含氢电极真空弧放电等离子体时空分布特性研究

真空弧离子源在真空镀膜、材料表面改性、真空大电流开关、加速器离子注入等领域有广泛应用,目前国内外对真空弧放电等离子体的研究主要针对纯金属或合金电极,对含氢电极的研究和公开报道较少.本文利用高时空分辨的四分幅图像诊断系统,结合氢和钛原子特征线单色器件,研究了含氢钛电极的真空弧微秒级脉冲放电等离子体的轴向和径向时空分布特性.研究表明:在真空击穿阶段,阳极区域发光更为明显,阳极电极解吸附释放的氢原子是引发击穿的主要放电介质;在真空弧阶段,阴极-绝缘-真空三结合点处产生圆锥状阴极斑,喷射出大量的等离子体以维持弧放电,同时电极内壁非阴极斑区域也有少量等离子体产生,等离子体中H原子的轴向和径向空间分布均比Ti原子均匀.     

Anode Phenomena in Vacuum and Atmospheric Pressure Arcs

This paper summarizes recent experimental data related to anode phenomena in both vacuum and atmospheric pressure arcs. Currents in the range 10A to 3OkA are discussed, and particular emphasis is placed on the effect of plasma flow from the cathode. For vacuum arcs this plasma flow is the directed motion of metal ions from the cathode spots. These ions reduce the anode voltage drop, and maintain a diffuse anode termination. At atmospheric pressure the ion flow is impeded by gas-atom collisions. However, a plasma flow towards the anode can result from magnetic pinch forces at the constricted cathode termination. In the absence of plasma flow, the anode termination constricts to a vigorously evaporating anode spot. For a typical non-refractory electrode such as copper, the spot operates at a temperature close to the boiling point irrespective of the gas pressure. The spot temperature is dictated by the balance between electrical input power and evaporative losses. These anode phenomena are discussed in relation to vacuum switchgear, arc welding and arc furnaces.     

Charge-state distribution of ions in a vacuum arc discharge plasma in a high magnetic field

It is shown that the fraction of multiply charged metal ions generated in a vacuum arc discharge plasma grows substantially in a high magnetic field. This effect was observed for more than 30 different cathode materials. A relation is established between growth of the mean charge of the ions and increases in the burning voltage of the arc. It is demonstrated that the burning voltage of the vacuum arc can be ultimately increased to 160 V. Zh. Tekh. Fiz. 68, 39–43 (May 1998)     

High current density spotless vacuum arc as a glow discharge

Vacuum discharge burning between a broad cathode and a point anode made of Mo, Cu, and Cd has been studied. This discharge operates in anode vapors and shows major arc characteristics, although no craters were examined on the cathode. The secondary electron emission is involved to explain current transport within the cathode region. This discharge is interpreted as a high density low voltage glow discharge. Having discussed the present and previous findings, the conclusion has been drawn that the secondary electron emission and “hump of potential” are dominant in the vacuum arc cathode spot     

Vacuum Switch Trigger Delay Characteristics

Measurements have been conducted to determine the turn-on times of a triggered vacuum gap as a function of main gap voltage and trigger and main gap polarities. The triggered vacuum gap consisted of a pair of molybdenum electrodes mounted in a low-inductance (20 nH) stainless-steel chamber. Triggering was accomplished by supplying a 10-kV pulse from a charged 12.5-? cable circuit to a tungsten trigger pin protruding through one electrode. The main gap voltage was supplied by a 4-? charged cable circuit. Minimum wait times (the time from application of the trigger pulse to the beginning of main gap voltage coliapse) of 50 ns were observed when a negative pulse was applied to the trigger located in the cathode. A minimum value of voltage collapse time of 10 ns was observed when a positive pulse was applied to the anode located trigger. The switch could be triggered for all main gap voltages in the range 50 V-75 kV, with minimum delay times occurring at 500 V.     

纵磁作用下真空电弧单阴极斑点等离子体射流三维混合模拟

真空电弧的特性直接受到从阴极斑点喷射出的等离子体射流的影响,对等离子体射流进行数值仿真有助于我们深入了解真空电弧的内部物理机制.然而,磁流体动力学和粒子云网格仿真方法受限于计算精度和计算效率的原因,无法有效地应用于真空电弧等离子体射流仿真模拟.本文开发了一套三维等离子体混合模拟算法,并在此基础上建立了真空电弧单阴极斑点射流仿真模型,模型中将离子作宏粒子考虑,而电子作无质量流体处理,仿真计算了自生电磁场与外施纵向磁场作用下等离子体的分布运动状态.仿真结果表明,单个阴极斑点情况下真空等离子体射流在离开阴极斑点后扩散至极板间,其整体几何形状为圆锥形,离子密度从阴极到阳极快速下降.外施纵向磁场会压缩等离子体,使得等离子体射流径向的扩散减少并且轴线上的离子密度升高.随着外施纵向磁场的增大,其对等离子体射流的压缩效应增强,表现为等离子体射流的扩散角度逐渐减小.此外,外施纵向磁场对等离子体射流的影响也受到电弧电流大小的影响,压缩效应随电弧电流的增加而逐渐减弱.     

