光束整形系统异形元件的研制

为了实现非球柱面镜的高精度加工,解决这一领域面临的难题,对非球柱面镜的加工和检测方法进行了深入的研究。采用古典与现代制造技术相结合的方法,研制了用于光束整形的异形元件,该异形元件是由非球柱面镜和柱面镜组成。针对非球柱面镜面型难以控制的问题,给出了独特的抛光模设计。结果表明：经过轮廓仪检测面型精度为0.848 7 μm,达到了图纸精度,满足了光学元件的使用要求。     

Antireflection structures written by excimer laser on CVD diamond

Two-dimensional antireflective periodical microstructures for the IR range are fabricated on the surface of CVD diamond films. These structures are created using an ArF excimer laser (λ=193 nm) and a direct writing scheme consisting of a beam collimator and a microscope objective to focus the beam onto the sample. Two different arrays are investigated. One has a spacing of 3 μm and is produced with single shots and the other one has a spacing of 4 μm and is produced with three shots per spot. The hole depth and shape are measured with an atomic force microscope (AFM). The optical transmittance and the scattering properties of the structure at 10.6 μm are reported for a CO₂ laser beam. With a spectrometer further transmission measurements in the range of 5 to 20 μm are performed. Received: 16 September 1999 / Accepted: 11 October 1999 / Published online: 24 March 2000     

Formation of regular domain structures and peculiarities of switching of the spontaneous polarization in lithium tantalate crystals during discrete electron irradiation

The processes of the formation of domain structures in lithium tantalate crystals (≈300 μm thick) under electron irradiation in a scanning electron microscope were studied. Successive discrete quasi-point irradiations with an electron beam over the —Z-cut surface were used. This method of drawing by an electron beam made it possible to control the implanted charge and to examine the influence of the distances between conditionally point charges on the domain structure formed during switching. The effect of change in the direction of the beam displacement under irradiation on the domain-line width was investigated. The domain lattice with a period of 12 μm was formed on the —z face of the crystal, which transformed into a 2D-type structure deep in the crystal.     

Processing of micro-particles by UV laser irradiation in a field cage

An electric cage-laser micro-turning lathe was realised and applied to contact-free handling and mechanical processing of micro particles. Since particles with diameters of several micrometers cannot be fixed in mechanical chucks, an octode field cage was used to trap and rotate a single particle in a fluid without any mechanical surface contact. A pulsed nitrogen laser of high beam quality focused to about 1 μm in diameter could be adjusted independently of the cage position. The trapping forces (negative dielectrophoresis) acting on a bead of 5 to 15 μm are up to several hundred pN. This and the surrounding fluid damp down the effect of the laser pulses during bead processing. Examples demonstrating the possibilities of this technique are shown. Microsystems with high optical quality were fabricated photolithographically or by laser direct-write chemical vapor deposition (LCVD). Technical and biotechnological applications are discussed. Received: 20 October 1999 / Accepted: 27 October 1999 / Published online: 10 November 1999     

Single-frequency operation of a laser diode side-pumped Q-switched Tm:YAG laser using seeding injection technique

A laser diode (LD) side-pumped 2 μm single-frequency Q-switched Tm:YAG laser was demonstrated. The laser was injection seeded by a CW single frequency Tm:YAG laser with a twisted-mode cavity. The maximum single-frequency pulse energy was 16.3 mJ, with a pulse width of 570 ns and a pulse repetition rate of 10 Hz. The linewidth of the 2 μm single-frequency Q-switched laser was 0.68 MHz, measured by using the optical heterodyne technique. The M ² of the laser beam was measured to be 1.09 and 1.03 for x direction and y direction, respectively.     

