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1.
For plasma enhanced and catalytic chemical vapor deposition (PECVD and Cat‐CVD) processes using small silanes as precursors, disilanyl radical (Si2H5) is a potential reactive intermediate involved in various chemical reactions. For modeling and optimization of homogeneous a‐Si:H film growth on large‐area substrates, we have investigated the kinetics and mechanisms for the thermal decomposition of Si2H5 producing smaller silicon hydrides including SiH, SiH2, SiH3, and Si2H4, and the related reverse reactions involving these species by using ab initio molecular‐orbital calculations. The results show that the lowest energy path is the production of SiH + SiH4 that proceeds via a transition state with a barrier of 33.4 kcal/mol relative to Si2H5. Additionally, the dissociation energies for breaking the Si? Si and H? SiH2 bonds were predicted to be 53.4 and 61.4 kcal/mol, respectively. To validate the predicted enthalpies of reaction, we have evaluated the enthalpies of formation for SiH, SiH2, HSiSiH2, and Si2H4(C2h) at 0 K by using the isodesmic reactions, such as 2HSiSiH2 + 1C2H61Si2H6 + 2HCCH2 and 1Si2H4(C2h) + 1C2H61Si2H6 + 1C2H4. The results of SiH (87.2 kcal/mol), SiH2 (64.9 kcal/mol), HSiSiH2 (98.0 kcal/mol), and Si2H4 (68.9 kcal/mol) agree reasonably well previous published data. Furthermore, the rate constants for the decomposition of Si2H5 and the related bimolecular reverse reactions have been predicted and tabulated for different T, P‐conditions with variational Rice–Ramsperger–Kassel–Marcus (RRKM) theory by solving the master equation. The result indicates that the formation of SiH + SiH4 product pair is most favored in the decomposition as well as in the bimolecular reactions of SiH2 + SiH3, HSiSiH2 + H2, and Si2H4(C2h) + H under T, P‐conditions typically used in PECVD and Cat‐CVD. © 2013 Wiley Periodicals, Inc.  相似文献   

2.
Hydrogen atoms and SiHx (x = 1–3) radicals coexist during the chemical vapor deposition (CVD) of hydrogenated amorphous silicon (a‐Si:H) thin films for Si‐solar cell fabrication, a technology necessitated recently by the need for energy and material conservation. The kinetics and mechanisms for H‐atom reactions with SiHx radicals and the thermal decomposition of their intermediates have been investigated by using a high high‐level ab initio molecular‐orbital CCSD (Coupled Cluster with Single and Double)(T)/CBS (complete basis set extrapolation) method. These reactions occurring primarily by association producing excited intermediates, 1SiH2, 3SiH2, SiH3, and SiH4, with no intrinsic barriers were computed to have 75.6, 55.0, 68.5, and 90.2 kcal/mol association energies for x = 1–3, respectively, based on the computed heats of formation of these radicals. The excited intermediates can further fragment by H2 elimination with 62.5, 44.3, 47.5, and 56.7 kcal/mol barriers giving 1Si, 3Si, SiH, and 1SiH2 from the above respective intermediates. The predicted heats of reaction and enthalpies of formation of the radicals at 0 K, including the latter evaluated by the isodesmic reactions, SiHx + CH4 = SiH4 + CHx, are in good agreement with available experimental data within reported errors. Furthermore, the rate constants for the forward and unimolecular reactions have been predicted with tunneling corrections using transition state theory (for direct abstraction) and variational Rice–Ramsperger–Kassel–Marcus theory (for association/decomposition) by solving the master equation covering the P,T‐conditions commonly employed used in industrial CVD processes. The predicted results compare well experimental and/or computational data available in the literature. © 2013 Wiley Periodicals, Inc.  相似文献   

