一维增透亚波长光栅的研究

将具有高透射性的亚波长光栅置于微机械波长可调谐垂直腔面发射激光器(VCSEL)的内腔当中可以提高波长的调谐范围,为了使波长调谐范围达到最优则必须优化高透射性的亚波长光栅使其透射率达到最大。利用严格耦合波法分析了亚波长光栅的占空比、周期、厚度和入射角对其透射率的影响并找出最优的光栅参数。通过计算分析可得,对于TE和TM偏振存在最佳的占空比使其透射率达到99.5%。在文中条件下,它们对应的占空比分别为0.23和0.80。而光栅厚度对于TE和TM偏振透射率的影响是周期性的,在一个周期内存在一个最佳值使其透射率达到最高。在文中条件下,TE偏振的厚度周期是150 nm,TM偏振的厚度周期是300 nm。当光栅参数不变时,无论是TE还是TM偏振光,它们的透射率只有在垂直入射光栅时(入射角为0°)才能达到最大。而通过等效介质原理可以得出,周期对透射率没有影响。最后计算了透射率在光栅厚度和占空比同时变化时的变化趋势,并从中得出最优的光栅参数。     

基于亚波长高对比度光栅的波前调控器设计

基于严格耦合波分析法分析了亚波长光栅波前调控的方法,设计了具有凸透镜、锥透镜和闪耀光栅功能的三种亚波长光栅结构,以平面方式制备了具有聚焦和闪耀效果的三种微纳结构波前调控器.计算了不同光栅厚度、光栅齿和光栅槽宽度下的光栅透射率,通过选择合适光栅参数组合,得到三种波前调控器透射率均在97%以上.硅基平面结构与常规结构器件性能相比,平面和常规透镜、锥透镜在聚焦效果上,焦斑的半高全宽近似相等,峰值强度提高了1.64和2.35倍;平面相对常规闪耀光栅的峰值强度提高了3.77倍.     

基于二维矩形SiO2光子晶体光栅的研究

 为解决光学系统中普遍存在的菲涅耳反射问题,提高光的透射率,设计了一种二维矩形SiO2光子晶体结构光栅。采用勒让德多项式展开法对该结构在可见 近红外波长范围入射光波的透射率进行了模拟计算,寻找到了合适的占空比e、光栅深度h和基底厚度d,使得光栅的透射率在入射角为0～60°范围内、入射波长在400 nm～1 200 nm范围内变化时,其透射率的变化相对稳定,透射率的平均值可达到96%以上。     

基于全反射的波导异质结构单向传输性能研究

基于光子晶体异质结构实现光波单向传输在全光网络和光信息处理中有重要意义。基于全反射原理设计了两种由二氧化硅和锗材料构筑的三角晶格光子晶体波导异质结构,运用时域有限差分法对该结构在宽频带内的单向传输特性进行分析。通过改变正向出射端波导宽度对结构进一步优化,实现了在异质结构一中,TE模式光波在1458~1517nm波长范围内正向透射率高于0.8,透射对比度高于0.9的单向传输;在异质结构二中,TM模式光波在1498~1689nm波长范围内正向透射率高于0.8,透射对比度接近于1的单向传输。     

亚波长抗反射光栅结构的设计及制备

针对现有亚波长抗反射光栅结构参数对加工工艺要求较高且难以制备等问题,设计了一种方柱形二维抗反射光栅结构。依据等效介质理论和薄膜增透理论对亚波长抗反射光栅结构参数进行仿真分析,结果表明其透射率在远红外波段20～24 μm平均透射率能够达到98%,中心波段21.8 μm处透射率达到99%。使用飞秒激光直写方式进行实验制备,测得平均透射率达77%,中心波段透射率达到77%,与仿真结果相近。经实验验证,所设计的亚波长光栅结构的工艺容差较现有光栅结构更好,且对实验加工精度要求较低,为其他类似光栅结构的设计和加工提供了新的思路。     

