用快速光热退火制备多晶硅薄膜的研究

用等离子体增强型化学气相沉积先得到非晶硅(a-Si:H)薄膜,再用卤钨灯照射的方法对其进行快速光热退火(RPTA),得到了多晶硅薄膜.然后,进行XRD衍射谱、暗电导率和拉曼光谱等的测量.结果发现,a-Si:H薄膜在RPTA退火中,退火温度在750℃以上,晶化时间需要2min,退火温度在650℃以下,晶化时间则需要2.5h;晶化后,晶粒的优先取向是(111)晶向;退火温度850℃时,得到的晶粒最大,暗电导率也最大;退火温度越高,晶化程度越好;退火时间越长,晶粒尺寸越大;光子激励在RPTA退火中起着重要作用.     

Characterization of thin‐film a‐Si:H/µc‐Si:H tandem solar cells on glass substrates

Techniques, such as photoluminescence (PL) and electron‐beam‐induced current (EBIC), have already proven their effectiveness and applicability for solar materials. Although, the methods are standard techniques for multicrystalline Si PV, their application to thin films is challenging and requires special adjustment and a careful selection of the measuring parameters. Here we report on the investigation of thin‐film tandem solar cells consisting of hydrogenated amorphous (a‐Si:H) and microcrystalline silicon (µc‐Si:H) on glass substrates. We observe a homogeneous spatial distribution of the PL signals caused by the dominance of the surface recombination. A typical PL spectrum exhibits sub‐band gap features of a‐Si:H. We relate the sub‐band‐gap spectral features mainly to transitions of carriers trapped in deep states. Observations on partially processed stacks support this supposition. PL is only detectable on the a‐Si:H layer, while EBIC signal is generated mainly in the µc‐Si:H layer. It is found out that the luminescence features of the thin a‐Si:H layer resemble those on bulk a‐Si:H.     

Synthesis and characterization of manganese sulphide thin films deposited by spray pyrolysis

Manganese sulphide (MnS) thin films have been deposited onto glass substrate by a low cost spray‐pyrolysis technique at 220 °C. The as‐deposited MnS thin films have been characterized using scanning electron microscopy (SEM), energy dispersive X‐ray (EDX) spectroscopy, atomic force microscopy (AFM), X‐ray diffraction, UV visible spectroscopy and photo electrochemical (PEC) measurement. The SEM and AFM images showed that the MnS thin films were well covered onto the substrate surface. The as‐deposited raw thin film was found to be amorphous in nature and perfectly crystalline phase after annealing the sample. Optical band gap of the MnS thin films was found to vary from 3.1 to 3.21 eV and the band gap decreases with the increase in film thickness. Optical constants such as refractive index, extinction coefficient have been evaluated using reflectance and absorbance data. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Improvement of amorphous silicon n-i-p solar cells by incorporating double-layer hydrogenated nanocrystalline silicon structure

We develop a double-layer p-type hydrogenated nanocrystalline silicon (p-nc-Si:H) structure consisting of a low hydrogen diluted i/p buffer layer and a high hydrogen diluted p-layer to improve the hydrogenated amorphous silicon (a-Si:H) n-i-p solar cells. The electrical, optical and structural properties of p-nc-Si:H films with different hydrogen dilution ratio (R_H) are investigated. High conductivity, low activation energy and wide band gap are achieved for the thin films. Raman spectroscopy and high-resolution transmission electron microscopy (HRTEM) analyses indicate that the thin films contain nanocrystallites with grain size around 3-5 nm embedded in the amorphous silicon matrix. By inserting a p-nc-Si:H buffer layer at the i/p interface, the overall performance of the solar cell is improved significantly compared to the bufferless cell. The improvement is correlated with the reduction of the density of defect states at the i/p interface.     

The synthesis of aligned silicon nanowires under ambient atmospheric pressure

Highly ordered amorphous silicon nanowires were successfully synthesized from single crystalline silicon wafer at the pyrolysis temperature of 1050 °C under ambient atmospheric pressure. Both poly (phenylcarbyne) and nickel nitrate played important roles in the growth of silicon nanowires. The fabrication of ordered silicon nanowires was controllable and repeatable, confirmed by the experimental results. The morphology and microstructure analysis of the as-obtained samples showed the highly ordered amorphous silicon nanowires were obtained, determined by scanning electron microscopy, transmission electron microscopy, X-ray photoelectron spectroscopy, and FT-infrared spectroscopy. A solid-liquid-solid growing process was proposed.     

