人造金刚石单晶薄膜的制备及表面形貌优化

人造金刚石作为一种高效的热管理衬底,在宽禁带半导体电子器件领域具有广泛的应用前景。然而微波等离子体化学气相沉积(MPCVD)法外延金刚石单晶的生长速率慢,表面粗糙度高,难以满足半导体器件的衬底需求。对此,本文采用MPCVD法制备金刚石单晶薄膜,通过分阶段生长监控样品的生长速率,结合显微镜照片和AFM表征样品的表面形貌和表面粗糙度,根据拉曼光谱和XRD分析外延薄膜的晶体质量,最终采用高/低甲烷浓度的两步法外延工艺,实现了金刚石单晶薄膜的高速外延,生长速率达到20 μm/h,同时获得了较为平整的表面形貌。本文所研究的甲烷调制两步法外延工艺能够起到表面形貌优化的作用,有利于在后续的相关器件研发中提供平整的金刚石衬底,推动高功率电子器件的发展。     

直喷式直流电弧等离子化学气相沉积法金刚石单晶外延层制备研究

采用非循环直流喷射(直喷式)直流电弧等离子化学气相沉积法,在Ar/H2/CH4气氛下,成功制备了金刚石单晶外延层.试验采用的是3 mm×3 mm×1.2 mm的高温高压Ib型金刚石单晶衬底.研究了不同衬底温度和甲烷浓度对金刚石单晶外延层的形貌,速率和晶体质量的影响.采用光学显微镜,激光共聚焦表征了样品的形貌,利用千分尺测量其生长速率,利用Raman表征其晶体质量,采用OES诊断Ar/H2/CH4等离子气氛下C2、CH与Hβ的相对浓度.研究表明,温度和甲烷浓度对单晶刚石形貌和质量产生了明显的影响.在衬底为温度980℃,甲烷浓度在1.5;的条件下,生长速率达到了36 μm/h,并且晶体质量较好(半高宽仅为1.88 cm-1).同时发现生长参数对金刚石单晶外延层的生长模式有着显著地影响.     

探测器级单晶金刚石材料的生长

采用高质量高温高压单晶金刚石衬底,通过等离子体环境净化的方法获得高纯、低缺陷密度金刚石材料,有望应用于医疗、核、宇宙射线等辐射探测器.采用微波化学气相沉积方法成功外延生长出了8 mm×8 mm的高质量单晶金刚石材料.晶体内无明显的应力集中区,X射线摇摆曲线(004)峰半高宽0.008°,PL光谱中未见与氮相关杂质,基于电子顺磁共振测试孤氮杂质含量为23ppb.     

大尺寸单晶金刚石薄膜的外延生长

用电子回旋共振等离子体增强的化学汽相沉积法, 在单晶硅衬底上外延生长出了近于100μm2的单晶金刚石薄膜.使用的原料气体是高纯的氢气和甲烷,生长前没有对衬底做划痕和研磨等预处理.生长中是把衬底放在ECR共振区,并施加了射频负偏压.研究证实,在单晶金刚石薄膜的外延中,硅衬底表面形成高质量结晶的β-SiC过渡层是外延生长金刚石单晶的关键条件;而射频负偏压对于β-SiC过渡层的形成是致关重要的条件.     

高温高压金刚石衬底上的同质外延生长研究

在自主研发的小功率微波等离子体化学气相沉积(MPCVD)装置上利用高温高压(HPHT)单晶金刚石片为衬底进行了金刚石同质外延生长的研究.研究了甲烷浓度、工作气压对金刚石生长速率的影响.测量了金刚石外延 生长过程中等离子体的发射光谱,利用扫描电子显微镜(SEM)和数码相机对生长前后金刚石的形貌进行了表征,利用激光拉曼光谱对金刚石的质量进行了分析.结果表明:一定程度内,适当升高工作气压和甲烷浓度能够有效提高金刚石的生长速率;在外延生长过程会产生过多的丘状体,导致许多金刚石颗粒的产生,影响其生长时间和质量,通过生长、刻蚀相结合的方法能够有效延长生长时间,改善生长形貌;外延生长出的金刚石的激光拉曼图谱中金刚石1332 cm-1特征峰明显、尖锐,荧光背底低,非金刚石相特征峰较低.     

