A novel approach for characterizing the nonlinear phase steps of the PZT in interferometry

We propose a novel approach to estimate the phase distribution in the presence of nonlinear response of the PZT. The proposed method is an outcome of two different concepts based on the discrete chirp Fourier transform (DCFT) and the maximum-likelihood estimator for the estimation of nonlinear phase step. The robustness of the proposed method is tested for various magnitudes of nonlinearity and harmonics. Comparison of our proposed method with the bench marking algorithm by Hibino et al.'s six and nine sample algorithm in the presence of noise shows that our method is highly efficient.     

A state space approach in phase shifting interferometry

The paper proposes a state space approach for the determination of phase distribution in an interferogram in the presence of a non-sinusoidal waveform, random noise, and the miscalibration of the piezoelectric device. In this approach we first estimate the phase step imparted to the piezoelectric transducer (PZT) before determining the phase distribution. A denoising procedure is applied with the knowledge of the state-feedback matrix prior to the extraction of the phase step. This step ensures a good estimation of the phase distribution even at low signal-to-noise ratios. The other salient features of the proposed concept lie in its ability to compensate the detector non-linearity and in the use of non-collimated beams. The comparison of the proposed method with other bench-marking algorithms shows that our approach is efficient and robust. The experimental results show the feasibility of the proposed approach.     

基于多光束干涉原理的相移算法研究

针对多光束干涉原理的相移算法包括算法误差及步长优化等问题，以菲索干涉仪精密测长为 应用背景进行了研究.利用干涉光学的基本原理导出了在多束光干涉(经光学面多次反射、透 射)的情况下干涉光强随相位分布的精确公式；在此基础上，通过数值分析的方法得出了利 用菲索干涉仪精密测长的相移步长的优化取值范围和干涉光束最佳初相位差的范围；对余弦 依赖算法所引起的光强误差分别就四步法、五步法得出了不同的依赖关系；并对多光束干涉 算法中几种主要的误差来源进行了不确定度评估. 关键词： 相移算法 多光束干涉 精密测长 不确定度     

相移技术中五步等步长Stoilov算法的性能分析

Stoilov算法是近几年提出的一种五步等步长相移算法。有关文献中的误差分析表明 ,该算法的性能优于四步等步长Carr啨算法闹懈隽耍樱簦铮椋欤铮鏊惴ǖ恼繁泶锸?,采用线性误差理论详细分析了算法的性能 ,尤其是算法性能对相移步长的依赖关系。分析表明 ,可以选择一个最佳的相移步长以有效减少位相测量误差 :相移步长为 5 2°时可有效抑制二次相移量误差的影响 ;相移步长为 90°时可极大地减少光强误差的影响。最后给出了Stoilov算法与Carr啨算法和Hariharan算法的比较。     

基于数值模拟的高准确度五步相移算法研究

传统五步算法具有很好的准确度,但必须满足测量中无法实现的等步长相移条件,这在实际测量中无法使用。为此在双光束干涉原理的基础上,提出了一种改进型的五步算法,实现了在10 nm范围内任意步长的算法高准确度。通过数值模拟,结果表明:对于1 nm的步长测量误差、0.1%的信号测量误差,改进型五步算法的算法准确度优于0.001个相位周期,而且不需要等步长相移控制。改进型五步算法不仅技术上更易于实现,其结果也更加可靠,对于指导精密测长的实验和研究工作具有十分重要的意义。     

基于单神经元PID控制器的压电陶瓷控制方法

卫星地面综合测试是卫星研制过程中的重要环节,对系统功能验证及性能评估具有重要作用。传统的卫星地面综合测试系统存在研制周期长、投入较大、自动化流程不够完整、可重用性较差等不足。而北斗导航卫星地面综合测试系统采用分布式、高实时性、可配置、多主机的集成体系结构,是集计算机通讯、实时控制、实时数据处理、事后分析等功能于一体的测试系统,适用于从卫星总装集成到发射各个阶段的电气测试。通过卫星系统级的各项接口、功能、性能指标测试,表明该系统满足支持系统论证、状态确认、问题排查等测试需求,有力支撑了北斗导航卫星的成功发射和在轨运行。     

用于相移点衍射干涉仪的加权最小二乘相位提取算法

针对现有的相位提取算法只对某些特定的误差不敏感,不能满足高精度光学检测的要求,本文引入一种等间隔多步移相算法—权重待定的加权最小二乘算法。通过在最小二乘算法中添加待定的权重,分析移相点衍射干涉仪中多种误差源对算法的影响,获得多组约束方程,从而确定权重和新算法。对新算法和标准四步算法、Hariharan五步算法进行比对分析,验证了新算法对PZT线性和二阶非线性移相不准、光强的一阶二阶波动和光源频率一阶二阶波动等误差抑制能力远远优于标准四步算法和Hariharan五步算法;新算法对CCD的量化误差、光强噪声、频率噪声的抑制能力也具有一定优势,且对CCD的二阶响应非线性完全不敏感。     