高效异质结构四波长波分复用器的设计与优化

将两光子晶体单模波导平行、邻近放置构成一个光子晶体波导耦合结构.根据耦合和解耦合理论,设计了一种新型的高效异质结构四波长波分复用器.应用时域有限差分法模拟了该器件的效率,并通过改变一排介质柱的折射率,实现了较高的透射率.进一步发现在入射口处添加三对介质柱,可以有效地降低系统的反射,实现了四个波长的高效传输,四个波长的透射率均超过了90%.该器件不仅具有较高的透射率,而且其尺寸仅为36 μm×17 μm,在未来的光子集成回路中具有潜在的应用价值. 关键词： 光子晶体波导 耦合 异质结构 波分复用     

金属光栅的非对称透射现象研究

提出一种利用表面等离子体耦合的金属光栅结构,该光栅结构因入射光的方向和耦合表面等离子体的条件不同,从不同方向入射时会有不同的透射率。周期为500 nm、填充因子为0.7的Au-SiO₂光栅结构在565~589 nm波段具有单向透射性。当填充因子为0.662时,最大透射对比率达3×10⁴。当光栅厚度为60 nm时,入射波长在570~630 nm之间的透射对比率均可达到5以上,最高透射率为43%。当光栅周期为1 100 nm时,1 530~1 590 nm波段的透射对比率均大于5,可以满足中红外波段的应用。     

带有高折射率介质层的金属光栅偏振器特性的研究

研究了一种亚波长金属光栅偏振器在可见光波段的透射与消光特性。与传统亚波长光栅偏振器不同的是,通过在基底和光栅之间增加一层高折射率介质薄膜,提高了TM偏振光透射率和消光比。利用严格耦合波分析法(RCWA),模拟了高折射率介质层厚度、光栅占宽比对透射率和消光比的影响。计算结果表明,在整个可见光波段,合适的介质层厚度可使透射更加均匀并且当入射角在0～60°变化时,TM偏振光的透射率和消光比仍可分别达到79%和50 dB。这种带有高折射率介质层的亚波长金属光栅偏振器结构紧凑,性能优良,特别适合作为液晶平板显示中的偏振分光器件。     

锗衬底红外抗反射亚波长结构的研究

为了减小锗表面的反射,利用模式理论对锗衬底正方柱形亚波长结构的衍射特性进行了研究。结果发现,当周期较小时,占空比大于0.78对透射率的影响比较明显;周期大于0.25λ,零级透射率随周期的增大急剧下降,而总透射率随周期的增大变化不大;周期较小透射率随结构高度的变化呈余弦周期性,周期增大透射率随结构高度的变化呈余弦赝周期性,并且周期越大余弦赝周期性越明显;此外,周期较小时,可以实现大角度范围内的高的透射率,周期较大时,可以制备为窄带滤波器。     

一种提高OLED基底出光效率的亚波长光栅设计

为了提高OLED出光效率,在OLED基底表面设计了二维连续表面亚波长光栅。利用等高台阶逼近的方法近似连续表面光栅结构,并结合等效介质理论和薄膜光学原理,设计光栅参数:刻蚀深度0.29 μm,周期大小0.165 μm,底边直径与周期的比值等于1,可以实现宽光谱、广角度的高透射率。利用时域有限差分方法仿真计算了该光栅对OLED基底出光效率的影响,结果表明,出光效率最高可提高30%。     

Imprinted conjugated polymer DFB lasers optimized based on simulation results

In this study, we present distributed feedback structure lasers which were fabricated by imprinting a grating directly into a highly luminescent conjugated polymer. Based on the interplay between simulations and experimental results, we optimized some basic parameters, crucial for the effective behavior of the structure. On the base of these parameters, new grating structures were designed and fabricated by e-beam lithography and transferred to the polymer by the soft lithographic technique of “liquid imprinting”. Due to these improved grating structures, the devices showed stable, low threshold lasing under photo-excitation using a frequency doubled Nd:YAG laser. The obtained experimental results were again successfully modeled by simulating the electromagnetic modes within the structure, and, in addition, the grating response to an electromagnetic field as a function of the waveguide thickness and grating depth was monitored.     