MPCVD单晶金刚石生长及其电子器件研究进展

本综述分析了微波等离子化学气相沉积(MPCVD)单晶金刚石生长及其电子器件近年来的研究进展,并对其进行展望.详细介绍了金刚石宽禁带半导体特性、生长原理、生长设备、衬底处理.研究了影响MPCVD单晶金刚石生长的关键因素,为获得最优生长条件提供指导.分析了横向外延、拼接生长、三维生长等关键性生长技术,逐步提高单晶金刚石的质量和面积.在金刚石掺杂的研究中,详细介绍了n型和p型掺杂的研究进展.通过对金刚石肖特基二极管、氢终端金刚石场效应晶体管、紫外探测器的研究,展现了金刚石在电子器件领域的成果和进展.最后总结了MPCVD单晶金刚石生长及其电子应用过程中面临的挑战,展望了金刚石在电子器件领域的巨大应用前景.     

直流喷射电弧等离子体制备金刚石单晶的研究

通过利用光发射谱技术,探测了大功率直流喷射电弧等离子体增强化学气相沉积方法中沉积区域的气相激元分布,进而优选了金刚石生长的位置.在沉积过程中,不断使衬底做背向等离子体的运动,实现了大颗粒金刚石的连续生长,颗粒尺寸达到约1 mm3.采用劳厄背反射X射线衍射测试技术和拉曼谱技术,对所制备的样品进行了测试,结果表明:所制备的颗粒为金刚石单晶.对于大尺寸衬底,研究了背向运动速度对沉积晶体的形貌和质量的影响,发现了ATG型不稳定形貌.     

大范围ReS2纳米带的化学气相沉积制备及特性表征

采用化学气相沉积方法,在整个SiO2(300 nm)/Si衬底上制备出了大面积、高质量的单层及多层ReS2纳米带,纳米带的长度可达150μm.利用光镜、原子力显微镜(AFM)、荧光(PL),拉曼(Raman)以及X射线光电子能谱分析(XPS)等手段对所得不同层数的ReS2样品进行了表征.结果表明:所制备的ReS2纳米带的拉曼信号与化学气相沉积方法制备的(CVD)单层及多层的薄膜材料差别不大,而其荧光峰出现了明显的展宽,且峰位出现了明显的蓝移.化学气相沉积法(CVD)制备ReS2纳米带操作简单,可控性与可重复性高,对其基础研究和未来潜在应用有着比较重要的现实意义.     

限制空间法制备大尺寸单层二硫化钨薄膜

采用一种限制空间的化学气相沉积方法,在整个SiO2(300 nm)/Si衬底上制备出了大面积、大尺寸、高质量的单层WS2薄膜,薄膜尺寸随生长时间可控,最大尺寸可达500 μm.利用光镜、原子力显微镜(AFM)、荧光、拉曼以及XPS等手段对所得的单层WS2样品进行了表征.结果表明:限制空间方法可以很好地对两种源粉的比例进行调控,制备的单层WS2薄膜样品以三角形为主导,有着清洁的表面、均匀的荧光和拉曼强度分布,以及较高的单晶质量.限制空间化学气相沉积方法操作简单,可控性与可重复性高,可以为其他过渡金属硫属化合物单层薄膜材料的大面积、大尺寸、高质量生长提供借鉴.     

热丝化学气相法生长单晶金刚石颗粒的衬底温度场仿真及实验研究

本文使用金刚石磨料作为晶种颗粒,通过热丝化学气相法生长出单晶金刚石颗粒,并且建立三维的有限元模型,利用有限元仿真分析了生长过程中影响金刚石磨料生长速率以及沉积质量的各种因素,如热丝的排列方式,衬底的温度场,以及晶种的分布方式.通过固定在热丝CVD反应腔里的热电偶测量了实际的衬底温度分布,从而验证了仿真结果的正确性.另外,通过改变仿真模型优化了沉积单晶金刚石颗粒的工艺参数,获得适应于合成单晶金刚石颗粒的新技术,为化学气相沉积合成单晶金刚石颗粒奠定了基础,也为高温高压金刚石磨料品级的改进与提高提供了新途径.     

Sol-gel synthesis and characterization of adsorbent and photoluminescent nanocomposites of starch and silica

Using sol-gel method, mesoporous and photoluminescent silica nanocomposites of soluble starch have been synthesized and characterized. Different ratios of H₂O, TEOS and EtOH were used at fixed template (soluble starch) and catalyst (NH₄OH) concentrations to obtain materials of different performances in terms of heavy metal binding from a solution which has been monitored using Cd(II) as representative divalent heavy metal ion. Optimum material was obtained when H₂O, TEOS and EtOH were used in 14:1:2 ratio. This sample was not only an efficient metal ion adsorbent but also had an intense luminescence in ultra-violet region and potentially may be used in silicon-based UV-emitting devices. Metal binding by the material was further enhanced after calcination (at 800 °C in air) while its luminescence had a multipeak profile in UV-visible region. In a batch adsorption study, calcined hybrid composite (0.25 g/L) could remove 98.5% Cd(II) from 100 mg/L Cd(II) solution in 2 h. The chemical, structural and textural characteristics of the synthesized materials have been investigated using Fourier Transform Infrared Spectroscopy (FTIR), X-rays Diffraction (XRD), Thermal Analysis (TGA/DTA), Photoluminescence (PL), Brunauer-Emmett-Teller Analysis (BET) and Scanning Electron Microscopy (SEM).     

