Electrical characterization of dielectric barrier discharge driven by repetitive nanosecond pulses in atmospheric air

Dielectric barrier discharge (DBD) is an important method to produce non-thermal plasma, which has been widely used in many fields. In the paper, a repetitive nanosecond-pulse generator is used for the excitation of DBD. Output positive pulse of the generator has a rise time of about 15 ns and a full width at half maximum of 30–40 ns, and pulse repetition frequency varies from single shot to 2 kHz. The purpose of this paper is to experiment the electrical characteristics of DBD driven by repetitive nanosecond pulses. The variables affecting discharge conditions, including air gap spacing, dielectric thickness, barrier fashion, and applied pulse repetition frequency, are investigated. The relationship between electric field, discharge current, instantaneous discharge power across air gap, and estimated electron density with the length of air gap, dielectric thickness, barrier fashion, and pulse repetition frequency is obtained respectively, and the experimental results are also discussed. In addition, two typical images exhibiting homogeneous and filamentary discharges are given with different experimental conditions.     

电荷电压法测量DBD等离子体的放电参量

在DBD应用研究中，使用电荷电压法能够测量许多重要参量，如放电功率、放电间隙等效电容、电介质层等效电容、着火电压、放电间隙等效电压及放电间隙电场强度等．同时根据电荷电压图形随工作条件及状态变化的情况还可以诊断DBD等离子体的工作稳定性．文章对相关原理、模拟实验结果及实际应用效果进行了介绍．     

Role of the volume and surface breakdown in a formation of microdischarges in a steady-state DBD

The results of an experimental study on a spatial-time behavior of microdischarges (MDs) in steady-state dielectric barrier discharge (DBD) are presented. MDs of DBD have a spatial “memory”, i.e. every subsequent MD appears exactly at the same place that was occupied by the preceding MD. In most cases each MD appears at its fixed place only once by every half-period (HP). Spatial “memory” is derived from slow recombination of plasma in the MDs channels for a period between two neighbor HPs. In steady-state DBD each plasma column was formed only one-time due to local avalanche-streamer breakdown in the very first (initial) gas gap breakdown under inception voltage U^*U^*. After that DBD is sustained under voltage lower than U^*U^*. For the plane-to-plane DBD having the restricted electrode area there is a critical voltage U ₁: DBD is in a steady-state if U > U ₁ but the DBD decays slowly at voltages below U ₁. The decay takes many HPs and occurs due to decreasing the number of MDs inside the gap because of their Brownian motion from central region to the outside of the discharge area. In steady-state DBD there is no correlation between an appearance of alone MD and phase of the applied voltage – each MD has a great scatter in its appearance at the HP. This scatter is attributed to the dispersion in a threshold voltage for local surface breakdowns around the MD base. So, in steady-state DBD the MD volume plasma is responsible for an existence of spatial “memory” (i.e. where the MD appears) but the surface charge distribution around MD is responsible for MD time dispersion (i.e. when the MD appears).     

Optimization of a Dielectric Barrier Discharge for Pulsed UV Emission of XeCl at 308 nm

A pulsed dielectric barrier discharge (DBD) has been investigated in a wide range of experimental conditions with the purpose of optimization for XeCl excimer radiation. For that the following operation parameters had been considered: four different lamps of coaxial geometry with gas gaps in the range of 1.3 ‐ 6.5 mm; gas mixtures of xenon and chlorine containing admixtures of 1%, 2% and 4% Cl₂ at total filling pressures between 5 mbar and 600 mbar; voltage rise times of 20 ‐ 50 ns and voltage amplitudes of up to 12 kV. A maximum radiation pulse energy of 1.8 µ J has been detected at 310 ± 10 nm with an estimated radiation decay by three orders of magnitude within about 5 µ s. It was shown that the minimization of the voltage rise time is essential for enhancing the radiation pulse energy. Furthermore a correlation between the discharge geometry and the optimum pressure for maximum radiation output was observed. The decay characteristics of the excimer emission provides evidence of the harpoon reaction being the main channel of XeCl formation under our operation conditions (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

