一维增透亚波长光栅的研究

将具有高透射性的亚波长光栅置于微机械波长可调谐垂直腔面发射激光器(VCSEL)的内腔当中可以提高波长的调谐范围,为了使波长调谐范围达到最优则必须优化高透射性的亚波长光栅使其透射率达到最大。利用严格耦合波法分析了亚波长光栅的占空比、周期、厚度和入射角对其透射率的影响并找出最优的光栅参数。通过计算分析可得,对于TE和TM偏振存在最佳的占空比使其透射率达到99.5%。在文中条件下,它们对应的占空比分别为0.23和0.80。而光栅厚度对于TE和TM偏振透射率的影响是周期性的,在一个周期内存在一个最佳值使其透射率达到最高。在文中条件下,TE偏振的厚度周期是150 nm,TM偏振的厚度周期是300 nm。当光栅参数不变时,无论是TE还是TM偏振光,它们的透射率只有在垂直入射光栅时(入射角为0°)才能达到最大。而通过等效介质原理可以得出,周期对透射率没有影响。最后计算了透射率在光栅厚度和占空比同时变化时的变化趋势,并从中得出最优的光栅参数。     

基于二维光栅的偏振无关波长可调谐垂直腔面发射激光器

为了能够实现垂直腔面发射激光器(VCSEL)偏振无关特性,提出了将偏振无关光栅与half-VCSEL集成的方法。基于严格耦合波法,分析了光栅参数对偏振无关二维光栅反射特性的影响,经过模拟计算,发现在光栅周期为691～719 nm、光栅宽度为408.73～467.60 nm时,偏振无关二维光栅有210 nm的高反射带宽。将偏振无关二维光栅与中心波长为1.55μm的half-VCSEL进行集成,得到了中心波长为1.55μm的偏振无关波长可调谐VCSEL,经过光学传输矩阵计算,可得该偏振无关波长可调谐VCSEL的波长调谐范围可达93 nm。     

Si/SiO2高对比光栅参数对反射率的影响

为解决850 nm波长VCSEL表面的GaAs/空气材料的高对比亚波长光栅( HCGs)稳定性差的问题,设计了基于Si/SiO2材料的高对比亚波长光栅。研究了850 nm波长高稳定、高反射率(>99.5%)的高对比亚波长矩形光栅参数的变化对反射率的影响。利用有限元分析软件计算了Si/SiO2高对比亚波长光栅的高度、填充因子、周期、刻蚀深度及光栅倾角等各个参数的变化对850 nm的反射率影响。计算结果表明：当波长为850 nm的TE光从SiO2正入射到矩形HCGs且只有在光栅的倾角大于88°的小范围内变化时,HCGs的反射率才大于0.995,而光栅的其他参数对HCGs反射率的影响可以忽略不计。     

应用于VCSEL的GaAs/AlOx高折射率对比度亚波长光栅反射镜的设计和制备

基于严格耦合波理论,分析GaAs/AlO_x高折射率对比度亚波长光栅(HCG)反射镜的偏振和反射特性,设计了横电(TE)偏振的HCG。当入射光由衬底垂直入射时,HCG在940 nm附近的最高反射率接近1。分析了光栅形貌误差和入射角偏差对其反射特性的影响。采用金属有机化合物气相沉积技术进行外延生长,通过电子束曝光、干法刻蚀、湿法刻蚀以及湿法氧化等方法制备出HCG,并进行理论与实验结果的对比分析。实验测试了入射光由光栅表面垂直入射的反射率,其中TE偏振光的最高反射率达到84.9%,与86.5%的理论值比较接近,且横磁(TM)偏振光的反射率低于40%,反射谱的变化规律也与理论结果基本一致,这验证了理论结果的合理性。该反射镜可以作为垂直腔面发射激光器的超薄反射器,具有低损耗、偏振稳定和单模工作的特性。     

一种具有低折射率的高对比度光栅反射镜的设计

设计并研究了一种工作于2 μm波段的GaSb基亚波长高对比度光栅反射镜,其具有低折射率光栅层结构。通过严格耦合波理论优化结构,以最大限度地满足VCSEL腔面反射镜对反射率带宽的要求。反射镜对2 μm波段的TM模式具有优良的反射效率,带宽与设计波长之比达15%（反射率R>99%）,在反射率R>99.9%的部分Δλ/λ₀>9.5%,带宽中心波长为2.003 μm,与此同时TE模的反射率不超过70.20%。该反射镜结构中几个参数的制作容差较大,且厚度低于1.1 μm,有利于在垂直腔面发射半导体激光器上的单片集成。     

亚波长光栅调制的偏振稳定垂直腔面发射激光器研究

基于微光学技术设计得到了偏振稳定垂直腔面发射激光器结构, 将亚波长光栅结构集成在上分布布拉格反射镜表面, 光栅周期小于材料中光波长, 透射波和反射波中仅包含零级衍射, 避免了高级次衍射造成 的损耗. 集成光栅后不同偏振方向光阈值增益不同, 从而实现偏振控制. 实验结 果显示, 集成亚波长光栅结构后, 整个激射过程中偏振方向被固定在平行于光栅槽方向上, 获得偏振稳定激光输出, 正交偏振抑制比大于12 dB, 且阈值电流仅增大7.14%.     