3D multiple optical trapping of Au-nanoparticles and prokaryote <Emphasis Type="Italic">E. coli</Emphasis> using intra-cavity generated non-circular beam of inhomogeneous intensity

We report 3D multiple trapping of dielectric polystyrene (PS) beads and gold nano-particles (GNPs) in single beam optical tweezers system using an asymmetric beam of inhomogeneous intensity distribution. This special kind of beam of quasi-TEM₁₁ profile was generated from intra-cavity CW-laser source operating at 532 nm. Multiple trapping of both the low refractive index rod-like Escherichia coli bacteria and 253 nm plasmonic GNPs dispersed in 1.025 μm PS beads which were homogenized in de-ionized water was realized utilizing this spatial beam. Laser-GNPs interaction rendered the enhancement of local surface plasmon resonance field around GNPs causing long-range aggregation of PS beads. The multiple trapping of plasmonic GNPs by the present simple method might find applications for micro- and nano-connectors, underlying physical processes in light-matter interaction assays for inter-particle force analysis, cancer diagnostic and photothermolysis, surface-enhanced Raman scattering (SERS) spectroscopy, and surface plasmon based biological and chemical sensors.     

中小口径双非球面数控抛光技术研究

针对口径Φ62 mm双凸非球面透镜,进行了数控研磨和抛光技术研究.提出了规范性的加工工艺流程,实现了中小口径双非球面元件的高效、快速抛光.根据计算机控制光学表面成型技术,采用全口径抛光和小抛头修抛的两步抛光法,在抛光中对其面形误差进行多次反馈补偿,使被加工零件表面的面形精度逐步收敛.最终两面的面形精度均小于0.5 μm,中心偏差小于0.01 mm,满足了光学系统中对非球面元件的精度要求,并且在保证有较高面形精度和较好表面光洁度的同时,解决了双非球面中心偏差和中心厚度难以控制的加工技术难题.     

Amplification of near-infrared light in a photorefractive ring resonator

We have demonstrated efficient amplification of near-infrared, 0.83-μm and 1.06-μm light, in a photorefractive ring resonator using Rh:BaTiO₃. The optical power oscillating inside the ring exceeded the pump power by a factor of up to 2.34. The sensitivity of a ring resonator to nanometer changes in its length was characterised using a piezo-mirror. Received: 30 November 2000 / Revised version: 24 January 2001 / Published online: 20 April 2001     

Comparative investigation of efficient diode-pumped <Emphasis Type="Italic">c</Emphasis>-cut Tm:YAP laser emitting at 1.94 and 1.99 μm

A c-cut Tm:YAP laser which operated at 1.94 or 1.99 μm is reported in detail. The maximum output power was 20.4 and 19.8 W at the wavelength around 1.99 and 1.94 μm, corresponding to the slope efficiency of 34.3 and 31.5%, respectively. For 1.94 μm operation, with an F-P etalon inserted in the cavity, the output central wavelength was stable around 1.94 μm with about 0.15 nm linewidth. The beam quality factor M ² was measured to be ∼1.8 for 1.99 μm and ∼1.9 for 1.94 μm.     

High-power mid-infrared tunable optical parametric oscillator based on 3-mm-thick PPMgCLN

The experimental results of a high-power tunable mid-IR laser are presented. The optical parametric oscillator (OPO) with a 3-mm-thick PPMgCLN crystal was pumped by a 1.064 μm pulse laser. When the pump power of the 1.064 μm laser was 151 W at 10 kHz, and the operating temperature of the PPMgCLN with 5% MgO doping was 100°C, average output power of 23.7 W at 3.91 μm was obtained with a slope efficiency of 18.2% for the idler resonant OPO. The variation of the 3.91 μm output power was about ±4% in 10 min continuous operation. The beam quality factor M ² was less than 2.6. The average output power of 27.4 W at 3.91 μm was also obtained with 151 W pump power and the slope efficiency of 20.9% for the signal resonant OPO by changing the coating parameters of the OPO cavity mirrors. The mid-IR wavelength tunability of 3.7–4.0 μm can be achieved by adjusting the temperature of a 29 μm period PPMgCLN crystal from 200 to 30°C.     

