Electric admittance analysis of quartz crystal resonator in thickness-shear mode induced by array of surface viscoelastic micro-beams

The electric admittance of a compound system composed of a thicknessshear mode(TSM) quartz crystal resonator(QCR) and an array of surface viscoelastic micro-beams(MBs) is studied.The governing equations of the MBs are derived from the Timoshenko-beam theory in consideration of shear deformation.The electrical admittance is described directly in terms of the physical properties of the surface epoxy resin(SU-8) MBs from an electrically forced vibration analysis.It is found that both the inertia effect and the constraint effect of the MBs produce competitive influence on the resonant frequency and admittance of the compound QCR system.By further comparing the numerical results calculated from the Timoshenko-beam model with those from the Euler-beam model,the shear deformation is found to lead to some deviation of an admittance spectrum.The deviations are revealed to be evident around the admittance peak(s) and reach the maximum when a natural frequency of the MBs is identical to the fundamental frequency of the QCR.Besides,a higher order vibration mode of the MBs corresponds to a larger deviation at the resonance.     

Effect of strain-gradients of surface micro-beams on frequency-shift of a quartz crystal resonator under thickness-shear vibrations

With introduction of the first-order strain-gradient of surface micro-beams into the energy density function,we developed a two-dimensional dynamic model for a compound quartz crystal resonator(QCR) system,consisting of a QCR and surface micro-beam arrays.The frequency shift that was induced by micro-beams with consideration of strain-gradients is discussed in detail and some useful results are obtained,which have important significance in resonator design and applications.     

Coupled vibrations and frequency shift of compound system consisting of quartz crystal resonator in thickness-shear motions and micro-beam array immersed in liquid

The dynamic characteristics of a quartz crystal resonator(QCR) in thicknessshear modes(TSM) with the upper surface covered by an array of micro-beams immersed in liquid are studied. The liquid is assumed to be inviscid and incompressible for simplicity. Dynamic equations of the coupled system are established. The added mass effect of liquid on micro-beams is discussed in detail. Characteristics of frequency shift are clarified for different liquid depths. Modal analysis shows that a drag effect of liquid has resulted in the change of phase of interaction(surface shear force), thus changing the system resonant frequency. The obtained results are useful in resonator design and applications.     

ON THE INTERACTION BETWEEN A QUARTZ CRYSTAL RESONATOR AND AN ARRAY OF MICRO-BEAMS IN THICKNESS-SHEAR VIBRATIONS

We studied the coupled dynamic behavior of a quartz-crystal-resonator(QCR)/microbeams system in the thickness-shear motions. Through taking into account the couple stress in the dynamic equations of the quartz plate, both continuous conditions of shear force and bending moment at the resonator/micro-beams interface are realized. Frequency shift of the compound QCR system induced by micro-beams is studied in detail. The obtained results are useful in device design and frequency-stability analysis of quartz crystal resonators.     

ELECTRICALLY FORCED THICKNESS-SHEAR VIBRATIONS OF QUARTZ PLATE WITH NONLINEAR COUPLING TO EXTENSION

We study electrically forced nonlinear thickness-shear vibrations of a quartz plate resonator with relatively large amplitude. It is shown that thickness-shear is nonlinearly coupled to extension due to the well-known Poynting effect in nonlinear elasticity. This coupling is relatively strong when the resonant frequency of the extensional mode is about twice the resonant frequency of the thickness-shear mode. This happens when the plate length/thickness ratio assumes certain values. With this nonlinear coupling, the thickness-shear motion is no longer sinusoidal. Coupling to extension also affects energy trapping which is related to device mounting. When damping is 0.01, nonlinear coupling causes a frequency shift of the order of 10^-6 which is not insignificant,and an amplitude change of the order of 10^-8. The effects are expected to be stronger under real damping of 10^-5 or larger. To avoid nonlinear coupling to extension, certain values of the aspect ratio of the plate should be avoided.     

Control of nonlinear vibrations of vibrating ring microgyroscope

The influence of the basement rotation on the variations in the spectrum of vibration frequencies of thin elastic shells and rings was known already at the end of the 19th century [1]. The physical phenomenon of inertness of elastic waves occurring free vibrations of an axisymmetric body, first explained in [2], were practically used in developing new types of gyros [2–6]. The foundations of the theory of wave gyros were laid in [2, 4], and the errors of such gyroscopes for various shapes of the vibrating resonator were studied in [2, 4, 7, 8]. It was shown that the error of the resonator manufacturing (the variable density, thickness, anisotropy of the material elastic properties, etc.) [2, 8] and the geometric nonlinearity of the resonator flexural vibrations studied in [2, 7] lead to splitting of the natural frequency of flexural vibrations [2], which is reflected in the wave picture of the resonator vibrations and characterizes the gyroscope precision.In the present paper, we study the errors of the vibrating microgyroscope which arise because of nonlinear elastic properties of the ring resonator material. We construct a control of the potential on the electrodes which allows one to maintain the prescribed amplitude of the normal resonator deflection and compensate for the gyroscope errors arising because of the nonlinear elastic properties of the material.     

