account the change in free energy of nucleation of an island due to the formation of additional edges of islands and due to the dependence of surface energies of facets of quantum dots on the thickness of a 2D wetting layer during the Stranski–Krastanow growth. Calculations of noise and signal characteristics of infrared photodetectors based on heterostructures with quantum dots of germanium on silicon are done. Dark current in such structures caused by thermal emission and barrier tunneling of carriers, as well as detectivity of the photodetector in the approximation of limitation by generation-recombination noises are estimated. Moreover, the presence of dispersion of quantum dots by size is taken into account in the calculations of the generation-recombination noises. Results of calculations of the properties of structures with quantum dots and their dependencies on growth parameters, as well as the characteristics of quantum dot photodetectors are presented. Comparison of the estimated parameters of quantum dots ensembles and the characteristics of quantum dot photodetectors with experimental data is carried out.     

Theoretical study of the effect of temperature differential and ionizing radiation on the current–voltage characteristics of HEM transistors

Requirements to the modeling of the effects of temperature differential and ionizing radiation on the current–voltage characteristics of high electron mobility transistors (HEMTs) were formulated. The results of modeling of the effects of temperature differential on the current–voltage characteristics of HEMTs were described. The results of analysis of the effects of ionizing radiation on the current–voltage characteristics of HEMTs were given. The results of modeling of the effects of ionizing radiation on the current–voltage characteristics of HEMTs were presented.     

Specific features of determination of the energy of excited electronic states in the formalism of density functional theory

Possibilities for application of the theory of subspaces to determination of the energy of excited electronic states are studied in terms of density functional formalism. Specific features of computer implementation of the theory in a basis of spherical Gaussian functions, whose parameters are determined by minimizing the energy of the corresponding subspace of states, are discussed. The results of calculation of the energy of excited states and the excitation energies of simple atoms and molecules are presented to demonstrate the potential of the approach.     

A sufficient condition of applicability of the model of a chemical equilibrium mixture to describing the state of detonation products

A sufficient condition of applicability of the model of a chemical equilibrium mixture to gasdynamic calculations based on a comparison of the rate of change of the equilibrium concentrations of the products in gas-dynamic process with the rate of chemical reactions leading to the establishment of chemical equilibrium is obtained. An example of using this condition in examining the applicability of the model of a chemical equilibrium mixture to the products of detonation of spherical charges of oxyacetylene and hydrogen-air mixtures the in the air is presented.     

Discrete gravity,the problem of fermion state doubling,and quantum anomalies

The problem of doubling of fermion states is studied in the framework of the theory of discrete gravitation. Examples of amorphous lattices (simplicial two-, three-, and four-dimensional complexes) free of doubling of fermion states are given. Possible consequences of this fact, such as the absence of quantum anomalies in divergence of axial currents, are considered. On the basis of the absence of axial anomalies and the finiteness of the number of physical degrees of freedom in the model of discrete quantum gravity proposed in [1] and of the continuum theory of gravitation constructed with the help of the dynamic quantization method [2], the following conclusion has been drawn: discrete quantum gravity [1] in the continuum limit is transformed into the theory of gravitation constructed in accordance with the algorithm of the dynamic quantization method [2].     

Visualization of scattering media upon backscattering of a linearly polarized nonmonochromatic light

The method of polarization visualization of multiply scattering macroinhomogeneous media, based on analysis of the spatial distributions of polarization characteristics of a linearly polarized radiation backscattered from a medium, is discussed. The effect of optical characteristics of the medium and the scattering geometry on the quality of the images obtained in the case of visualization of an absorbing heterogeneity immersed into a multiply scattering medium is considered. The comparative analysis of the quality of formed images was performed with the use of different polarization characteristics of the backscattered radiation as a visualization parameter. The theoretical interpretation of the obtained experimental results is given within the framework of the phenomenological approach based on the concept of the distribution of the effective optical paths of partial components of the scattered optical field. To calculate the probability density of the effective optical paths, the statistical simulation method was used.