3.
Formation of Organosilicon Compounds. 111. The Hydrogenation of Si-chlorinated, C-spiro-linked 2,4-Disilacyclobutanes with LiAlH4 or iBu2AlH. The Access to Si8C3H20 The hydrogenation of Si-chlorinated, C-spiro-linked 2,4-disilacyclobutanes containing C(SiCl3)2 terminal groups with LiAlH4 in Et2O proceeds under complete cleavage of the fourmembered rings and under elimination of one SiH3 group. Such, Si8C3Cl20 4 forms (H3Si)2CH? SiH2? CH(SiH3)? SiH2? CH(SiH3)2 4 α, and even Si8C3H20 4a with LiAlH4 forms 4 α. The hydrogenation of related compounds containing however CH(SiCl3) terminal groups similarly proceeds under ring cleavage but no SiH3 groups are eliminated. Such, (Cl3Si)CH(SiCl2)2CH(SiCl3) 41 forms (H3Si)2CH? SiH2? CH2(SiH3) 41 α. However, in reactions with iBu2AlH in pentane neither the disilacyclobutane rings are cleaved nor are SiH3 groups eliminated. Only by this method Si8C3H20 is accessible from 4 , Si6C2H16 3a from Si6C2Cl16 3 and Si4C2H12 41a from 41 . C(SiCl3)4 cleanly produces C(SiH3)4. Based on the knowledge about the different properties of LiAlH4 and iBu2AlH in hydrogenation reactions of disilacyclo-butanes it was possible to elucidate the composition and the structures of the hydrogenated derivatives of the product mixture from the reaction of MeCl2Si? CCl2? SiCl3 with Si(Cu) [1] and to trace them back to the initially formed Si chlorinated disilacyclobutanes Si6C2Cl15Me 34 , Si6C2Cl14Me2 35 , Si8C3Cl19Me 36 and Si8C3Cl18Me2 37 . Compound 4a forms colourless crystals of space group P1 with a = 799.7(6), b = 1263.6(12), c = 1758.7(14) pm, α = 103.33(7)°, β = 95.28(6)°, γ = 105.57(7)° and Z = 4.  相似文献   

4.
The hydrogenated silicon clusters structures, electron affinities, and dissociation energies of the Si6Hn/Si6H (n = 3?14) species have been systematically investigated by means of three density functional theory (DFT) methods. The basis set used in this work is of double‐ζ plus polarization quality with additional diffuse s‐ and p‐type functions, denoted DZP++. The geometries are fully optimized with each DFT method independently. Three different types of energy separations presented in this work are the adiabatic electron affinity (EAad), the vertical electron affinity (EAvert), and the vertical detachment energy (VDE). The first Si? H dissociation energies De (Si6Hn→ Si6Hn?1+H) for the neutral Si6Hn and De (Si6H→Si6H+H) for the anionic Si6H species have also been reported. © 2008 Wiley Periodicals, Inc. Int J Quantum Chem, 2009  相似文献   

5.
The silyl amide Et2SiCl‐NLi‐SitBu3 can be cleanly prepared from precursor silylamine Et2SiCl‐NH‐SitBu3 and Li[nBu]. The CF3SO3SiMe3 induced LiCl elimination of Et2SiCl‐NLi‐SitBu3 in thf afforded a 2‐silaazetidine derivative by [2+2] cycloaddition of Et2Si=N–SitBu3 with Et2Si(OCH=CH2)–NH–SitBu3. X‐ray quality crystals of this 2‐silaazetidine derivative (triclinic, space group P$\bar{1}$ ) were grown from benzene at room temperature. The starting material for this approach, Et2SiCl–NH–SitBu3, is water‐sensitive. Hydrolysis of Et2SiCl‐NH‐SitBu3 gave [tBu3SiNH3]Cl along with (Et2SiO)n oligomers. The hydro chloride [tBu3SiNH3]Cl could be isolated and was characterized by X‐ray crystallography (trigonal, space group P$\bar{3}$ ).  相似文献   