基于类表面等离子体激元的矩形金属光栅色散特性的研究

等离子体激元(surface plasmon polaritons, SPP)因其独特的光学和物理特性, 使其具有诸如透射增强和局域共振等一系列新颖现象, 已成为当前国内外学者研究的热点. 本文对基于类表面等离子体激元(Spoof Surface Plasmons, SSP)的矩形金属光栅色散特性和模式分布进行了研究. 利用本征函数法并结合场匹配条件, 获得了矩形栅表面SSP的场表达式、色散关系和模式分布, 并通过电磁仿真进行了验证. 在此基础上分析了矩形栅各参数对SSP色散及模式分布的影响, 研究结果表明: 由本征函数法获得的SSP色散特性与仿真结果基本符合; 增大金属栅高度或减小排列周期能减小SSP的相速度; 而增大金属栅周期占空比能在一定程度上拓展SSP与电子束互作用的带宽; 改变金属盖板高度对慢波SSP色散模式基本没有影响; 减小金属栅侧面宽度能增大模式之间的间隔, 从而能有效避免模式竞争的发生. 本文对基于SSP的矩形金属光栅色散特性的研究将为进一步研究SSP与电子束的相互作用, 形成高效、宽带的新型太赫兹源奠定良好的理论基础.     

亚波长闪耀光栅矢量衍射效率计算

将矢量衍射数值算法—严格耦合波分析用于精确计算亚波长闪耀光栅的衍射效率,并分析其衍射特性。建立了闪耀光栅的电磁介质模型,并将楔形不规则结构简化为多层矩形光栅结构,通过电磁场的介质分布建立严格耦合波方程。根据边界条件求解出各层的电磁场分布,再通过增透矩阵方法将各层电磁场依次迭代,求解出了整个结构的衍射效率。计算分析显示,对闪耀角为11.3°、周期为500 nm的金属铝闪耀光栅可以得到高于90%的衍射效率和相应的闪耀级次。实验表明这种矢量衍射数值算法具有较高的准确性,可以推广应用于高致密刻线复杂光栅的衍射计算分析。     

Extraordinary Transmission through Metallic Grating with Subwavelength Slits for S-Polarization Illumination

Based on the rigorous coupled-wave analysis algorithm, we have systematically analysed the effect of the geometrical parameters of a dielectric film coated metallic grating with subwavelength slits on extraordinary optical transmission for s-polarization illumination. Results show that the dielectric film which sustains a waveguide electromagnetic mode on the top of the metallic lamellar grating can strongly enhance the transmittance, the positions of the transmission peaks are mainly determined by the period of the metallic grating, the thickness and refractive index of the dielectric film. This structure shows potential applications in excellent polarizers or polarization-isotropic devices at infrared spectral range by appropriately choosing the geometrical parameters.     

Robust wide zero-average-index gap in photonic heterostructures that incorporate left-handed materials

In this article, we theoretically study electromagnetic waves that propagate in a one-dimensional photonic heterostructure that contains left-handed materials. We suggest a type of heterostructure that is composed of two photonic crystals (PCs) that consist of different materials, rather than the previously studied heterostructures that are based on changing the thicknesses of alternating layers, to target zero-average-index gap enlargement. Numerical calculations of the transmittance show that the suggested structure possesses an ultra-wide zero-average-index gap that is robust for both transverse electric and magnetic polarizations. The demonstrated wide gap is independent of the incidence angle. The proposed structure works as a perfect stop-band filter, which completely blocks both polarizations, and may have many other potential applications.     