A physical model of the low-current-density vacuum arc

A one-dimensional (1-D) physical model of the low-current-density steady-state vacuum arc is proposed. The model is based on the continuity equations for ions and electrons and the energy balance for the discharge system; the electric potential distribution in the discharge gap is assumed to be nonmonotonic. It is supposed that the ion current at the cathode is generated within the cathode potential fall region due to the ionization of the evaporated atoms by the plasma thermal electrons having Boltzmann's energy distribution. The model offers a satisfactory explanation for the principal regularities of a hot-cathode vacuum arc with diffuse attachment of the current. The applicability of the model proposed to the explanation of some processes occurring in a vacuum arc, such as the flow of fast ions toward the anode, the current cutoffs and voltage bursts, and the backward motion of a cathode spot in a transverse magnetic field is discussed     

Characteristic features of the emission properties of pulsed broad-beam ion and plasma sources utilizing the evaporation of metal by a vacuum arc

An experimental confirmation was obtained of the anode potential fall effect in pulsed broad-beam ion and plasma sources utilizing the evaporation of metal by a vacuum arc. An increase in the overall voltage across the arc discharge was discovered. The investigations demonstrated that the magnitude of the positive anode fall depends on the structural features of the ion source and are determined by the ratio of the plasma flux directed onto the lateral surface of the anode to the total plasma flux from the cathode spot. It was established that the anode fall effect is controlled and makes it possible to influence the homogeneity of the ion current distribution over the beam cross section, the efficiency of extracting ions from the plasma, and the charge composition of the ion flux.Scientific-Research Institute of Nuclear Physics, Polytechnic University, Tomsk. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 2, pp. 82–92, February, 1994.     

Über den Gleichspannungsdurchschlag im Ultrahochvakuum

DC-breakdowns with arc-conditioned electrodes in vapour-free vacuum have been investigated with high temporal resolution. The breakdowns started always with a cathode flare, the ignition voltage of which was strongly correlated with prebreakdown field emission. The temporal development of gap plasma, discharge current and gap voltage during the breakdowns could be satisfactorily explained by the models of explosive electron emission and space-charge limited diode conduction. No change of mechanism was observed with gap distances up to 6 mm and voltages up to 120 kV. Generally the resistance of the discharge channel became low enough for a transition to the arc stage. However, in a few cases a self-limitation of the discharge occurred due to starvation of the material transfer from the cathode. At higher gap distances the surrounding walls had a distinct influence on the ignition of the discharges.     

Laser action in an argon vacuum arc discharge

A transverse vacuum arc discharge has been developed. The anode cathode distance is 4 mm, the discharge length 100 mm. Gain up to 0.55% cm^?1 and a maximum laser power of 20 mW have been observed in argon at 488 nm.     

用于真空弧等离子体放电阴极温度场测量的多光谱高温计

阴极表面温度是真空弧等离子体放电过程中一个重要参数,对真空弧等离子体的形成、电极腐蚀预测、热传导以及离子源的寿命都有重要影响。真空弧离子源的阴极具有目标小,放电过程快等特点,其温度的测量,对于时间分辨率和空间分辨率要求都很高,阴极表面温度的测量技术的欠缺,使得仅靠理论解析获得的结果难以得到验证。并且等离子体放电过程中测量仪器极易受到弧光的影响,如何避免放电过程中等离子体的辐射也是采用辐射法测量阴极表面温度要考虑的问题。这无疑给其温度场的测试研究带来困难。针对脉冲真空弧等离子体开展阴极表面温度测试实验有着重要意义,在分析了真空弧等离子体放电特性以及背景辐射特性和等离子体放电阴极测温的实际需求,本文基于高速CCD相机研制了一种新型的多光谱高温计。该高温计采用单色高速CCD相机,主要避免RGB彩色相机不能完全滤除背景辐射的弧光。为使用单色CCD相机实现多光谱辐射测温,设计了高温计的光学系统,该系统采用4孔径分光系统。将4种不同波长的滤光片嵌入到1个滤光片中。该研究设计的高温计可用于2 000~6 000 K的等离子体温度测量。并在中国工程物理研究院电子工程研究所进行现场测试,测试过程中将研制的高温计,通过外部触发形式对等离子体放电过程进行跟踪拍摄,高温计完全拍摄到等离子体放电过程。利用真空弧等离子体金属电极阴极放电的实测数据对高温计进行了验证。实验结果表明,设计的新型多光谱高温计能够用于测量真空弧等离子体放电时阴极温度场信息,测量的温度值低于放电电极的沸点温度,与等离子体放电过程中出现气化现象相符,说明高温计测的是等离子体放电阴极的温度。     

