易于多面共体加工的自由曲面离轴三反系统设计

将自由曲面离轴反射系统的曲面加工在同一个基底上实现了多面共体制造,可以有效降低装调难度,进而提升系统的稳定性。提出了一种有柱形轮廓的多面共体自由曲面离轴三反成像系统的设计方法,基于共焦离轴二次曲面实时生成满足离轴共体系统结构和初阶参数要求的初始结构。提出了一种基于曲面采样点位置约束的自由曲面优化方法来控制系统整体外轮廓的形状与大小,使系统的曲面易于实现共体加工。基于光线追迹信息控制系统的焦距,并抑制光线遮拦和光瞳像差。采用Q2D多项式自由曲面进行系统优化,降低曲面检测难度。最终设计了一款高像质、低畸变、易于共体加工的自由曲面离轴三反热成像系统,并根据自由曲面面形特点对该系统进行了公差分析。     

基于自由曲面的大视场离轴反射光学系统设计

大视场离轴反射光学系统可以获取丰富的信息资源,是未来空间光学系统的发展趋势。自由曲面在离轴反射光学系统中的应用可以增大系统视场,但大视场自由曲面离轴反射光学系统初始结构较少,优化过程复杂,设计难度大。提出了一种大视场自由曲面离轴反射光学系统设计方法,首先基于矢量像差理论与费马原理直接获得成像质量较好的无遮拦自由曲面初始系统,再对其进行简单优化即可得到最终的大视场自由曲面光学系统。该方法可以降低大视场自由曲面离轴反射光学系统的设计难度。设计了一个大视场自由曲面离轴三反光学系统,光学系统视场为30°×3°,F数为2,验证了所提方法的有效性。     

实现均匀照明的自由曲面反射器

通过单个自由曲面反射器的反射,令光源发出的能量重新分布,在特定照明面上实现所需照明,从而简化了投影设备中的照明系统,使设备的进一步小型化成为可能。根据给出的光源辐射特性和所需实现的照明面上的能量分布,可得到一组偏微分方程,数值差分求解直接得到自由曲面反射器。光源采用发光面积1 mm×1 mm朗伯体发光的LED,视角为120°,照明面为4:3的均匀矩形光斑。设计了两种自由曲面反射器,并用软件对得到的曲面进行了照明模拟,模拟得到的照明均匀性接近90%。两种反射器在光轴方向上的投影尺寸均小于25 mm,垂直光轴方向上投影长度均小于22 mm,照明系统总长均小于40 mm,结构紧凑,适用于小型LED投影设备。     

用于LED广告灯箱的自由曲面大角度透镜设计与仿真

基于能量守恒定律和网格划分法,设计了一种实现LED阵列近场均匀照明的自由曲面大角度透镜,其内曲面为椭圆形曲面、外曲面为自由曲面.根据能量守恒定律建立映射关系,对光源和目标面进行网格划分,并结合折射定律,迭代求解出外自由曲面数据点.分析了椭圆形内曲面的长短轴比值对透镜菲涅耳损耗和照度均匀性的影响.结果表明:短轴与长轴的比值在0.35~0.55时,出光效率和照度均匀性最佳.通过反馈优化法对LED阵列进行优化,重新划分网格,使叠加部分光照度减弱,提高了整体光照均匀性.仿真结果表明:仅对透镜外自由曲面的面型数据点进行优化,在目标面高度为80mm,透镜出光角度为157°时,优化后的整体光照均匀度由优化前的0.40提高到0.84,出光效率大于0.9.     

基于自由曲面的大视场空间相机光学系统设计

运用自由曲面设计一款大视场离轴三反光学系统,该系统焦距为2 000mm,F数为12,视场角为35°×1°,主镜和三镜采用XY多项式自由曲面设计,且主镜设计为凸面,使子午视场达到35°,进一步拓宽了成像视场.基于优化后的XY多项式系数,利用Matlab软件仿真出主镜和三镜的XY自由曲面面型.设计结果表明,全视场内该系统的光学传递函数在63lp/mm处优于0.4,弥散斑直径小于一个像元尺寸,最大相对畸变小于3%,波像差均优于λ/14,系统能量集中度高,成像质量接近衍射极限.可见自由曲面在提升离轴反射式光学系统的成像视场和成像质量方面具有很大优势,该系统克服了传统离轴反射式光学系统子午方向视场角小的缺点,适合大幅宽推扫成像.     

