Fabrication of integrated microchip for optical sensing by femtosecond laser direct writing of Foturan glass

By the one-continuous fabrication procedure of hollow microstructures using femtosecond (fs) laser direct writing followed by thermal treatment, successive chemical wet etching and additional annealing, three-dimensional integration of microoptics with microfluidics, i.e., a planoconvex microlens with a microfluidic chamber, in a single Foturan glass chip was achieved. Further integration of an optical waveguide was performed through internal refractive index modification by fs laser direct writing after the fabrication of the microlens and the microchamber. An “all-in-one” microchip that is highly effective for on-chip photonic biosensing can be manufactured by the present technique with easy assembly of each microcomponent and without any cumbersome processes for stacking and joining substrates. Experimental demonstration of photonic biosensing using the integrated microchip has revealed that fluorescence analysis and absorption measurement of liquid samples can be performed with efficiencies enhanced by factors of 8 and 3, respectively.     

Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

This article reports the fabrication of high-fill-factor plano-convex cylindrical and spherical microlens arrays horizontally and vertically embedded in a photosensitive Foturan glass chip by femtosecond (fs) laser micromachining. The microlens arrays were fabricated by modifying the microstructure of Foturan glass using fs laser direct writing followed by thermal treatment, wet etching, and additional annealing. The focusing ability and image quality of the microlens arrays were examined, showing that the lens arrays not only can focus light well but also provide an imaging capability that holds great potential for lab-on-a-chip applications.     

Optical waveguide fabrication and integration with a micro-mirror inside photosensitive glass by femtosecond laser direct writing

Photosensitive glass is a potentially important material for micro-fluidic devices that can be integrated with micro-optical components for biochemical analysis. Here, we demonstrate the fabrication of optical waveguides inside glass by femtosecond laser direct writing. The influence of the laser parameters on the waveguide properties is investigated, and it is revealed that the waveguide mode can be well controlled. The single mode is achieved at a low writing energy, while the multimode is achieved with increasing energy. In spite of a longitudinally elongated elliptical shape of the cross-sectional profile, the far-field pattern of the single-mode waveguide shows an almost symmetric profile. The measured propagation loss and the coupling loss are evaluated to be ∼0.6 dB/cm and ∼1.6 dB at a wavelength of 632.8 nm, respectively, under the conditions of 1.0–2.0 μJ pulse energy and 200–500 μm/s scan speed. The increased optical loss is associated with a higher waveguide mode at higher writing energy. Furthermore, the integration of waveguides and a micromirror made of a hollow microplate inside the glass is demonstrated to bend the laser beam at an angle of 90° in a small chip. The bending loss is estimated to be smaller than 0.3 dB. PACS 42.62.-b; 42.82.Cr; 82.50.Pt; 42.79.Gn; 42.81.Qb     

Three‐dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips

Internal modification of transparent materials such as glass can be carried out using multiphoton absorption induced by a femtosecond (fs) laser. The fs‐laser modification followed by thermal treatment and successive chemical wet etching in a hydrofluoric (HF) acid solution forms three‐dimensional (3D) hollow microstructures embedded in photosensitive glass. This technique is a powerful method for directly fabricating 3D microfluidic structures inside a photosensitive glass microchip. We used fabricated microchips, referred to as a nanoaquarium, for dynamic observations of living microorganisms. In addition, the present technique can also be used to form microoptical components such as micromirrors and microlenses inside the photosensitive glass, since the fabricated structures have optically flat surfaces. The integration of microfluidics and microoptical components in a single glass chip yields biophotonic microchips, in other words, optofluidics, which provide high sensitivity in absorption and fluorescence measurements of small volumes of liquid samples.     

Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) a second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing the great potential of using these microoptical lenses in lab-on-a-chip applications. PACS 42.62.-b; 81.05.Kf; 82.50.Pt     

3D microoptical elements formed in a photostructurable germanium silicate by direct laser writing

We present our investigations into the fabrication of three-dimensional microoptical elements by the direct femtosecond laser writing of a germanium–silicon photosensitive hybrid material. Germanium glass composites are very interesting for optical applications as they are photosensitive, and maintain high optical transparency in the visible and near-infrared bands of the spectrum. Here, we have used a germanium containing hybrid material to make nanophotonic structures and microoptical elements such as photonic crystal templates, prisms and spatial polarization plates, both on flat surfaces and fiber tips. Our results show that this germanium silicate composite is an excellent material for microoptics fabrication.     