Twenty-five years of progress in vacuum arc research andutilization

Progress in understanding and applying vacuum arcs is reviewed. Laser diagnostics have demonstrated the existence of micron-sized regions in the cathode spot plasma having electron densities exceeding 10²⁶ m^-3. The expanding plasma produces a highly ionized jet whose ions typically have charge states of 1-3 and energies of 50-150 eV. Gas dynamic and explosive emission models have been formulated to explain cathode spot operation. In cases where the arc is constricted at the anode, forming an anode spot, or the anode is thermally isolated, forming a hot anode vacuum arc, material emitted from the anode may dominate the interelectrode plasma. Evaporation from liquid droplets may also provide a substantial component of the plasma, and the presence of these droplets can have deleterious consequences in applications. The vacuum arc has been extensively utilized as a plasma source, particularly for the deposition of protective coatings and thin films, and as a switching medium in electrical distribution circuit breakers     

Generation of a submillisecond electron beam with a high-density current in a plasma-emitter diode under the conditions of open plasma boundary emission

The generation of a 250-μs-wide electron beam in a plasma-emitter diode is studied experimentally. A plasma was produced by a pulsed arc discharge in hydrogen. The electron beam is extracted from a circular emission hole 3.8 mm in diameter under open plasma boundary conditions. The beam accelerated in the diode gap enters into a drift space in the absence of an external magnetic field through a hole 4.1 mm in diameter made in the anode. The influence of electron current deposition at the edge of the anode hole on the beam’s maximum attainable current, above which the diode gap breaks down, is studied for different accelerating voltages and diode gaps. The role of processes occurring on the surface of the electrodes is shown. For an accelerating voltage of 32 kV, a mean emission current density of 130 A/cm² is achieved. The respective mean strength of the electric field in the acceleration gap is 140 kV/cm. Using the POISSON-2 software package, the numerical simulation of the diode performance is carried out and the shape of steady plasma emission boundaries in the cathode and anode holes is calculated. The influence of the density of the ion current from the anode plasma surface on the maximum attainable current of the electron beam is demonstrated.     

Vacuum arc investigation of dual-part cathode electrodes

The basic characteristics of a vacuum arc are investigated with a special electrode whose cathode consists of two half-disks. Pure copper is used for one part of the cathode, while copper, chromium, silver, and titanium are used for the other part. The tested arc current value is less than 4000 A, and the flux density of the axial magnetic field applied to a vacuum arc is less than 0.015 T. Experimental results show that the arc voltages of dual-part cathode electrodes are much lower than those of the individual pure metals, and that current sharing between the two parts is roughly determined by the arc current-voltage characteristics of the metals. The arc voltage of the dual-part cathode electrode is extremely low when the current is less than 1000 A     

Pulsed dye laser diagnostics of vacuum arc cathode spots

The ignition and arc phases of vacuum arcs were investigated using differential dye laser absorption photography with simultaneous high spatial (micrometer) and temporal (nanosecond) resolution. The discharge duration was 800 ns, the current 50-150 A, the electrode material copper, and the cathode-anode distance less than 50 μm. A 0.4 ns laser pulse (tunable, γ=480-530 nm) was used to obtain momentary absorption photographs of the cathode region. During ignition, an optically thick anode plasma expanded toward the cathode, decaying within 25 ns after bridging the electrode gap. In the arc phase, a fragmentary structure of the cathode spots was observed in situ for the first time. The microspots have a characteristic size of 5-10 μm. They appear and disappear on a nanosecond time scale. The plasma density of the microspots was estimated to be greater than (3-6)×10²⁶ m^-3     

Cold-hollow-cathode arc discharge in crossed electric and magnetic fields

A crossed-field cold-hollow-cathode arc is stable at low working gas pressures of 10⁻²–10⁻¹ Pa, magnetic-field-and gas-dependent arcing voltages of 20–50 V, and discharge currents of 20–200 A. This is because electrons come from a cathode spot produced on the inner cathode surface by a discharge over the dielectric surface. The magnetic field influences the arcing voltage and discharge current most significantly. When the plasma conductivity in the cathode region decreases in the electric field direction, the magnetic field increases, causing the discharge current to decline and the discharge voltage to rise. The discharge is quenched when a critical magnetic field depending on the type of gas is reached. Because of the absence of heated elements, the hollow cathode remains efficient for long when an arc is initiated in both inert and chemically active gases.     