6.
Compounds of Silicon. 146. Unsaturated Silicon Compounds. 59. On the Way to a Disilyne –Si≡Si–: Formation of RHSi=SiHR and Indication of the Intermediate Formation of RSi≡SiR (R = SiH(Si t Bu3)2) Reaction of R*2HSi–SiHBr–SiHBr–SiHR*2 with an equimolar amount of NaR* × 2 THF in THF at –78 °C (R* = supersilyl = SitBu3) or reaction of R*2ClSi–SiHBr–SiHBr–SiClR*2 with a two‐molar amount of NaR* × 2 THF in C6D6 at room temperature leads in the first case to the yellow disilene (R*2HSi)HSi=SiH(SiHR*2) ( 1 ) and to the red cyclotetrasilene [–R*HSi–R*Si=SiR*–SiHR*–] ( 3 ), respectively, in the latter case to the colorless bicyclotetrasilane R*4H2Si4 ( 4 ). The disilene 1 (for > Si= in 29Si‐NMR: d of d at 141.32 ppm with 1JSiH = 149.9 Hz, 2JSiH = 0.9 Hz) slowly isomerizes at room temperature (τ1/2 ca. 3 h) under formation of the colorless trisilacyclopentane [–CH2–SiH(SiH2SiHR*2)–SiHR*–SitBu2–CMe2–] ( 2 ) and adds methanole under formation of the colorless compound R*2HSi–SiH2–SiH(OMe)–SiHR*2. As initial stage of 3 the disilyne R*2HSi–Si≡Si–SiHR*2 is in consideration, which by way of R*HSi=SiR*–SiR*=SiHR* may transform into 3 . The characterization of 2 and 3 results among others from X‐ray structure analyses, whereby for 3 an unexpectable long double bond (2.36 Å) has been found. The identification of 4 results from comparison with an authentic sample (formed from R*HBrSi–SiBr2R* and NaR* × 2 THF).  相似文献   

7.
Deprotonation of the aminophosphanes Ph2PN(H)R 1a – 1h [R = tBu ( 1a ), 1‐adamantyl ( 1b ), iPr ( 1c ), CPh3 ( 1d ), Ph ( 1e ), 2,4,6‐Me3C6H2 (Mes) ( 1f ), 2,4,6‐tBu3C6H2 (Mes*) ( 1g ), 2,6‐iPr2C6H3 (DIPP) ( 1h )], followed by reactions of the phosphanylamide salts Li[Ph2PNR] 2a , 2b , 2g , and 2h with the P‐chlorophosphaalkene (Me3Si)2C=PCl, and of 2a – 2g with (iPrMe2Si)2C=PCl, gave the isolable P‐phosphanylamino phosphaalkenes (Me3Si)2C=PN(R)PPh2 3a , 3b , 3g , and (iPrMe2Si)2C=PN(R)PPh2 4a – 4g . 31P NMR spectra, supported by X‐ray structure determinations, reveal that in compounds 2a , 2b , 3a , and 3b , with bulky N‐alkyl groups the Si2C=P–N–P skeleton is non‐planar (orthogonal conformation), whereas 3g , 3h , and 4g with bulky N‐aryl groups exhibit planar conformations of the Si2C=P–N–P skeleton. Solid 3g and 4g exhibit cisoid orientation of the planar C=P–N–C units (planar I) but in solid 3h the transoid rotamer is present (planar II). From 3g , 4d , and 4g mixtures of rotamers were detected in solution by pairs of 31P NMR patterns ( 3h : line broadening).  相似文献   

8.
Si2H2 species were produced through the 193 nm excimer laser photolysis of Si2H6. Time‐resolved photoionization mass spectrometry was employed to study the reaction kinetics of Si2H2. The lower limit of self‐reaction of Si2H2 was estimated, k(Si2H2 + Si2H2) ≥ (1.7 ± 0.5) × 10−10 cm3 molecule−1 s−1, through analysis of the decay traces. This rate constant was independent of a total pressure on the entire pressure range (ptotal = 1–7 Torr). No reaction of Si2H2 with H2, CH4, SiH4, and Si2H6 was confirmed. The decay rates of Si2H2 reacting with O2, NO, and HCl exhibit negative dependence on the total pressure. © 2001 John Wiley & Sons, Inc. Int J Chem Kinet 33: 136–141, 2001  相似文献   

9.
The mechanism of the gas‐phase reactions of SiHn+ (n = 1,2) with NF3 were investigated by ab initio calculations at the MP2 and CAS‐MCSCF level of theory. In the reaction of SiH+, the kinetically relevant intermediates are the two isomeric forms of fluorine‐coordinated intermediate HSi‐F‐NF2+. These species arise from the exoergic attack of SiH+ to one of the F atoms of NF3 and undergo two competitive processes, namely an isomerization and subsequent dissociation into SiF+ + HNF2, and a singlet‐triplet crossing so to form the spin‐forbidden products HSiF+ + NF2. The reaction of SiH2+ with NF3 involves instead the concomitant formation of the nitrogen‐coordinated complex H2Si‐NF3+ and of the fluorine‐coordinated complex H2Si‐F‐NF2+. The latter isomer directly dissociates into NF2+ + H2SiF, whereas the former species preferably undergoes the passage through a conical intersection point so to form a H2SiF‐NF2+ isomer, which eventually dissociates into H2SiF+ and NF2. © 2012 Wiley Periodicals, Inc.  相似文献   