移相干涉测量术及其应用

为了对移相式数字干涉仪在光学元件测量中的应用有全面了解，介绍了移相干涉术的基本原理。结合激光数字波面干涉仪，阐述移相干涉术的四步重叠平均算法、压电晶体移相器(PZT)的结构、3 PZT的组合方法、移相器的标定误差和非线性误差的校正方法、波面相位解包的自适应种子算法、波面相位的评价指标等内容。结合移相数字波面干涉仪，叙述了移相干涉测量技术在普通光学元件、红外光学元件、大口径光学元件、非球面光学元件等测量中的应用并指出了应用过程中的注意事项。最后明确指出光干涉技术正沿着高相位分辨率、高空间分辨率、宽波段和瞬态高速测量的方向发展，并将会在瞬态波前测量、微机械的微结构动态分析等方面有着越来越广泛的应用。     

相移干涉仪中探测器非线性误差及其补偿

通过对多个相移算法的理论分析和数值模拟,发现探测器的非线性响应在相位中会引入2倍空间频率的系统误差。结果表明,非标准相移算法随着探测器非线性度的增加,相对误差也越来越大。提出了压电陶瓷驱动器的移相误差和光电探测器的非线性误差相互抵消的误差补偿技术,并给出了判别误差匹配有效性的实用判据。仿真表明,这种误差补偿技术可以使测量误差减小约一个量级。证明了在不考虑波前幅度信息时,标准相移算法对光电探测器的非线性为零响应,不影响仪器精度。     

Model-based processing of a holographic moiré

A state space model for the determination of dual phase distributions in a holographic moiré in the presence of nonsinusoidal waveforms, random noise, and miscalibration of the piezoelectric (PZT) devices is proposed. The extraction of these phase terms requires incorporating two PZTs into the moiré setup. A Toeplitz approximation method (TAM) is applied for phase determination, and modification to the Toeplitz covariance matrix formed from the phase-shifted moiré fringes by application of a denoising step in the state-feedback matrix is proposed. This step ensures that the phase terms can even be estimated at a signal-to-noise ratio much lower than that of the original TAM or by our previously suggested polynomial based method.     

Fast blind extraction of arbitrary unknown phase shifts by an iterative tangent approach in generalized phase-shifting interferometry

A novel fast convergent algorithm to extract arbitrary unknown phase shifts in generalized phase-shifting interferometry (PSI) is proposed and verified by a series of computer simulations. In this algorithm an error function is introduced and then the unknown phase shifts are found by an iterative tangent approach. In combination with the statistical method, this algorithm can give the most exact results in the fewest iteration steps. It can be used for generalized PSI of arbitrary frames for both smooth and diffusing objects and can usually reach the exact phase shifts with only four or five iterations for three- or four-frame PSI.     

一种基于移相误差估计的5步移相算法

移相误差是用移相法进行相位测量的主要误差。本文提出一种 5步移相算法 ,分两步进行相位计算 ,首先估计实际步进移相的线性移相误差 ,然后再利用此移相误差估计值计算相位分布。移相误差估计公式和相位计算公式简洁 ,算法简单易行 ,对线性移相误差和二次谐波的敏感度低 ,可基本消除线性移相误差对解调相位的影响。对本文提出的算法进行了仿真研究 ,同时给出了 Hariharan 5步算法、Surrel 6步最小算法的仿真结果。结果表明 :本算法明显优于以上两种算法 ,可基本消除线性移相误差引起的相位偏移。本算法适用于作等步移相的相位测量或移相的标定。     

压电晶体位移特性曲线干涉自动测量方法

本文提出了压电晶体(PZT)位移物曲线自动干涉测量方法,该方法利用干涉仪把PZT的微位移量转化成干涉条纹相位变化量,通过快速傅里叶变换(FFT)方法自动复原干涉条纹中包含的相位的变化量,从而高精度地检测出PZT的位移特性曲线.根据该方法,利用CCD摄象机、图象板和干涉仪组合成一套光、机、电一体化的微位移自动测试系统,实际测量了我们研制的PZT随电压变化的位移特性曲线.实验表明,该方法原理实现简单,且能实现高精度、自动、实时和动态测量.     