Thermal annealing of a-Si/Au superlattice thin films

The superlattice films, which consist of amorphous silicon (a-Si) and amorphous gold (Au), were prepared by ultra-high vacuum evaporation system. The first layer was grown a-Si with a thickness of 4.2 nm and the second layer was grown Au with a thickness of 0.8 nm. Thermal annealing was performed at 473, 673, and 873 K, respectively. The structural properties of the films were investigated using transmission electron microscope (TEM), X-ray diffraction (XRD), and Raman scattering spectroscopy. The electrical property was assessed by the temperature dependence of electrical conductivity. A crystallization of Si and a forming of Au nanoparticles were observed in all of the annealing films. The crystalline volume fraction reached 70% by annealing time for 15 min. An average diameter of the Au nanoparticles embedded in Si matrix also increased with increasing the annealing temperature. At annealing temperature above 873 K, Au atoms migrated toward the film surface. It was observed that the electrical conductivity changed in several temperatures.     

Influence of temperature on the microcrystalline structure of thermally evaporated Sb2S3 thin films

Thin films of antimony trisulfide (Sb₂S₃) were prepared by thermal evaporation under vacuum (p=5×10^–5 torr) on glass substrates maintained at various temperatures between 293 K and 523 K. Their microstructural properties have obtained by transmission electron microscopy (TEM). The electron diffraction analysis showed the occurrence of amorphous to polycrystalline transition in the films deposited at higher temperature of substrates (523 K). The polycrystalline thin films were found to have an orthorhombic structure. The interplanar distances and unit‐cell parameters were determined by high‐resolution transmission electron microscopy (HRTEM) and compared with the standard values for Sb₂S₃. The surface morphology of Sb₂S₃ thin films was investigated by scanning electron microscopy (SEM). The optical transmission spectra at normal incidence of Sb₂S₃ thin films have been measured in the spectral range of 400–1400 nm. The analysis of the absorption spectra revealed indirect energy gaps, characterizing of amorphous films, while the polycrystalline films exhibited direct energy gap. From the photon energy dependence of absorption coefficient, the optical band gap energy, E_g, were calculated for each thin films. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Hafnium silicate dielectrics fabricated by RF magnetron sputtering

Structural and composition properties of hafnium silicate layers fabricated by RF magnetron sputtering were studied by means of spectroscopic ellipsometry, X-ray diffraction, transmission electron microscopy and attenuated total reflection infrared spectroscopy with respect to the deposition parameters and post-deposition annealing treatment. The variation of the deposition conditions allows the temperature of amorphous-crystalline phase transformation of pure hafnium oxide layers to be controlled. It is shown that the silicon incorporation in oxide matrix prevents the formation of interfacial silicon oxide layer and plays a major role in the stability of the structure of hafnium based layers remaining an amorphous state upon annealing at 900–950 °C.     

Complex boron redistribution kinetics in strongly doped polycrystalline‐silicon/nitrogen‐doped‐silicon thin bi‐layers

We have investigated the complex behaviour of boron (B) redistribution process via silicon thin bi‐layers interface. It concerns the instantaneous kinetics of B transfer, trapping, clustering and segregation during the thermal B activation annealing. The used silicon bi‐layers have been obtained by low pressure chemical vapor deposition (LPCVD) method at 480 °C, by using in‐situ nitrogen‐doped‐silicon (NiDoS) layer and strongly B doped polycrystalline‐silicon (P⁺) layer. To avoid long‐range B redistributions, thermal annealing was carried out at relatively low‐temperatures (600 °C and 700 °C) for various times ranging between 30 min and 2 h. To investigate the experimental secondary ion mass spectroscopy (SIMS) doping profiles, a redistribution model well adapted to the particular structure of two thin layers and to the effects of strong‐concentrations has been established. The good adjustment of the simulated profiles with the experimental SIMS profiles allowed a fundamental understanding about the instantaneous physical phenomena giving and disturbing the complex B redistribution profiles‐shoulders. The increasing kinetics of the B peak concentration near the bi‐layers interface is well reproduced by the established model.     

Synthesis and characterization of type-II textured tungsten disulfide thin films by vdWR process with Pb interfacial layer as texture promoter

The growth of type-II textured tungsten disulfide (WS₂) thin films by solid state reaction between the spray deposited WO₃ and gaseous sulfur vapors with Pb interfacial layer has been studied. X-ray diffraction (XRD) technique is used to measure the degree of preferred orientation ‘S’ and texture of WS₂ films. Scanning electron microscopy (SEM) and transmission electron microscopy techniques have been used to examine the microstructure and morphology. The electronic structure and chemical composition were studied using X-ray photoelectron spectroscopy (XPS). The use of Pb interfacial layer for the promotion of type-II texture in WS₂ thin films is successfully demonstrated. The presence of (0 0 3 l), (where l=1, 2, 3, …) family of planes in the XRD pattern indicates the strong type-II texture of WS₂ thin films. The crystallites exhibit rhombohedral (3R) structure. The large value of ‘S’ (1086) prompts the high degree of preferred orientation as well. The stratum of crystallites with their basal plane parallel to the substrate surface is seen in the SEM image. The EDS and XPS analyses confirm the tungsten to sulfur atomic ratio as 1:1.75. We purport that Pb interfacial layer enhances type-II texture of WS₂ thin films greatly.     

