Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates

Highly resolved micropatterns induced on SiO₂-coated Si sample surfaces have been investigated using a KrF excimer laser (λ: 248 nm and τ: 23 ns). Uniform micropatterns were observed to form in the oxide layer after laser-induced melting of interfaces. The pattern size can be controlled either by the laser parameters or even by the oxide layer thickness. SEM analysis identified that the micropatterns were virtually initiated at the molten interface and the oxide layer followed the interface patterning to change its profile. Simulation of laser interaction with double-layered structures indicated that the oxide layer could melt or be ablated due to interface superheating when it was deposited on a highly absorbing Si substrate. IR analysis has demonstrated that the structural properties of the SiO₂ layer undergo no appreciable changes after laser radiation. This process provides a possible basis for its application in micropatterning of transparent materials using excimer lasers. Received: 4 September 2000 / Accepted: 13 September 2000 / Published online: 30 November 2000     

Laser-assisted mechanical texturing of magnetic media

Mechanical texturing is the dominant technique for texturing magnetic media and is widely used in current hard disk drive manufacturing processes. This technique possesses the advantages of easy operation and low cost. However, it has an inherent disadvantage since mechanical texturing leads to jagged profiles randomly generated on hard disk surfaces, which precludes its further use in low-fly-height cases. A laser-assisted process working at near-threshold fluences for mechanical texturing was proposed to buff the irregular profiles of mechanical textures formed on Ni-P disk surfaces using a KrF excimer laser (λ=248 nm,τ=23 ns). This process, based on selective melting of the Ni-P surfaces due to inhomogeneous deposition of laser energy, was found to be capable of improving the surface characteristics of mechanically textured Ni-P disks. VSM and XRD analyses demonstrated that magnetic and structural properties of the Ni-P surfaces would not be affected in a detrimental way so as to influence the recording features of the magnetic media after laser buffing. Received: 28 November 2000 / Accepted: 12 December 2000 / Published online: 3 April 2001     

Comparative interaction mechanisms for different laser systems with selected materials on titanium alloys

This paper describes further research into, and modelling of, the interaction mechanisms of various laser types with materials, including synthetic oil and silicone grease. A Q-switched Nd:YAG pulsed laser, a CW CO₂ laser, and a pulsed KrF excimer laser (λ = 248 nm) were used in the study. In general, the materials studied were very absorptive in the ultraviolet, less absorptive in the infrared, and least absorptive in the near-infrared. For the excimer, photo-ablation takes place, while for the other two wavelengths thermal vapourization dominates. In the case of silicone grease, full volatilization is only obtained using the excimer. For the other two wavelengths, this is not the case, with a sticky residue remaining after treatment. Interaction with synthetic oil with its lower boiling point can be obtained for all three laser types. With the Nd:YAG the dominant heating mechanism is conduction from the substrate and a baking effect is observed with strong interaction between the contaminant and the substrate. For the two pulsed lasers, oxidation is substantially less, while for the continuous wave CO₂, the interaction time is sufficiently long for oxidation and secondary reactions to take place if care is not taken to work below the reaction threshold.     

Properties of pulsed laser deposited nanocomposite NiO:Au thin films for gas sensing applications

Nanocomposite thin films formed by gold nanoparticles embedded in a nickel oxide matrix have been synthesized by a new variation of the pulsed laser deposition technique. Two actively synchronized laser sources, a KrF excimer laser at 248 nm and an Nd:YAG laser at 355 nm, were used for the simultaneous ablation of nickel and gold targets in oxygen ambient. The structural, morphological, and electrical properties of the obtained nanocomposite films were investigated in relation to the fluence of the laser irradiating the gold target. The nanocomposite thin films were tested as electrochemical hydrogen sensors. It was found that the addition of the gold nanoparticles increased the sensor sensitivity significantly.     