用于PZT调制干涉仪的外触发式差动数字鉴相技术

基于相位测量的外差干涉系统以其信号处理方面的优势在光学计量领域得到了广泛的应用。介绍了采用机械调制方法的差动单频干涉系统的干涉信号小数级次的相位测量实现方法。针对机械调制干涉系统的信号有相位跃变点且周期不均匀的特点 ,提出了利用外触发信号对干涉信号进行整周期截取而后再鉴相的方法。研制了基于 FPGA的外触发式差动数字鉴相系统。实验测试表明 ,该鉴相系统在信号频率为 30 0 Hz～ 10 k Hz范围内达到的指标为 :示值稳定性优于± 0 .0 15°,极限偏差小于± 0 .0 7°     

用待定系数法设计误差补偿相移算法

提出了一种以误差补偿为目的的新的相移算法设计方法—待定系数法,该方法首先在算法表达式中引入一系列待定参数,根据对误差补偿的要求提供约束方程,从而解出这些未知参数.待定系数法使得算法设计和误差分析是同时进行的,改变了以往先设计算法再进行误差分析和评价的过程,由待定系数法导出的相移算法对算法设计中所考虑的误差源具有良好的补偿性能.     

外加电场对铁电薄膜相变的影响

采用热力学非线性理论,研究了外加电场对立方基底Pb(Zr_0.3Ti_0.7)O₃(PZT)铁电薄膜相变的影响.通过数值计算,得到了"失配应变-外加电场"相图,及外加电场与极化强度的关系.当外加电场达到186 kV/cm时,能使生长在SrTiO₃ 基底上PZT铁电薄膜从单斜r相转变为c相.在实验上,采用扫描探针显微镜通过对PZT薄膜施加不同的极化电场来研究了它的电畴翻转.从得到的压电响应相图可以看出,绝大多数的电畴是清晰可 关键词： 铁电薄膜 相变 扫描探针显微镜 失配应变     

Interfacial morphology and domain configurations in 0-3 PZT-Portland cement composites

Cement-based piezoelectric composites have attracted great attention recently due to their promising applications as sensors in smart structures. Lead zirconate titanate (PZT) and Portland cement (PC) composite were fabricated using 60% of PZT by volume. Scanning Electron Microscope and piezoresponse force microscope were used to investigate the morphology and domain configurations at the interfacial zone of PZT-Portland cement composites. Angular PZT ceramic grains were found to bind well with the cement matrix. The submicro-scale domains were clearly observed by piezoresponse force microscope at the interfacial regions between the piezoelectric PZT phase and Portland cement phase, and are clearer than the images obtained for pure PZT. This is thought to be due to the applied internal stress of cement to the PZT ceramic particle which resulted to clearer images.     

Self-mixing interferometer based on temporal-carrier phase-shifting technique for micro-displacement reconstruction

A novel self-mixing interferometer based on temporal-carrier phase-shifting technique is presented. The phase of the laser beam is modulated with a triangular wave by an electro-optic modulator (EOM) in the external cavity. Phase demodulation of the interference signal is achieved by five-step Schwider-Hariharan algorithm combined with a special sampling technique. Theoretical analysis and simulation results are presented. Some errors of the technique have been discussed. Experimentally, the new interferometer is applied to measure the displacement of a high precision commercial PZT and a displacement measurement accuracy of λ/60 can be obtained.     

Chirp estimation in phase-shifting interferometry

We propose a new approach for estimating the phase in the presence of a nonlinear response of a phase-shifting device: a piezoelectric transducer (PZT). The method is complemented well by the high resolution and the maximum likelihood estimation techniques in the estimation of the phase step and the nonlinear coefficient. The advantage of the proposed method is that it can be extended to the extraction of multiple phases in configurations involving multiple PZTs in the presence of nonlinearity. Symmetricity in the phase steps is not required in this method. Hence hysteresis of the PZT does not have any influence on the accuracy of the phase estimation. The effectiveness of the method is shown by experimental results.     

阴影叠栅相移非线性误差补偿算法研究

相移阴影叠栅干涉场的相位(高度)存在非线性关系,而传统的相移阴影叠栅技术往往忽略了相位与高度的非线性关系,从而在测量系统中引入测量误差。对此提出了一种基于迭代相位解调自调算法相移阴影叠栅技术,该方法利用最小二乘技术获得相移量估算值,利用该估算值通过迭代算法消除相移阴影叠栅的全场相位误差,从而得到正确的相位分布。模拟计算表明该方法可以有效解决相移不均产生的相位测量误差问题,且可实现光栅移动量的精确估算,其误差不超过3.4%。对比实验进一步说明了所提出方法的正确性和优越性。