并行共焦三维检测方法的理论分析

从一般共焦系统的原理出发,重点围绕并行共焦方法的三维检测,通过引用三维点扩散函数和矩阵形式,研究了并行共焦检测方法的理论问题,确立了点阵并行共焦检测方法的检测过程。其结果表明,并行共焦检测过程总的光场分布,是各条共焦检测光路的求和,且都符合两个点扩散函数相乘的共焦形式。     

激光共焦球面元件姿态自动调整系统

为解决激光差动共焦元件参数测量系统中人工调整元件姿态效率低、重复性差的问题，研制了激光共焦球面元件姿态自动调整系统。基于共焦原理，建立了元件失调量与电动四维调整机构调整量关系的数学模型，并根据CCD探测器实时获取的光斑位置信号分析出被测件的姿态信息，结合闭环反馈控制算法实现姿态自动调整。利用电动四维调整机构搭建了自动调整实验装置，实验结果表明:研制的电动调整机构平移调整分辨力达到0.5 μm，倾斜调整分辨力达到8″；调整系统能够快速、稳定地将被测件姿态失调量调至误差范围内，有效提高调整重复性及效率，对激光差动共焦测量系统实现全自动球面元件参数检测格外重要。     

并行共焦测量中的并行光源技术综述

并行共焦测量技术的核心是将单点共焦测量变成多点同时扫描测量,从而使共焦测量速度显著提高。本文介绍了共焦测量技术原理,综述了用于并行共焦的并行光源技术,分析了这些方法的优点和不足。结合作者近年来的研究成果,重点阐述了基于微透镜阵列和数字微镜器件(DMD)产生并行光源的新方法。分析和研究了DMD的空间光调制机理,最终建立了一种单光源双光路并行像散共焦测量系统。     

阶跃型三维形貌信息小波去噪方法研究

阶跃样品显微测量时,样品三维形貌本身丰富的阶跃信息极易受到噪声高频信号的干扰,如何在滤除噪声的同时保持三维形貌的阶跃特征,实现对样品表面三维形貌信息的高精度测量是一个重要研究问题。利用小波函数良好的空间域和频率域的局部化特性,针对阶跃型样品的特点选取Haar小波,并采用一种基于模平方的阈值处理方法对三维形貌信息小波去噪方法进行研究。将该方法应用在本课题组研制的激光差动共焦显微镜扫描台阶样品得到的三维高度轮廓中,去噪后测量样品高度与OLYMPUS共焦显微镜扫描结果相对比,误差为0.146 8 nm,满足三维形貌信息后续测量分析的要求,证明了算法的有效性。     

共焦显微扫描探测技术的发展

传统的共焦显微探测多是采用单点机械扫描方式完成的,存在着扫描效率低的缺点,针对于此,一种多光束共焦显微系统成为当前的研究热点,通过不同方式对光束进行分割,使单点检测变为多路并行检测,提高了测量速度,减少了扫描过程中光源和振动噪声的影响,实现多光束的同步测量。介绍了几种典型的单光束和多光束共焦显微测量系统的原理、研究进展、发展方向及作者在该方面的研究。     

基于数字微镜器件并行共焦成像的光点阵列优化

数字微镜器件(DMD)的灵活性有助于实现并行共焦成像。设计并搭建了基于DMD的并行共焦成像系统,分析了DMD光点阵列对轴向分辨率、横向分辨率和图像对比度的影响,得出了最优光点阵列参数。结果表明:光点越小,则横向和轴向分辨率越高;当光点间距大于光点大小时,增大光点间距对成像的横向分辨率无明显改善;对于1×1微镜,光点间距为光点大小的4倍时对应的图像对比度最高,即1×1光点大小、4倍光点间距为最优光点阵列。对数值孔径为0.25的物镜而言,最优光点阵列对应的横向分辨率优于512lp/mm,轴向分辨率可达7.82μm,均达到衍射极限。基于最优光点阵列的三维体光栅成像比宽场成像具有更高的分辨率和明显的层切效果,与激光扫描共焦成像相比无较大差距。基于DMD的并行共焦成像系统在保证高速成像的前提下,实现了高分辨率和高图像对比度的光学层切成像,在实时成像和三维成像中有一定的优势和应用前景。     

共焦显微镜三维轮廓快速测量方法及其误差分析

共焦显微术在生物学及工程应用中已成为一种有效的测量、观察方法。本文针对共 焦显微三维测量系统提出了一种高精度快速算法,并进行了误差分析与计算机仿真。对实际 共焦三维测量系统的设计具有重要意义。     