低气压氙气介质阻挡放电的一维仿真研究

通过建立一个自洽耦合的一维流体模型来描述低气压氙气介质阻挡放电(DBD),并采用有限元法对模型进行数值仿真研究,得到了不同外加电压幅值和频率下的气体间隙压降、放电电流、介质表面电荷随时间的变化关系以及电子、离子、中性粒子和空间电场的时域分布.仿真结果表明:介质表面电荷对放电的点燃与熄灭起着关键的作用;在一个放电周期内,根据气体间隙压降的变化情况,介质表面电荷可按六个阶段进行分析;随着外施电压幅值的增加,间隙击穿逐渐提前至外施电压过零点之前发生,放电更为剧烈;随着外施电压频率的提高,气体间隙压降减小,间隙容易击穿,放电也更加均匀.粒子及空间电场的时域分布表明氙气DBD为典型的辉光放电.     

Al2O3介质层厚度对AlGaN/GaN金属氧化物半导体-高电子迁移率晶体管性能的影响

在蓝宝石衬底上采用原子层淀积法制作了三种不同Al₂O₃介质层厚度的绝缘栅高电子迁移率晶体管.通过对三种器件的栅电容、栅泄漏电流、输出和转移特性的测试表明：随着Al₂O₃介质层厚度的增加,器件的栅控能力逐渐减弱,但是其栅泄漏电流明显降低,击穿电压相应提高.通过分析认为薄的绝缘层能够提供大的栅电容,因此其阈值电压较小,但是绝缘性能较差,并不能很好地抑制栅电流的泄漏;其次随着介质厚度的增加,可以对栅极施加更高的正偏压,因此获 关键词： 2O₃')" href="#">Al₂O₃ 金属氧化物半导体-高电子迁移率晶体管 介质层厚度 钝化     

常压窄间隙介质阻挡放电等离子体辐射特性

利用带有透明电极与可测向观察的一个介质阻挡放电(DBD)实验装置对它的常压窄间隙等离子体辐射特性进行了实验研究。结果表明：这一DBD装置的辐射特性会受激励电压、激励频率、DBD结构等多种因素影响。在频率为10～20kHz高压电源激励下,采用窄间隙、薄电介质层结构DBD可以大幅度提高放电空间的电场强度,增加放电功率密度,提高了放电装置性能。     

空气中纳秒脉冲介质阻挡放电高速摄影

使用上升沿40 ns、脉宽70 ns的重复频率单极性纳秒脉冲电源,采用双水电极结构产生大气压空气中介质阻挡放电。测量了纳秒脉冲下介质阻挡电压和电流,并获得长曝光时间和ns级曝光时间的放电特性,采用曝光时间为2 ns的高速摄影拍摄放电发展过程。结果表明:大气压空气中,水电极结构纳秒脉冲介质阻挡放电能够产生稳定均匀的放电等离子体,且存在二次放电。高速摄影对放电发展过程的拍摄结果表明:放电首先由电极中部开始发展,径向扩展至整个电极范围。     

纳秒脉冲表面介质阻挡放电特性实验研究

在常规大气环境条件下,基于单极性纳秒脉冲电源对表面介质阻挡放电特性进行了实验研究。结果表明:纳秒脉冲表面介质阻挡放电的本质是丝状放电,放电集中在电压脉冲的上升沿;激励电压和脉冲重复频率越大,放电越强烈,越接近均匀放电,但电压的作用更侧重于均匀性,而频率的作用则侧重于放电的强度;电极间隙的优化可以使表面介质阻挡放电特性最好;玻璃作为阻挡介质时容易发生沿面闪络。     

The impulse dielectric behavior of N2 gas in sphere-plane gap

The focus of this work has been on the pre-breakdown phenomena and the breakdown characteristics of N₂ gas in a sphere-plane gap under various impulse voltages. Both electrical and optical experimental investigation methods were used. Following parameters were considered: gas pressure range from 0.2 to 0.6 MPa, electric field utilization factor of the electrode configuration 71%, positive and negative impulse waveforms with the rise time of 500 ns, 1.2 μs and 180 μs. The observed discharge processes before the breakdown through the light emission images by the ICCD camera are in good agreement with the streamer mechanism. Under both polarity stresses, discharges are initially concentrated around the tip of the sphere and later pointing towards the earth electrode. However, negative streamers are thinner and more diffuse. As expected, the breakdown voltages for negative polarity are lower than those for positive polarity regardless of the gas pressure and shape of the applied impulse voltage. The breakdown voltage is increased with shortening the rise time of pulse waveforms. As a substitute for SF₆, N₂ gas under pressures above 0.3 MPa can reach the standard rated withstand voltage for 24 kV C-GIS.     