亚微米局域空心光束的产生及其在单原子囚禁与冷却中的应用理论研究

提出了一种采用单模光纤、环形二元相位板和微透镜组成的光束整形系统产生亚微米局域空心光束的方案. 根据瑞利-索莫菲衍射积分公式, 数值计算了微透镜焦平面附近的场分布, 详细研究了空心光束的暗斑尺寸与单模光纤模场半径和微透镜焦距的关系. 数值计算结果表明: 在微透镜焦平面附近光场分布近似对称, 在焦点处场强近似为零, 周围场强逐渐增大, 形成半径约为0.4 μm的三维封闭的球形空心光场区域, 即亚微米局域空心光束. 当局域空心光束为蓝失谐时, 光场中的原子将被囚禁在光场最弱处. 若加上抽运光, 原子将受到蓝失谐局域空心光束与抽运光共同激发的强度梯度Sisyphus冷却. 本文利用该方案产生的亚微米局域空心光束构建单原子的囚禁与冷却器件, 并以单个⁸⁷Rb原子为例, 利用Mont-Carlo方法研究亚微米局域空心光束中单原子囚禁与强度梯度冷却的动力学过程, 结果表明利用该器件可以获得温度在5.8 μK量级的超冷单原子.     

Photoetching of spherical microlenses on glasses using a femtosecond laser

We fabricated spherical microlenses on optical glasses by femtosecond laser direct writing (FLDW) in ambient air. To achieve good appearances of the microlenses, a meridian-arcs scanning method was used after a selective multilayer removal process with spiral scanning paths. A positive spherical microlens with diameter of 48 μm and height of 13.2 μm was fabricated on the surface of the glass substrate. The optical performances of the microlens were also tested. Compared to the conventional laser direct writing (LDW) technique, this work could provide an effective method for precise shape-controlled fabrication of three-dimensional (3D) microstructures with curved surfaces on difficult-to-cut materials for practical applications.     

Ultrafast laser fabrication of low-loss waveguides in chalcogenide glass with 0.65 dB/cm loss

This Letter reports on the fabrication of low-loss waveguides in gallium-lanthanum-sulfide chalcogenide glasses using an ultrafast laser. Spatial beam shaping and temporal pulse width tuning were used to optimize the guided mode profiles and optical loss of laser-written waveguides. Highly symmetric single-mode waveguides guiding at 1560 nm with a loss of 0.65 dB/cm were fabricated using 1.5 ps laser pulses. This Letter suggests a pathway to produce high quality optical waveguides in substrates with strong nonlinearity using the ultrafast laser direct writing technique.     

Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application

We report the selective metallization of photostructurable glass by femtosecond (fs) laser direct writing followed by electroless copper (Cu) plating. It was found that a Cu thin film can be deposited only on the rough surface of glass ablated by the fs laser. The deposited Cu thin film exhibits strong adhesion and excellent electrical properties. A Cu film can even be deposited on the internal wall of a hollow microchannel inside photostructurable glass by the multiphoton absorption of the fs laser. To show the use of this technique for micro-total-analysis-system (μ-TAS) applications, the fabrication of a microheater operating at temperatures up to 200 °C was demonstrated. PACS 81.05.Kf; 85.40.Ls; 87.85.Va     

Femtosecond laser direct writing of embedded optical waveguides in aluminosilicate glass

Using tightly focused femtosecond laser pulses to irradiate lines in aluminosilicate glass, embedded lines with increased refractive index, which function as optical waveguides were observed. The pulse energy (4.5–11.2 μJ) and writing speed (50–700 μm/s) were shown to affect the resultant optical properties of the waveguides such as the magnitude of refractive index change, core diameter and propagation mode. At pulse energies above 5 μJ, two types of structures were observed, namely an inhomogeneous void-like structure and a cross-sectional crack-like structure. These structures were found to affect significantly the resultant waveguiding properties of the irradiated lines. Using pulse energy of 5 μJ or below, single mode waveguides were fabricated. Raman spectroscopy showed that the fs laser pulses generated structural changes to the aluminosilicate glass. The fabrication of a 1×4 splitter was also demonstrated. PACS 42.62.-b; 42.82.-m; 81.05.Kf     

Fabrication of hollow optical waveguides in fused silica by three-dimensional femtosecond laser micromachining

We report on the fabrication of hollow optical waveguides in fused silica using femtosecond laser micromachining. We show that in such hollow waveguides, high-intensity femtosecond laser beams can be guided with low optical loss. Our technique, which was established earlier for fabrication of optofluidic structures in glass, can ensure a high smoothness at the inner surfaces of the hollow waveguides and provide the unique capability of fabrication of hollow waveguides with complex geometries and configurations. A transmission of ∼90% at 633 nm wavelength is obtained for a 62-mm-long hollow waveguide with an inner diameter of ∼250 μm. In addition, nonlinear propagation of femtosecond laser pulses in the hollow waveguide is demonstrated, showing that the spectral bandwidth of the femtosecond pulses can be broadened from ∼27.2 to ∼55.7 nm.     

Direct ultraviolet writing of channel waveguides in congruent lithium niobate single crystals

We report the fabrication of optical channel waveguides in congruent lithium niobate single crystals by direct writing with continuous-wave ultraviolet frequency-doubled Ar+ laser radiation (244 nm). The properties and performance of such waveguides are investigated, and first results are presented.     

