Fractal surface for calibration of an optical profiler

The surface profiler has become a basic metrology tool for the characterization of high-quality optical surfaces. The unknown effective resolution of the surface profiler is problematic in using the instrument, as it distorts the measured surface profile. In this paper, we suggest and describe the use of a fractal surface as a standard test surface with which to calibrate the effective resolution of a surface profiler. Fractal surfaces have the characteristics of irregularity, self-similarity and low correlation, with the correlation length being approximately equal to the length of the profile; therefore, a log-log plot of the power spectral density curve is a straight line. The power spectral density curves of fractal surfaces, which can be acquired through surface characterization techniques such as atomic force microscopy, are fitted to a straight line to act as a standard with which to calibrate an optical profiler in different ranges. Through calibration, we can obtain the effective resolution of the optical profiler, and the surface profiler is found to have good transmission capacity within the effective spatial frequency range.     

放大自发辐射对激光冲击处理7050铝合金的影响

 利用高功率钕玻璃激光器对7050铝合金表面进行了冲击处理,保持泵浦功率不变,用压电传感器和示波器测试了激光冲击产生的压力波形,用X射线应力测量仪测量了激光冲击后铝合金表面的残余应力,并用非接触式光学轮廓仪分析了激光冲击后铝合金的表面形貌,研究了放大自发辐射强度对激光冲击处理7050铝合金冲击压力、残余应力和粗糙度影响的微观机理。研究结果表明:在泵浦功率不变前提下,放大自发辐射强度的增大降低了激光冲击波压力,铝合金表面残余压应力也随之降低,同时铝合金表面粗糙度增大。     

Probing acoustic nonlinearity on lengths scales comparable to material grain dimensions

The focus of this presentation is to describe our efforts at laser generation of high frequency surface acoustic waves and detection of the nonlinear contribution in the acoustic near-field of the source. Narrow band acoustic generation is accomplished by interfering two pulsed laser beams at the surface of the sample. A Michelson interferometer, that incorporates a high power microscope objective, is used to detect the acoustic disturbance. Detection near the source combined with high frequency generation (approximately 0.1 GHz) facilitates investigation of fundamental processes of harmonic generation on length scales comparable to grain size dimensions.     

Acoustic emission monitoring during laser shock cleaning of silicon wafers

A laser shock cleaning is a new dry cleaning methodology for the effective removal of submicron sized particles from solid surfaces. This technique uses a plasma shock wave produced by laser-induced air breakdown, which has applied to remove nano-scale silica particles from silicon wafer surfaces in this work. In order to characterize the laser shock cleaning process, acoustic waves generated during the shock process are measured in real time by a wide-band microphone and analyzed in the change of process parameters such as laser power density and gas species. It was found that the acoustic intensity is closely correlated with the shock wave intensity. From acoustic analysis, it is seen that acoustic intensity became stronger as incident laser power density increased. In addition, Ar gas has been found to be more effective to enhance the acoustic intensity, which allows higher cleaning performance compared with air or N₂ gas.     

Large scale spatio-temporal behaviour in surface growth

This paper presents new findings concerning the dynamics of the slow height variations in surfaces produced by the two-dimensional isotropic Kuramoto-Sivashinsky equation with an additional nonlinear term. In addition to the disordered cellular patterns of specific size evident at small scales, slow height variations of scale-free character become increasingly evident when the system size is increased. This paper focuses on the parameter range in which the kinetic roughening with eventual saturation in surface roughness and coarseness is obtained, and the statistical and dynamical properties of surfaces in the long-time stationary regime are investigated. The resulting long-range scaling properties of the saturated surface roughness consistent with the power-law shape of the surface spectrum at small wave numbers are obtained in a wider parameter range than previously reported. The temporal properties of these long-range height variations are investigated by analysing the time series of surface roughness fluctuations. The resulting power-spectral densities can be expressed as a generalized Lorentzian whose cut-off frequency varies with system size. The dependence of this lower cut-off frequency on the smallest wave number connects spatial and temporal properties and gives new insight into the surface evolution on large scales.     