Planar atmospheric pressure dielectric barrier discharge for ozone production

Planar dielectric barrier discharge (DBD) has been designed for ozone synthesis using oxygen as working gas. Applied voltage, gas flow rate and gap space between electrodes have been found to be an important parameters affecting ozone concentration. Electrical characterization of the discharge cell including onset voltage, consumed power, and current voltage wave form have been studied. A maximum ozone concentration of 29 g/m³ and maximum efficiency of 14g/kWmin have been obtained for the designed system.     

同轴介质阻挡放电发生器介质层等效电容和负载特性研究

大气压介质阻挡放电(DBD)可以在常压下产生非平衡等离子体,已经成为热点研究领域.通过脉冲或交变电源激发放电,研究电源输出特性、电源与放电发生器负载间的匹配和外界条件对放电的影响对于理解放电现象和提高放电效率具有重要意义.本文采用Lissajous图形法,分别研究了驱动电压、气流速率等因素影响同轴DBD发生器介质层等效电容及负载幅频特性的规律.结果表明,气流速率和驱动电压等外界条件影响DBD发生器的负载特性:介质层等效电容随气流速率增大而减小,随驱动电压增大而增大;幅频特性曲线均表现出RLC回路谐振现象,谐振频率随气流速率增大而增大,随驱动电压增大而减小.通过对比发现,介质层等效电容随频率的变化曲线与幅频特性曲线具有一致的特征,介质层等效电容是影响电路谐振频率动态变化的主要因素.提出了一种有关介质层等效电容的形成机制.     

大气压氖气介质阻挡放电脉冲等离子射流特性

采用自行研制的低造价、小体积、可产生幅值0~35 kV、重复频率1 kHz的高压s脉冲电源,设计了一套以大气压氖气为工作气体的介质阻挡放电（DBD）等离子体射流源,通过测量并计算放电过程中的电压-电流波形、拍摄放电图像、光谱分析等手段,对电压幅值、气体流速对氖气等离子体射流特性的影响进行了研究。结果表明:s脉冲电源激励下大气压氖气DBD能产生锥状的等离子射流且其等离子强度适中;s脉冲电源电压幅值的快速上升,可在放电空间瞬间施加高的过电压,能有效促进放电功率、电子密度、电子激发温度和射流长度的增加;工作气体流速的增加使得放电功率、电子激发温度和电子密度减小,而射流长度变化很小;一定条件下,能形成长距离的射流。     

The influence of the discharge parameters on the plasma spatial structuring in argon DBDs

The plasma parameters, discharge plasma uniformity and filamentation processes in high pressure (near atmospheric pressure) dielectric barrier discharges (DBD) in argon are studied using the developed two-dimensional 2D(r, z) model. The applied voltage frequency, the voltage shape, the dielectric layers material and its thickness are varied and the effects of such variations on plasma uniformity, discharge structure and operation are studied. The DBD discharges with different dielectric layers thickness, dielectric constants and secondary electron emission coefficients are simulated. It was shown that the dielectric layer thickness is an important parameter for producing high pressure discharges uniform over the radius. The possibility of the radially uniform discharges at atmospheric pressure was shown in the present study.     

Decrease in the static electric gas breakdown voltage in the presence of free electrons in a discharge gap

The dependence of the gas breakdown voltage U _B on the anode-cathode spacing d, pressure p, and other gas characteristics in the presence of a steady external ionizer in the discharge gap was determined within the avalanche discharge theory. The case was considered where the spatial charge created by the external ionizer did not distort the electric field in the discharge gap. In the absence of external ionizer the obtained dependence comes down to the well-known expression for the gas breakdown voltage (the Paschen law).     