Photographic appearance of high-current vacuum arcs prior to and during anode spot formation

This article presents the results of research on the photographic appearance of a highcurrent vacuum arc between butt type copper electrodes a of 30–80 mm diameter and a fixed gap of 10 mm. Current pulses of up to 30 kA peak amplitude at an initial value of (di/dt)₀ from 1–10kA/ms and a duration of approximately 14 ms were applied. Arcs were photographed with a high-speed framing camera, mostly at 10⁴ frames/s. A detailed study of discharge modes in phase transition from a high-current diffuse arc to a constricted arc with an anode spot was conducted. Most of the measurements were obtained at a peak current slightly in excess of 10 kA for electrodes of 55 mm diameter. It was found that at peak current exceeding moderately the threshold value of the onset of anode spot formation, the arc is characterized by the following main features: the formation of an anode spot and an anode plasma jet occurs concurrently with a local concentration of cathode spots; the anode spot is, most often, formed on the electrode edge; the coexistence of very varied structures of spots on the cathode; the lack of considerable constriction of the cathode discharge; the pseudo-periodic shrinking and expansion of the area occupied by cathode spots; the existence of a relatively dark space separates the anode plasma jet from the plasma sheath near the cathode surface; the plasma space distribution in the interelectrode gap is non-uniform and non-stationary.This work was supported by State Committee for Scientific Research within the research project No. 3 P40101507.     

真空弧放电TiH合金阴极表面形貌分析

TiH合金电极是一种含氢量非常高的金属材料,用它作真空弧离子源的电极,可在真空环境下产生强度非常高的氢离子流。相比纯金属材料电极,TiH电极除了出现真空弧放电特有的融蚀现象外,还存在气体释放过程,所以它的表面形貌具有一定的独特性。利用扫描电子显微镜观察了单次放电和多次放电后阴极表面形貌,发现阴极斑在阴极表面微裂纹附近连续分布,气体释放生成很多小孔,使阴极斑区域呈絮状结构;弧流越大,阴极斑数量越多;多次放电后,阴极斑朝含氢量多的地方移动。该结果有助于了解含氢电极的真空弧放电过程,对该类放电的应用具有一定参考意义。     

Voltage of the vacuum arc with a ring anode in an axial magneticfield

The plasma jet focusing and voltage distribution in the interelectrode gap of a vacuum arc with a ring anode and subjected to an axial magnetic field were studied theoretically. A two-dimensional model was developed based on the free plasma jet expansion into vacuum, and the steady-state solution of the fully ionized plasma in the hydrodynamic approximation was analyzed. It was found that the imposition of an axial magnetic field reduces the radial expansion of the plasma jet. The characteristic jet angle decreases from about 40° in the zero magnetic field case and approaches a value of about 20° with a 0.02 T magnetic field. The arc voltage consisting of the cathode drop, the plasma voltage drop, and anode sheath drop increased, with the imposition of a magnetic field, and decreased with the anode length. The model was compared to experimental measurements of the vacuum arc voltage behavior in an axial magnetic field, and good agreement was found     

A Review of Anode Phenomena in Vacuum Arcs

This paper discusses arc modes at the anode, anode temperature measurments, anode ions, transitions of the arc into various modes (principally the anode-spot mode), and theoretical explanations of anode phenomena. A vacuum arc can exhibit five anode discharge modes: 1) a low-current mode in which the anode is basically passive, acting only as a collector of particles emitted from the cathode; 2) a second low-current mode that can occur if the electrode material is readily sputtered (a flux of sputtered atoms will be emitted by the anode); 3) a footpoint mode, characterized by the appearance of one or more luminous spots on the anode (footpoints are much cooler than the true anode spots present in the last two modes); 4) an anode-spot mode in which one large or several small anode spots are present (such spots are very luminous, have a temperature near the atmospheric boiling point of the anode material, and are a copious source of vapor and ions); and 5) an intense-arc mode where an anode spot is present, but accompanied by severe cathode erosion. The arc voltage is relatively low and quiet in the two low-current modes and the intense-arc mode. It is usually high and noisy in the footpoint mode, and it can be either in the anode-spot mode. Anode erosion is low, indeed negative, in the two low-current modes, and it is low to moderate in the footpoint mode. Severe anode erosion occurs in both the anode-spot and intense-arc modes.