Optical properties and highly efficient laser oscillation of Nd:YAG ceramics

Optical absorption, emission spectra have been measured for polycrystalline Nd-doped Y₃Al₅O₁₂ ceramics. Fluorescence lifetimes of 257.6 μs, 237.6 μs, 184.2 μs and 95.6 μs have been obtained for 0.6%, 1%, 2% and 4% neodymium-doped YAG ceramics, respectively. For the first time, highly efficient laser oscillation at 1064 nm has been obtained with this kind of ceramics. Slope efficiency of 53% has been achieved on a uncoated 4.8-mm thick 1% Nd:YAG ceramics sample. Optical to optical conversion efficiency is 47.6%. Laser oscillation has also been obtained with a 2% Nd:YAG ceramics. The optical properties and laser output results have been compared with that of Nd:YAG single crystal grown by the Czochralski method. Almost identical results have been achieved including laser experiments results. But fabrication of Nd:YAG ceramics is much easier compared to the single-crystal growth method. And also large size (now of about 400 mm diameter×5 mm is available) and high-concentration (>1%) Nd:YAG ceramics can be fabricated. The results show that this kind of Nd:YAG ceramics is a very good alternative to Nd:YAG single crystal. Received: 20 April 2000 / Published online: 16 August 2000     

Antireflection structures written by excimer laser on CVD diamond

Two-dimensional antireflective periodical microstructures for the IR range are fabricated on the surface of CVD diamond films. These structures are created using an ArF excimer laser (λ=193 nm) and a direct writing scheme consisting of a beam collimator and a microscope objective to focus the beam onto the sample. Two different arrays are investigated. One has a spacing of 3 μm and is produced with single shots and the other one has a spacing of 4 μm and is produced with three shots per spot. The hole depth and shape are measured with an atomic force microscope (AFM). The optical transmittance and the scattering properties of the structure at 10.6 μm are reported for a CO₂ laser beam. With a spectrometer further transmission measurements in the range of 5 to 20 μm are performed. Received: 16 September 1999 / Accepted: 11 October 1999 / Published online: 24 March 2000     

Deposition and characterization of ITO films produced by laser ablation at 355 nm

Indium tin oxide (ITO) films have been deposited by pulsed laser deposition (PLD) at 355 nm. Even though the absorption of laser light at the wavelength 355 nm is much smaller than that of the standard excimer lasers for PLD at 248 nm and 193 nm, high-quality films can be produced. At high fluence and at high substrate temperatures, the specific resistivity of the films, 2–3×10^-4 Ω cm, is comparable to values obtained with excimer lasers, whereas the resistivities obtained at room temperature are somewhat higher than those of films produced by excimer lasers. The transmission coefficient of visible light, about 0.9, is also comparable to values for films deposited by excimer lasers. The crystalline structure of films produced at 355 nm is similar to that of samples produced by these lasers. Received: 16 January 2001 / Accepted: 24 July 2001 / Published online: 17 October 2001     

Laser-based techniques for living cell pattern formation

In the production of biosensors or artificial tissues a basic step is the immobilization of living cells along the required pattern. In this paper the ability of some promising laser-based methods to influence the interaction between cells and various surfaces is presented. In the first set of experiments laser-induced patterned photochemical modification of polymer foils was used to achieve guided adherence and growth of cells to the modified areas: (a) Polytetrafluoroethylene was irradiated with ArF excimer laser (λ=193 nm, FWHM=20 ns, F=9 mJ/cm²) in presence of triethylene–tetramine liquid photoreagent; (b) a thin carbon layer was produced by KrF excimer laser (λ=248 nm, FWHM=30 ns, F=35 mJ/cm²) irradiation on polyimide surface to influence the cell adherence. It was found that the incorporation of amine groups in the PTFE polymer chain instead of the fluorine atoms can both promote and prevent the adherence of living cells (depending on the applied cell types) on the treated surfaces, while the laser generated carbon layer on polyimide surface did not effectively improve adherence. Our attempts to influence the cell adherence by morphological modifications created by ArF laser irradiation onto polyethylene–terephtalate surface showed a surface–roughness dependence. This method was effective only when the Ra roughness parameter of the developed structure did not exceed the 0.1 micrometer value. Pulsed laser deposition with femtosecond KrF excimer lasers (F=2.2 J/cm²) was effectively used to deposit structured thin films from biomaterials (endothelial cell growth supplement and collagen embedded in starch matrix) to promote the adherence and growth of cells. These results present evidence that some surface can be successfully altered to induce guided cell growth.     