Effect of movability of the resonator center on the operation of a hemispherical resonator gyro

It was established in [2] that resonator deformation according to the second mode shape of a thin hemispherical shell results in a displacement of the center of mass if the resonator is unbalanced, i.e., if the distribution of mass over the surface of the hemisphere deviates from axial symmetry. In the same paper, it was shown that this displacement of the center of mass makes the instrument sensitive to linear vibrations. The present paper deals with linear vibration caused in the presence of unbalance by the working vibrations themselves and by the forces used to maintain the latter. The linear vibration is considered in the form of beam vibrations of the resonator stem. The study is aimed at determining the influence of the coupling between the working and beam vibrations on the instrument readings. We obtain a formula relating the hemispherical resonator gyro drift to the unbalance and the eccentricity, which, in particular, can be caused by the gravity component normal to the sensitivity axis. The drift considered here is essentially caused by the fact that deformation of the resonator supports also results in deformation of the electric control field in the gap between the electrodes. The resulting additional forces cause the effect studied in this paper. The drift magnitude depends on how the control of the phase state of the resonator is chosen. In what follows, to be definite, we consider the control in fast-time mode, i.e., at the natural vibration frequency. A similar effect takes place for any other type of control of waves in the resonator.     

Nonlinear Forced Vibration of Cantilevered Pipes Conveying Fluid

The nonlinear forced vibrations of a cantilevered pipe conveying fluid under base excitations are explored by means of the full nonlinear equation of motion, and the fourthorder Runge-Kutta integration algorithm is used as a numerical tool to solve the discretized equations. The self-excited vibration is briefly discussed first, focusing on the effect of flow velocity on the stability and post-flutter dynamical behavior of the pipe system with parameters close to those in previous experiments. Then, the nonlinear forced vibrations are examined using several concrete examples by means of frequency response diagrams and phase-plane plots. It shows that, at low flow velocity, the resonant amplitude near the first-mode natural frequency is larger than its counterpart near the second-mode natural frequency. The second-mode frequency response curve clearly displays a softening-type behavior with hysteresis phenomenon, while the first-mode frequency response curve almost maintains its neutrality. At moderate flow velocity,interestingly, the first-mode resonance response diminishes and the hysteresis phenomenon of the second-mode response disappears. At high flow velocity beyond the flutter threshold, the frequency response curve would exhibit a quenching-like behavior. When the excitation frequency is increased through the quenching point, the response of the pipe may shift from quasiperiodic to periodic. The results obtained in the present, work highlight the dramatic influence of internal fluid flow on the nonlinear forced vibrations of slender pipes.     

A perturbation method for nonlinear vibrations of imperfect structures: Application to cylindrical shell vibrations

A perturbation method is used to analyse the nonlinear vibration behaviour of imperfect general structures under static preloading. The method is based on a perturbation expansion for both the frequency parameter and the dependent variables. The effects on the linearized and nonlinear vibrations caused by geometric imperfections, a static fundamental state, and a nontrivial static state are included in the perturbation procedure.The theory is applied in the nonlinear vibration analysis of anisotropic cylindrical shells. In the analysis the specified boundary conditions at the shell edges can be satisfied accurately. The characteristics of the analysis capability are shown through examples of the vibration behaviour of specific shells. Results for single mode and coupled mode nonlinear vibrations of shells are presented. Parametric studies have been performed for a composite shell.     

Flexural vibrations of double tapered atomic force microscope cantilevers studied by considering the contact position and using the differential quadrature method

The resonant frequency of flexural vibrations for a double tapered atomic force microscope (AFM) cantilever has been investigated by using the Timoshenko beam theory. In this paper, the effects of various parameters on the dimensionless frequency of vibrations of the AFM cantilever have been studied. The differential quadrature method (DQM) is employed to solve the nonlinear differential equations of motion. The results show that the resonant frequency decreases when the Timoshenko beam parameter or the cantilever thickness increases, and high-order modes are more sensitive to it. The first frequency is sensitive only in the lower range of contact stiffness, but the higher-order modes are sensitive to the contact stiffness in a larger range. Increasing the tip height increases the sensitivity of the vibrational modes in a limited range of normal contact stiffness. Furthermore, with increasing the breadth taper ratio, the frequency increases. The DQM results are compared with the exact solution for a rectangular AFM cantilever.     