拓扑绝缘体椭球粒子的电磁散射

利用麦克斯韦方程组,用球矢量波函数展开了长椭球坐标系中的电磁场分量; 根据拓扑绝缘体的本构关系,修正了椭球内外的电磁场;利用拓扑绝缘体的边界条件, 推导了散射系数和散射电磁场.模拟结果表明:当时间反演对称打破时,拓扑磁电参数对散射截面有明显影响.     

FDTD analysis of infrared radiative properties of microscale structure aluminum surfaces

Metallic triangular grating structures have a wide range of applications. This study focuses on the radiative properties of triangular grating structures of aluminum in the mid-infrared wavelength to determine if we can tailor the infrared radiative properties by designing special geometrical details into triangular grating surfaces. Fabrication of triangular gratings within the range of micron scale is very difficult. Therefore, the influences of slight geometry modification, generated by fabrication errors, on radiative properties of triangular gratings are mainly investigated. The electromagnetic wave scattering from such surfaces is predicted by solving Maxwell's equations using the finite-difference time-domain (FDTD) method. The results show that the spectral reflectance varies with the dimensions of triangular gratings, which is due to the excitation of surface wave by confirmation of the EM fields. It is found that the spectral reflectance can also be reduced by increasing the height of slight geometry modification. The effect of oblique incident wave state is also investigated. An optical vortex is found due to the coupling of surface waves, the oblique incident wave and the scattering waves. This study helps to gain a better understanding of the radiative properties of metallic triangular gratings with slight geometry modification and will have an impact on triangular grating processing.     

Unidirectional optical transmission in dual-metal gratings in the absence of anisotropic and nonlinear materials

We predict the unidirectional optical transmission in dual-metal grating structures composed of two gratings with different structures in the absence of anisotropy and nonlinearity. The zero-order unidirectional transmission is achieved. Based on the unique property and by modulating the structural parameters, the transmittance approaches to 0% and 60% in the two opposite directions, respectively.     

深紫外双层金属光栅偏振器的设计与分析

193 nm波长浸没式步进扫描投影光刻机是实现45 nm及以下技术节点集成电路制造的核心装备.增大数值孔径是提高光刻分辨率的有效途径,而大数值孔径曝光系统的偏振性能严重影响光刻成像质量.光刻机曝光系统偏振参数的高精度检测是对其进行有效调控的前提.基于光栅的偏振检测技术能实现浸没式光刻机偏振检测装置的小型化,满足其快速、高精度在线检测的需求,该技术中的关键部件是结构紧凑且偏振性能良好的光栅.本文基于反常偏振效应和双层金属光栅对TE偏振光的透射增强原理,采用严格耦合波理论和有限时域差分方法,设计了一种双层金属光栅偏振器.计算了该偏振器的初始结构参数,并通过数值仿真得到了其偏振性能关于各光栅参数的变化关系.仿真结果表明,中间层高度是影响TE偏振光透射增强的主要因素;垂直入射时TE偏振光的透过率可达到56.8%,消光比高达65.6 dB.与现有同波段金属光栅偏振器相比,所设计的光栅偏振器在保证高透过率的同时,消光比提升了四个数量级.     

Hybrid photonics structures with grating and prism couplers based on ZnO waveguides

This paper presents the results of investigations concerning input-output systems of an electromagnetic wave in the visible and near visible spectrum for their application in structures of integrated optics. The input-output structures used in described planar optical waveguides are in a form of prism and grating couplers. The first part of the paper contains numerical analysis of grating couplers aiming at an optimization of their geometrical parameters, strictly — the depth of the grooves in the grating coupler. The second part presents the practical realization, as well as experimental tests of the planar optical waveguide with the hybrid input-output system. As the input system of the electromagnetic wave, a prism coupler was used, and in the case of the output system — a photonic structure with grating coupler was applied. The investigated planar wave guides with the input-output structures were made of a wide energy band gap semiconductor — zinc oxide (ZnO).