Nanosecond laser ablation and deposition of silicon

Nanosecond-pulsed KrF (248 nm, 25 ns) and Nd:YAG (1064 nm, 532 nm, 355 nm, 5 ns) lasers were used to ablate a polycrystalline Si target in a background pressure of <10⁻⁴ Pa. Si films were deposited on Si and GaAs substrates at room temperature. The surface morphology of the films was characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Round droplets from 20 nm to 5 μm were detected on the deposited films. Raman Spectroscopy indicated that the micron-sized droplets were crystalline and the films were amorphous. The dependence of the properties of the films on laser wavelengths and fluence is discussed.     

Zinc oxide nanostructures grown by pulsed laser deposition

We report the use of PLD to grow different ZnO nanostructures. Very different film morphologies have been observed using different laser wavelengths to ablate the target. The influence of substrate temperature and oxygen background pressure on the film morphology has been investigated too. Smooth and rough films, hexagonal pyramids and columns have been obtained by using a KrF excimer laser (248 nm) for the target ablation, while hexagonal hierarchical structures and pencils have been obtained by using ArF (193 nm). Photoluminescence and X-ray diffraction measurements revealed the good quality of the samples, in particular of those deposited using the ArF laser beam.     

Blue luminescent silicon nanocrystals prepared by short pulsed laser ablation in liquid media

The pulsed laser processing in liquid media is an attractive alternative to produce room temperature luminescent silicon nanocrystals (Si-ncs). We report on a blue luminescent Si-ncs preparation by using nanosecond pulsed laser (Nd:YAG, KrF excimer) processing in transparent polymer and water. The Si-ncs fabrication is assured by ablation of crystalline silicon target immersed in liquids. During the processing and following aging in liquids, oxide based liquid media, induce shell formation around fresh nanocrystals that provides a natural and stable form of surface passivation. The stable room temperature blue-photoluminescent Si-ncs are prepared with maxima located around ∼440 nm with corresponding optical band gap around ∼2.8 eV (∼430 nm). Due to the reduction of surface defects, the Si-ncs preparation in water, leads to a narrowing of full-width-half-maxima of the photoluminescence spectra.     

Laser cleaning of polymer surfaces

We have investigated the removal of small spherical particles from polymer surfaces by means of 193-nm ArF and 248-nm KrF laser light. Polystyrene (PS) particles with diameters in the range of 110 nm to 1700 nm and silica particles (SiO₂) with sizes of 400 nm and 800 nm are successfully removed from two different substrates, polyimide (PI) and polymethylmethacrylate (PMMA). Experiments were performed in air (23 °C, relative humidity 24–28%) and in an environment with a relative humidity (RH) of about 90%. Received: 13 July 2000 / Accepted: 14 July 2000 / Published online: 9 November 2000     

Particulate assisted growth of ZnO nanorods and microrods by pulsed laser deposition

Zinc oxide (ZnO) thin films were deposited on the gallium nitride (GaN) and sapphire (Al₂O₃) substrates by pulsed laser deposition (PLD) without using any metal catalyst. The experiment was carried out at three different laser wavelengths of Nd:YAG laser (λ = 1064 nm, λ = 532 nm) and KrF excimer laser (λ = 248 nm). The ZnO films grown at λ = 532 nm revealed the presence of ZnO nanorods and microrods. The diameter of the rods varies from 250 nm to 2 μm and the length varies between 9 and 22 μm. The scanning electron microscopy (SEM) images of the rods revealed the absence of frozen balls at the tip of the ZnO rods. The growth of ZnO rods has been explained by vapor-solid (V-S) mechanism. The origin of growth of ZnO rods has been attributed to the ejection of micrometric and sub-micrometric sized particulates from the ZnO target. The ZnO films grown at λ = 1064 nm and λ = 248 nm do not show the rod like morphology. X-ray photoelectron spectroscopy (XPS) has not shown the presence of any impurity except zinc and oxygen.     

