激光共焦球面元件姿态自动调整系统

为解决激光差动共焦元件参数测量系统中人工调整元件姿态效率低、重复性差的问题，研制了激光共焦球面元件姿态自动调整系统。基于共焦原理，建立了元件失调量与电动四维调整机构调整量关系的数学模型，并根据CCD探测器实时获取的光斑位置信号分析出被测件的姿态信息，结合闭环反馈控制算法实现姿态自动调整。利用电动四维调整机构搭建了自动调整实验装置，实验结果表明:研制的电动调整机构平移调整分辨力达到0.5 μm，倾斜调整分辨力达到8″；调整系统能够快速、稳定地将被测件姿态失调量调至误差范围内，有效提高调整重复性及效率，对激光差动共焦测量系统实现全自动球面元件参数检测格外重要。

Laser confocal automatic adjustment system for attitude of spherical component

In order to solve the problem of poor efficiency and repeatability during adjusting the attitude of spherical components in laser differential confocal components parameters measurement system, we designed a laser confocal automatic adjustment system for attitude of spherical component. Based on the laser confocal principle, we set up the relationship between the component misalignment and the adjusting value of electric four-dimensional adjustment mechanism, analyzed the attitude information of the component according to the airy spot position constantly measured by CCD detectors, and realized the attitude automatic adjustment by using the closed-loop feedback control algorithm. Finally, we built an automatic adjustment experiment device. The experimental results show that the shift adjustment resolution of the electric adjustment mechanism reaches 0.5 μm, and the tilt resolution reaches 10″. The adjustment system can quickly and stably adjust the attitude misalignment of the device under test to the error range, effectively improving the repeatability and efficiency of the adjustment. It is especially important for the laser differential confocal measurement system to realize the automatic measurement of spherical component parameters.