Operational characteristics of a plasma cathode with a grid stabilization in a two-stage ion source

The discharge characteristics and the parameters of the cathode plasma in a two-stage ion source with a grid plasma cathode and a magnetic trap in the anode region are investigated. It is shown that an increase in the gas pressure and the accompanying increase in the reverse ion current in the bipolar diode between the cathode and anode plasmas lead to an increase in the cathode plasma potential and a transition of the cathode into the regime of electron emission from the open plasma boundary. The dependence of the ion current extracted from the anode plasma on the area of the exit aperture of the hollow cathode and the mesh size of the grid plasma cathode is explained. The conditions at which the ion emission current from the anode plasma is maximum are determined. The potential difference at the bipolar diode is measured by using the probe method. It is shown that, when the gas pressures reaches a critical value determined by the mesh size of the grid plasma cathode, the discharge passes into a contracted operating mode, in which the ion current extracted from the anode plasma decreases severalfold.     

Correlation of current quenching and occurrence of metal vapor in apseudospark discharge

The quenching phenomenon, i.e., a sudden interrupt of the discharge current, was investigated in a pseudospark discharge with charging voltage of 2.5 kV, maximum current of 2 kA and discharge duration of 3 μs. The working gas was hydrogen at a pressure of 40 Pa. Concerning electrode material and geometric parameters, molybdenun electrodes were chosen with hole diameters of 5 mm; the electrode distance was 3 mm. In this parameter range, a temporal correlation of current quenching and the occurrence of metal vapor could be detected by means of time-resolved optical spectroscopy. With each current interruption a sudden increase of emission from neutral molybdenum atoms as well as an increase of cathode spot emission, which is spatially localized on the cathode, occurs. Also oxygen ions were observed which show a similar time-dependence, however with a significant delay of the order of 200 ns. The results are discussed in the scope of the mechanism proposed for quenching, i.e., ion depletion in the plasma boundary layer, and the mechanisms occurring in the high current phase of a pseudospark discharge     

Determination of the specific ion erosion of the vacuum arc cathode by measuring the total ion current from the discharge plasma

The specific ion erosion γ_i of cathodes made of C, Mg, Al, Ti, Co, Cu, Y, Mo, Cd, Sm, Ta, W, Pt, Pb, and Bi is determined by measuring the total ion current from the vacuum arc plasma. It is demonstrated that the ratio of the total ion current to the discharge current, α_i in a vacuum arc varies from 5 to 19%, depending on the cathode material. It is found experimentally that the ion current fraction α_i is inversely proportional to the atomic bond energy of the cathode material. It is shown that an increase in the total ion current extracted from the discharge plasma when applying an external magnetic field to the cathode region of the discharge is related solely to the appearance of ions with higher charge numbers in the plasma, while the magnitude of the specific ion erosion γ_i remains unchanged.     

同轴电极结构下真空放电等离子体生成及传播特性

采用放电电流为100~300 A、持续时间为13 s的单脉冲电源,设计了两种同轴电极结构作为放电阳极,分别为筒状电极、喷嘴状电极。利用MAXWELL 3D电场仿真软件对两种电极结构下的电场分布进行了仿真分析,并采用探针法对放电生成的等离子体的参数进行了测量,分析讨论了同轴电极结构对真空放电等离子体生成特性的影响。选取喷嘴状电极结构作为阳极,分别测量了采用铅、铝、铜三种材质的阴极时生成的等离子体的扩散速度及能量。实验与仿真结果表明:当阳极为喷嘴状电极时阴极尖端的电场强度较大,测得放电电流较大,击穿电压较低,等离子体密度也较大;采用铝材质阴极时生成的等离子体扩散速度最快,采用铅材质阴极时生成的等离子体的离子动能最大。     

Discharge and emission parameters of a plasma electron source based on a discharge in crossed E × H fields with various cathode materials