Threshold effect in femtosecond laser induced nanograting formation in glass: influence of the pulse duration

Recently, femtosecond laser direct writing in porous glass is emerging as a powerful technique for building arbitrary 3D hollow micro/nanostructures in bulk glass materials. In this study, we investigate the pulse duration dependence of laser intensity window for inducing a single nanocrack inside porous glass by femtosecond laser direct writing. We find that the window for a single nanocrack increases with the pulse duration, while the roughness of side walls in the nanocracks becomes higher for pulses longer than ~300 fs. When the femtosecond laser pulses of an optimized duration of ~200 fs are chosen, a sufficiently broad range of laser intensity (~44 % of the structuring threshold) for creating a single nanocrack can be obtained, while smooth sidewalls required by nanofluidic applications can still be maintained. The reported results will be beneficial not only for the development of the 3D femtosecond laser micro/nanostructuring techniques, but also for gaining a deeper understanding of the physical mechanism behind the nanograting formation induced by femtosecond laser irradiation in glass and other transparent materials.     

Frontispiece: Optical waveguides in crystalline dielectric materials produced by femtosecond‐laser micromachining

Femtosecond‐laser micromachining has been developed as one of the most efficient techniques for direct three‐dimensional microfabrication of transparent optical materials. In integrated photonics, by using direct writing of femtosecond/ultrafast laser pulses, optical waveguides can be produced in a wide variety of optical materials. With diverse parameters, the formed waveguides may possess different configurations. The paper by F. Chen and J.R. Vázquez de Aldana (pp. 251–275) focuses on crystalline dielectric materials, and is a review of the state‐of‐the‐art in fabrication, characterization and applications of femtosecond‐laser micromachined waveguiding structures in optical crystals and ceramics.     

Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass

A new technique of laser-assisted single-step chemical etching for diffractive microlens fabrication upon high-energy-beam sensitive glass is reported. Laser direct writing with calibrated writing parameters results in gray-level mask patterns upon the ion-exchanged layer of the glass. The transmittance-dependent chemical etching upon the glass is then effectively utilized to yield suitable surface relief structures for multiple-phase-level diffractive optical elements. The one-step nonphotolithographic fabrication technique has been successfully applied for the realization of an eight-phase-level diffractive microlens.     

Enhancement of Optical Fiber Coupling Based on Collimated and Focused Laser Diode Beam with Micro Aspherical Plano-Convex Lens Fabricated by Excimer Laser

In this article, we have proposed and demonstrated experimentally the double plano-convex micro-aspherical lens scheme to amplify an edge-emitting laser diode (LD) to optical fiber coupler. Both microlenses have two different profiles along their x- and the y-axes direction. The optical simulation software Zemax is used to design and optimize the proposed microlens profile and then fabricate by an excimer laser micromachining system. Focal spot size of LD around 9 µm is achieved experimentally. Light coupling efficiency between LD and optical fiber, using this double plano-convex microlens, is 27.57% and 44.23% for single-mode and multi-mode fiber, respectively.     

Femtosecond laser microstructuring: an enabling tool for optofluidic lab‐on‐chips

This paper provides an overview of the rather new field concerning the applications of femtosecond laser microstructuring of glass to optofluidics. Femtosecond lasers have recently emerged as a powerful microfabrication tool due to their unique characteristics. On the one hand, they enable to induce a permanent refractive index increase, in a micrometer‐sized volume of the material, allowing single‐step, three‐dimensional fabrication of optical waveguides. On the other hand, femtosecond‐laser irradiation of fused silica followed by chemical etching enables the manufacturing of directly buried microfluidic channels. This opens the intriguing possibility of using a single laser system for the fabrication and three‐dimensional integration of optofluidic devices. This paper will review the state of the art of femtosecond laser fabrication of optical waveguides and microfluidic channels, as well as their integration for high sensitivity detection of biomolecules and for cell manipulation.     

Design and Fabrication of Microlens Array for Near-Field Vertical Cavity Surface Emitting Laser Parallel Optical Head

A GaP microlens for collecting laser light was developed in the tip of a near-field probe. It is important to realize a near-field optical probe head with high throughput and a small spot size. The design and fabrication results of the GaP microlens array are described. The most suitable GaP microlens with a probe was calculated as having a 10 μm radius using the two-dimensional finite difference time domain (2-D FDTD) method. The full width half maximum (FWHM) spot size variation and optical power density tolerance were calculated as 157 nm ± 5 nm and 7%, respectively. A spherical GaP microlens was fabricated with a radius of 10 μm by controlling the Cl₂/Ar gas mixture ratio. The difference between the theoretical spherical shape and the fabricated GaP microlens was evaluated as 40 nm at peak to valley. The FWHM spot size and optical throughput of the fabricated microlens were measured as 520 nm and 63%, respectively. The microlens was the same as a theoretical lens with a 10 μm radius. The micron-lens array fabrication process for a near-field optical head was demonstrated in this experiment.