Comparison of the influence of the fictive and the annealing temperature on the UV-transmission properties of synthetic fused silica

′ and NBOH). Samples with high OH content exhibit gradual recovery from the absorption band within several minutes after exposure to the KrF laser radiation. The formation of the KrF laser-induced 210 nm absorption band depends on the fictive temperature and on the OH content. Low fictive temperature, as a measure for the number of intrinsic defects, retards E^′ generation at the beginning of intense KrF excimer laser irradiation when the majority of defects are generated from precursor defects. However, for longer irradiation periods with pulse numbers of the order of 10⁵ pulses, a high OH content is the beneficial parameter. The accompanying atomic hydrogen is essential for the suppression of the 210 nm absorption band. This happens by transformation of the E^′ centers into Si-H defects. In contrast to a generally held view, annealing (decreasing of the fictive temperature) of fused silica does not always reduce UV induced defect generation. For example, annealing of the samples in an argon atmosphere causes a significantly higher 210 nm absorption increase during KrF excimer laser irradiation (240000 pulses) compared to nonannealed samples. Two spectroscopic methods to determine the OH content of fused silica were applied: Raman and infrared spectroscopy, which in this work lead to differing results. The energetics of the 210 nm absorption band generation and bleaching is summarized by a diagram explaining the interaction of the 248 nm laser radiation with fused silica. Received: 2 June 1997/Accepted: 13 June 1997     

Critical role of laser wavelength on carbon films grown by PLD of graphite

The structure of thin films deposited by pulsed laser ablation (PLD) is strongly dependent on experimental conditions, like laser wavelength and fluence, substrate temperature and pressure. Depending on these parameters we obtained various kinds of carbon materials varying from dense, mainly tetrahedral amorphous carbon (ta-C), to less compact vertically oriented graphene nano-particles. Thin carbon films were grown by PLD on n-Si 〈100〉 substrates, at temperatures ranging from RT to 800°C, from a rotating graphite target operating in vacuum. The laser ablation of the graphite target was performed by a UV pulsed ArF excimer laser (λ=193 nm) and a pulsed Nd:YAG laser, operating in the near IR (λ=1064 nm). The film structure and texturing, characterised by X-ray diffraction analysis, performed at grazing incidence (GI-XRD), and the film density, evaluated by X-ray reflectivity measurements, are strongly affected both by laser wavelength and fluence and by substrate temperature. Micro-Raman and GI-XRD analysis established the progressive formation of aromatic clusters and cluster condensation into vertically oriented nano-sized graphene structures as a direct function of increasing laser wavelength and deposition temperature. The film density, negatively affected by substrate temperature and laser wavelength and fluence, in turn, results in a porous bulk configuration and a high macroscopic surface roughness as shown by SEM characterisation. These structural property modifications induce a relevant variation also on the emission properties of carbon nano-structures, as evidenced by field emission measurements. This work is dedicated to our friend Giorgio who passed away 20th August.     

Influence of laser fluence and irradiation timing of F2 laser on ablation properties of fused silica in F2-KrF excimer laser multi-wavelength excitation process

A collinear irradiation system of F₂ and KrF excimer lasers for high-quality and high-efficiency ablation of hard materials by the F₂ and KrF excimer lasers’ multi-wavelength excitation process has been developed. This system achieves well-defined micropatterning of fused silica with little thermal influence and little debris deposition. In addition, the dependence of ablation rate on various conditions such as laser fluence, irradiation timing of each laser beam, and pulse number is examined to investigate the role of the F₂ laser in this process. The multi-wavelength excitation effect is strongly affected by the irradiation timing, and an extremely high ablation rate of over 30 nm/pulse is obtained between -10 ns and 10 ns of the delay time of F₂ laser irradiation. The KrF excimer laser ablation threshold decreases and its effective absorption coefficient increases with increasing F₂ laser fluence. Moreover, the ablation rate shows a linear increase with the logarithm of KrF excimer laser fluence when the F₂ laser is simultaneously irradiated, while single KrF excimer laser ablation shows a nonlinear increase. The ablation mechanism is discussed based on these results. Received: 16 July 2001 / Accepted: 27 July 2001 / Published online: 2 October 2001     