10.
Gas phase ion—molecule reactions occurring in GeH4/SiH4 systems under different partial pressures and their mechanisms have been investigated by ion trap mass spectrometry (ITMS). SiH+n (n=0–3) and GeH+n (n = 0–3) are the main ionic species at zero reaction time when the GeH4: SiH4 ratio is in the range 1:1 to 1:12. Self-condensation sequences are observed at increasing reaction times. Moreover, formation of ions containing GeSi bonds, such as GeSiH+n (in = 2–5) and GeSi2H+n (n = 4, 5), occurs by reactions of Si2H+n (n = 2–5) and Si3H+n (n = 4, 5) with GeH4. At longer reaction times, further substitution of silicon with germanium in GeSiH+n (n = 2–5) ions has been observed, to give Ge2H+n (n = 2–5).  相似文献   

11.
The IR spectrum of Si3H8+ ions produced in a supersonic plasma molecular beam expansion of SiH4, He, and Ar is inferred from photodissociation of cold Si3H8+–Ar complexes. Vibrational analysis of the spectrum is consistent with a Si3H8+ structure ( 2+ ) obtained by a barrierless addition reaction of SiH4 to the disilene ion (H2Si?SiH2+) in the silane plasma. In this structure, one of the electronegative H atoms of SiH4 donates electron density into the partially filled electrophilic π orbital of the disilene cation. The resulting asymmetric Si? H? Si bridge of the 2+ isomer with a bond energy of approximately 60 kJ mol?1 is characteristic for a weak three‐center two‐electron bond, which is identified by its strongly IR active asymmetric Si? H? Si stretching fundamental at about 1765 cm?1. The observed 2+ isomer is calculated to be only a few kJ mol?1 less stable than the global minimum structure of Si3H8+ ( 1+ ), which is derived from vertical ionization of trisilane. Although more stable, 1+ is not detected in the measured IR spectrum of Si3H8+–Ar, and its lower abundance in the supersonic plasma is rationalized by the production mechanism of Si3H8+ in the silane plasma, in which a high barrier between 2+ and 1+ prevents the efficient formation of 1+ . The potential energy surface of Si3H8+ is characterized in some detail by quantum chemical calculations. The structural, vibrational, electronic and energetic properties as well as the chemical bonding mechanism are investigated for a variety of low‐energy Si3H8+ isomers and their fragments. The weak intermolecular bonds of the Ar ligands in the Si3H8+–Ar isomers arise from dispersion and induction forces and induce only a minor perturbation of the bare Si3H8+ ions. Comparison with the potential energy surface of C3H8+ reveals the differences between the silicon and carbon species.  相似文献   

12.
In this work we report the synthesis and characterisation of the 1.5‐diphosphanyldiethylether O{C2H4PH(SiiPr3)}2 ( 2 ) in which two silyl‐substituted phosphine groups are linked by an ether bridge as well as the compound O(SiiPr2PHEt)2 ( 3 ) where two ethyl substitute phosphine groups are connected by a siloxane bridge. In addition, we describe the metalation of 2 and 3 with triisopropylindium. These reactions lead to the compounds [O{C2H4P(SiiPr3)IniPr2}2] ( 4 ) and [O{SiiPr2P(Et)IniPr2}2] ( 5 ) with In2P2 ring structures.  相似文献   

13.
The abstractions of H with (CH3)4‐nSiHn (n = 1–4) have been investigated at high levels of ab initio molecule orbital theory. Geometries have been optimized at the MP‐2 level with 6–31G(d) basis set, and G2MP2 level has been used for the final energy calculations. Theoretical analysis provided conclusive evidence that the main process occurring in each case is the abstraction of H from the Si? H bond leading to the formation of the H2 and silyl radicals; the abstraction of H from C? H bond has higher barrier and is difficult to react in each case. The kinetics of the title reactions have been calculated with variational transition state theory over the temperature range 200–1000 K, and the theoretical rate constants match well with the experimental values.  相似文献   