Hydrogenated amorphous silicon with substrate-dependent structure

Hydrogenated amorphous silicon (a-Si:H) thin films grown at 250°C on (1 0 0) crystalline substrate using plasma-enhanced chemical vapor deposition (PECVD) with SiH₄/H₂ gas flow ratio equal to 5/1 (sccm) are investigated by transmission electron microscopy. It is found that the thin film is totally amorphous when grown on a glass substrate. But when the substrate is changed to crystalline silicon, some crystalline grains are found embedded in the amorphous structure in certain regions even if the thickness of the film reaches 600 nm. It is suggested that the amorphous silicon film grown on a crystalline silicon substrate at a temperature of 250°C without heavy H₂ dilution is a mixed network of a small amount of crystalline silicon and the major portion of amorphous silicon.     

Hydrothermal synthesis of anatase flower‐like nanostructures for photocatalytic degradation of dye

Flower‐like hierarchical nanostructures of titanium dioxide (TiO₂) have been synthesized in large scale by a facile and controlled hydrothermal and after annealing process. The morphologies of flower‐like hierarchical nanostructures are formed by self‐organization of several tens of radially distributed thin flakes with a thickness of several nanometers holding a larger surface area. The materials are characterized by Scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X‐ray diffraction (XRD). The ultraviolet photocatalytic degradation of R6G dyes has been studied over this flower‐like hierarchical nanostructures and the activity is compared with that of commercial P25 TiO₂ under same conditions. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Influence of thermoannealing on crystallinity and optical properties of Sb2S3 thin films

Sb₂S₃ thin films are obtained by evaporating of Sb₂S₃ powder onto glass substrates maintained at room temperature under pressure of 2×10^‐5 torr. The composition of the thin films was determined by energy dispersive analysis of X‐ray (EDAX). The effect of thermal annealing in vacuum on the structural properties was studied using X‐ray diffraction (XRD) technique and scanning electron microscopy (SEM). The as‐deposition films were amorphous, while the annealed films have an orthorhombic polycrystalline structure. The optical constants of as‐deposited and annealed Sb₂S₃ thin films were obtained from the analysis of the experimental recorded transmission spectral data over the wavelength range 400‐1400 nm. The transmittance analysis allowed the determination of refractive index as function of wavelength. It was found that the refractive dispersion data obeyed the single oscillator model, from which the dispersion parameters (oscillator energy, E₀, dispersion energy, E_d) were determined. The static refractive index n(0), static dielectric constant, ε_∞, and optical band gap energy, E_g, were also calculated using the values of dispersion parameters. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

TEM investigation on the structure of amorphous silicon monoxide

Commercially available powder samples of silicon monoxide have been investigated by methods of transmission electron microscopy: electron scattering, electron energy-loss spectroscopy (EELS) and electron spectroscopic imaging (ESI). Pair distribution functions (PDFs) as well as EEL spectra can be shown to be a composition of the PDF and EEL spectra of elemental silicon and amorphous SiO₂. The distribution of the elements silicon and oxygen calculated from ESI images proof the silicon monoxide to be inhomogeneous, i.e. it consists of amorphous silicon and amorphous SiO₂. The phase separated regions measure ≈3–4 nm. One maximum in the PDF at 2.95 Å does not stem from either a-Si or a-SiO₂, and it is assigned to atomic configurations at the interphase boundary layer between Si and SiO₂. The portion of the interphase domain in the total composite material is estimated to be between 20% and 25%.     

The formation of tin oxides in thin-film Sn/C/KCl(100) structures

The formation of oxides upon the thermal annealing (both in air and vacuum) of island tin films grown on a KCl(100) substrate, which was coated by a thin layer of amorphous carbon, has been investigated by transmission electron microscopy. It is established that thermal annealing at temperatures below the tin melting point (T _m) does not lead to phase transitions with the formation of new crystalline oxide phases. At the same time, the films undergo structural changes: the average size of blocks in the substrate plane decreases compared to those in an as-deposited film. Thermal annealing in air at temperatures above the tin melting point leads to the formation of multiphase oxide structures and increases the average size of blocks and islands in the substrate plane. It is shown that preliminary thermal annealing in air at temperatures below T _m hinders oxidation upon subsequent heat treatment.     