实际加工表面红外激光散射特性的实验研究

为了研究激光在实际加工表面的散射特性,利用分辨率为10 nW的激光功率计PM100D,波长为1550 nm的激光器和精密转台,自行设计并搭建了半球空间中目标表面散射特性的测量系统. 以典型的刨床加工的若干标准粗糙度比较样块为被测目标,在1550 nm红外激光以不同方位照射下,测量了微观具有V形槽结构的不同粗糙度的样块表面的散射功率分布. 实验结果转换成双向反射分布函数后,对比分析了入射光方位、入射角和表面粗糙度对此类典型表面散射特性的影响,并分析了特殊散射场形成的原因. 结果表明,表面纹理、入射角以及粗糙度均对目标表面的散射特性有规律性影响,这一结果对于具有规律性加工纹理表面的散射特性的研究和建模有一定的参考价值,对激光技术在实际加工表面的应用研究提供了一定的基础. 关键词： 散射特性 双向反射分布函数 红外激光 实际加工表面     

Characteristics and application of laser-generated acoustic shock waves in air

When a high-power laser beam is focused at a point, the air at the focal point is heated to temperatures of thousands of degrees within several nanoseconds and breaks down. This generates a spark that, in turn, is accompanied by an acoustic shock wave. The acoustic shock waves generated by focussing the beam from a pulsed laser with a 1064 nm wavelength and a power of 800 mJ per pulse have been measured using 1/4″ and 1/8″ B&K microphones. Nonlinear sound levels are observed up to 1.5 m from the laser-induced sparks. Beyond a certain region close to the source, levels are found to decrease in a manner consistent with spherical spreading plus nonlinear hydrodynamic losses. Analysis of the waveforms shows that the acoustic pulses associated with the laser-induced sparks are more repeatable and have higher intensity than those from an electrical spark source. Laser-generated acoustic shock waves are ideal for simulating a blast wave or a sonic boom in the laboratory and for studying the associated propagation effects. To illustrate this application, the propagation of the laser generated shock waves over a series of different hard, rough surfaces has been investigated. The results show the distinctive influences of ground roughness on the propagation of the shock wave.     

Ultraviolet and visible Raman spectroscopy characterization of diamond–like carbon film growth by pulsed laser deposition

Laser-induced removal of flash from heat sinks in integrated circuit (IC) packages has been studied. It is found that flash can be effectively removed from heat sinks in plastic IC packages by laser deflashing. An optical microscope, an α-step surface profiler and X-ray photoelectron spectroscopy are used to analyze the deflashing efficiency. Laser deflashing of IC packages is based on laser ablation of flash materials. With an increase of laser fluence, the ablation rate increases. The laser fluence is selected between the ablation threshold of flash materials and that of heat-sink materials. An acoustic wave is generated by laser ablation of flash materials. Acoustic wave detection is used to monitor the surface cleanness during laser deflashing and to determine the ablation threshold of flash materials. Received: 18 April 2001 / Accepted: 14 September 2001 / Published online: 17 October 2001     

The attenuation of rayleigh surface waves by surface roughness

This paper presents a calculation of the attenuation length of Rayleigh surface waves in the presence of surface roughness. We consider Rayleigh waves on the surface of a semi-infinite isotropic elastic continuum, and the method we use produces the contribution to the attenuation rate proportional to the square of the rms amplitude of the roughness. We obtain explicit expressions for the contribution to the attenuation rate from roughness-induced scattering into bulk transverse and longitudinal acoustic waves, and into Rayleigh waves. Our derivation makes use of a Green's function method. When the wavelength λ of the Rayleigh wave is long compared to the transverse correlation length a that characterizes the surface roughness, all contributions to the attenuation rate are proportional to the fifth power of the frequency. When λ is comparable to or smaller than a, the attenuation constant varies more slowly with frequency. For a model of the surface roughness, we present numerical calculations of the relative magnitude and frequency dependence of the various contributions to the attenuation rate. The Green's functions used here may be applied to a number of calculations. A derivation of their form is provided in an Appendix.     

表面粗糙度对固体内部超声背散射的影响

超声背散射法可通过多晶体金属内部的空间方差信号,实现微观结构参数的无损评价,但表面粗糙度对评价模型的精度及实用性存在显著影响.基于高斯声束理论推导垂直入射粗糙界面的纵波声场,以此研究声能的Wigner分布规律;在超声的波长远大于粗糙度的前提下,构造表面粗糙度修正系数,并建立粗糙界面的单次散射响应模型,揭示粗糙度对超声波背向散射的影响规律.用304不锈钢制备轮廓均方根值为0.159μm的光滑试块和25.722μm的粗糙试块开展超声背散射实验,结果表明模型在粗糙度修正前后均可实现光滑试块的晶粒尺寸有效评价,但未经修正的传统模型对粗糙试块的晶粒尺寸评价结果与金相法结果的相对误差高达-21.35%,而本模型的评价结果与金相法结果符合得很好,相对误差仅为1.35%.可见,本模型能有效补偿粗糙度引起的超声背散射信号衰减,从而提高晶粒尺寸无损评价的精度.     