采用变焦液体透镜的共焦检测系统的设计与仿真

共焦显微技术越来越广泛地应用于微机电系统和半导体器件的三维轮廓测量。设计一种新型采用变焦透镜作为轴向扫描方式的共焦显微系统,利用变焦透镜的焦距变化来代替传统的轴向位移扫描。系统实现了无机械运动的轴向扫描,消除了传统共焦系统中由位移台移动带来的振动,不仅减小了系统的复杂度,而且降低了成本。进一步设计了基于位移台和变焦透镜的两种共焦检测系统,并且对其进行了仿真实验。实验结果表明:基于位移台和基于变焦透镜的共焦系统的聚焦成像和离焦成像结果类似,并且光强的轴向分布曲线也基本相同,表明此方法可行。     

利用全息干涉层析重构三维折射率场的新方法

介绍了一种新的重构三维折射率场的方法。该方法利用一个共焦检测系统对被测对象的像面全息干涉图进行三维扫描，并记录干涉强度，通过对强度数据的处理，可以重构出三维折射率场。这种方法原理简单，不需要进行多方向的全息干涉记录和复杂的重构过程。给出了初步的试验结果，证明该方法是可行的。     

超宽带微波检测早期乳腺肿瘤三维仿真

超宽带微波成像技术可作为有效的方法用于乳房早期乳腺肿瘤的检测. 该方法基于乳房组织和肿瘤之间较大的电学特性差异的特点进行成像, 能提供足够的分辨率以及足够的穿透深度. 本文采用时域有限差分方法建立超宽带微波信号在三维乳房组织中传播的模型, 并采用单极德拜模型完成了生物组织色散特性的模拟. 利用8发9收的天线阵列实现微波肿瘤探测, 利用共焦成像算法对乳房组织进行图像重构并进行肿瘤定位. 仿真结果显示共焦成像算法能够实现最小直径3 mm的肿瘤的检测, 同时证实了超宽带微波成像技术应用于早期乳腺肿瘤检测的有效性. 关键词： 微波成像 肿瘤检测 时域有限差分 共焦成像算法     

基于莫尔拓扑与图像处理的三维形貌术

本文叙述了一种新型三维物体表面测量方法,该方法利用单光栅投射待测物体表面而获取变形光栅像,然后应用图像处理方法,通过微机计算出物体表面各点高度。该方法测试精度高,速度快。文中对其原理进行了详细的叙述。并讨论了该法的测量范围、灵敏度。     

超薄型平行平面镜的研制

超薄型平行平面镜的加工难度很高,往往在投入大量的辅助工装和较长的加工工时后,收效甚微。笔者用双平面分离器和平面环抛法相结合的工艺手段,经反复实践和试验,终于研制出厚度与直径的比例达1∶85、N=2、ΔN=0.2、θ=15″的平行平面镜。     

一种乳腺癌检测的改进微波共焦成像方法

尝试引入因媒质不均匀而产生的折射效应,改进原有算法.共焦过程选用鲁棒的Capon波束成形（RCB）算法.乳房模型选用较为简单的三维（3-D）半球,为了更好地描述人体组织电参数的色散特性,各组织建模为多极柯尔-柯尔（Cole-Cole）媒质.在超宽带（UWB）平面波激励下,利用时域有限差分（FDTD）法模拟电波传播.数值应用中,乳房植入两个半径3 mm球状肿瘤,分别应用原有微波共焦成像方法和改进方法检测乳腺肿瘤.仿真结果对比显示：改进方法在复杂度略微增加的同时,提高了计算精度.     

Effect of the codoping of N—H—O on the growth characteristics and defects of diamonds under high temperature and high pressure

Diamond crystals were synthesized with different doping proportions of N—H—O at 5.5 GPa—7.1 GPa and 1370 °C—1450 °C. With the increase in the N—H—O doping ratio, the crystal growth rate decreased, the temperature and pressure conditions required for diamond nucleation became increasingly stringent, and the diamond crystallization process was affected. [111] became the dominant plane of diamonds; surface morphology became block-like; and growth texture, stacking faults, and etch pits increased. The diamond crystals had a two-dimensional growth habit. Increasing the doping concentration also increased the amount of N that entered the diamond crystals as confirmed via Fourier transform infrared spectroscopy. However, crystal quality gradually deteriorated as verified by the red-shifting of Raman peak positions and the widening of the Raman full width at half maximum. With the increase in the doping ratio, the photoluminescence property of the diamond crystals also drastically changed. The intensity of the N vacancy center of the diamond crystals changed, and several Ni-related defect centers, such as the NE1 and NE3 centers, appeared. Diamond synthesis in N—H—O-bearing fluid provides important information for deepening our understanding of the growth characteristics of diamonds in complex systems and the formation mechanism of natural diamonds, which are almost always N-rich and full of various defect centers. Meanwhile, this study proved that the type of defect centers in diamond crystals could be regulated by controlling the N—H—O impurity contents of the synthesis system.     