Estimation of required parameters for detection of small smoke plumes by lidar at 1.54 μm

Parameters of eyesafe lidar at 1.54 μm for detection of small plumes of smoke from burning wood or oil have been evaluated. It was assumed that a diode-pumped solid-state Er:glass laser at 1.54 μm or a Nd:YAG laser with a Raman cell or optical-parametric oscillator is used as a light source and that detection of backscattered light is performed with an avalanche photodiode. Ash and soot particle size distributions were taken from experiments. A backscattering coefficient at 1.54 μm for various source of smoke was estimated. In computing the laser energy, range between lidar and smoke, receiver optics diameter, fuel mass burned in unit time, fire source radius, laser pulse duration and visibility were varied. Results of the computations enabled estimation of the required laser energy, which ranges from 0.05 to 1400 mJ depending on the parameters. Received: 5 January 2000 / Revised version: 3 March 2000 / Published online: 11 May 2000     

Analysis by using X-ray photoelectron spectroscopy for polymethyl methacrylate and polytetrafluoroethylene etched by KrF excimer laser

The C 1s, F 1s, and O 1s electron spectra for polymethyl methacrylate (PMMA) and polytetrafluoroethylene (PTFE) irradiated by KrF excimer laser with 248 nm wavelength were analyzed by the X-ray photoelectron spectroscopy (XPS) method. The results show that, after irradiation by the laser, the percentage of the carbon atoms of C-C bond decreases and the percentage of CO bond increases for PMMA, while for PTFE percentages of both C-C bond and CF₂ group decrease drastically, respectively. Moreover, it was found that C-O bond and other complex carbon-oxygen groups appeared for PTFE. The photon-chemical processes associated with the energy level transitions, energy diversion, and dissociation of bonds in the interaction were theoretically analyzed based on the chemical structures of PTFE and PMMA. Our analyses can successfully explain that PMMA can be effectively etched by KrF excimer laser with 248 nm wavelength can efficiently etch the PMMA, but the surface of PTFE can only be modified by it.     

Evaluation of dual differential absorption lidar based on Raman-shifted Nd:YAG or KrF laser for tropospheric ozone measurements

Based on Raman-shifted Nd:YAG or KrF laser, a method of three-wavelength Dual DIfferential Absorption Lidar (DIAL) for tropospheric ozone measurements is proposed. A theoretical analysis and numerical simulations of the measurement error have been performed. The results show that this method can reduce the error in ozone measurements caused by the aerosol layer in the troposphere by a factor of ten. The proposed method is also shown to be insensitive to aerosol optical properties, and therefore, one does not need to know the wavelength dependence of aerosol scattering. The dual-DIAL with 277.1, 291.8, 313.2 nm radiation based on a Raman-shifted KrF laser can be used both during day- and night-time. The dual-DIAL with 289.0, 299.1, 316.1 nm radiation based on Raman-shifted Nd:YAG laser can only be used during night-time.     

Optical and waveguiding properties of Nd:KGW films grown by pulsed laser deposition

 Nd: KGd(WO₄)₂ thin films were deposited by KrF laser ablation on MgO, YAP, YAG and Si substrates at temperatures up to 800 °C. Film crystallinity, morphology, stoichiometry (WDX, RBS and PIXE), excitation spectra, fluorescence, refractive index and waveguiding properties were studied in connection with deposition conditions. The best films were crystalline and exhibited losses of approximately 5 dB cm^-1 at a wavelength of 633 nm. Received: 8 January 2001 / Accepted: 7 November 2001 / Published online: 11 February 2002