Fractal Roughness Retrieval by Integrated Wavelet Transform

An integrated-wavelet-transform (IWT) approach is proposed for the study of scattering from slightly rough surfaces that manifest scaling properties over a finite domain of correlation lengths. Instead of collecting angle-resolved intensities, values of the irradiance integrated over increasing areas are used to enhance the contributions of small irradiances at large scattering angles and to reduce the coherent noise. In the case of self-similar surfaces, the scaling behavior of IWT allows investigation of the surface roughness at various length scales. For the realistic case of self-affine surfaces, IWT permits the evaluation of the scaling exponent of the autocorrelation and also offers a direct way to evaluate the necessary length scale of the surface profile.     

Influence of acoustic leakage at fluid–solid interface on interferometric detection of surface acoustic wave

When using laser interferometer to detect surface acoustic wave at fluid–solid interface, there are two factors which will cause the optical path length variation of the probe laser beam: interface deformation, and refractive index changes in fluid induced by acoustic leakage. Influence of acoustic leakage on laser interferometric detection for surface acoustic wave is researched here. A metal plate immersed in an infinite fluid is used as a physical model. Interface deformation due to laser-induced acoustic wave and pressure in fluid due to acoustic leakage are computed for select cases by finite element method. The optical path length variation caused by the two factors are calculated respectively and compared. The results show that the influence of acoustic leakage increases with the increasing acoustic impedance matching of fluid and solid, the peak-to-peak of influence degree increases linearly with the increasing acoustic impedance of fluid, and that decreasing the distance between the interferometer and interface can effectively reduce the influence of acoustic leakage.     

共光路外差干涉法精密测量光学表面

报道了光学外差法测量表面起伏精度及横向分辨精度达到０．１１ｎｍ及４μｍ。本文采用的是完全共光路外差干涉系统，阐述了它的原理、构造及噪声的影响，并将测量结果与其它商品仪器测量结果作了比较。     

利用多角度海底反向散射信号进行地声参数估计

针对现有海底地声参数估计方法的不足,提出了利用相控参量阵浅地层剖面仪接收的多角度海底反向散射信号进行地声参数估计的方法,首先利用正下方和斜入射方向上沉积层上、下表面的差频反向散射信号进行沉积层厚度和声速估计,然后利用正下方沉积层上、下表面两个不同频率的差频信号的反向散射信号估计沉积层衰减系数,最后利用正下方沉积层上表面原频反向散射信号估计沉积层阻抗,计算沉积层密度从而解决和声速的耦合性,通过水池试验验证了该方法的有效性。     

Model for continuously scanning ultrasound vibrometer sensing displacements of randomly rough vibrating surfaces

An analytic model is developed for the time-dependent ultrasound field reflected off a randomly rough vibrating surface for a continuously scanning ultrasound vibrometer system in bistatic configuration. Kirchhoff's approximation to Green's theorem is applied to model the three-dimensional scattering interaction of the ultrasound wave field with the vibrating rough surface. The model incorporates the beam patterns of both the transmitting and receiving ultrasound transducers and the statistical properties of the rough surface. Two methods are applied to the ultrasound system for estimating displacement and velocity amplitudes of an oscillating surface: incoherent Doppler shift spectra and coherent interferometry. Motion of the vibrometer over the randomly rough surface leads to time-dependent scattering noise that causes a randomization of the received signal spectrum. Simulations with the model indicate that surface displacement and velocity estimation are highly dependent upon the scan velocity and projected wavelength of the ultrasound vibrometer relative to the roughness height standard deviation and correlation length scales of the rough surface. The model is applied to determine limiting scan speeds for ultrasound vibrometer measuring ground displacements arising from acoustic or seismic excitation to be used in acoustic landmine confirmation sensing.     