声表面波谐振器频率-温度行为分析

声表面波（SAW）器件以其优良的性能广泛应用于雷达、通讯和日常用品等领域。然而，随着器件工作频率的不断升高，温度对器件频率稳定性的影响也越来越严重。因此，研究声表面波器件的温度效应，并在变温情况下保持SAW器件的频率稳定性至关重要。本文采用增量型的拉格朗日方程分析受温度影响的声表面波频率漂移问题。用频率-温度系数（TCF）作为评价频率-温度行为的标准。设计了一个具有温度补偿层的双层SAW谐振器模型，降低了器件的频率-温度系数。通过尺寸优化，LiNbO3-AlN结构的SAW谐振器在25℃（参考温度）下的频率温度系数TCF接近0ppm/℃。SAW谐振器的波长为4μm，谐振频率为1214.9MHz。     

声表面波谐振器频率-温度行为分析

声表面波（SAW）器件以其优良的性能广泛应用于雷达、通讯和日常用品等领域。然而,随着器件工作频率的不断升高,温度对器件频率稳定性的影响也越来越严重。因此,研究声表面波器件的温度效应,并在变温情况下保持SAW器件的频率稳定性至关重要。本文采用增量型的拉格朗日方程分析受温度影响的声表面波频率漂移问题。用频率-温度系数（TCF）作为评价频率-温度行为的标准。设计了一个具有温度补偿层的双层SAW谐振器模型,降低了器件的频率-温度系数。通过尺寸优化,LiNbO3-AlN结构的SAW谐振器在25℃（参考温度）下的频率温度系数TCF接近0ppm/℃。SAW谐振器的波长为4μm,谐振频率为1214.9MHz。     

Torsional vibrations of a column of fine-grained material: A gradient elastic approach

The gradient theory of elasticity with damping is successfully employed to explain the experimentally observed shift in resonance frequencies during forced harmonic torsional vibration tests of columns made of fine-grained material from their theoretically computed values on the basis of the classical theory of elasticity with damping. To this end, the governing equation of torsional vibrations of a column with circular cross-section is derived both by the lattice theory and the continuum gradient elasticity theory with damping, with consideration of micro-stiffness and micro-inertia effects. Both cases of a column with two rotating masses attached at its top and bottom, and of a column fixed at its base carrying a rotating mass at its free top, are considered. The presence of both micro-stiffness and micro-inertia effects helps to explain the observed natural frequency shift to the left or to the right of the classical values depending on the nature of interparticle forces (repulsive or attractive) due to particle charge. A method for using resonance column tests to determine not only the shear modulus but also the micro-stiffness and micro-inertia coefficients of gradient elasticity for fine-grained materials is proposed.     

Nonlinear dynamic analysis of a photonic crystal nanocavity resonator

A nonlinear dynamic model of a one-dimensional photonic crystal nanocavity resonator is presented. It considers the internal tensile stress and the geometric characteristics of a photonic crystal with rectangular(and circular) holes. The solution of the dynamic model shows that the internal tensile stress can suppress the hardening and softening behaviors of the resonator. However, the stress can reduce the amplitude, which is not conducive to an improvement of the sensitivity of the sensor. It is demonstrated that with an optimized beam length, the normalized frequency drift of the beam can be stabilized within 1% when the optical power increases from 2 mW to 6 mW. When the hole size of the resonator beam is close to the beam width, its increase can lead to a sharp rise of the resonant frequency and the promotion of hardening behavior. Moreover,the increase in the optical power initially leads to the softening behavior of the resonator followed by an intensification of the hardening behavior. These theoretical and numerical results are helpful in understanding the intrinsic mechanism of the nonlinear response of an optomechanical resonator, with the objective of avoiding the nonlinear phenomena by optimizing key parameters.     