一种新型大气压毛细管介质阻挡放电冷等离子体射流技术

介绍一种结构设计简单、操作运行方便的新型毫米量级大气压冷等离子体射流发生技术.这种射流可以在大气压条件下，利用多种工作气体(如Ar,He,N₂)，通过毛细管介质阻挡放电(DBD)的方式实现.使用频率为33kHz，峰值电压为1—12kV的双向脉冲电源，利用Ar,He,N₂等工作气体，在毛细管内形成了稳定的冷等离子体射流.放电区域的光辐射空间分布利用商用CCD摄像机记录，从中研究放电形态和空间分布，观察到了在DBD区域的流动气体放电和在毛细管出口处形成的等离子体射流 关键词： 冷等离子体射流 毛细管介质阻挡放电 射流射程 射流激发温度     

Performance of non-thermal DBD plasma reactor during the removal of hydrogen sulfide

Destruction of hydrogen sulfide using dielectric barrier discharge plasma in a coaxial cylindrical reactor was carried out at atmospheric pressure and room temperature. Three types of DBD reactor were compared in terms of specific energy density (SED), equivalent capacitances of the gap (Cg) and the dielectric barrier (Cd), energy yield (EY), and H₂S decomposition. In addition, byproducts during the decomposition of H₂S and destruction mechanism were also investigated. SED for all the reactors depended almost linearly on the voltage. In general, Cg decreased with increasing voltage and with the existence of pellet material, while Cd displayed the opposite trend. The removal efficiency of H₂S increased substantially with increasing AC frequency and applied voltage. Longer gas residence times also contributed to higher H₂S removal efficiency. The choice of pellet material was an important factor influencing the H₂S removal. The reactor filled with ceramic Raschig rings had the best H₂S removal performance, with an EY of 7.30 g/kWh. The likely main products in the outlet effluent were H₂O, SO₂, and SO₃.     

Influence of Gap Spacing between Dielectric Barriers in Atmospheric Pressure Discharges

The breakdown activity in helium atmospheric pressure dielectric barrier discharge (DBD) plasma is strongly modified by introducing small impurities (nitrogen (N₂) and air in ppm), although its precise implications for the behavior of discharge plasma is not evident under several constraints. In this simulation study, we investigate the influence of gap spacing between the dielectric barriers to explore the dynamic modification in the structure of discharge plasma in distinct phases of the discharge current pulse using a two‐dimensional fluid model in He‐air gas mixture. Specifically, the impact of nitrogen and air impurities is contrasted by exploring the spatial distributions of electrons in the breakdown phase under similar operating conditions. The filamentary mode of DBD plasma in He‐N₂ is transformed into uniform glow discharge in He‐air gas mixture by the dominant effect of Penning ionization. Finally, the outcomes of two‐dimensional fluid model are validated by comparing with three‐dimensional fluid model to provide the reliability of numerical simulations. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

大气压下氮气介质阻挡微放电中分子振动温度的时间分辨

使用针-板式电极装置,在大气压氮气介质阻挡微放电中,通过对氮分子第二正带系(C3Πu→B3Πg)发射光谱的时间分辨谱线进行分析,根据振动带序发射光谱强度计算得出N2(C,ν)振动温度,并研究了不同压强及放电电压对氮分子(C3Πu)的振动温度时间分辨的影响。实验结果表明:氮分子振动温度的范围为2 000~3 500 K,在每半个放电周期内都呈减小趋势,且正负半周期振动温度差较大,负半周期振动温度始终高于正半周期;振动温度随电压升高而升高,随压强的升高而降低。     

μs振荡脉冲电源激励下同轴电极介质阻挡放电特性

 采用μs振荡脉冲电源激励同轴电极结构产生空气中介质阻挡放电(DBD),通过电压-电流波形的测量及发光图像拍摄研究了放电特性,计算得到了放电功率及传输电荷量等重要放电参量,研究了电压幅值、气隙距离对放电特性及放电参量的影响,在分析放电机理的基础上对实验结果进行了解释。结果表明:μs振荡脉冲电源激励下,DBD平均放电功率可达上百W,传输电荷量可达几千nC;增大电压幅值和减小放电气隙距离能获得更剧烈的放电,平均放电功率和传输电荷量均增加。