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1.
The present study is carried out for the investigation of energetic ion beam mixing in the Bi/Ge system, induced by electronic excitation. The system Ge/Bi/C was deposited on Si substrate at room temperature in the high vacuum deposition system and irradiated using Au ions of 120?MeV at the fluences 1?×?1013, 5?×?1013 and 1?×?1014?ions/cm2. The top layer of carbon was deposited as the protecting layer to avoid oxidation. The swift heavy ions (SHI)-induced interface mixing was studied by Rutherford backscattering spectroscopy (RBS) for depth profiles and compositions, grazing incidence X-ray diffraction (GIXRD) for phase identification and atomic force microscopy (AFM) for surface roughness. We have calculated the mixing rate, mixing efficiency and inter-diffusion coefficient for the Bi/Ge system. We observed that the thickness of the mixed region increased with increasing fluence. In the GIXRD pattern, no new crystalline phase formation was observed after irradiation, the mixed region may be in an amorphous form. The mixing effect is explained in the framework of the thermal spike model.  相似文献   

2.
The mixing of Au in Si induced by secondary and high-order recoil implantation was investigated using 350 keV Ar+ and 350 keV Kr+ ions to fluences from 1?×?1016 to 3?×?1016 ions/cm2 at room temperature. The thickness of the Au layer evaporated on Si substrate was ~2400 Å.The ranges of the Ar and Kr ions were chosen to be lower than the thickness of the Au layer in order to avoid the ballistic mixing produced by the primary knock-on atoms. Rutherford backscattering spectrometry (RBS) experiments were carried out to study the effects induced by Ar and Kr irradiation at the interface of Au–Si system. We observed that in the case of the irradiation with Ar+ ions, a broadening of the Au–Si interface occurred only at the fluence of 3?×?1016 Ar+/cm2 and it is attributed to the surface roughening induced by ion bombardment. In contrast, the RBS analysis of a sample irradiated with 2?×?1016 Kr+/cm2 clearly showed, in addition to the broadening effect, the formation of a mixed zone of Au and Si atoms at the interface. The mixing of Au in Si atoms can be explained by the secondary and high-order recoil implantation followed by subsequent collision cascades.  相似文献   

3.
Swift heavy ion (SHI) beam induced irradiation is an established technique for investigating structural modifications in thin films depending on the S e sensitivity of material. Intermixing due to 120 MeV Au ion irradiation at different fluences from 1012 to 1014 ions/cm2 has been reported as a function of ion fluence in a-Si/Zr/a-Si thin films on Si substrate. The samples are characterized before (pristine) and after irradiation using Grazing Incident X-ray Diffraction (GIXRD) and Rutherford Backscattering Spectroscopy (RBS), which confirm the formation of ZrSi at thin film interface. It is suggested that mixing is mainly due to electronic energy loss since the energy transferred from high energy ions seems to create a transient molten zone along the ion track. It is found that the interface mixing increases linearly with the increase in ion fluence. The mixing effect explained in the framework of Thermal spike model. The irradiation effect on the surface roughness of the system is measured using Atomic Force Microscopy (AFM) technique. The current conduction mechanism and Schottky barrier height are also calculated by taking I–V curves across the Metal/Si junction.  相似文献   

4.
We report the preparation of multiferroic BiFeO3 thin films on ITO coated glass substrates through sol-gel spin coating method followed by thermal annealing and their modification by swift heavy ion (SHI) irradiation. X-ray diffraction and Raman spectroscopy studies revealed amorphous nature of the as deposited films. Rhombohedral crystalline phase of BiFeO3 evolved on annealing the films at 550°C. Both XRD and Raman studies indicated that SHI irradiation by 200 MeV Au ions result in fragmentation of particles and progressive amorphization with increasing irradiation fluence. The average crystallite size estimated from the XRD line width decreased from 38 nm in pristine sample annealed at 550°C to 29 nm on irradiating these films by 200 MeV Au ions at 1 × 1011 ions cm−2. Complete amorphization of the rhombohedral BiFeO3 phase occurs at a fluence of 1 × 1012 ions.cm−2. Irradiation by another ion (200 MeV Ag) had the similar effect. For both the ions, the electronic energy loss exceeds the threshold electronic energy loss for creation of amorphized latent tracks in BiFeO3.  相似文献   