一维TiO2亚波长光栅的衍射异常现象及其结构设计

研究了一维TiO₂亚波长光栅（SWG）的衍射异常现象,具体表现为泄漏模共振效应和瑞利异常。研究表明,一定参数条件下的横磁波（TM偏振）和横电波（TE偏振）入射均会出现瑞利异常和泄漏模共振效应。在TM偏振光情况下,会出现传统的窄带、高衍射效率泄漏模共振效应,而在TE偏振光情况下,由于多个接近的泄漏模共振峰相互叠加,故会形成宽带、高衍射效率的反射谱。采用严格耦合波理论计算了一维TiO₂ SWG的衍射效率,研究了光栅周期、高度和占空比对光栅反射率的影响。当光栅周期为0.49μm,高度为0.25μm,占空比为0.34时,SWG具有TE偏振选择性,在0.52μm波段处的反射率接近1,且高反带（反射率达到99.9%以上）宽度为26 nm。优化各结构参数,得到光栅周期、占空比、高度的制作容差分别为1.6%、8.3%、2.0%,故SWG理论上可以作为垂直腔面发射激光器的反射镜。     

亚波长金属偏振分束光栅设计分析

结合有效介质理论和薄膜光学的抗反射设计方法,设计了基于0.65μm工作波长的亚波长金属偏振分束光栅,给出了光栅的优化设计参数,采用严格耦合波理论分析了光栅的偏振分束特性.结果表明,亚波长金属光栅对TE偏振表现为金属膜特性,具有高反射,对TM偏振表现为介质膜特性,具有高透射,在-30°<θ<30°的大入射角范围和0.47μm<λ<0.80μm的宽入射波谱内,该光栅的透射光和反射光均具有高偏振消光比和低插入损耗的特点. 关键词： 亚波长金属偏振分束光栅 有效介质理论 薄膜光学 严格耦合波理论     

亚波长介质偏振分束光栅的衍射特性

 采用严格耦合波理论并结合矩阵LU分解法,分析了亚波长介质光栅的刻槽深度、占空比、入射角、入射波长等参数对TE偏振和TM偏振0级衍射效率的影响。结果表明:在1 550 nm波长处,出现瑞利反常现象。由此提出利用瑞利反常现象设计工作波长为1 550 nm的偏振分束光栅,通过优化设计确定了最佳设计参数,即光栅周期为l0/2,瑞利入射角为30°,刻槽深为0.9l0,占空比为0.5。结果表明,参数优化后的偏振分束光栅可以使TE偏振0级反射波和TM偏振0级透射波同时达到近100%的衍射效率。     

端面反射率的波长特性对外腔半导体激光器调谐范围的影响

端面镀增透膜的激光二极管构成的光栅外腔激光器（ECLD）中,考虑到镀膜端面剩余反射率对波长的依赖关系以后,利用等效腔法导出了该激光器阈值载流子密度随波长变化的解析表达式,以此为出发点,讨论了增透膜反射率极小位置对调谐范围的影响。结果表明,除了增大剩余反射率工和降低剩余反射率能够提高调谐范围这一明显结论这外,在镀膜工艺确定的情况下,即假定剩余反射率带宽和剩余反射率极小值变化不大时,通过控制剩余反射率极小值所对应的波长相对于镀膜前增益峰的偏移量,可进一步拓宽波长调谐范围。     

Optimal design of sub-wavelength metal rectangular gratings for polarizing beam splitter based on effective medium theory

A novel optimal design of sub-wavelength metal rectangular gratings for the polarizing beam splitter (PBS) is proposed. The method is based on effective medium theory and the method of designing single layer antireflection coating. The polarization performance of PBS is discussed by rigorous couple-wave analysis (RCWA) method at a wavelength of 1550~nm. The result shows that sub-wavelength metal rectangular grating is characterized by a high reflectivity, like metal films for TE polarization, and high transmissivity, like dielectric films for TM polarization. The optimal design accords well with the results simulated by RCWA method.     