超薄光学元件精密加工关键技术

针对超薄光学元件在加工过程中因重力和磨头产生应力形变的特点,提出了一种高效、先进的超薄光学元件综合加工方法。该方法综合运用了精密铣磨、精密抛光、离子束修形等先进技术进行面形控制。在铣磨阶段采用受力分析和误差补偿的方法降低了元件变形引入的面形误差;在抛光阶段通过气囊抛光和沥青抛光的迭代实现了面形快速收敛;在离子束加工阶段充分利用其非接触、无应力的加工特点实现了高精度面形修正。实验选择径厚比为34(边长152 mm,厚度6.35 mm)的方形融石英材料进行加工实验。结果表明:在铣磨、抛光、修形阶段的各项指标都达到了精密光学元件的加工水平,最终的面形精度为PV=25 nm,RMS=1.5 nm。该加工方法可以广泛应用于超薄光学元件的高精度加工。     

五轴加工中心范成铣磨离轴非球面研究

离轴非球面作为非球面的一部分,是空间光学系统、天文学和高精度测量系统不可或缺的光学器件.针对空间光学对离轴非球面光学元件制造技术的重大需求,开展了离轴非球面反射镜的精密铣磨加工技术研究.分析了五轴联动范成法铣磨离轴非球面的原理,将离轴非球面所在的同轴母镜离散为一系列不同半径的球面环带,将工件坐标系建立在待加工离轴非球面...     

Spreading of an SR beam spot (diameter 0.5 μm, 95 eV) photoelectron image on the surface of WO<Subscript>3 − <Emphasis Type="Italic">x</Emphasis></Subscript> films

The 2D-photoemission image of the beam spot was obtained for the first time for the W⁵⁺ oxidation state on the preliminary irradiated WO_{3 − x} thin film surface, created by scanning of the SR beam over the film surface. The W⁵⁺ beam profile intensity was found to spread up to a distance of 3.2 μm for an amorphous film and 5.5 μm for a polycrystalline film, it exceeds considerably the beam spot size. The image saturation dose was reached faster for a polycrystalline film. Among the possible mechanisms explaining this phenomenon, for the case of an almost unchangeable O2s state under irradiation, a choice was made in favor of a photon-generated charge diffusion due to low-energy secondary electrons from photoemission, which produce the “coloration” effect, e⁻ + W⁶⁺ (W⁵⁺) W⁵⁺ → W⁵⁺(W⁴⁺). The O512-eV Auger peak was found to degrade at the distance of 1.5–2 mm outside the beam spot under long-time electron beam irradiation, which is attributed to electron-stimulated oxygen desorption and outdiffusion.     

Laser micro- and nanostructuring using femtosecond Bessel beams

We report the generation of femtosecond Bessel beams of conical half-angle 26 degrees using an axicon lens and a beam reduction imaging setup. The generated Bessel beams were applied to the micromachining of nanostructures in glass of length up to 100 μm. The effect of the incident pulse energy on the characteristics of the nano- structures was studied using optical microscopy.     

Portable optical water-and-oil analyzer based on a mid-IR (1.6–2.4 μm) optron consisting of an LED array and a wideband photodiode

An optical method for measuring the water and oil content using mid-IR (1.6–2.4 μm) LEDs and a wideband photodiode is suggested for the first time. This method is developed based on the absorption spectra of pure water, dewatered oil, and water—oil emulsions (cut oil) with different content of water and uses 10 types of LEDs in the spectral range 1.6–2.4 μm. It is shown that pure water heavily absorbs the LED radiation in the spectral range 1.85–2.05 μm, oil absorbs in the range 1.67–1.87 μm, and the LED radiation with a maximum at 2.20 μm is equally weakly absorbed by water and oil. An optical cell of the water-and-oil analyzer is designed on the basis of a three-element diode array with radiation maxima at 1.65 (detection of oil), 1.94 (detection of water), and 2.2 μm (reference signal) wideband photodiode covering the spectral range 1.3–2.4 μm. A calibration curve is derived that represents the dependence of the water concentration in oil on the amplitude of the reduced signal obtained by processing three signals from the LEDs. This optical method of measuring the water content in oil underlies a portable analyzer making possible online measurements directly in an oil well.     