The possibility of using a plasma electron source (PES) with a discharge in crossed E × H field for compensating the ion beam from an end-Hall ion source (EHIS) is analyzed. The PES used as a neutralizer is mounted in the immediate vicinity of the EHIS ion generation and acceleration region at 90° to the source axis. The behavior of the discharge and emission parameters of the EHIS is determined for operation with a filament neutralizer and a plasma electron source. It is found that the maximal discharge current from the ion source attains a value of 3.8 A for operation with a PES and 4 A for operation with a filament compensator. It is established that the maximal discharge current for the ion source strongly depends on the working gas flow rate for low flow rates (up to 10 ml/min) in the EHIS; for higher flow rates, the maximum discharge current in the EHIS depends only on the emissivity of the PES. Analysis of the emission parameters of EHISs with filament and plasma neutralizers shows that the ion beam current and the ion current density distribution profile are independent of the type of the electron source and the ion current density can be as high as 0.2 mA/cm² at a distance of 25 cm from the EHIS anode. The balance of currents in the ion source-electron source system is considered on the basis of analysis of operation of EHISs with various sources of electrons. It is concluded that the neutralization current required for operation of an ion source in the discharge compensation mode must be equal to or larger than the discharge current of the ion source. The use of PES for compensating the ion beam from an end-Hall ion source proved to be effective in processes of ion-assisted deposition of thin films using reactive gases like O₂ or N₂. The application of the PES technique makes it possible to increase the lifetime of the ion-assisted deposition system by an order of magnitude (the lifetime with a Ti cathode is at least 60 h and is limited by the replacement life of the deposited cathode insertion).     

磁控溅射辉光放电特性的模拟研究

采用二维、自洽的PIC/MCC (particle-in-cell with Monte Carlo collision) 方法,模拟了磁控溅射辉光放电过程, 重点讨论了工作参数对放电模式和放电电流的影响. 模拟结果表明, 当工作气压由小到大或空间磁场从强到弱变化时, 放电模式会从阴极空间电荷主导的放电模式过渡到阳极空间电荷主导 的放电模式.在过渡状态,对应的工作气压与磁通密度分别为0.67 Pa和0.05 T; 随着工作气压的增大,放电电流先增大后趋向平衡,当工作气压超过2.5 Pa时,电流开始随工作气压的增大而减小; 而阴极电压增大时,放电电流近似线性增加.     

Neutralization of an ion beam from the end-Hall ion source by a plasma electron source based on a discharge in crossed E × H fields

The possibility of using a plasma electron source (PES) with a discharge in crossed E × H field for compensating the ion beam from an end-Hall ion source (EHIS) is analyzed. The PES used as a neutralizer is mounted in the immediate vicinity of the EHIS ion generation and acceleration region at 90° to the source axis. The behavior of the discharge and emission parameters of the EHIS is determined for operation with a filament neutralizer and a plasma electron source. It is found that the maximal discharge current from the ion source attains a value of 3.8 A for operation with a PES and 4 A for operation with a filament compensator. It is established that the maximal discharge current for the ion source strongly depends on the working gas flow rate for low flow rates (up to 10 ml/min) in the EHIS; for higher flow rates, the maximum discharge current in the EHIS depends only on the emissivity of the PES. Analysis of the emission parameters of EHISs with filament and plasma neutralizers shows that the ion beam current and the ion current density distribution profile are independent of the type of the electron source and the ion current density can be as high as 0.2 mA/cm² at a distance of 25 cm from the EHIS anode. The balance of currents in the ion source-electron source system is considered on the basis of analysis of operation of EHISs with various sources of electrons. It is concluded that the neutralization current required for operation of an ion source in the discharge compensation mode must be equal to or larger than the discharge current of the ion source. The use of PES for compensating the ion beam from an end-Hall ion source proved to be effective in processes of ion-assisted deposition of thin films using reactive gases like O₂ or N₂. The application of the PES technique makes it possible to increase the lifetime of the ion-assisted deposition system by an order of magnitude (the lifetime with a Ti cathode is at least 60 h and is limited by the replacement life of the deposited cathode insertion).     

Optimisation of cold cathode ion source model

This paper represents the results of the optimisation of cold cathode ion source model with 5 cm extraction aperture diameter. In this model, the glow discharge is utilised for generation of electrons in the cathode of the ion source. The various models with different lengths of cathode and anode are tested. The shortest model with 4.5 cm in length of cathode and anode each shows satisfactory operation and can be used in cases when the high values of extracted ion current are not required. The best model from the point of view of ion beam current value and efficiency of the discharge is the model with cathode length of 7 cm and anode length of 7 cm. In this case, the obtained maximum ion beam current is 110 mA when the discharge current is 1000 mA. In case when moderate values of extracted ion beam current are necessary, it is possible to operate the ion source even without the anode magnetic system.     

The effect of ion emission on the characteristics of a glow discharge with a hollow cathode

The effect of extraction of the ion current on the conditions for sustaining a low-pressure glow discharge with a hollow cathode, which is a topical problem for developing ion sources, is studied. It is shown that there exists a certain optimal level of the ion emission at which the energy efficiency reaches its maximum.     