基于双自由曲面的LED大角度光学透镜设计

针对直下式LED背光源的均匀照明系统,采用双自由曲面组合,设计了一种大角度光学透镜结构。通过近光源面的自由曲面将光发散成的c/cos3(θ)型光场分布,再利用远光源面实现目标面的均匀分布。这样可以在短距离条件下实现大面积的均匀照明,相对于传统的单自由曲面设计,有效地避免了全反射的发生,提高了照明区域的面积。采用光线追迹软件对所设计的结构进行仿真,通过对模拟结果的分析,在灯箱厚度为15mm时,单透镜均匀照明面积可以达到60mm。采用正三角阵列分布,整个目标面均匀度达到87.5%。相对于传统的大功率器件的直下式光源方式,提高了照明的均匀度,同时大大减少了箱体的厚度。     

实现LED照明的自由曲面透镜设计

为在特定平面上实现所需照明,从而满足各类LED照明系统的要求,通过透镜的第一面球面和第二面自由曲面的两次折射实现LED的配光设计.根据给出的LED辐射特性和所需实现的照明面上的能量分布,并预先定义透镜球面的结构参量,可得到一组一阶偏微分方程,数值差分求解直接求得透镜的自由曲面.光源采用发光面积1×1 mm2朗伯体发光的LED,视角180°,由自由曲面透镜得到的各种形状照明面的模拟均匀性皆接近90%,且能量利用率高于98%,编程解一阶偏微分方程组的计算时间少于20 s.     

基于正交种子曲线扩展算法设计自由曲面离轴反射无焦系统

离轴反射无焦光学系统在空间望远镜中具有重要的应用,自由曲面能够校正离轴反射系统中的非对称像差。设计自由曲面离轴反射无焦系统的初始结构非常关键。提出了正交种子曲线扩展算法(OSCE),可直接设计自由曲面离轴反射无焦系统的初始结构。为了验证方法可行性,分别设计了放大倍率为10和20的离轴无焦三反和四反系统。设计结果表明离轴三反系统初始结构均方根(RMS)波前差为0.36 λ,离轴四反系统初始结构波前差为0.18 λ。对这两个初始结构分别进行优化,优化之后的RMS波前差小于0.02 λ。     

基于近场侧面均匀照明的LED投射器研究

在LED双面平板照明灯具中,为实现侧入式近场均匀照明,研究了一种LED柱面透镜阵列自由曲面投射器。根据非成像光学理论中的边缘光线原理,采用直接法和重叠法设计投射器的表面形状,利用反射旋转面和折射旋转面以及柱面透镜阵列将LED光源发出的朗伯光重新分配。建立侧面近场均匀照明的柱面透镜阵列自由曲面投射器模型,用TracePro软件对所设计的模型进行光线追迹仿真,结果表明,当不考虑反射损耗时投射器的出光效率达到96.03%,在投射器侧面的面板上面积为240mm×360mm的照度均匀度达到95.6%。     

基于自由曲面阵列的激光投影显示照明系统设计

纯激光光源的投影产品是显示技术发展的未来趋势之一。为了使用多个激光二极管作为光源实现大功率的均匀照明,设计了一种激光照明系统,在基于自由曲面阵列的匀光系统前增加两个透镜和圆形光棒以进一步提高目标面均匀度。激光阵列经准直后会聚到圆棒中传输,再经过透镜准直出射,通过自由曲面阵列后经场镜会聚到目标面上,形成均匀的照明区域。借助软件仿真模拟后发现:引入圆棒混光后,目标面均匀度从77.59%提高到90.99%。此外,还对自由曲面阵列单元的形状进行了研究,结果表明,相比于正方形的结构单元,选取与目标面长宽比一致的自由曲面单元可以得到更好的均匀度。     

Hybrid approach for the design of mirror array to produce freeform illumination sources in immersion lithography

Source and mask optimization (SMO) has emerged as a key resolution enhancement technique (RET) for 45 nm technology node and below in lithography. The design method of freeform illumination sources predicted by SMO is significant for the scanner development. We present a hybrid approach combining simultaneous and sequential approaches to optimize the tilt angles of the mirrors to produce multi target freeform illumination sources accurately and quickly. The size of spot reflect by plane mirror can be easily controlled by changing different microlens arrays with appropriate focal length, which reduce the complexity of the system and makes it more flexible to produce the specific freeform sources compared to curving the mirrors used in previous work. The relationship between the tilt angles of plane mirrors and the positions of the spots in the pupil is obtained by chief ray tracing. Using the hybrid approach the freeform illumination sources required by SMO can be designed by merely adjusting the tilt angles of mirrors without changing other parameters of optical elements, which is most effective for both lithography tool manufacture and its applications. The real ray tracing results demonstrate that our design method is capable of creating multi freeform illumination sources with high transmittance, and confirm that the effectiveness of the hybrid approach for optimized design and control of mirror array in immersion lithography system.     