Generating ordered Si nanocrystals via atomic force microscopy

We describe two successful routes for generating ordered arrays of Si nanocrystals by using atomic force microscopy (AFM) and amorphous silicon thin films (200–400 nm) on Ti/Ni coated glass substrates. First, we show that field-enhanced metal-induced solid phase crystallization at room temperature can be miniaturized to achieve highly spatially localized (below 100 nm) current-induced crystallization of the amorphous silicon films using a sharp tip in AFM. In the second route, resistive nano-pits are formed at controlled positions in the amorphous silicon thin films by adjusting (lowering and/or stabilizing) the exposure currents in the AFM process. Such templated substrates are further used to induce localized growth of Si nanocrystals in plasma-enhanced chemical vapor deposition process. In both cases the crystalline phase is identified in situ as features of enhanced current in current-sensing AFM maps.     

Effects of passivation and postannealing on the photoluminescence properties of MgO/SiO2 core‐shell nanorods

MgO nanorods were grown by the thermal evaporation of Mg₃N₂ powders on the Si (100) substrate coated with a gold thin film. The MgO nanorods grown on the Si (100) substrate were a few tens of nanometers in diameter and up to a few hundreds of micrometers in length. MgO/SiO₂ core‐shell nanorods were also fabricated by the sputter‐deposition of SiO₂onto the MgO nanorods. Transmission electron microscopy (TEM) and X–ray diffraction (XRD) analysis results indicated that the cores and shells of the annealed core‐shell nanorods were a face‐centered cubic‐type single crystal MgO and amorphous SiO₂, respectively. The photoluminescence (PL) spectroscopy analysis results showed that SiO₂ coating slightly decreased the PL emission intensity of the MgO nanorods. The PL emission of the MgO/SiO₂ core‐shell nanorods was, however, found to be considerably enhanced by thermal annealing and strongly depends on the annealing atmosphere. The PL emission of the MgO/SiO₂ core‐shell nanorods was substantially enhanced in intensity by annealing in a reducing atmosphere, whereas it was slightly enhanced by annealing in an oxidative atmosphere. The origin of the PL enhancement by annealing in a reducing atmosphere is discussed with the aid of energy‐dispersive X‐ray spectroscopy analyses. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Enhancement of the emission from TeO2 nanorods by encapsulation with ZnO

TeO₂‐core/ZnO‐shell nanorods were synthesized by a two–step process comprising thermal evaporation of Te powders and atomic layer deposition of ZnO. Scanning electron microscopy images exhibit that the core‐shell nanorods are 50 ‐ 150 nm in diameter and up to a few tens of micrometers in length, respectively. Transmission electron microscopy and X‐ray diffraction analysis revealed that the cores and shells of the core‐shell nanorods were polycrystalline simple tetragonal TeO₂ and amorphous ZnO with ZnO nanocrystallites locally, respectively. Photoluminescence measurement revealed that the TeO₂ nanorods had a weak broad violet band at approximately 430 nm. The emission band was shifted to a yellowish green region (∼540 nm) by encapsulation of the nanorods with a ZnO thin film and the yellowish green emission from the TeO₂‐core/ZnO‐shell nanorods was enhanced significantly in intensity by increasing the shell layer thickness. The highest emission was obtained for 125 ALD cycles (ZnO coating layer thickness: ∼15 nm) and its intensity was much higher than that of the emission from the uncapsulated TeO₂ nanorods. The origin of the enhancement of the emission by the encapsulation is discussed in detail. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Confocal spectromicroscopy of amorphous and nanocrystalline tungsten oxide films

A Raman confocal spectromicroscopic system was used to study in situ phase composition and surface morphology in amorphous and nanocrystalline tungsten oxide and tungstate thin films, prepared on silicon and glass substrates by dc magnetron co-sputtering technique. The possible use of these films for the phase-change optical recording was demonstrated using 442 nm He–Cd laser with a variable power of up to 50 mW. The formation of nanocrystalline tungsten trioxide or tungstate phases was observed under the laser irradiation. These nanocrystalline phases show relatively strong Raman activity, which can be used for information reading purposes. A multilayer structure composed of several tungstate films with different chemical composition is proposed as potential write-once optical recording media.     

Photoelectrical properties of crystalline titanium dioxide thin films after thermo‐annealing

This paper reports the photoelectrical properties of sol gel derived titanium dioxide (TiO₂) thin films annealed at different temperatures (425‐900°C). The structure of the as‐grown film was found to be amorphous and it transforms to crystalline upon annealing. The trap levels are studied by thermally stimulated current (TSC) measurements. A single trap level with activation energy of 1.5 eV was identified. The steady state and transient photocurrent was measured and the results are discussed on the basis of structural transformation. The photocurrent was found to be maximum for the films annealed at 425°C and further it decreases with annealing at higher temperatures. The photoconduction parameters such as carrier lifetime, lifetime decay constant and photosensitivity were calculated and the results are discussed as a function of annealing temperature. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)