5.
The reactivity of the Zr/Si interface induced by swift heavy ion beams of Au has been investigated in the present work. Zirconium was evaporated on a clean silicon substrate in ultra high vacuum (UHV) at a pressure of 10?8 Torr by the electron beam evaporation technique and the final layer was a thin film of Au to avoid oxidation of zirconium. The Zr/Si system was irradiated by 350 MeV Au26+ ions at liquid nitrogen temperature at different fluences (0.46×1014, 1.85×1014 and 4.62×1014 ions/cm2). Rutherford back scattering (RBS) spectroscopy using 2 MeV He ions was used to monitor the Zr and Si concentration profiles and interdiffusion at the interfaces. The irradiation at the Zr/Si interface showed mixing. X-ray diffraction measurements confirmed the formation of the ZrSi2 phase. Thermal spike formation and melting in the tracks was found to be the dominant process at the interfaces.  相似文献   

6.
Markers of Nb, Ru, Ag, In, Sb, Hf, Pt, Au, and Bi in Cu were mixed by irradiation with 750 keV Kr at 77 K and analyzed in situ by backscattering of 1.9 MeV He+. Cu with Pt and Au markers were also irradiated and analyzed at 7 K. The results were identical to those obtained at 77 K results. The measured mixing efficienciesDt/øF D , for the various markers correlate with their respective impurity tracer diffusivities and impurity-vacancy binding energies in Cu. The correlation suggests that diffusion by a vacancy mechanism during a thermal spike as an important process in ion mixing of marker atoms in Cu.  相似文献   

7.
A 400 keV 40Ar+ ion beam was utilized to induce mixing between two thin layers of Ag and Ge. Rutherford Backscattering Spectrometry and Electrical Resistivity Measurements were employed as probes to investigate the kinetics of ion mixing. The intermixed region was studied at several fluences up to 1.7×1017 ions/cm2 at a constant flux of 0.25 μA/cm2. The “RUMP” simulation computer code was used to assist in the evaluation of the experimental results from the spectra. The analysis of the Rutherford Backscattering Spectrometry spectra shows that increasing the Ar+ fluence enhances the Ag–Ge intermixing. To describe the mixing process, mixing rate parameters were calculated and compared with the theoretical models’ predictions. Børgesen’s local thermal spike model was found to accurately predict the diffusion in the Ag–Ge interface. An increase in the electrical resistivity of the film was detected during irradiation.  相似文献   

8.
The possibility of interlayer mixing in a Ti/Ta multilayer system, induced by laser irradiation, was the main purpose of these experiments. Ti/Ta multilayer system, consisting of ten alternating Ti and Ta thin films and covered by slightly thicker Ti layer, was deposited on Si (100) wafers to a total thickness of 205 nm. Laser irradiation was performed in air by picoseconds Nd:YAG laser pulses in defocused regime with fluences of 0.057 and 0.11 J cm?2. Laser beam was scanned over the 5?×?5 mm surface area with different steps along y-axes. Structural and compositional characterisation was done by auger electron spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy, and scanning electron microscopy. Laser processing at lower fluence caused only oxidation of the top Ti layer, despite of the number of applied laser pulses. Interlayer mixing was not observed. Application of laser pulses at fluence of 0.11 J cm?2 caused partial and/or complete ablation of deposited layers. In partially ablated regions considerable mixing between Ti and Ta films was registered.  相似文献   

9.
K.Y. Yu  C. Sun  Y. Chen  Y. Liu  H. Wang  M.A. Kirk 《哲学杂志》2013,93(26):3547-3562
Monolithic Ag and Ni films and Ag/Ni multilayers with individual layer thickness of 5 and 50?nm were subjected to in situ Kr ion irradiation at room temperature to 1 displacement-per-atom (a fluence of 2?×?1014?ions/cm2). Monolithic Ag has high density of small loops (4?nm in diameter), whereas Ni has fewer but much greater loops (exceeding 20?nm). In comparison, dislocation loops, ~4?nm in diameter, were the major defects in the irradiated Ag/Ni 50?nm film, while the loops were barely observed in the Ag/Ni 5?nm film. At 0.2?dpa (0.4?×?1014?ions/cm), defect density in both monolithic Ag and Ni saturated at 1.6 and 0.2?×?1023/m3, compared with 0.8?×?1023/m3 in Ag/Ni 50?nm multilayer at a saturation fluence of ~1?dpa (2?×?1014?ions/cm2). Direct observations of frequent loop absorption by layer interfaces suggest that these interfaces are efficient defect sinks. Ag/Ni 5?nm multilayer showed a superior morphological stability against radiation compared to Ag/Ni 50?nm film.  相似文献   

10.
We report on the ion-beam mixing processes of Sb/Ni marker layers and bilayers under the irradiation of ions ranging from He to Pb, at 80 K and at room temperature. The concentration profiles are obtained by Rutherford backscattering spectroscopy with 900 keV -particles. At 80 K, the bilayer mixing rates cannot be reproduced by purely ballistic mixing; the essentially linear scaling of the bilayer mixing rate with the energy F D deposited at the interface points to local spike formation. A transition to global spike formation seems to be visible for the Pb-irradiations. Additional mixing effects at 300 K are due to radiation enhanced diffusion and scale with F D. The marker mixing rates at 80 K are reproduced by the ballistic mixing approach, but are equally well described by local spike models. High fluence Xe-irradiations of Sb/Ni bilayers lead to intermetallic phases in the interface region as verified by transmission electron microscopy.  相似文献   