Syntheses and structures of N-phenylmaleimidetriazoles and by-products

The syntheses, properties, and structures of N-phenylmaleimidetriazole derivatives are described. Intermediates and by-products are also discussed. 1b. a = 43.997(7) Å, 5.7610(9) Å, 8.245(1) Å, = 99.339(4), C₂/c; 2a. a = 13.646(4) Å, b = 7.744(2) Å, c = 10.612(3) Å, = 91.979(6), P2₁/c. 3a. a = 22.245(1) Å, b = 22.245(1) Å, 10.010(1) Å, P42/n. 3a. a = 11.727(2) Å, b = 14.075(3) Å, c = 16.080(3) Å, = 105.859(3), = 105.331(3), = 98.187(3), P-1. 3b. a = 8.561(3) Å, b = 14.755(5) Å, c = 22.771(7) Å, = 97.006(5), P2₁/c. 3c. a = 10.500(2) Å, b = 12.189(2) Å, c = 13.040(2) Å, = 109.091(3), = 106.089(3), = 101.022(3), P-1. 8a. a = 16.389(8) Å, b = 5.749(3) Å, c = 19.316(3) Å, = 97.467(9), P2₁/n. 8b. a = 5.822(2) Å, b = 10.114(3) Å, c = 16.705(4) Å, = 84.681(5), = 82.840(5), = 75.769(4), P-1. 9b. a = 11.251(1) Å, 13.335(3) Å, 13.376(3) Å, = 102.456(4), P2₁/n. 9c. a = 15.836(3) Å, b = 8.236(2) Å, c = 5.447(3) Å, = 92.551(3), P2₁/c. 10a. a = 13.177(2) Å, b = 14.597(2) Å, c = 5.5505(8) Å, = 110.979(2), Cc. 11a. a = 14.720(2) Å, b = 13.995(2) Å, c = 38.245(6) Å, = 94.430(3), P2₁/n. 12b. a = 15.067(5) Å, b = 20.378(6) Å, c = 8.669(5) Å, = 99.16(4), = 99.32(3), = 105.23(3), P-1. 13b. a = 8.2824(6) Å, b = 10.5245(7) Å, c = 15.518(1) Å, = 92.305(1), = 100.473(1), = 100.124(1), P-1. 15a. a = 15.357(3) Å, b = 7.778(2) Å, c = 22.957(2) Å, Pbca. 16b. a = 18.0384(4) Å, b = 12.474(3) Å, c = 20.078(5) Å, Pbca.     

Surface topography and crystal and domain structures of films of ferroelectric copolymer of vinylidene difluoride and trifluoroethylene

The crystallization of a copolymer from a solution at room temperature is found to lead to the formation of a metastable structure, characterized by the coexistence of ferroelectric and paraelectric phases. The fraction of the latter decreases after annealing above the Curie point. Atomic force microscopy (AFM) has revealed a difference in the surface topographies between the films contacting with air and the films contacting with a glass substrate. The microstructure of copolymer chains has been investigated by ¹⁹F NMR spectroscopy. The chain fragments with “defect” attached monomeric units are ejected to the surface. The character of the ferroelectric domains formed during crystallization and their size distribution are analyzed.

     

Chemistry and Electrocrystallization of Organic Metals and Superconductors

Abstract

Considerable variation in the conditions of electrochemical crystal growth of TMTSF₂X (i.e., constant current versus constant potential, ambient versus inert atmosphere, etc.) and in the purity of the constituents (donor, electrolyte, solvent) does not significantly affect the unusual low-temperature properties of this class of materials. Our results suggest that the electrocrystallization procedure may be self-purifying by selecting for conducting crystal phases with constituents having specific oxidation potentials and solubility properties. However, doping solutions with structurally and chemically similar constituents (i.e., TMTTF, and IO^? ₄ in CIO^? ₄) leads to their incorporation in the crystal structure where they have a profound effect. Several mole percent of these dopants suppress superconductivity in the PF^? ₆ and CIO^? ₄ salts, and increase and broaden the metal-insulator phase transition.     