Polarizing beam splitter based on a double-layer subwavelength grating

A Si–ZnS double-layer subwavelength grating is theoretically used as a high-efficient polarizing beam splitter. To design this structure, the rigorous coupled-wave analysis (RCWA) is applied to study the reflectivity and transmissivity for the TE and TM polarization, respectively. Simulation results show that both the zero-order reflection for TE polarization and the zero-order transmission for TM polarization can exceed 90% in a wide tunable working incident angle range from 48° to 72°. Moreover, the proposed polarizing beam splitter has a working wavelength that is in the range of 1500–1600 nm.     

Theoretical reflective performance of a sandwiched two-layer grating polarizer

The reflective polarizer is described by a sandwiched two-layer grating with a metal slab. Such a new polarizer is aimed to improve the performance of a reflective grating-based polarizer. The grating is optimized with the usual duty cycle of 0.5, where TE and TM polarizations are reflected in the –1st and the 0th diffraction orders, respectively. With optimized grating parameters, the extinction ratio can reach 45.5 dB and 41.9 dB in two diffraction orders, which are greatly improved compared with the conventional reported surface grating polarizer with the simple structure. Attractive merits of the new design are high efficiency, high extinction ratio, wide incident wavelength bandwidth for TE polarization, and wide angular range for TM polarization. Numerical results are expected to open new opportunities for the design of a grating-based polarizer with the enhanced performance by the complicated grating configuration.     

A mixed metal dielectric sandwiched grating for polarization-selective reflection

A mixed metal dielectric sandwiched grating is described for polarization-selective reflection. The novel grating is composed of substrate, metal slab, two dielectric grating layers, and covering layer. The polarization-selective grating is optimized by using rigorous coupled-wave analysis for the usual duty cycle of 0.5. With the optimized grating parameters, reflective efficiency of 96.49% can be diffracted into the −1st order for TE polarization. And two-port output of 48.26%/48.27% can be diffracted into the 0th and the −1st orders for TM polarization. Polarization-selective reflection with good performance can be obtained by the mixed metal dielectric sandwiched grating. The usual duty cycle of 0.5 makes it easy and simple to be fabricated for practical applications. Moreover, the polarization-selective beam splitter based on the mixed metal dielectric sandwiched grating has advantages of wide incident wavelength range for TE polarization and angular bandwidth for TM polarization.     

A reflective surface-relief two-layer grating for splitting beams with the polarization-selective property

A polarization-selective beam splitter is presented based on a reflective surface-relief two-layer grating with a metal slab. The grating is composed of two dielectric layers and a metal slab on the substrate. For TE polarization, efficiencies of 97.58% can be diffracted into the reflective −1st order. For TM polarization, two-port output of 47.55% and 47.11% can be split into the 0th order and the −1st order, respectively. Such a polarization-selective beam splitter can be fulfilled by one grating in reflection. The grating depths of two layers are optimized by using rigorous coupled-wave analysis with the given duty cycle of 0.6 and period of 1100 nm. The performance for different incident conditions is investigated when the incident wavelength and angle deviate from the central wavelength and the Bragg angle, respectively. For TM polarization, good uniformity can still be achieved within the given incident wavelength and angle regions. For TE polarization, the reflective polarization-selective beam splitter can have merits of wideband for different incident wavelengths.     

Optimized sub-wavelength grating mirror design for mid-infrared wavelength range

Several designs of sub-wavelength grating mirrors adapted to mid-infrared operation are reported with several percents of tolerance for the grating fabrication. These designs have been automatically optimized by the use of a genetic-based algorithm to maximize a quality factor defined to meet the requirements of a VCSEL cavity mirror. These mirrors are devoted to integration in VCSEL operating near λ=2.3 μm, with a large bandwidth, very high reflectivity coefficient for transverse magnetic mode only, polarization selectivity and a thickness as low as 2 μm.     

Narrow-bandwidth tunable bandstop filters with circularly cylindrical self-suspended silicon gratings

A circularly cylindrical self-suspended silicon grating (SSG) is proposed, and its reflectance spectrum is investigated by the rigorous coupled-wave method (RCWM). For TM incident polarization, when the grating period is tuned, numerical results by the RCWM reveal that the circularly cylindrical SSG possesses a tunable narrow reflectance bandwidth property in the optical telecommunication wavelength region. It is also demonstrated that both TM incident polarization and the circular grating cross section are easier to bring narrow reflectance bandwidth, compared with TE incident polarization and square grating cross section. Via a micro-electromechanical systems actuator, the proposed circularly cylindrical SSG is expected to serve as a narrow-bandwidth tunable bandstop filter in micro-optical telecommunication systems.