Shifted-phase calibration for a 3-D shape measurement system based on orthogonal composite grating projection

This paper proposes a novel method for reducing measurement error caused by spectrum overlapping in orthogonal-composite-grating-based 3-D measurement method. For 3-D measurement systems based on orthogonal composite grating projection, spectrum overlapping causes phase of each deformed phase-shifting fringe changed differently, which violates the principle that the shifted phases between adjacent deformed fringes must be equivalent to 2π/3, and therefore results in phase measurement error. The proposed shifted-phase calibration method is based on that phase variation of each deformed fringe is independent of height and reflectivity of the measured object. Three composite gratings are projected on the reference plane, and each carrier channel includes three phase-shifting gratings needed in phase measuring profilometry (PMP). Because the adjacent phase-shifting fringes demodulated from the same carrier channel have the phase difference of 2π/3, we can respectively calculate the reference plane's phases of three carrier channels by the phase algorithm of PMP method, and the shifted phases between them are obtained. When an object is measured, the shifted phases between deformed phase-shifting fringes can be calibrated. A new 3-D measurement mathematical model is set to reconstruct object. Our experiments prove that the proposed method can effectively restrain the effect of spectrum overlapping and improve measurement accuracy almost one times.     

高性能三端口全光纤开关

提出采用２×２和３×３单模光纤耦合器组合成的马赫－陈德尔干涉仪来制作全光纤开关。解决了在连续熔融拉伸两个耦合器组成马赫－陈德尔干涉仪的过程中，由于干涉的作用而无法监视光功率来控制第二个耦合器的分束比的问题。并且由于是连续熔融拉伸，保证了两条单模光纤干涉臂长度的一致，从而提高了单模光纤马赫－陈德尔干涉仪的性能，使得用其做成的三端口压电陶瓷电控全光纤开关具有宽频带的特性，其最小交调达到３０ｄＢ，附加损耗为０．２３ｄＢ。     

Real-time recognition of microscopic phase objects

A method of image enhancement and real-time input of 3-D, microscopic phase objects into a coherent optical pattern recognition system is described. The method consists of directing a low-power laser beam into a microscope objective to produce a real, magnified, coherent image of the specimen under test. The image plane is followed by two successive Fourier transform (FT) planes. In the first FT plane, low and high frequency spatial filters, one of which is photographically produced, are used as pre-processing filters to enhance the image quality. The enhanced signal is imaged from the first FT plane to the second FT plane which contains a matched spatial filter used for specimen identification. The system does not require an expensive incoherent-to-coherent light transducer and in addition, is capable of utilizing both phase and amplitude information from 3-D objects. Examples of results are given.     

Application of robust color composite fringe in flip-chip solder bump 3-D measurement

This study developed a 3-D measurement system based on flip-chip solder bump, used fringes with different modulation intensities in color channels, in order to produce color composite fringe with robustness, and proposed a multi-channel composite phase unwrapping algorithm, which uses fringe modulation weights of different channels to recombine the phase information for better measurement accuracy and stability. The experimental results showed that the average measurement accuracy is 0.43μm and the standard deviation is 1.38 µm. The results thus proved that the proposed 3-D measurement system is effective in measuring a plane with a height of 50 μm. In the flip-chip solder bump measuring experiment, different fringe modulation configurations were tested to overcome the problem of reflective coefficient between the flip-chip base board and the solder bump. The proposed system has a good measurement results and robust stability in the solder bump measurement, and can be used for the measurement of 3-D information for micron flip-chip solder bump application.     

Rapid Frequency-Domain FLIM Spinning Disk Confocal Microscope: Lifetime Resolution,Image Improvement and Wavelet Analysis

A spinning disk confocal attachment is added to a full-field real-time frequency-domain fluorescence lifetime-resolved imaging microscope (FLIM). This provides confocal 3-D imaging while retaining all the characteristics of the normal 2-D FLIM. The spinning disk arrangement allows us to retain the speed of the normal 2-D full field FLIM while gaining true 3-D resolution. We also introduce the use of wavelet image transformations into the FLIM analysis. Wavelets prove useful for selecting objects according to their morphology, denoising and background subtraction. The performance of the instrument and the analysis routines are tested with quantitative physical samples and examples are presented with complex biological samples.     

Semi-guided plane wave reflection by thin-film transitions for angled incidence

The non-normal incidence of semi-guided plane waves on step-like or tapered transitions between thin film regions with different thicknesses, an early problem of integrated optics, is being reconsidered. As a step beyond the common effective index picture, we compare two approaches on how this problem can be tackled—at least approximately—by nowadays readily available simulation tools for integrated optics design. Accepting the scalar approximation, using an ansatz of harmonic field dependence on the position along the interface, the 3-D problem reduces to a 2-D Helmholtz problem, for guided wave input and transparent-influx boundary conditions, with an effective permittivity that depends on the incidence angle. Alternatively, one complements the structure with a second mirrored interface, such that the 2-D cross section of a wide multimode rib waveguide emerges. Constraints for transverse resonance then permit to translate the propagation constants of its polarized modes into discrete samples of the phase changes experienced by an in-plane guided wave upon total internal reflection at the sidewalls.