11.
The effects of 200 MeV Au ions irradiation on the structural and magnetic properties of Ni–Mn–Sn ferromagnetic shape memory alloy (FSMA) thin films have been systematically investigated. In order to understand the role of initial microstructure and phase of the film with respect to high energy irradiation, the two types of Ni–Mn–Sn FSMA films having different phases at room temperature were irradiated, one in martensite phase (Ni58.9Mn28.0Sn13.1) and other in austenite phase (Ni50Mn35.6Sn14.4). Transmission electron microscope (TEM) and scanning electron microscope (SEM) images along with the diffraction patterns of X-rays and electrons confirm that martensite phase transforms to austenite phase at a fluence of 6×1012 ions/cm2 and a complete amorphization occurs at a fluence of 3×1013 ions/cm2, whereas ion irradiation has a minimal effect on the austenitic structure (Ni50Mn35.6Sn14.4). Thermo-magnetic measurements also support the above mentioned behaviour of Ni–Mn–Sn FSMA films with increasing fluence of 200 MeV Au ions. The results are explained on the basis of thermal spike model considering the core and halo regions of ion tracks in FSMA materials.  相似文献   

12.
Common features of ion-induced tracks in layered structures are analysed in Y?Ba?Cu?O, Bi?Sr?Ca?Cu?O and in semiconducting GeS and MoS 2. In all crystals, the conduction is poor along the normal layer. The anisotropic electron properties lead to the formation of an ion-induced broad and a narrow thermal spike in these solids. The contribution of the two spikes to the formation of tracks can be separated in GeS. When the gap energy is low or zero (Y?Ba?Cu?O, Bi?Sr?Ca?Cu?O, MoS 2), only the narrow spike controls the track formation, and the localization of the energy deposition is the same as in insulators. However, the fraction of the deposited energy transferred to the narrow spike is only about one-third of that in insulators. The anisotropic features of tracks show the effect of the energy bands. Good quantitative agreement is found between the experimental data and the predictions of the author’s thermal spike model.  相似文献   

13.
Modified chemical bath deposited (MCBD) bismuth sulphide (Bi2S3) thin films’ structural, optical and electrical properties are engineered separately by annealing in air for 1 h at 300 °C and irradiating with 100 MeV Au swift heavy ions (SHI) at 5 × 1012 ions/cm2 fluence. It is observed that the band gap of the films gets red shifted after annealing and irradiation from pristine (as deposited) films. In addition, there is an increase in the grain size of the films due to both annealing and irradiation, leading to the decrease in resistivity and increase in thermoemf of the films. These results were explained in the light of thermal spike model.  相似文献   

14.
Gold/Nickel bilayer thin films deposited on Si(100) substrates are bombarded by 100 keV 40Ar+, 260 and 300 keV 84Kr2+ and 400 keV 132Xe3+ ions which deposit maximum energy across the Gold/Nickel interface and hence produce maximum atomic transport within two sides of the interface. However, due to the energy of the projectile ions some Si atoms have also gained energy, which, in turn, displaces the atoms. The atomic displacements caused by the projectile in the system has been analyzed using RBS, XRD, SEM/EDS and AFM/MFM techniques. The relative change in the variance of the intermixed region across the Au–Ni–Si interfaces excluding the irradiation-induced surface roughness has been calculated and it was observed that it increases linearly with ion fluence. The measured athermal mixing rates which vary between 3.7 and 6.9 nm4, have been explained by various existing phenomenological models. It shows that local or global thermal spike models are most suitable for explaining the ion beam-induced mixing of systems with strong thermochemical properties of the constituents. The mixing efficiency of this system has been calculated and found to be 1.2 nm5/keV.  相似文献   

15.
Nanocrystalline thin films of Ni–Ti shape memory alloy are deposited on an Si substrate by the DC-magnetron co-sputtering technique and 120?keV Ag ions are implanted at different fluences. The thickness and composition of the pristine films are determined by Rutherford Backscattering Spectrometry (RBS). X-Ray diffraction (XRD), atomic force microscopy (AFM) and four-point probe resistivity methods have been used to study the structural, morphological and electrical transport properties. XRD analysis has revealed the existence of martensitic and austenite phases in the pristine film and also evidenced the structural changes in Ag-implanted Ni–Ti films at different fluences. AFM studies have revealed that surface roughness and grain size of Ni–Ti films have decreased with an increase in ion fluence. The modifications in the mechanical behaviour of implanted Ni–Ti films w.r.t pristine film is determined by using a Nano-indentation tester at room temperature. Higher hardness and the ratio of higher hardness (H) to elastic modulus (Er) are observed for the film implanted at an optimized fluence of 9?×?1015 ions/cm2. This improvement in mechanical behaviour could be understood in terms of grain refinement and dislocation induced by the Ag ion implantation in the Ni–Ti thin films.  相似文献   