Hollow-cathode magnetron discharge as a generator of charged particles

A magnetron discharge with a cold hollow cathode and an uncooled rod cathode is studied. It is shown that such a discharge can be efficiently used to generate a plasma emitting charged particles. For a discharge current of 2 A and an accelerating voltage of 10 kV, ion and electron emission currents of 0.1–0.15 and 1 A, respectively, are achieved. The energy cost of ion extraction is 1–2 W/mA, which is two to five times less than for typical ion sources, and the energy efficiency is 15 mA/W, which is a factor of five or six higher than for electron emitters based on a hollow-cathode reflex discharge.     

强流离子源新型LaMo阴极实验研究

对从美国购进的强流离子源新型LaMo阴极的发射特性以及用于强流离子源阴极的放电性能进行了测试.实验结果表明了LaMo阴极是一种有效的热阴极发射体,且该阴极用于强流离子源时,离子源工作稳定,放电起弧正常,使用寿命大大延长(相对于LaB₆阴极).从实际应用来看,LaMo阴极确是强流离子源的一种有效的新型阴极.     

Objektzerstäubung im Elektronen-Emissionsmikroskop in Abhängigkeit von Art und Energie der Ionen

In an emission electron microscope with ion induced electron emission the dependence of emission current and cathode sputtering under ion bombardment on discharge voltage, type of discharge gas and specimen material is measured. If high image intensity and little cathode sputtering is desired, a discharge gas of small molecular mass and high ion energies should be used. Under such conditions it is possible to observe a specimen in an emission microscope over a longer period without appreciable specimen changes due to cathode sputtering during observation.     

The characteristics of pulsed hollow cathode discharges used forpseudospark switch triggering

The complex interaction between the trigger discharge and the main switch discharge in high-power gas discharge switches influences both the switching characteristics, and the switch and trigger lifetime. Any attempts to improve either of these parameters has to take into account the pressure and geometry dependence of a particular trigger geometry. Yet, although not very intensely investigated in detail for this particular purpose, pulsed hollow cathode discharges are commonly used for low-pressure gas discharge triggering as in pseudospark switches. Measurements of the electron current flowing to the cathode backplane of a pseudospark switch from the pulsed hollow cathode trigger discharge show that maximum current densities are peaked around the symmetry axis of the trigger electrode, an effect which is more pronounced at low pressures. Delayed (and slowed-down) increase of the current density at larger radii leads to increasing delay and jitter, provided the trigger coupling holes in the cathode backplane are located off-axis. The electron current density increases with decreasing diameter of the trigger electrode, and with increasing pressure of the working gas. In addition, it is shown that a preionization (keep-alive) current in the trigger electrode region shows a distinct influence on the trigger current distribution, proving that there exists an optimum keep-alive current depending on the geometry and gas pressure     

真空弧放电TiH合金阴极表面形貌分析

TiH合金电极是一种含氢量非常高的金属材料,用它作真空弧离子源的电极,可在真空环境下产生强度非常高的氢离子流。相比纯金属材料电极,TiH电极除了出现真空弧放电特有的融蚀现象外,还存在气体释放过程,所以它的表面形貌具有一定的独特性。利用扫描电子显微镜观察了单次放电和多次放电后阴极表面形貌,发现阴极斑在阴极表面微裂纹附近连续分布,气体释放生成很多小孔,使阴极斑区域呈絮状结构;弧流越大,阴极斑数量越多;多次放电后,阴极斑朝含氢量多的地方移动。该结果有助于了解含氢电极的真空弧放电过程,对该类放电的应用具有一定参考意义。     

Nonself-sustained arc discharge in anode material vapors

The basic characteristics of the nonself-sustained arc discharge in a vapor of the anode material are studied. The influence of thermoemission parameters of the cathode on volt-ampere characteristics of the discharge is described. It is established that in a free mode of the discharge cathode operation, when the discharge current I_D is lower than the current of the thermoelectron emission from the discharge cathode I_C, the deposition rate of the films q is directly proportional to the discharge current I_D. In the compelled mode of the cathode operation, when I_D>I _C, q~W_D², where W_D=I_D U_D with U_D being the discharge voltage. It is shown that the magnetic field increases the plasma density and changes the density profile from n(x)-1/x² to n(x)-1/x with x being a distance along the flow. The motion of created plasma flow is shown to have a noncollisional character with constant electron temperature of 5-7 eV along the flow. The values of plasma potential and electric field in the flow are determined; the values of cathodic and anodic potential drops in the discharge are evaluated. The angular distributions of ion and neutral fluxes in the created plasma flow are described. It is shown that the plasma flows parameters depend substantially on the working material. With use of crossed electric and magnetic fields, the flow ionization coefficient was enhanced up to 85% for the discharge in Ti vapors, and 35% for the discharge in Cu vapors     