Hydrothermal Synthesis and Morphology of Thomsonite and Edingtonite

The hydrothermal treatment of different glasses of the composition 2 Na₂O–8 CaO–10 Al₂O₃– 20 SiO₂ and 2 BaO–2 Al₂O₃–6 SiO₂ at one kilobar pressure in a temperature-range between 80 °C and 230 °C lead to the formation of the zeolite-minerals thomsonite (orthorhombic symmetry space-group Pbmn, a = 13.05 Å, b = 13.09 Å and c = 13.22 Å), and edingtonite (orthorhombic symmetry, space-group: P2,2,2, a = 9.55 Å, b = 9.67 Å and c = 6.52 Å). Under the chosen hydrothermal conditions both mineral phases are formed in the whole temperature interval.     

Preparation and characterization of PbSe nanopowder and quasi-ceramics

By means of the reduction of Pb(II) and Se(IV) with hydrazine, oval monodispersed PbSe nanoparticles characterized by sizes ～100 nm and the cubic symmetry were obtained. Their compaction and sintering into quasi-ceramic state were performed. The samples were investigated by means of scanning electron microscopy, X-ray diffraction and FTIR spectroscopy. The results obtained are discussed.     

Numerical and experimental analysis of periodic patterns and sedimentation of lysozyme

This paper deals with experimental investigation, mathematical modelling and numerical simulation of the crystallization processes induced by counter diffusion method of a precipitant agent in a lysozyme protein solution. Novel mathematical strategies are introduced to simulate the experiments and in particular to take into account the kinetics of the growth process and the motion of the crystals due to the combined effect of gravitational force and viscous drag if the sedimenting process is allowed (protein chamber free of gel). Comparison between experimental observations and numerical simulations in the presence of convection and sedimentation and without them provides a validation of the model. The crystal formation in gel results modulated in space. If the gel matrix is not present, convective cells arise in the protein chamber due to local inversions in the density distribution associated to nucleation phenomena. As time passes, these vortex cells migrate towards the top of the protein chamber exhibiting a different wave number according to the distance from the gel interface. The sedimentating particles produce a wake due to depletion of protein from the surrounding liquid. The models and the experiments may represent a useful methodology for the determination of the parameters and conditions that may lead to protein crystallization.     

Structural and spectral studies of N-trans-cinnamylidene-m-toluidine and N-trans-cinnamylidene-m-chloroaniline

N-trans-cinnamylidene-m-toluidine (1) C₁₆H₁₅N, and N-trans-cinnamylidene-m-chloroaniline (2) C₁₅H₁₂NCl form isomorphous crystals which are monoclinic, space group P2_l/c, with unit cell dimensionsa=5.967(2),b=13.793(3),c=15.048(5) Å, =91.97(3)° anda=5.868(2),b=13.788(4),c=15.191(4) Å, =91.87(3)°, respectively. The single-crystal X-ray structure determinations of the title compounds revealtrans structures. Ring (A) C_10–15 and ring (B) C_1–6, are practically planar in both structures with dihedral angels of 61.3(3) and 63.6(2)°, respectively.¹H nmr, u.v. and i.r. spectra are also reported.     

Crystal and molecular structures of benz-p-nitroanilide and benz-p-methoxyanilide

The crystal structures of the two carboxylic amides C₁₃H₁₀N₂O₃ (I) and C₁₄H₁₃NO₂ (II) have been determined by direct methods and refined by full-matrix least squares. The predominant structural feature is the hydrogen bonding (N-H?O=C) which influences the conformations of both structures.     

Structure simulation and study of electronic and dielectric properties of two derivatives of benzamide

First-principles calculations based on density functional theory have been done on the chlorinated phenyl benzamides; 4-chloro-phenyl-benzamide – C13H10ClNO, and 2-chloro-3-chloro-phenyl-benzamide – C13H9Cl2NO. The triclinic structure of 4-chloro-phenyl-benzamide and orthorhombic structure of 2-chloro-3-chloro-phenyl-benzamide have been simulated and the structural parameters have been found out. Electron density of states has been computed in the materials using the electronic structure calculation code of Quantum-Espresso which gives a band gap of 0.74 eV in case of 4-chloro-phenyl-benzamide. This value is close to the value exhibited by semiconducting materials and photonic band gap materials. Band gap in case of 2-chloro-3-chloro-phenyl-benzamide comes out to be 3.08 eV. This value is in the range exhibited by NLO materials. Dielectric constant of the materials has been computed. The value of dielectric constant in 4-chloro-phenyl-benzamide comes out to be 2.78, 3.14, and 3.92 along X, Y, and Z axes, respectively, and the average value comes out to be 3.28. The value of dielectric constant in case of 2-chloro-3-chloro-phenyl-benzamide comes out to be 1.39, 1.53, and 1.34 along X, Y, and Z axes, respectively, and the average value comes out to be 1.42. Thus, additional chlorination is increasing the band gap and decreasing the dielectric constant in phenyl benzamide.