14.
Reaction of carbene‐stabilized disilicon ( 1 ) with Fe(CO)5 gives the 1:1 adduct L:Si?Si[Fe(CO)4]:L (L:=C{N(2,6‐Pri2C6H3)CH}2) ( 2 ) at room temperature. At raised temperature, however, 2 may react with another equivalent of Fe(CO)5 to give L:Si[μ‐Fe2(CO)6](μ‐CO)Si:L ( 3 ) through insertion of both CO and Fe2(CO)6 into the Si2 core, which represents the first experimental realization of transition metal‐carbonyl‐mediated cleavage of a Si?Si double bond. The structures and bonding of both 2 and 3 have been investigated by spectroscopic, crystallographic, and computational methods.  相似文献   

15.
YbSi2 and the derivatives YbTxSi2–x (T = Cr, Fe, Co) crystallizing in the α‐ThSi2 structure type were obtained as single crystals from reactions run in liquid indium. All silicides were investigated by single‐crystal X‐ray diffraction, I41/amd space group and the lattice constants are: a = 3.9868(6) Å and c = 13.541(3) Å for YbSi2, a = 4.0123(6) Å and c = 13.542(3) Å for YbCr0.27Si1.73, a = 4.0142(6) Å and c = 13.830(3) Å for YbCr0.71Si1.29, a = 4.0080(6) Å and c = 13.751(3) Å for YbFe0.34Si1.66, and a = 4.0036(6) Å, c = 13.707(3) Å for YbCo0.21Si1.79. YbSi2 and YbTxSi2–x compounds are polar intermetallics with three‐dimensional Si and M (T+Si) polyanion sub‐networks, respectively, filled with ytterbium atoms. The degree of substitution of transition metal at the silicon site is signficant and leads to changes in the average bond lengths and bond angles substantially.  相似文献   

16.
Time-resolved mass spectrometric data show that the concentration of di- and trisilane, which are formed from monosilane under discharge conditions typical for the deposition of high electronic quality amorphous silicon, correlate with the measured deposition rate of a-Si. The data can be quantitatively and self-consistently described by a simple set of consecutive reactions:
  1. SiH4 →-SiH2 + H2
  2. SiH2 + SiH4 → Si2H6
  3. SiH2 + Si2H6 → Si3H8
  4. Si n H2(n + 1)n ·a-Si:H+(n+1)H2,n=2,3
The only fitting parameter necessary for an excellent fit of the measured data over a wide range of experimental parameters is the value of the reactive sticking coefficient .for the decomposition of di- and trisilane (reaction 3). The resultant value agrees well with the published data of other authors and with those calculated from the measured deposition rate and Si2H6, concentration. We did not find and physically meaningful way to lit the measured data with the various “SiH3 models” proposed by other authors who assumed that the dominant species responsiblefor the deposition of a-Si: H is the SiH3, radical. For this and some additional reasons mentioned in the present paper. the SiH3 model is in disagreement with available experimental data.  相似文献   

17.
The reduction of R*–SiBr2–SiBr2–R* ( 2 ) with NaR* (R* = supersilyl = SitBu3) in presence of C2H4 provides a white crystalline solid (η2‐C2H4)R*Si–SiR*(Br)(CH2–CH2–R*) ( 3 ) characterized by X‐ray diffraction analysis. Compound 3 is accompanied with an impurity of R*(Br)2Si–Si(Br)(R*)(CH2–CH2–R*) ( 4 ). The formation of 3 and 4 runs complicated because of several reactive partners. However, reduction of 2 with sodium naphthalenide in presence of ethene runs straightforward with formation of a mixture of tetrahedrane R*4Si4 ( 1 ) and bis(silirane) R*(η2‐C2H4)Si–Si(η2‐C2H4)R* ( 5 ). The latter is formed by [1+2]‐cycloaddition reaction of intermediate disilyne R*Si≡SiR* with ethene. Compound 5 has been characterized by X‐ray structure determination. The 1H NMR spectrum of the silacyclopropane ring protons shows AA′BB′ complex spectrum comprising of 2 sets each of 12 transitions.  相似文献   