Investigation of the Directional Velocities of Ions in a Vacuum Arc Discharge by Emission Methods

This paper is devoted to an investigation of the directional velocities of the ions generated in cathode spots of vacuum arc discharges. By using emission methods of studying the processes in a vacuum arc discharge, which involve the determination of the parameters and characteristics of the discharge plasma by analyzing the ion current extracted from the plasma and the ion charge states, the velocities of ions have been determined for the majority of cathode materials available in the periodic table. Is has been shown that at a low pressure of the residual gas in the discharge gap the directional velocities of the ions do not depend on the ion charge state. Comparison of the data obtained with calculated values allows the conclusion that the acceleration of ions in a vacuum arc occurs by the magnetohydrodynamic mechanism.     

HL-2M装置5 MW中性束加热束线离子源放电室研制

为了给HL-2M装置建设一条5 MW中性束加热束线,开展了中性束加热用热阴极弧放电离子源放电室的研制。这条中性束束线包含4套80 kV/45 A/5 s离子源,放电室的设计指标为850 A/5 s。首先采用CST软件中的电磁工作室对特定几何结构的放电室会切磁场进行了模拟计算,得到了会切磁场分布,验证了会切磁场布局的合理性。针对放电室加工工艺和实验过程中局部拉弧等问题,对放电室结构进行了不断改进。放电室侧壁由40列会切磁体改为7圈环形磁体,阴极灯丝结构从灯丝板结构最终改为陶瓷可伐结构,并且在放电室和加速器之间增加了陶瓷屏蔽。在阴极板结构放电室和阴极陶瓷可伐结构放电室内都获得了正常的弧放电。最终定型的放电室采用周边7圈环形会切磁体和陶瓷可伐结构。在定型的放电室内达到了5 MW中性束束线离子源弧放电的指标。弧放电时间接近5 s,最大弧放电电流达到1 000 A。     

A physical model of the low-current-density vacuum arc

A one-dimensional (1-D) physical model of the low-current-density steady-state vacuum arc is proposed. The model is based on the continuity equations for ions and electrons and the energy balance for the discharge system; the electric potential distribution in the discharge gap is assumed to be nonmonotonic. It is supposed that the ion current at the cathode is generated within the cathode potential fall region due to the ionization of the evaporated atoms by the plasma thermal electrons having Boltzmann's energy distribution. The model offers a satisfactory explanation for the principal regularities of a hot-cathode vacuum arc with diffuse attachment of the current. The applicability of the model proposed to the explanation of some processes occurring in a vacuum arc, such as the flow of fast ions toward the anode, the current cutoffs and voltage bursts, and the backward motion of a cathode spot in a transverse magnetic field is discussed     

Intense emission from a grid-stabilized plasma cathode

Intense emission from a grid-stabilized plasma cathode based on a glow discharge with an expanded anode area is studied. In the electrode system of the ion source, the potential difference between a large-mesh grid electrode (a hole diameter of 4–6 mm) and cathode and anode plasma reaches 200 V and the glow discharge current is up to 1 A. The current distribution over the electrodes of the plasma cathode is taken, and the dependences of the electron extraction efficiency and electron-emitting-plasma potential on the gas pressure and discharge parameters are obtained. A relationship between the geometric parameters of the grid, cathode plasma potential, and efficiency of electron extraction from the plasma is derived. It is shown that stable intense emission from the plasma cathode can be provided in wide ranges of gas pressure and discharge current by varying the geometry and mesh size of the plasma cathode grid. Discharge contraction in the grid plane at elevated gas pressures is explained. It is assumed that the emitting plasma becomes inhomogeneous due to variation in the thickness of near-electrode layers in the holes of the grid, which makes the distribution of the emission current from the plasma more nonuniform.     

A cw uv copper hollow cathode laser in the 260 nm region

A cw uv copper hollow cathode laser is described, which could be operated for a longer time duration with an output power of 7 mW in the 260 nm region. A double-cathode configuration with a protection for the mirrors from metal-vapour deposition is presented. Characteristics of the laser output power, the spontaneous emission, and the ion densities in the negative glow were measured as depending on the discharge current, the neon gas pressure, and the size of the cathode slit. The observed saturation of the laser output power at high discharge current (1 A/cm²) and the optimum slot size are discussed.