Freeform lens for off-axis illumination in optical lithography system

A method of designing a freeform lens for off-axis illumination (OAI) in an optical lithography system is proposed in this paper. Based on the Snell's law and conservation law of energy, a series of first-order partial differential equations are deduced. Coordinate relations are established with the energy mapping relations by the characteristics of the incident beam and the predetermined irradiance distribution on the target plane. The contours of the freeform lens are calculated by solving partial differential equations numerically. Moreover, the optical performance for OAI is simulated and analyzed. Simulation results show that the irradiance distributions can be well controlled with a maximum uniformity of 95.71% and a maximum efficiency of 99.04%. Tolerance analysis shows that the angular errors of the freeform lens are more sensitive than the coordinate errors.     

Cartesian oval representation of freeform optics in illumination systems

The geometrical method for constructing optical surfaces for illumination purpose developed by Oliker and co-workers [Trends in Nonlinear Analysis (Springer, 2003)] is generalized in order to obtain freeform designs in arbitrary optical systems. The freeform is created by a set of primitive surface elements, which are generalized Cartesian ovals adapted to the given optical system. Those primitives are determined by Hamiltonian theory of ray optics. The potential of this approach is demonstrated by some examples, e.g., freeform lenses with collimating front elements.     

Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node

Immersion lithography has been considered as the mainstream technology to extend the feasibility of optical lithography to further technology nodes. Using proper polarized illumination in an immersion lithographic tool is a powerful means to enhance the image quality and process capability for high numerical aperture (NA) imaging. In this paper, the impact of polarized illumination on high NA imaging in ArF immersion lithography for 45 nm dense lines and semi-dense lines is studied by PROLITH simulation. The normalized image log slope (NILS) and exposure defocus (ED) window are simulated under various polarized illumination modes, and the impact of polarized illumination on image quality and process latitude is analyzed.     

LED路灯的自由曲面二次透镜设计

配光是LED路灯应用的主要技术问题之一。道路照明要求LED路灯在路面为均匀性良好的矩形光斑,在道路外无污染,无眩光。采用Snell定律和光源扩展度守恒原理确定自由曲面的解析方程,借助Matlab工具,采用差分法求解建立的偏微分方程,得到自由曲面的数据组,用作图软件Pro/Engineer为自由曲面透镜建模,通过计算机仿真软件TracePro进行光路仿真检验设计结果,并对所得结果进行分析。设计一款内表面为椭球面,外表面为自由曲面的LED路灯透镜,实现了路面光照总均匀度0.75,纵向均匀度0.85的效果。     

A study of the impact on telecentricity to the illumination system based on CCD imaging

One of the important properties of the illumination system is of determining telecentricity for the realization of the place of wafer in the optical lithography. In this paper, we present numerical simulations of the optical imaging using four different illumination models and based on CCD imaging. We simulate the imaging of light source for different illumination pupil distributions and determine the energy centroid through the imaging of the conventional illumination which exist telecentricity of 11 mrad. Furthermore, we discuss the influencing factors of two aspects on telecentricity. One is the non-uniformity of light intensity distribution, and the other is pinhole defocus in the wafer. The range between the non-uniformity of light intensity distribution and pinhole defocus are quantified by computing the allowed telecentricity error in the illumination system. Finally, experiments have verified telecentricity measurement feasibility and validity. The presented scheme that with CCD imaging instead the actual wafer which saves cost and improves the accuracy in the optical lithography. In comparison with the measurement methods of convention the CCD imaging has a series of advantages such as fast response, high sensibility, high precision and the measurement is carried out on-line.     

Subwavelength-size solid immersion lens

We report on the fabrication and characterization of nanoscale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicrometer-scale cylinders fabricated by electron-beam lithography are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates for optical characterization. The optical characterization is performed using a high-resolution interference microscope with illumination at 642 nm wavelength. The focal spots produced by the nano-SILs show both spot-size reduction and enhanced optical intensity, which are consistent with the immersion effect.     

Optical design of a freeform TIR lens for LED streetlight

Secondary optics is a critical component determining the output efficiency and light distribution of the LED streetlight. A good roadway illumination requires the LED streetlight have a rectangular light pattern just cover the roadway and without excess spill light creeping into yards and shining into windows of neighbor residents. The adoption of the unsymmetrical freeform optics with different light distributions along X and Y directions is necessary. The whole LED streetlight can be constructed if only mounts these LED modules on the planar PCB plate. The mechanism, thermal management, and the power control electronics of the LED streetlight become very simple. In this paper, an optical design approach of a freeform TIR (total internal reflection) lens for the LED streetlight is investigated. With these freeform lenses, high output efficiency, even light distribution, and batwing far field beam angle distribution can be achieved.