Opto-chemical response of Makrofol-KG to swift heavy ion irradiation

In the present study, the effects of swift heavy ion beam irradiation on the structural, chemical and optical properties of Makrofol solid-state nuclear track detector (SSNTD) were investigated. Makrofol-KG films of 40 μm thickness were irradiated with oxygen beam (O^8 +) with fluences ranging between 10¹⁰ ion/cm² and 10¹² ion/cm². Structural, chemical and optical properties were investigated using X-ray diffraction, FTIR spectroscopy and UV–visible spectroscopy methods. It is observed that the direct and indirect band gaps of Makrofol-KG decrease after the irradiation. The XRD study shows that the crystalline size in the films decreases at higher fluences. The intensity plots of FTIR measurements indicate the degradation of Makrofol at higher fluences. Roughness of the surface increases at higher fluence.     

Optical properties of one-dimensional photonic crystals fabricated by photo-electrochemical etching of silicon

The optical properties of one-dimensional photonic crystals (1D PCs), fabricated by electrochemical etching of periodic wall arrays on n-type (100) Si substrates, are investigated in this study. Several 1D PCs were fabricated with lattice periods varying from 4 to 7 μm and with trench depths in the range 160–210 μm. In-plane reflection spectra of the photonic structures at different depths were registered over a wide spectral range of 1.5–15 μm using Fourier Transform Infra-Red (FTIR) micro-spectroscopy. Some of the features observed in the reflection spectra of the structures investigated are believed to be as a result of interface roughness. A corrugated side-wall surface, an artifact of the fabrication technique, results in the degradation of optical reflection characteristics, principally mainly in the near IR spectral range, and the emergence of optical anisotropy. As a result of the periodicity, modulation of the reflection spectra, that is, the difference between the maxima and minima of the interference fringes, reached a value of 95% in the mid-infrared. The optical properties of the structures investigated indicate that they show promise for microphotonics applications.     

Picosecond optical switching of a 1.5 μm active birefringent optical fiber loop filter using 1.3 μm control optical pulses and a 1.3 μm semiconductor optical amplifier

Less than 100ps, polarization-independent switching operation of an active birefringent optical fiber loop filter using 1.3 μm control optical pulses as well as a 1.3 μm semiconductor optical amplifier (SOA) has been demonstrated. In the proposed SOA-based active birefringent filter operating at 1.55 μm wavelength, 1.3 μm SOA is employed to control the polarization-mode dispersion in the loop part. By injecting 1.3 μm ps gain-switched optical control pulses into the SOA, 1.5 μm input signals can be switched from the transmission port to the reflection port with less than 100 ps rise time.     

Investigation of final-stage sintering of various microsize structures prepared by micro powder injection molding

Micro powder injection molding (μPIM) has been developed as a potential technique for mass production of microcomponents in microsystems due to its shaping complexity at low cost, in which sintering is a crucial step to dictate the final properties of the microcomponents. In this paper, final-stage sintering behavior of 316L stainless steel microsize structures prepared by μPIM, φ100 μm and φ60 μm, respectively, was studied. The effect of size reduction in the regime of micrometers on the density of various microsize structures was investigated. Sintering kinetics of the microsize structures of φ100 μm and φ60 μm were studied based on particle level sintering models. It is found that the microsize structures of φ60 μm had higher density than the microsize structures of φ100 μm given the same sintering condition. The results indicate that size reduction in the regime of micrometers facilitated densification of microsize structures. The grain growth mechanism of microsize structures varied with size. Whereas the grain growth of the microsize structures of φ100 μm is governed by surface-diffusion-controlled pore drag, the grain growth of the microsize structures of φ60 μm is controlled by boundary diffusion. During densification, the microsize structures, φ100 μm and φ60 μm, are both controlled by lattice diffusion. The corresponding activation energies are reported in the paper.