16.
TiO2 thin film synthesized by the RF sputtering method has been implanted by 120 keV Ag? ion with different doses (3?×?1014, 1?×?1015, 3?×?1015, 1?×?1016 and 3?×?1016 ions/cm2). Further, these were characterized by Rutherford back Scattering, XRD, X-ray photoelectron spectroscopy (XPS), UV–visible and fluorescence spectroscopy. Here we reported that after implantation, localized surface Plasmon resonance has been observed for the fluence 3?×?1016 ions/cm2, which was due to the formation of silver nanoparticles. Ag is in metallic form in the matrix of TiO2, which is very interestingly as oxidation of Ag was reported after implantation. Also, we have observed the interaction between nanoparticles of Ag and TiO2, which results in an increasing intensity in lower charge states (Ti3+) of Ti. This interaction is supported by XPS and fluorescence spectroscopy, which can help improve photo catalysis and antibacterial properties.  相似文献   

17.
Nanocomposite polymer electrolyte thin films of polyvinyl alcohol (PVA)-orthophosphoric acid (H3PO4)-Al2O3 have been prepared by solution cast technique. Films are irradiated with 50 MeV Li3+ ions having four different fluences viz. 5?×?1010, 1?×?1011, 5?×?1011, and 1?×?1012 ions/cm2. The effect of irradiation on polymeric samples has been studied and characterized. X-ray diffraction spectra reveal that percent degree of crystallinity of samples decrease with ion fluences. Glass transition and melting temperatures have been also decreased as observed in differential scanning calorimetry. A possible complexation/interaction has been shown by Fourier transform infrared spectroscopy. Temperature-dependent ionic conductivity shows an Arrhenius behavior before and after glass transition temperature. It is observed that ionic conductivity increases with ion fluences and after a critical fluence, it starts to decrease. Maximum ionic conductivity of ~2.3?×?10?5 S/cm owing to minimum activation energy of ~0.012 eV has been observed for irradiated electrolyte sample at fluence of 5?×?1011 ions/cm2. The dielectric constant and dielectric loss also increase with ion fluences while they decrease with frequency. Transference number of ions shows that the samples are of purely ionic in nature before and after ion irradiation.  相似文献   

18.
An Fe/Ni multilayer of overall FeNi3 composition, prepared by Joule effect deposition, has been irradiated with 200 keV krypton ions at a nominal dose of 5×1015ions/cm2 to induce mixing at the interface. Depth profiling AES, RBS, XRD (glancing angle) and CEMS have been used to characterize the samples before and after irradiation and also after subsequent mild annealing. In the final structure, we have recognized the presence of embryos of an ordered FeNi3 superlattice.  相似文献   

19.
报道了在兰州重离子加速器国家实验室电子回旋共振离子源原子物理实验平台上,在室温(293.15K)条件下,用固定剂量(4.3×1011/cm2)的高电荷态40Ar12+离子,辐照沉积在厚度为300nm的金膜表面上、平均直径约为35.3nm的Au纳米颗粒,使其大小发生改变的实验结果.实验中,通过改变入射离子的引出电压,选择不同的能量,利用原子力显微镜(AFM)对辐照前后颗粒的形态和大小进行表征,系统地研究了辐照后Au纳米颗 关键词: 纳米颗粒 高电荷态离子 离子辐照 临界能量  相似文献   

20.
吴迪  王静  张建红  宫野 《计算物理》2010,27(3):423-427
采用Monte Carlo方法模拟强流脉冲离子束与铝基钛膜双层靶的相互作用.强流脉冲离子束与双层靶材相互作用过程中,随着离子的注入,高能离子束引起涂层原子与基体材料原子之间相互渗透和混合,同时离子能量沉积到靶材内一定深度,并呈规律性的空间分布.这种能量分布影响靶内两种材料的熔化或气化过程,并导致界面物质结合强度发生变化.利用建立的束流模型,计算束流在靶材内的能量沉积和分布状况及界面处级联碰撞对双层靶界面混合区的影响,得出强流脉冲离子束混合双层靶时级联碰撞不起主要作用的结论,离子流密度在100A·cm-2~150A·cm-2时对离子束混合最为有利.  相似文献   

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