Effective impedance spectra for predicting rough sea effects on atmospheric impulsive sounds

Two methods of calculating the effective impedance spectra of acoustically hard, randomly rough, two-dimensional surfaces valid for acoustic wavelengths large compared with the roughness scales have been explored. The first method uses the complex excess attenuation spectrum due to a point source above a rough boundary predicted by a boundary element method (BEM) and solves for effective impedance roots identified by a winding number integral method. The second method is based on an analytical theory in which the contributions from random distributions of surface scatterers are summed to obtain the total scattered field. Effective impedance spectra deduced from measurements of the complex excess attenuation above 2D randomly rough surfaces formed by semicylinders and wedges have been compared to predictions from the two approaches. Although the analytical theory gives relatively poor predictions, BEM-deduced effective impedance spectra agree tolerably well with measured data. Simple polynomials have been found to fit BEM-deduced spectra for surfaces formed by intersecting parabolas corresponding to average roughness heights between 0.25 and 7.5 m and for five incidence angles for each average height. Predicted effects of sea-surface roughness on sonic boom profiles and rise time are comparable to those due to turbulence and molecular relaxation effects.     

Application of the ISO 13472-1 in situ technique for measuring the acoustic absorption coefficient of grass and artificial turf surfaces

This paper presents the applicability of an in situ technique based on ISO 13472-1 standard for measuring the acoustic absorption coefficient of grass and artificial turf surfaces for normal incidence from a sound source. The in situ method is based on acoustic impulse response measurement of the material surface. A maximum length sequence (MLS) signal is played through a loudspeaker and the acoustic response from the surface is recorded using a single microphone. The fast Hadamard transform and fast Fourier transform based digital signal post-processing algorithm provides the acoustic absorption coefficient of the surface under test. The normal incidence acoustic absorption coefficient of a commercial artificial quash surface of Dow Co. obtained from this method was compared with the results from the ASTM E1050 impedance tube method for the same surface. The acoustic absorption coefficients of a test-site grass surfaces were measured for 30 mm and 100 mm length of grass blades in wet and dry soil conditions. Substantial difference in the acoustic absorption coefficient was observed for a similar grass-like artificial surface used for estimating sound power of commercial garden equipments and lawnmowers. The advantage of the in situ method lies in its ability to measure the normal incident acoustic absorption coefficient of any planar surface as installed or in situ. Additionally a quick testing time of less than a minute with the use of a laptop sound card based inexpensive data acquisition system is the main feature of this robust method.     

Pushing the limits of plasma length in inertial-fusion laser-plasma interaction experiments

We demonstrate laser beam propagation and low backscatter in laser produced hohlraum plasmas of ignition plasma length. At intensities I < 5 x 10(14) W cm(-2) greater than 80% of the energy in a blue (3 omega, 351 nm) laser is transmitted through a L=5-mm long, high-temperature (Te = 2.5 keV), high-density (ne = 5 x 10(20) cm(-3)) plasma. These experiments show that the backscatter scales exponentially with plasma length which is consistent with linear theory. The backscatter calculated by a new steady state 3D laser-plasma interaction code developed for large ignition plasmas is in good agreement with the measurements.     

Laser generation of surface acoustic modes guided by copper lines of sub-micron width on silicon

Surface acoustic waves guided by a copper line embedded in a silica film on a silicon wafer were generated and detected optically using the laser-induced transient grating technique. Lines as narrow as ∼0.2 μm yield a good signal despite the much larger size of the laser spot. The phase velocity of the guided mode is slightly lower than the surface acoustic wave velocity in the thin film structure. Good correlation between the acoustic frequency and the electrical resistivity of the copper lines results from the dependence of both measurements on the line width.     

由于表面粗糙引起的激光声表面波色散的实验和理论研究

表面粗糙是材料制造过程中必有的副产物, 粗糙表面会引起其中传播的声表面波的速度发生变化. 在利用激光声表面波对材料性质进行评估时, 常用宽带的激光声表面波速度频散特性对材料性质进行反演. 为了研究表面粗糙度是否能作为反演的特征参数之一, 本文建立了激光在表面粗糙样品中激发声表面波、聚偏氟乙烯换能器宽带接收声表面波的实验装置来研究不同粗糙度表面对声表面波速度的影响; 理论上建立了激光在粗糙表面中激发声表面波的计算模型, 利用有限元法得到声表面波的时域特征, 并进一步得到声表面波的速度色散曲线, 理论结果和实验结果能很好地拟合. 这为利用激光声表面波对表面粗糙的评估提供理论和实验依据. 关键词： 表面粗糙 激光声表面波 速度色散 聚偏氟乙烯传感器 有限元法