18.
The oxonitridoalumosilicates (so‐called sialons) MLn[Si4?xAlxOxN7?x] with M = Eu, Sr, Ba and Ln =Ho, Er, Tm, Yb were obtained by the reaction of the respective lanthanoid metal, the alkaline earth carbonates or europium carbonate, resp., AlN, “Si(NH)2” and MCl2 as a flux in a radiofrequency furnace at temperatures around 2100 °C. The compounds MLn[Si4?xAlxOxN7?x] are relevant for the investigation of substitutional effects on the materials properties due to their ability of tolerating a comparatively large phase width up to x ≈ 2.0(5). The crystal structures of the twelve compounds were refined from X‐ray single crystal data and X‐ray powder data and are found to be isotypic to the MYb[Si4N7] structure type. The compounds crystallize in space group P63mc (no. 186, hexagonal) and are made up of chains of so‐called starlike units [N[4](SiN3)4] or [N[4]((Si,Al)(O,N)3)4], respectively. These units are formed by four (Si,Al)(N/O)4 tetrahedra sharing a common central nitrogen atom. The structure refinement was performed utilizing an O/N‐distribution model according to Paulings rules, i.e. nitrogen was positioned on the four‐fold bridging site and nitrogen and oxygen were distributed equally on both of the two‐fold bridging sites, resulting in charge neutrality of the compound. The Si and Al atoms were distributed equally on their two crystallographic sites, referring to their elemental proportion in the compound, due to being poorly distinguishable by X‐ray methods. The chemical compositions of the compounds were derived from electron probe micro analyses (EPMA).  相似文献   

19.
In order to shed light upon the nature and mechanism of 4f-3d magnetic exchange interactions, a series of binuclear complexes of lanthanide(3+) and chromium(3+) with the general formula [Ln(L)5(H2O)2Cr(CN)6]·mL· nH2O (Ln=La (1), Ce (2), Pr (3), Nd (4); x=5, y=2, m=1 or 2, n=2 or 2.5; L=2-pyrrolidinone) and [Ln(L)4(H2O)3Cr(CN)6] ·nH2O (Ln=Sm (5), Eu (6), Gd (7), Tb (8), Dy (9), Er (10); x=4, y=3, m=0, n= 1.5 or 2.0; L=2-pyrrolidinone) were prepared and the X-ray crystal structures of complexes 2, 6 and 7 were determined. All the compounds consist of a Ln-CN-Cr unit, in which Ln^3+ in a square antiprism environment is bridged to an octahedral coordinated Cr^3+ ion through a cyano group. The magnetic properties of the complexes 3 and 6-10 show an overall antiferromagnetic behavior. The fitting to the experimental magnetic susceptibilities of 7 give g= 1.98, J=0.40 cm^-1, zJ'= -0.21 cm^-1 on the basis of a binuclear spin system (Scd=7/2, Scr=3/2), revealing an intra-molecular Gd^3+-Cr^3+ ferromagnetic interaction and an inter-molecular antiferromagnetic interaction. For 7 the calculation of quantum chemical density functional theory (DFT), combined with the broken symmetry approach, showed that the calculated spin coupling constant was 20.3 cm^-1, supporting the observation of weak ferromagnetic intra-molecular interaction in 7. The spin density distributions of 7 in both the high spin ground state and the broken symmetry state were obtained, and the spin coupling mechanism between Gd^3+ and Cr^3+ was discussed.  相似文献   

20.
The adsorption and reactions of the SiHx (x = 0–4) on Titanium dioxide (TiO2) anatase (101) and rutile (110) surfaces have been studied by using periodic density functional theory in conjunction with the projected augmented wave approach. It is found that SiHx (x = 0–4) can form the monodentate, bidentate, or tridentate adsorbates, depending on the value of x. H coadsorption is found to reduce the stability of SiHx adsorption. Hydrogen migration on the TiO2 surfaces is also discussed for elucidation of the SiHx decomposition mechanism. Comparing adsorption energies, energy barriers, and potential energy profiles on the two TiO2 surfaces, the SiHx decomposition can occur more readily on the rutile (110) surface than on the anatase (101) surface. The results may be used for kinetic simulation of Si thin‐film deposition and quantum dot preparation on titania by chemical vapor deposition (CVD), plasma enhanced CVD, or catalytically enhanced CVD. © 2013 Wiley Periodicals, Inc.  相似文献   

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