Nonlinear dynamics of a microelectromechanical mirror in an optical resonance cavity

The nonlinear dynamical behavior of a micromechanical resonator acting as one of the mirrors in an optical resonance cavity is investigated. The mechanical motion is coupled to the optical power circulating inside the cavity both directly through the radiation pressure and indirectly through heating that gives rise to a frequency shift in the mechanical resonance and to thermal deformation. The energy stored in the optical cavity is assumed to follow the mirror displacement without any lag. In contrast, a finite thermal relaxation rate introduces retardation effects into the mechanical equation of motion through temperature dependent terms. Using a combined harmonic balance and averaging technique, slow envelope evolution equations are derived. In the limit of small mechanical vibrations, the micromechanical system can be described as a nonlinear Duffing-like oscillator. Coupling to the optical cavity is shown to introduce corrections to the linear dissipation, the nonlinear dissipation and the nonlinear elastic constants of the micromechanical mirror. The magnitude and the sign of these corrections depend on the exact position of the mirror and on the optical power incident on the cavity. In particular, the effective linear dissipation can become negative, causing self-excited mechanical oscillations to occur as a result of either a subcritical or supercritical Hopf bifurcation. The full slow envelope evolution equations are used to derive the amplitudes and the corresponding oscillation frequencies of different limit cycles, and the bifurcation behavior is analyzed in detail. Finally, the theoretical results are compared to numerical simulations using realistic values of various physical parameters, showing a very good correspondence.     

Nonlinear vibrations in beams and frames: The effect of the deformed equilibrium state

In the study of nonlinear vibrations of planar frames and beams with infinitesimal displacements and strains, the influence of the static displacements resulting from gravity effect and other conservative loads is usually disregarded. This paper discusses the effect of the deformed equilibrium configuration on the nonlinear vibrations through the analysis of two planar structures. Both structures present a two-to-one internal resonance and a primary response of the second mode. The equations of motion are reduced to two degrees of freedom and contain all geometrical and inertial nonlinear terms. These equations are derived by modal superposition with additional subsidiary conditions. In the two cases analyzed, the deformed equilibrium configuration virtually coincides with the undeformed configuration. Also, 2% is the maximum difference presented by the first two lower frequencies. The modes are practically coincident for the deformed and undeformed configurations. Nevertheless, the analysis of the frequency response curves clearly shows that the effect of the deformed equilibrium configuration produces a significant translation along the detuning factor axis. Such effect is even more important in the amplitude response curves. The phenomena represented by these curves may be distinct for the same excitation amplitude.     

Reprogrammable logic-memory device of a mechanical resonator

From the viewpoint of application of nonlinear dynamics, we report multifunctional operation in a single microelectromechanical system (MEMS) resonator. This paper addresses a reprogrammable logic-memory device that uses a nonlinear MEMS resonator with multi-states. In order to develop the reprogrammable logic-memory device, we discuss the nonlinear dynamics of the MEMS resonator with and without control input as logic and memory operations. Through the experiments and numerical simulations, we realize the reprogrammable logic function that consists of OR/AND gate by adjusting the excitation amplitude and the memory function by storing logic information in the single nonlinear MEMS resonator.     

Vibration localization in one-dimensional linear and nonlinear lattices: discrete and continuum models

The phenomenon of vibration localization plays an important role in the dynamics of inhomogeneous and nonlinear materials and structures. The vibration localization can occur in the case of inhomogeneity under the following conditions: (i) the frequency spectrum of the periodic structure includes stopbands, (ii) a perturbation of periodicity is present, and (iii) the eigenfrequency of the perturbed element falls into a stopband. Under these conditions, the energy can be spatially localized in the vicinity of the defect with an exponential decay in the infinity. The influence of nonlinearity can shift frequency into the stopband zone. In the present paper, the localization of vibrations in one-dimensional linear and nonlinear lattices is investigated. The localization frequencies are determined and the attenuation factors are calculated. Discrete and continuum models are developed and compared. The limits of the applicability of the continuum models are established. Analysis of the linear problem has allowed a better understanding of specifics of the nonlinear problem and has led to developing a new approach for the analysis of nonlinear lattices alternative to the method of continualization.     

Effects of middle plane curvature on vibrations of a thickness-shear mode crystal resonator

We study the effects of a small curvature of the middle plane of a thickness-shear mode crystal plate resonator on its vibration frequencies, modes and acceleration sensitivity. Two-dimensional equations for coupled thickness-shear, flexural and extensional vibrations of a shallow shell are used. The equations are simplified to a single equation for thickness-shear, and two equations for coupled thickness-shear and extension. Equations with different levels of coupling are used to study vibrations of rotated Y-cut quartz and langasite resonators. The influence of the middle plane curvature and coupling to extension is examined. The effect of middle plane curvature on normal acceleration sensitivity is also studied. It is shown that the middle plane curvature causes a frequency shift as large as 10⁻⁸ g⁻¹ under a normal acceleration. These results have practical implications for the design of concave–convex and plano-convex resonators.